TWI567182B - 研磨用組成物 - Google Patents
研磨用組成物 Download PDFInfo
- Publication number
- TWI567182B TWI567182B TW101143736A TW101143736A TWI567182B TW I567182 B TWI567182 B TW I567182B TW 101143736 A TW101143736 A TW 101143736A TW 101143736 A TW101143736 A TW 101143736A TW I567182 B TWI567182 B TW I567182B
- Authority
- TW
- Taiwan
- Prior art keywords
- polishing
- polishing composition
- ruthenium
- portion containing
- hydrolysis
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title claims description 209
- 239000000203 mixture Substances 0.000 title claims description 104
- 239000000463 material Substances 0.000 claims description 94
- 150000001875 compounds Chemical class 0.000 claims description 35
- -1 polyoxypropylene Polymers 0.000 claims description 32
- 229910052707 ruthenium Inorganic materials 0.000 claims description 31
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 30
- 230000007062 hydrolysis Effects 0.000 claims description 30
- 238000006460 hydrolysis reaction Methods 0.000 claims description 30
- 239000006061 abrasive grain Substances 0.000 claims description 27
- 230000002401 inhibitory effect Effects 0.000 claims description 27
- 239000007800 oxidant agent Substances 0.000 claims description 24
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 17
- 229920001451 polypropylene glycol Polymers 0.000 claims description 14
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 12
- 239000002202 Polyethylene glycol Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 229920001223 polyethylene glycol Polymers 0.000 claims description 10
- 230000007935 neutral effect Effects 0.000 claims description 8
- 239000011164 primary particle Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 7
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 7
- MSWZFWKMSRAUBD-IVMDWMLBSA-N 2-amino-2-deoxy-D-glucopyranose Chemical compound N[C@H]1C(O)O[C@H](CO)[C@@H](O)[C@@H]1O MSWZFWKMSRAUBD-IVMDWMLBSA-N 0.000 claims description 6
- MSWZFWKMSRAUBD-UHFFFAOYSA-N beta-D-galactosamine Natural products NC1C(O)OC(CO)C(O)C1O MSWZFWKMSRAUBD-UHFFFAOYSA-N 0.000 claims description 6
- 229960002442 glucosamine Drugs 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 claims description 6
- 150000003973 alkyl amines Chemical class 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 229920005604 random copolymer Polymers 0.000 claims description 3
- 150000001412 amines Chemical class 0.000 claims 3
- 229920001400 block copolymer Polymers 0.000 claims 2
- 239000004698 Polyethylene Substances 0.000 claims 1
- 230000000655 anti-hydrolysis Effects 0.000 claims 1
- 150000002009 diols Chemical class 0.000 claims 1
- 125000006353 oxyethylene group Chemical group 0.000 claims 1
- 229920000573 polyethylene Polymers 0.000 claims 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 239000002253 acid Substances 0.000 description 9
- 239000003002 pH adjusting agent Substances 0.000 description 9
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 8
- 150000005215 alkyl ethers Chemical class 0.000 description 8
- 229910000420 cerium oxide Inorganic materials 0.000 description 6
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 5
- 125000003342 alkenyl group Chemical group 0.000 description 5
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium peroxydisulfate Substances [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 5
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 229910052732 germanium Inorganic materials 0.000 description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- BVJSUAQZOZWCKN-UHFFFAOYSA-N p-hydroxybenzyl alcohol Chemical compound OCC1=CC=C(O)C=C1 BVJSUAQZOZWCKN-UHFFFAOYSA-N 0.000 description 4
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 4
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 4
- CQRYARSYNCAZFO-UHFFFAOYSA-N salicyl alcohol Chemical compound OCC1=CC=CC=C1O CQRYARSYNCAZFO-UHFFFAOYSA-N 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 3
- VAZSKTXWXKYQJF-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)OOS([O-])=O VAZSKTXWXKYQJF-UHFFFAOYSA-N 0.000 description 3
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 3
- 239000011163 secondary particle Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- XPNGNIFUDRPBFJ-UHFFFAOYSA-N (2-methylphenyl)methanol Chemical compound CC1=CC=CC=C1CO XPNGNIFUDRPBFJ-UHFFFAOYSA-N 0.000 description 2
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- BBMCTIGTTCKYKF-UHFFFAOYSA-N 1-heptanol Chemical compound CCCCCCCO BBMCTIGTTCKYKF-UHFFFAOYSA-N 0.000 description 2
- HMBHAQMOBKLWRX-UHFFFAOYSA-N 2,3-dihydro-1,4-benzodioxine-3-carboxylic acid Chemical compound C1=CC=C2OC(C(=O)O)COC2=C1 HMBHAQMOBKLWRX-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- YIWUKEYIRIRTPP-UHFFFAOYSA-N 2-ethylhexan-1-ol Chemical compound CCCCC(CC)CO YIWUKEYIRIRTPP-UHFFFAOYSA-N 0.000 description 2
- WRMNZCZEMHIOCP-UHFFFAOYSA-N 2-phenylethanol Chemical compound OCCC1=CC=CC=C1 WRMNZCZEMHIOCP-UHFFFAOYSA-N 0.000 description 2
- OKVJCVWFVRATSG-UHFFFAOYSA-N 3-hydroxybenzyl alcohol Chemical compound OCC1=CC=CC(O)=C1 OKVJCVWFVRATSG-UHFFFAOYSA-N 0.000 description 2
- MSHFRERJPWKJFX-UHFFFAOYSA-N 4-Methoxybenzyl alcohol Chemical compound COC1=CC=C(CO)C=C1 MSHFRERJPWKJFX-UHFFFAOYSA-N 0.000 description 2
- HXDOZKJGKXYMEW-UHFFFAOYSA-N 4-ethylphenol Chemical compound CCC1=CC=C(O)C=C1 HXDOZKJGKXYMEW-UHFFFAOYSA-N 0.000 description 2
- MWUVGXCUHWKQJE-UHFFFAOYSA-N 4-fluorophenethyl alcohol Chemical compound OCCC1=CC=C(F)C=C1 MWUVGXCUHWKQJE-UHFFFAOYSA-N 0.000 description 2
- NGYYFWGABVVEPL-UHFFFAOYSA-N 5-(hydroxymethyl)benzene-1,3-diol Chemical compound OCC1=CC(O)=CC(O)=C1 NGYYFWGABVVEPL-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 2
- YZGQDNOIGFBYKF-UHFFFAOYSA-N Ethoxyacetic acid Chemical compound CCOCC(O)=O YZGQDNOIGFBYKF-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerol Natural products OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- XXROGKLTLUQVRX-UHFFFAOYSA-N allyl alcohol Chemical compound OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- MRNZSTMRDWRNNR-UHFFFAOYSA-N bis(hexamethylene)triamine Chemical compound NCCCCCCNCCCCCCN MRNZSTMRDWRNNR-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 229940075419 choline hydroxide Drugs 0.000 description 2
- 210000003298 dental enamel Anatomy 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- 150000002484 inorganic compounds Chemical class 0.000 description 2
- 239000010954 inorganic particle Substances 0.000 description 2
- PHTQWCKDNZKARW-UHFFFAOYSA-N isoamylol Chemical compound CC(C)CCO PHTQWCKDNZKARW-UHFFFAOYSA-N 0.000 description 2
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- CKFGINPQOCXMAZ-UHFFFAOYSA-N methanediol Chemical compound OCO CKFGINPQOCXMAZ-UHFFFAOYSA-N 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 239000011146 organic particle Substances 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
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- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- WYLYBQSHRJMURN-UHFFFAOYSA-N (2-methoxyphenyl)methanol Chemical compound COC1=CC=CC=C1CO WYLYBQSHRJMURN-UHFFFAOYSA-N 0.000 description 1
- QJANIQCEDPJNLO-UHFFFAOYSA-N (2-methyl-3-nitrophenyl)methanol Chemical compound CC1=C(CO)C=CC=C1[N+]([O-])=O QJANIQCEDPJNLO-UHFFFAOYSA-N 0.000 description 1
- BWRBVBFLFQKBPT-UHFFFAOYSA-N (2-nitrophenyl)methanol Chemical compound OCC1=CC=CC=C1[N+]([O-])=O BWRBVBFLFQKBPT-UHFFFAOYSA-N 0.000 description 1
- BTANRVKWQNVYAZ-BYPYZUCNSA-N (2S)-butan-2-ol Chemical compound CC[C@H](C)O BTANRVKWQNVYAZ-BYPYZUCNSA-N 0.000 description 1
- SJWFXCIHNDVPSH-QMMMGPOBSA-N (2S)-octan-2-ol Chemical compound CCCCCC[C@H](C)O SJWFXCIHNDVPSH-QMMMGPOBSA-N 0.000 description 1
- GPHYIQCSMDYRGJ-UHFFFAOYSA-N (3,5-dinitrophenyl)methanol Chemical compound OCC1=CC([N+]([O-])=O)=CC([N+]([O-])=O)=C1 GPHYIQCSMDYRGJ-UHFFFAOYSA-N 0.000 description 1
- NELPTBUSFQMYOB-UHFFFAOYSA-N (3-methyl-2-nitrophenyl)methanol Chemical compound CC1=CC=CC(CO)=C1[N+]([O-])=O NELPTBUSFQMYOB-UHFFFAOYSA-N 0.000 description 1
- GEZMEIHVFSWOCA-UHFFFAOYSA-N (4-fluorophenyl)methanol Chemical compound OCC1=CC=C(F)C=C1 GEZMEIHVFSWOCA-UHFFFAOYSA-N 0.000 description 1
- URCWIFSXDARYLY-UHFFFAOYSA-N (4-methyl-3-nitrophenyl)methanol Chemical compound CC1=CC=C(CO)C=C1[N+]([O-])=O URCWIFSXDARYLY-UHFFFAOYSA-N 0.000 description 1
- IKEYTRGLCHZQHO-UHFFFAOYSA-N (5-methyl-2-nitrophenyl)methanol Chemical compound CC1=CC=C([N+]([O-])=O)C(CO)=C1 IKEYTRGLCHZQHO-UHFFFAOYSA-N 0.000 description 1
- XZNOAVNRSFURIR-UHFFFAOYSA-N 1,1,1,3,3,3-hexafluoro-2-(trifluoromethyl)propan-2-ol Chemical compound FC(F)(F)C(O)(C(F)(F)F)C(F)(F)F XZNOAVNRSFURIR-UHFFFAOYSA-N 0.000 description 1
- DSDBYQDNNWCLHL-UHFFFAOYSA-N 1-(2-nitrophenyl)ethanol Chemical compound CC(O)C1=CC=CC=C1[N+]([O-])=O DSDBYQDNNWCLHL-UHFFFAOYSA-N 0.000 description 1
- ILDXSRFKXABMHH-UHFFFAOYSA-N 2-(2-aminophenyl)ethanol Chemical compound NC1=CC=CC=C1CCO ILDXSRFKXABMHH-UHFFFAOYSA-N 0.000 description 1
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- YCCILVSKPBXVIP-UHFFFAOYSA-N 2-(4-hydroxyphenyl)ethanol Chemical compound OCCC1=CC=C(O)C=C1 YCCILVSKPBXVIP-UHFFFAOYSA-N 0.000 description 1
- WCASXYBKJHWFMY-NSCUHMNNSA-N 2-Buten-1-ol Chemical compound C\C=C\CO WCASXYBKJHWFMY-NSCUHMNNSA-N 0.000 description 1
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- JJCKHVUTVOPLBV-UHFFFAOYSA-N 3-Methylbenzyl alcohol Chemical compound CC1=CC=CC(CO)=C1 JJCKHVUTVOPLBV-UHFFFAOYSA-N 0.000 description 1
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- CWNPOQFCIIFQDM-UHFFFAOYSA-N 3-nitrobenzyl alcohol Chemical compound OCC1=CC=CC([N+]([O-])=O)=C1 CWNPOQFCIIFQDM-UHFFFAOYSA-N 0.000 description 1
- MOOUWXDQAUXZRG-UHFFFAOYSA-N 4-(trifluoromethyl)benzyl alcohol Chemical compound OCC1=CC=C(C(F)(F)F)C=C1 MOOUWXDQAUXZRG-UHFFFAOYSA-N 0.000 description 1
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- JKTYGPATCNUWKN-UHFFFAOYSA-N 4-nitrobenzyl alcohol Chemical compound OCC1=CC=C([N+]([O-])=O)C=C1 JKTYGPATCNUWKN-UHFFFAOYSA-N 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- 229920001661 Chitosan Polymers 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical class [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920011250 Polypropylene Block Copolymer Polymers 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- TWQNSHZTQSLJEE-UHFFFAOYSA-N [2-(trifluoromethyl)phenyl]methanol Chemical compound OCC1=CC=CC=C1C(F)(F)F TWQNSHZTQSLJEE-UHFFFAOYSA-N 0.000 description 1
- BXEHKCUWIODEDE-UHFFFAOYSA-N [3-(trifluoromethyl)phenyl]methanol Chemical compound OCC1=CC=CC(C(F)(F)F)=C1 BXEHKCUWIODEDE-UHFFFAOYSA-N 0.000 description 1
- XYDQMRVDDPZFMM-UHFFFAOYSA-N [Ag+2] Chemical class [Ag+2] XYDQMRVDDPZFMM-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- SXDBWCPKPHAZSM-UHFFFAOYSA-N bromic acid Chemical compound OBr(=O)=O SXDBWCPKPHAZSM-UHFFFAOYSA-N 0.000 description 1
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
Description
本發明係關於在將具有含有IV族材料及III-V族化合物等高移動度材料的部分(以下,亦稱為高移動度材料部分)與含有氧化矽等矽材料的部分(以下,亦稱為矽材料部分)之研磨對象物進行研磨的用途中所使用之研磨用組成物。本發明亦關於使用有該研磨用組成物之研磨方法及基板之製造方法。
現正推展將載子的移動速度提高之高移動度通道材料的探討,作為使電晶體的消耗電力減低或性能(動作特性)提昇的技術之一。於載子的輸送特性提昇後的通道中,由於開通時的汲極電流會提高,因此可得到充分的開通電流,同時將電源電壓降低。該組合係可獲得於低電力時更高的金屬氧化物半導體場效應電晶體(MOSFET)之性能。
高移動度通道材料,係電子或電洞的移動度比矽更高,而可期待適用載子之輸送特性優異的砷化鎵(GaAs)等之III-V族化合物、矽鍺(SiGe)或鍺(Ge)等之IV族材料、或者僅由碳(C)所構成的單層石墨。特別是積極地探討使用有比III-V族化合物更容易導入的IV族材料之通道。控制具有高結晶性的III-V族化合物通道使其成長為所期望的形狀之技術尚未確立。此外,相對於使用有
IV族材料的通道,III-V族化合物通道係成本方面表現較差。
高移動度材料通道,係可將具有高移動度材料部分與矽材料部分之研磨對象物進行研磨而形成。此時,若使用可比矽材料部分更高選擇性地研磨高移動度材料部分的研磨用組成物,則能夠將高移動度材料部分有效率地去除。此外,由於氧化矽等之氧化物損失變少,因此可確保配線層間的耐電壓。進而,在之後進行光微影步驟時,由於氧化物損失少因此曝光聚焦會變得容易,而使步驟安定(參照專利文獻1)。然而,在將僅由IV族化合物所構成的化合物半導體基板進行研磨之用途中以往所使用之例如專利文獻2或專利文獻3所記載的研磨用組成物,係在將具有高移動度材料部分與矽材料部分之研磨對象物進行研磨的用途中使用時,並沒有發揮對於高移動度材料部分之充分的高研磨選擇性。
[專利文獻1]日本特開平11-204520公報
[專利文獻2]日本特開2010-130009公報
[專利文獻3]日本特表2010-519740公報
因此本發明之目的為提供一種研磨用組成物,其係可
在將具有高移動度材料部分與矽材料部分之研磨對象物進行研磨的用途中使用時發揮對於高移動度材料部分之高的研磨選擇性,此外,提供一種使用有該研磨用組成物之研磨方法及基板之製造方法。
為了達成上述目的,於本發明之第1態樣中,係提供一種研磨用組成物,其係在將具有高移動度材料部分與矽材料部分之研磨對象物進行研磨的用途中所使用之研磨用組成物,該研磨用組成物含有平均一次粒徑為40nm以下的研磨粒、及氧化劑。
此研磨用組成物係以進一步含有抑制水解化合物者為佳,該抑制水解化合物係發揮與前述矽材料部分之表面OH基鍵結而抑制矽材料的部分之水解的功用。
於本發明之第2態樣中,係提供一種研磨用組成物,其係在將具有高移動度材料部分與矽材料部分之研磨對象物進行研磨之用途中所使用的研磨用組成物,該研磨用組成物含有研磨粒、氧化劑、以及抑制水解化合物,該抑制水解化合物係發揮與前述矽材料部分之表面OH基鍵結而抑制矽材料部分之水解的功用。
上述第1及第2態樣之研磨用組成物係以具有中性之pH者為佳。
本發明之第3態樣中,係提供一種使用上述第1或第2態樣之研磨用組成物,來將具有高移動度材料部分與矽
材料部分之研磨對象物進行研磨的方法。
於本發明之第4態樣中,係提供一種藉由使用上述第1或第2態樣之研磨用組成物,來將具有高移動度材料部分與矽材料部分之研磨對象物進行研磨,而製造基板的方法。
若依據本發明,則可提供一種研磨用組成物,其係可在將具有高移動度材料部分與矽材料部分之研磨對象物進行研磨的用途中使用時發揮對於高移動度材料部分之高的研磨選擇性、以及使用有該研磨用組成物之研磨方法及基板之製造方法。
以下,說明本發明之第1實施形態。
本實施形態之研磨用組成物係將特定的研磨粒與氧化劑於水中進行混合而加以調製。因而,研磨用組成物係含有特定的研磨粒、及氧化劑。
此研磨用組成物,係在將具有高移動度材料部分與矽材料部分之研磨對象物進行研磨的用途,進一步而言是在將該研磨對象物進行研磨而製造基板的用途中選擇性地研磨高移動度材料部分之目的下使用。在此所謂高移動度材料係指電子或電洞的移動度比矽材料更高的材料。高移動度材料的例子係可列舉:磷化鎵(GaP)、磷化銦(InP)
、砷化鎵(GaAs)、砷化銦(InAs)、銻化銦(InSb)等之III-V族化合物、或矽鍺(SiGe)及鍺(Ge)等之IV族材料。此外,矽材料的例子係可列舉:多晶矽、氧化矽、氮化矽等。例如,相對於作為電子移動度1600cm2/V.s及電洞移動度430cm2/V.s之矽材料,作為高移動度材料之磷化銦的電子移動度係展現5400cm2/V.s且電洞移動度係展現200cm2/V.s、砷化鎵的電子移動度係展現8500cm2/V.s且電洞移動度係展現400cm2/V.s、砷化銦的電子移動度係展現40000cm2/V.s且電洞移動度係展現500cm2/V.s、銻化銦的電子移動度係展現77000cm2/V.s且電洞移動度係展現850cm2/V.s、而鍺的電子移動度係展現3900cm2/V.s且電洞移動度係展現1900cm2/V.s,相對於矽材料高移動度材料係針對電子移動度及電洞移動度雙方或一方有意展現高的值。
研磨用組成物中所含有的研磨粒係具有40nm以下之平均一次粒徑。相較於使用有平均一次粒徑超過40nm的研磨粒之情況,於使用有40nm以下之平均一次粒徑的小研磨粒之情況中,具有以研磨用組成物所致之矽材料部分的研磨速度會比以研磨用組成物所致之高移動度材料部分的研磨速度更大幅地降低之優點。另外,研磨粒之一次平均粒徑的值,例如,可根據以布厄特(BET)法所測量的研磨粒之比表面積而計算。
研磨用組成物中之研磨粒亦可為無機粒子及有機粒子中任一者。無機粒子之具體例係可列舉:由二氧化矽、氧化鋁、氧化鈰、氧化鈦等之金屬氧化物所構成的粒子。有機粒子之具體例係可列舉:聚甲基丙烯酸甲酯(PMMA)粒子。其中係以二氧化矽粒子為佳,特佳者為膠質二氧化矽。
研磨用組成物中之研磨粒的含量係以20質量%以下者為佳,較佳為15質量%以下,更佳為10質量%以下。隨著研磨粒的含量越少,除了越能抑制研磨用組成物之材料成本以外,還越難引起研磨粒的凝聚。
研磨粒之平均二次粒徑係以170nm以下者為佳,較佳為150nm以下,更佳為120nm以下。隨著研磨粒之平均二次粒徑越小,越容易藉由使用研磨用組成物來將研磨對象物進行研磨而得到刮痕較少的研磨面。研磨粒之平均二次粒徑的值,例如,可藉由雷射光散射法而測量。
研磨用組成物中所含有的氧化劑之種類雖無特別限定,但以具有0.3V以上的標準電極電位者為佳。相較於使用具有未達0.3V之標準電極電位的氧化劑之情況,於使用具有0.3V以上之標準電極電位的氧化劑之情況中,係具有以研磨用組成物所致之高移動度材料部分的研磨速度會提昇之優點。具有0.3V以上之標準電極電位的氧化劑之具體例,係可列舉:過氧化氫、過氧化鈉、過氧化
鋇、有機氧化劑、臭氧水、銀(II)鹽、鐵(III)鹽、以及過錳酸、鉻酸、重鉻酸、過氧二硫酸、過氧磷酸、過氧硫酸、過氧硼酸、過氧甲酸、過氧乙酸、過氧苯甲酸、過氧鄰苯二苯甲酸、次氯酸、次溴酸、次碘酸、氯酸、亞氯酸、過氯酸、溴酸、碘酸、過碘酸、硫酸、過硫酸、檸檬酸、二氯異三聚氰酸及此等之鹽等。此等之中,就大幅提昇以研磨用組成物所致之高移動度材料部分之研磨速度的觀點而言,以過氧化氫、過硫酸銨、次氯酸、過碘酸、及二氯異三聚氰酸鈉為佳。
另外,標準電極電位係指與氧化反應相關之所有的化學種皆處於標準狀態時以下述式子所表示。
E0=-△G0/nF=(RT/nF)1nK
在此,E0為標準電極電位,△G0為氧化反應之標準吉布斯(Gibbs)能變化,K為該平行常數、F為法拉第常數,T為絕對溫度,n為與氧化反應相關的電子數。因而,標準電極電位會隨著溫度而變動,因此,於本說明書中採用25℃時之標準電極電位。另外,水溶液系之標準電極電位,係於例如改訂4版化學便覽(基礎編)II、pp464-468(日本化學會編)等中所記載。
研磨用組成物中之氧化劑的含量係以0.01mol/L以上者為佳,較佳為0.1mol/L以上。隨著氧化劑之含量越多,越會提昇以研磨用組成物所致之高移動度材料部分的研磨速度。
研磨用組成物中之氧化劑的含量係以100mol/L以下
者為佳,較佳為50mol/L以下。隨著氧化劑的含量越少,除了越能抑制研磨用組成物之材料成本以外,還能減輕研磨使用後之研磨用組成物的處理,亦即廢液處理之負荷。
研磨用組成物之pH係以中性者,更具體而言,以5以上9以下之範圍內者為佳。於pH為中性之情況中,係具有降低以研磨用組成物所致之矽材料部分的研磨速度之優點。
為了將研磨用組成物之pH調整為所期望的值,亦可使用pH調整劑。所使用的pH調整劑係可為酸及鹼中任一者,此外,亦可為無機及有機之化合物中任一者。
若依據本實施形態則可得到以下之作用效果。
.於本實施形態之研磨用組成物中,為了使研磨用組成物所致之矽材料部分的研磨速度降低,而使用有平均一次粒徑40nm以下之小的研磨粒。因此,此研磨用組成物係具有對於高移動度材料部分之高的研磨選擇性。
.於研磨用組成物之pH為中性的情況中,為了使研磨用組成物所致之矽材料部分的研磨速度更加降低,而進一步提昇對於高移動度材料部分之研磨用組成物的研磨選擇性。
以下,說明本發明之第2實施形態。
第2實施形態之研磨用組成物係將研磨粒、氧化劑與抑制水解化合物於水中進行混合而加以調製。因而,研磨
用組成物係含有研磨粒、氧化劑及抑制水解化合物。
第2實施形態之研磨用組成物,亦與第1實施形態之研磨用組成物相同,係在將具有磷化鎵、磷化銦、砷化鎵、砷化銦、銻化銦、矽鍺及鍺等高移動度材料部分與氧化矽等矽材料部分之研磨對象物進行研磨的用途,進一步而言是在將該研磨對象物進行研磨而製造基板的用途中選擇性地研磨高移動度材料部分之目的下使用。
第2實施形態之研磨用組成物中所含有的研磨粒,並不需要具有40nm以下之平均一次粒徑,除了此點外與第1實施形態之研磨用組成物中所含有的研磨粒相同。
第2實施形態之研磨用組成物中所含有的氧化劑,係與第1實施形態之研磨用組成物中所含有的氧化劑相同。
第2實施形態之研磨用組成物中所含有的抑制水解化合物,係發揮與矽材料部分之表面OH基鍵結而抑制矽材料的部分之水解的功用。詳細而言,係被認為在矽材料部分之表面OH基與抑制水解化合物具有的氧原子之間形成有氫鍵結。此外,亦被認為在矽材料部分之表面OH基與抑制水解化合物具有的氮原子之間形成有氫鍵結。因而,
於使用有抑制水解化合物之情況中,係具有降低以研磨用組成物所致之矽材料部分的研磨速度之優點。若考慮此機制,則抑制水解化合物係以具有氧原子的化合物及具有氮原子之含氮化合物者為佳。具有氧原子的抑制水解化合物之具體例係可列舉:1-丙醇、2-丙醇、2-丙炔-1-醇、烯丙醇、乙烯氰醇(ethylene cyanohydrin)、1-丁醇、2-丁醇、(S)-(+)-2-丁醇、2-甲基-1-丙醇、t-丁醇、全氟-t-丁醇、巴豆醇、1-戊醇、2,2-二甲基-1-丙醇、2-甲基-2-丙醇、3-甲基-1-丁醇、S-戊醇、1-己醇、4-羥基-4-甲基-2-戊酮、4-甲基-2-戊醇、環己醇、DL-3-己醇、1-庚醇、2-乙基己醇、(S)-(+)-2-辛醇、1-辛醇、DL-3-辛醇、2-羥苯甲醇、2-硝苯甲醇、3,5-二羥苯甲醇、3,5-二硝苯甲醇、3-氟苯甲醇、3-羥苯甲醇、4-氟苯甲醇、4-羥苯甲醇、苯甲醇、m-(三氟甲基)苯甲醇、m-二胺基苯甲醇、m-硝苯甲醇、o-胺基苯甲醇、o-羥苯甲醇、p-羥苯甲醇、p-硝苯甲醇、2-(p-氟苯基)乙醇、2-胺基苯乙醇、2-甲氧苯甲醇、2-甲基-3-硝苯甲醇、2-甲基苯甲醇、2-硝苯乙醇、2-苯乙醇、3,4-二甲基苯甲醇、3-甲基-2-硝苯甲醇、3-甲基-4-硝苯甲醇、3-甲基苯甲醇、4-氟苯乙醇、4-羥基-3-甲氧苯甲醇、4-甲氧苯甲醇、4-甲基3-硝苯甲醇、5-甲基-2-硝苯甲醇、DL-α-羥乙基苯、o-(三氟甲基)苯甲醇、p-(三氟甲基)苯甲醇、p-胺基苯乙醇、p-羥苯乙醇、p-甲基苯甲醇及S-苯乙醇、乙炔醇等之醇、4-甲酚、4-乙酚及4-丙酚等酚、乙二醇、丙二醇、辛乙二醇(caprylyl
glycol)、丁二醇、乙炔二醇等之二醇、n-癸醇-n-甲基-D-還原葡糖胺、n-辛醯基-n-甲基-D-還原葡糖胺、n-壬醯基-n-甲基-D-還原葡糖胺等還原葡糖胺、丙三醇酯、山梨糖醇酯、甲氧乙酸、乙氧乙酸、3-乙氧丙酸、聚氧乙烯(以下,稱為POE)去水山梨醇脂肪酸酯、POE二醇脂肪酸酯、POE己糖醇酐(hexitans)脂肪酸酯及丙胺酸乙酯等酯、聚乙二醇、聚丙二醇、聚四亞甲基二醇、聚乙二醇烷基醚、聚乙二醇烯基醚、烷基聚乙二醇、烷基聚乙二醇烷基醚、烷基聚乙二醇烯基醚、烯基聚乙二醇、烯基聚乙二醇烷基醚、烯基聚乙二醇烯基醚、聚丙二醇烷基醚、聚丙二醇烯基醚、烷基聚丙二醇、烷基聚丙二醇烷基醚、烷基聚丙二醇烯基醚、烯基聚丙二醇、烯基聚丙二醇烷基醚及烯基聚丙二醇烯基醚、POE伸烷基二甘油基醚、POE烷基醚、POE烷基苯基醚、POE聚丙烯烷基醚等醚、及聚氧丙烯/聚氧乙烯之嵌段/無規共聚物等。
此外,具有氮原子的抑制水解化合物之具體例係可列舉:雙六亞甲基三胺(BHMT)、氫氧化四甲基銨(TMAH)、四甲基胺(TMA)、四乙基胺(TEA)、二甲基胺、三甲基胺、三乙基胺、丙二胺(propylene diamine)、甲基胺、乙基胺、哌、哌啶等水溶性烷基胺、氫氧化膽鹼(CH)、三乙醇胺、二乙醇胺、乙醇胺等胺醇類、伸乙基二胺四乙酸(EDTA)、二乙基二硫胺甲酸鈉、幾丁聚醣(chitosan)等水溶性胺化合物。
研磨用組成物中之抑制水解化合物的含量係以10質
量ppm以上者為佳,較佳為50質量ppm以上。隨著抑制水解化合物之含量越多,越會降低以研磨用組成物所致之矽材料部分的研磨速度。
研磨用組成物中之抑制水解化合物的含量又以100000質量ppm以下者為佳,較佳為50000質量ppm以下。隨著抑制水解化合物的含量越少,除了越能抑制研磨用組成物之材料成本以外,還能減輕研磨使用後之研磨用組成物的處理,亦即廢液處理之負荷。
第2實施形態之研磨用組成物亦與第1實施形態之研磨用組成物相同為中性,更具體而言,以5以上且9以下之範圍內者為佳。於pH為中性之情況中,係具有降低以研磨用組成物所致之矽材料部分的研磨速度之優點。
為了將第2實施形態之研磨用組成物的pH調整為所期望的值,亦可使用pH調整劑。所使用的pH調整劑係可為酸及鹼中任一者,此外,亦可為無機及有機之化合物中任一者。
若依據第2實施形態則可得到以下之作用效果。
.於第2實施形態之研磨用組成物中,為了使研磨用組成物所致之矽材料部分的研磨速度降低,而使用有抑制水解化合物。因此,此研磨用組成物係具有對於高移動度材料部分之高的研磨選擇性。
.於研磨用組成物之pH為中性的情況中,為了使研
磨用組成物所致之矽材料部分的研磨速度更加降低,而進一步提昇對於高移動度材料部分之研磨用組成物的研磨選擇性。
前述實施形態亦可變更如下。
.第1及第2實施形態之研磨用組成物亦可含有二種以上之研磨粒。於第1實施形態之研磨用組成物為含有二種以上之研磨粒的情況中,針對一部分的研磨粒並非一定具有40nm以下之平均一次粒徑。
.第1及第2實施形態之研磨用組成物亦可含有二種以上之氧化劑。
.第2實施形態之研磨用組成物亦可含有二種以上之抑制水解化合物。
.第1實施形態之研磨用組成物亦可進一步含有抑制水解化合物。於此情況中,為了使研磨用組成物所致之矽材料部分的研磨速度更加降低,而進一步提昇對於高移動度材料部分之研磨用組成物的研磨選擇性。
.前述實施形態之研磨用組成物亦可因應需要而進一步含有如防蝕劑之類所周知的添加劑。
.前述實施形態之研磨用組成物可為一液型,亦可為預先製成二液型之多液型。
.前述實施形態之研磨用組成物亦可藉由將研磨用組成物之原液以水來進行稀釋而調製。
接著,說明本發明之實施例及比較例。
因應需要將抑制水解化合物及pH調整劑與膠質二氧化矽及氧化劑一併與水進行混合,藉此而調製出實施例101~107及比較例101、102之研磨用組成物。將測量出各研磨用組成物中之成分的詳細內容、及各研磨用組成物之pH的結果展示於表1。
表1中,「H2O2」係表示過氧化氫,「APS」係表示過硫酸銨。pH調整劑係使用乙酸或氫氧化鉀。
使用實施例101~107及比較例101、102之各研磨用組成物,將以表2中所記載的條件來將矽鍺空白晶圓、鍺空白晶圓(blanket wafer)、及正矽酸乙酯(TEOS)空白晶圓的表面研磨後所求出的研磨速度之值展示於表3的「SiGe之研磨速度」欄、「Ge之研磨速度」欄、及「TEOS之研磨速度」欄。研磨速度之值,針對TEOS空白晶圓係藉由將使用光干擾式膜厚測定裝置所測量的研磨前後之晶圓厚度的差除以研磨時間而求出,針對矽鍺空白晶圓及鍺係藉由將研磨前後之晶圓重量的差除以密度與研磨時間而求出。此外,將以此方式所求出的實施例101~117及比較例101、102之各種研磨用組成物所致之矽鍺的研磨速度除以相同研磨用組成物所致之TEOS的研磨速度所得到的值展示於表3之「SiGe之研磨速度/TEOS之研磨速度」欄,將鍺的研磨速度除以相同研磨用組成物所致之TEOS的研磨速度所得到的值展示於表3之「Ge之研磨速度/TEOS之研磨速度」欄。
TEOS之研磨速度的值雖在300Å/min以下時為合格水準,但較佳為200Å/min以下,更佳為100Å/min以下。將矽鍺之研磨速度除以TEOS之研磨速度所得到的值雖在5以上時為合格水準,但較佳為10以上,更佳為15以上。將鍺之研磨速度除以TEOS之研磨速度所得到的值在10以上時為合格水準。
如表3所示,於實施例101~117之研磨用組成物的情況中,將矽鍺之研磨速度除以TEOS之研磨速度所得到的值為5以上或是將鍺之研磨速度除以TEOS之研磨速度所得到的值為10以上,而得到對選擇性研磨高移動度材料部分的目的而言能滿足使用的水準之結果。特別是將pH調整為7後的實施例101、103、105~116,係將矽鍺之研磨速度除以TEOS之研磨速度所得到的值、及將鍺之研磨速度除以TEOS之研磨速度所得到的值同為10以上,而得到特別良好的結果。
相對於此,於比較例101之研磨用組成物的情況中,將矽鍺之研磨速度除以TEOS之研磨速度所得到的值低於5而未達合格水準,無法得到對選擇性研磨高移動度材料部分的目的而言能滿足使用的水準之結果。
因應需要將抑制水解化合物及pH調整劑與膠質二氧化矽及氧化劑一併與水進行混合,藉此而調製出實施例201~216及比較例201之研磨用組成物。將測量出各研磨用組成物中之成分的詳細內容、及各研磨用組成物之pH的結果展示於表4。
表4中,「H2O2」係表示過氧化氫,「APS」係表示過硫酸銨,「KOH」係表示氫氧化鉀。
使用實施例201~216及比較例201之各研磨用組成物,將以表5中所記載的條件來將砷化鎵空白晶圓及正矽酸乙酯(TEOS)空白晶圓的表面研磨後所求出的研磨速度之值展示於表6的「GaAs之研磨速度」欄及「TEOS之研磨速度」欄。研磨速度之值,針對TEOS空白晶圓係藉由將使用光干擾式膜厚測定裝置所測量的研磨前後之晶圓厚度的差除以研磨時間而求出,針對砷化鎵空白晶圓係藉由將研磨前後之晶圓重量的差除以密度與研磨時間而求出。此外,將以此方式所求出的實施例201~216及比較例201之各研磨用組成物所致之砷化鎵的研磨速度除以相同研磨組成物所致之TEOS的研磨速度所得到的值展示於表6之「GaAs之研磨速度/TEOS之研磨速度」欄。
TEOS之研磨速度的值雖在300Å/min以下時為合格水準,但較佳為200Å/min以下,更佳為100Å/min以下。將砷化鎵之研磨速度除以TEOS之研磨速度所得到的值雖在5以上時為合格水準,但較佳為10以上,更佳為15以上。
如表6所示,於實施例201~216之研磨用組成物的情況中,將TEOS之研磨速度為100Å/min以下、或是將砷化鎵之研磨速度除以TEOS之研磨速度所得到的值為15
以上,而得到對選擇性研磨高移動度材料部分的目的而言能滿足使用的水準之結果。
相對於此,於比較例201之研磨用組成物的情況中,將砷化鎵之研磨速度除以TEOS之研磨速度所得到的值未達合格水準,而無法得到對選擇性研磨高移動度材料部分的目的而言能滿足使用的水準之結果。
Claims (5)
- 一種研磨用組成物,其係在將具有含有高移動度材料的部分與含有矽材料的部分之研磨對象物進行研磨的用途中所使用之研磨用組成物,其特徵為,含有平均一次粒徑為40nm以下的研磨粒、氧化劑、及發揮與前述含有矽材料的部分之表面OH基鍵結而抑制含有矽材料的部分之水解的功用之抑制水解化合物,前述抑制水解化合物,為還原葡糖胺、醚、聚氧丙烯/聚氧乙烯之嵌段/無規共聚物、水溶性烷基胺、或胺醇,前述醚,為聚氧乙烯伸烷基二甘油基醚、聚丙二醇、或聚乙二醇,前述水溶性烷基胺,為三甲基胺。
- 一種研磨用組成物,其係在將具有含有高移動度材料的部分與含有矽材料的部分之研磨對象物進行研磨之用途中所使用的研磨用組成物,其特徵為,含有研磨粒、氧化劑、以及發揮與前述含有矽材料的部分之表面OH基鍵結而抑制含有矽材料的部分之水解的功用之抑制水解化合物,前述抑制水解化合物,為還原葡糖胺、醚、聚氧丙烯/聚氧乙烯之嵌段/無規共聚物、水溶性烷基胺、或胺醇,前述醚,為聚氧乙烯伸烷基二甘油基醚、聚丙二醇、或聚乙二醇,前述水溶性烷基胺,為三甲基胺。
- 如申請專利範圍第1或2項之研磨用組成物,其中研磨用組成物係具有中性的pH。
- 一種研磨方法,其特徵為,使用如申請專利範圍第1或2項之研磨用組成物,來將具有含有高移動度材料的部分與含有矽材料的部分之研磨對象物進行研磨。
- 一種基板之製造方法,其特徵為,具有:使用如申請專利範圍第1或2項之研磨用組成物,來將具有含有高移動度材料的部分與含有矽材料的部分之研磨對象物進行研磨的步驟。
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20150014924A (ko) * | 2012-04-18 | 2015-02-09 | 가부시키가이샤 후지미인코퍼레이티드 | 연마용 조성물 |
WO2016084682A1 (ja) * | 2014-11-27 | 2016-06-02 | Jsr株式会社 | 化学機械研磨用水系分散体および化学機械研磨方法 |
US10106705B1 (en) | 2017-03-29 | 2018-10-23 | Fujifilm Planar Solutions, LLC | Polishing compositions and methods of use thereof |
US20190153262A1 (en) * | 2017-11-20 | 2019-05-23 | Cabot Microelectronics Corporation | Composition and method for polishing memory hard disks exhibiting reduced surface scratching |
JP2021150515A (ja) * | 2020-03-19 | 2021-09-27 | 株式会社フジミインコーポレーテッド | 研磨方法および半導体基板の製造方法 |
CN115725241A (zh) * | 2022-11-17 | 2023-03-03 | 万华化学集团电子材料有限公司 | 一种多晶硅抛光组合物及其应用 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1731567A (zh) * | 2005-06-22 | 2006-02-08 | 中国科学院上海微系统与信息技术研究所 | 集成电路铜互连一步化学机械抛光工艺及相应纳米抛光液 |
TW201113358A (en) * | 2009-08-19 | 2011-04-16 | Hitachi Chemical Co Ltd | CMP polishing slurry and polishing method |
Family Cites Families (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3715842A (en) * | 1970-07-02 | 1973-02-13 | Tizon Chem Corp | Silica polishing compositions having a reduced tendency to scratch silicon and germanium surfaces |
JPH085007B2 (ja) | 1986-12-12 | 1996-01-24 | 日産化学工業株式会社 | 第▲iii▼−▲v▼族化合物半導体の研磨剤 |
JPH01193166A (ja) * | 1988-01-28 | 1989-08-03 | Showa Denko Kk | 半導体ウェハ鏡面研磨用パッド |
US6022264A (en) * | 1997-02-10 | 2000-02-08 | Rodel Inc. | Polishing pad and methods relating thereto |
JPH11204520A (ja) | 1998-01-08 | 1999-07-30 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
JP2000160138A (ja) * | 1998-12-01 | 2000-06-13 | Fujimi Inc | 研磨用組成物 |
CN1240797C (zh) * | 2000-03-31 | 2006-02-08 | 拜尔公司 | 抛光剂和生产平面层的方法 |
US7238622B2 (en) * | 2001-04-17 | 2007-07-03 | California Institute Of Technology | Wafer bonded virtual substrate and method for forming the same |
US20050026432A1 (en) * | 2001-04-17 | 2005-02-03 | Atwater Harry A. | Wafer bonded epitaxial templates for silicon heterostructures |
JP4053755B2 (ja) | 2001-09-28 | 2008-02-27 | 株式会社東芝 | Cmp用スラリーおよび半導体装置の製造方法 |
JP2003109918A (ja) | 2001-09-28 | 2003-04-11 | Internatl Business Mach Corp <Ibm> | 化学機械研磨(cmp)を用いてボンディングのためにウェハを平滑化する装置およびその方法 |
WO2003044123A1 (en) * | 2001-11-16 | 2003-05-30 | Ferro Corporation | Particles for use in cmp slurries and method for producing them |
US20030139122A1 (en) * | 2002-01-24 | 2003-07-24 | Lawing Andrew Scott | Polishing pad for a chemical mechanical planarization or polishing (CMP) system |
US6884144B2 (en) * | 2002-08-16 | 2005-04-26 | Micron Technology, Inc. | Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layers |
JP4167928B2 (ja) | 2003-04-23 | 2008-10-22 | 住友金属鉱山株式会社 | Iii−v族化合物半導体ウェハ用の研磨液及びそれを用いたiii−v族化合物半導体ウェハの研磨方法 |
WO2005015647A1 (en) * | 2003-08-08 | 2005-02-17 | Vichel Inc. | Nitride micro light emitting diode with high brightness and method of manufacturing the same |
FR2864457B1 (fr) * | 2003-12-31 | 2006-12-08 | Commissariat Energie Atomique | Procede de nettoyage par voie humide d'une surface notamment en un materiau de type silicium germanium. |
JP4759298B2 (ja) * | 2005-03-30 | 2011-08-31 | 株式会社フジミインコーポレーテッド | 単結晶表面用の研磨剤及び研磨方法 |
US20060278614A1 (en) * | 2005-06-08 | 2006-12-14 | Cabot Microelectronics Corporation | Polishing composition and method for defect improvement by reduced particle stiction on copper surface |
US20060288929A1 (en) * | 2005-06-10 | 2006-12-28 | Crystal Is, Inc. | Polar surface preparation of nitride substrates |
US8771552B2 (en) * | 2005-06-23 | 2014-07-08 | Sumitomo Electric Industries, Ltd. | Group III nitride crystal substrate, epilayer-containing group III nitride crystal substrate, semiconductor device and method of manufacturing the same |
EP1930938A4 (en) | 2005-09-09 | 2010-03-24 | Asahi Glass Co Ltd | POLISHING AGENT, METHOD FOR POLISHING A POLISHED SURFACE AND METHOD FOR PRODUCING AN INTEGRATED SEMICONDUCTOR CIRCUIT ARRANGEMENT |
JP2007103514A (ja) | 2005-09-30 | 2007-04-19 | Fujimi Inc | 研磨用組成物及び研磨方法 |
JP2007103463A (ja) * | 2005-09-30 | 2007-04-19 | Sumitomo Electric Ind Ltd | ポリシングスラリー、GaxIn1−xAsyP1−y結晶の表面処理方法およびGaxIn1−xAsyP1−y結晶基板 |
JP2008135452A (ja) | 2006-11-27 | 2008-06-12 | Fujimi Inc | 研磨用組成物及び研磨方法 |
JP2008182179A (ja) | 2006-12-27 | 2008-08-07 | Hitachi Chem Co Ltd | 研磨剤用添加剤、研磨剤、基板の研磨方法及び電子部品 |
US8263474B2 (en) * | 2007-01-11 | 2012-09-11 | Tokyo Electron Limited | Reduced defect silicon or silicon germanium deposition in micro-features |
FR2912841B1 (fr) | 2007-02-15 | 2009-05-22 | Soitec Silicon On Insulator | Procede de polissage d'heterostructures |
WO2008105342A1 (ja) * | 2007-02-27 | 2008-09-04 | Hitachi Chemical Co., Ltd. | 金属用研磨液及び研磨方法 |
US20090001339A1 (en) * | 2007-06-29 | 2009-01-01 | Tae Young Lee | Chemical Mechanical Polishing Slurry Composition for Polishing Phase-Change Memory Device and Method for Polishing Phase-Change Memory Device Using the Same |
DE102007035266B4 (de) * | 2007-07-27 | 2010-03-25 | Siltronic Ag | Verfahren zum Polieren eines Substrates aus Silicium oder einer Legierung aus Silicium und Germanium |
JP5140469B2 (ja) * | 2007-09-12 | 2013-02-06 | 富士フイルム株式会社 | 金属用研磨液、及び化学的機械的研磨方法 |
US8721917B2 (en) * | 2007-10-05 | 2014-05-13 | Saint-Gobain Ceramics & Plastics, Inc. | Polishing of sapphire with composite slurries |
WO2009046311A2 (en) * | 2007-10-05 | 2009-04-09 | Saint-Gobain Ceramics & Plastics, Inc. | Composite slurries of nano silicon carbide and alumina |
JP5602358B2 (ja) * | 2007-11-30 | 2014-10-08 | 日揮触媒化成株式会社 | 非球状シリカゾル、その製造方法および研磨用組成物 |
JP5444625B2 (ja) | 2008-03-05 | 2014-03-19 | 日立化成株式会社 | Cmp研磨液、基板の研磨方法及び電子部品 |
US9202709B2 (en) | 2008-03-19 | 2015-12-01 | Fujifilm Corporation | Polishing liquid for metal and polishing method using the same |
FR2932108B1 (fr) * | 2008-06-10 | 2019-07-05 | Soitec | Polissage de couches de germanium |
TWI417245B (zh) * | 2008-06-13 | 2013-12-01 | Fujimi Inc | 氧化鋁粒子及含有該氧化鋁粒子之研磨用組成物 |
US8981427B2 (en) * | 2008-07-15 | 2015-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Polishing of small composite semiconductor materials |
US20100072515A1 (en) * | 2008-09-19 | 2010-03-25 | Amberwave Systems Corporation | Fabrication and structures of crystalline material |
DE102008053610B4 (de) * | 2008-10-29 | 2011-03-31 | Siltronic Ag | Verfahren zum beidseitigen Polieren einer Halbleiterscheibe |
DE102008059044B4 (de) | 2008-11-26 | 2013-08-22 | Siltronic Ag | Verfahren zum Polieren einer Halbleiterscheibe mit einer verspannt-relaxierten Si1-xGex-Schicht |
JP2010245091A (ja) | 2009-04-01 | 2010-10-28 | Fujifilm Corp | 化学的機械的研磨液及び研磨方法 |
JP2010030041A (ja) | 2009-11-04 | 2010-02-12 | Hitachi Chem Co Ltd | 酸化セリウム研磨剤および基板の研磨法 |
JP5035387B2 (ja) | 2010-05-10 | 2012-09-26 | 住友電気工業株式会社 | 研磨剤、化合物半導体の製造方法および半導体デバイスの製造方法 |
KR20120020556A (ko) * | 2010-08-30 | 2012-03-08 | 삼성전자주식회사 | 화학적 기계적 연마 공정의 슬러리 조성물 및 이를 이용하는 상변화 메모리 소자의 형성 방법 |
US8062963B1 (en) * | 2010-10-08 | 2011-11-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of fabricating a semiconductor device having an epitaxy region |
US9447306B2 (en) * | 2011-01-25 | 2016-09-20 | Hitachi Chemical Company, Ltd. | CMP polishing fluid, method for manufacturing same, method for manufacturing composite particle, and method for polishing base material |
US8790160B2 (en) * | 2011-04-28 | 2014-07-29 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition and method for polishing phase change alloys |
US8309468B1 (en) * | 2011-04-28 | 2012-11-13 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition and method for polishing germanium-antimony-tellurium alloys |
EP2741892A4 (en) * | 2011-08-01 | 2015-03-18 | Basf Se | METHOD FOR PRODUCING SEMICONDUCTOR COMPONENTS WITH CHEMICAL-MECHANICAL POLISHING ELEMENTARY GERMANIUM AND / OR SI1-XGEX MATERIALS IN THE PRESENCE OF A CMP COMPOSITION OF A PH BETWEEN 3.0 AND 5.5 |
KR20140059216A (ko) * | 2011-08-01 | 2014-05-15 | 바스프 에스이 | 특정 유기 화합물을 포함하는 CMP 조성물의 존재하에서 원소 게르마늄 및/또는 Si₁xGex 재료의 화학적 기계적 연마를 포함하는 반도체 디바이스의 제조 방법 |
-
2012
- 2012-11-21 US US14/359,269 patent/US9238755B2/en active Active
- 2012-11-21 WO PCT/JP2012/080219 patent/WO2013077369A1/ja active Application Filing
- 2012-11-21 KR KR1020147016697A patent/KR102028217B1/ko active IP Right Grant
- 2012-11-22 TW TW101143736A patent/TWI567182B/zh active
-
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- 2015-06-11 US US14/736,711 patent/US9816010B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1731567A (zh) * | 2005-06-22 | 2006-02-08 | 中国科学院上海微系统与信息技术研究所 | 集成电路铜互连一步化学机械抛光工艺及相应纳米抛光液 |
TW201113358A (en) * | 2009-08-19 | 2011-04-16 | Hitachi Chemical Co Ltd | CMP polishing slurry and polishing method |
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