TWI564935B - 壓印設備、壓印方法、和製造物品的方法 - Google Patents

壓印設備、壓印方法、和製造物品的方法 Download PDF

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Publication number
TWI564935B
TWI564935B TW104113038A TW104113038A TWI564935B TW I564935 B TWI564935 B TW I564935B TW 104113038 A TW104113038 A TW 104113038A TW 104113038 A TW104113038 A TW 104113038A TW I564935 B TWI564935 B TW I564935B
Authority
TW
Taiwan
Prior art keywords
substrate
imprint
imprint material
mold
pattern
Prior art date
Application number
TW104113038A
Other languages
English (en)
Chinese (zh)
Other versions
TW201545205A (zh
Inventor
山口裕充
田村泰之
宮島義一
齋藤昭男
Original Assignee
佳能股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 佳能股份有限公司 filed Critical 佳能股份有限公司
Publication of TW201545205A publication Critical patent/TW201545205A/zh
Application granted granted Critical
Publication of TWI564935B publication Critical patent/TWI564935B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/02—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2203/00—Other substrates
    • B05D2203/30—Other inorganic substrates, e.g. ceramics, silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
TW104113038A 2014-05-02 2015-04-23 壓印設備、壓印方法、和製造物品的方法 TWI564935B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014095502A JP6329425B2 (ja) 2014-05-02 2014-05-02 インプリント装置、インプリント方法、および物品の製造方法

Publications (2)

Publication Number Publication Date
TW201545205A TW201545205A (zh) 2015-12-01
TWI564935B true TWI564935B (zh) 2017-01-01

Family

ID=54358600

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104113038A TWI564935B (zh) 2014-05-02 2015-04-23 壓印設備、壓印方法、和製造物品的方法

Country Status (7)

Country Link
US (1) US10406743B2 (enExample)
JP (1) JP6329425B2 (enExample)
KR (2) KR101900585B1 (enExample)
CN (1) CN106256014B (enExample)
SG (1) SG11201608330YA (enExample)
TW (1) TWI564935B (enExample)
WO (1) WO2015166870A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6329437B2 (ja) * 2014-06-10 2018-05-23 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP6566843B2 (ja) * 2015-11-12 2019-08-28 キヤノン株式会社 パターン形成方法、インプリントシステムおよび物品製造方法
JP6666039B2 (ja) * 2016-03-07 2020-03-13 キヤノン株式会社 インプリント方法、インプリント装置、プログラム、および物品の製造方法
JP6726987B2 (ja) * 2016-03-17 2020-07-22 キヤノン株式会社 インプリント装置および物品製造方法
SG10201709153VA (en) * 2016-12-12 2018-07-30 Canon Kk Fluid droplet methodology and apparatus for imprint lithography
US10493672B2 (en) * 2017-06-26 2019-12-03 Canon Kabushiki Kaisha Imprint apparatus, method of manufacturing article, information processing apparatus, method of supporting map editing, and storage medium
US11131923B2 (en) * 2018-10-10 2021-09-28 Canon Kabushiki Kaisha System and method of assessing surface quality by optically analyzing dispensed drops
US10725375B2 (en) 2018-12-04 2020-07-28 Canon Kabushiki Kaisha Using non-linear fluid dispensers for forming thick films
JP7149870B2 (ja) 2019-02-08 2022-10-07 キヤノン株式会社 インプリント装置および物品製造方法
JP7171468B2 (ja) * 2019-02-20 2022-11-15 キヤノン株式会社 情報処理装置、プログラム、リソグラフィ装置、物品の製造方法、物品の製造システム、及び出力方法
CN110143061B (zh) * 2019-07-02 2020-07-24 敏达环保科技（嘉兴）有限公司 一种铁皮专用压印装置
JP7271352B2 (ja) * 2019-07-17 2023-05-11 キオクシア株式会社 インプリント装置、インプリント方法、および半導体装置の製造方法
KR102776383B1 (ko) * 2020-03-18 2025-03-10 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
JP7532234B2 (ja) * 2020-12-10 2024-08-13 キヤノン株式会社 平坦化装置、平坦化方法及び物品の製造方法
KR102509680B1 (ko) * 2020-12-31 2023-03-15 (주)유니젯 잉크방울 측정패드와 이를 구비한 잉크젯 프린터 장치 및 잉크방울 측정방법
JP2023012047A (ja) * 2021-07-13 2023-01-25 東京エレクトロン株式会社 機能液測定装置および機能液測定方法
JP7667047B2 (ja) * 2021-09-22 2025-04-22 キオクシア株式会社 ドロップレシピの作成方法、パターン形成方法、半導体装置の製造方法
EP4250006A1 (en) * 2022-03-23 2023-09-27 Koninklijke Philips N.V. Quality control method for imprint lithography

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US13011A (en) * 1855-06-05 Daniel mint horn
TW201206687A (en) * 2010-06-17 2012-02-16 Canon Kk Imprinting method and imprinting apparatus, sample shot extraction method, and article manufacturing method using same
US20130241096A1 (en) * 2012-03-19 2013-09-19 Canon Kabushiki Kaisha Imprint apparatus, and article manufacturing method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004337701A (ja) 2003-05-14 2004-12-02 Seiko Epson Corp 液滴吐出方法、及び液滴吐出装置
JP2007326003A (ja) * 2006-06-06 2007-12-20 Sharp Corp 液滴吐出装置およびその制御方法
US8480933B2 (en) * 2008-10-22 2013-07-09 Molecular Imprints, Inc. Fluid dispense device calibration
JP2010240503A (ja) * 2009-04-01 2010-10-28 Seiko Epson Corp 液滴吐出量測定方法および有機エレクトロルミネッセンス装置の製造方法
JP5520612B2 (ja) * 2010-01-04 2014-06-11 東芝機械株式会社 ディスペンサを備えた転写装置、ディスペンサの吐出量検出方法、及びディスペンサの吐出量制御方法
JP2011159764A (ja) * 2010-01-29 2011-08-18 Toshiba Corp パターン形成方法、レジスト塗布分布算出装置及びレジスト塗布分布算出プログラム
JP5489887B2 (ja) 2010-06-30 2014-05-14 富士フイルム株式会社 液体塗布装置及び液体塗布方法並びにナノインプリントシステム
JP5337114B2 (ja) * 2010-07-30 2013-11-06 株式会社東芝 パタン形成方法
JP2012114157A (ja) * 2010-11-22 2012-06-14 Toshiba Corp ドロップレシピ作成方法およびデータベース作成方法
JP5727905B2 (ja) * 2011-09-15 2015-06-03 富士フイルム株式会社 インクジェットヘッドの吐出量補正方法、吐出量補正装置、及びナノインプリントシステム
JP2014033069A (ja) * 2012-08-03 2014-02-20 Toshiba Corp パターン形成方法及びディスペンサー
JP5813603B2 (ja) * 2012-09-04 2015-11-17 株式会社東芝 インプリント装置およびインプリント方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US13011A (en) * 1855-06-05 Daniel mint horn
TW201206687A (en) * 2010-06-17 2012-02-16 Canon Kk Imprinting method and imprinting apparatus, sample shot extraction method, and article manufacturing method using same
US20130241096A1 (en) * 2012-03-19 2013-09-19 Canon Kabushiki Kaisha Imprint apparatus, and article manufacturing method

Also Published As

Publication number Publication date
US20170015045A1 (en) 2017-01-19
US10406743B2 (en) 2019-09-10
KR20180104777A (ko) 2018-09-21
CN106256014A (zh) 2016-12-21
SG11201608330YA (en) 2016-11-29
CN106256014B (zh) 2019-06-21
TW201545205A (zh) 2015-12-01
JP6329425B2 (ja) 2018-05-23
JP2015213130A (ja) 2015-11-26
WO2015166870A1 (en) 2015-11-05
KR101900585B1 (ko) 2018-09-19
KR20160146956A (ko) 2016-12-21

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