TWI560767B - Substrate processing apparatus and substrate processing method - Google Patents
Substrate processing apparatus and substrate processing methodInfo
- Publication number
- TWI560767B TWI560767B TW100145563A TW100145563A TWI560767B TW I560767 B TWI560767 B TW I560767B TW 100145563 A TW100145563 A TW 100145563A TW 100145563 A TW100145563 A TW 100145563A TW I560767 B TWI560767 B TW I560767B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate processing
- processing apparatus
- processing method
- substrate
- processing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32642—Focus rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
- H01J37/32165—Plural frequencies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010286075A JP5642531B2 (ja) | 2010-12-22 | 2010-12-22 | 基板処理装置及び基板処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201246357A TW201246357A (en) | 2012-11-16 |
TWI560767B true TWI560767B (en) | 2016-12-01 |
Family
ID=46315420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100145563A TWI560767B (en) | 2010-12-22 | 2011-12-09 | Substrate processing apparatus and substrate processing method |
Country Status (5)
Country | Link |
---|---|
US (2) | US20120160808A1 (zh) |
JP (1) | JP5642531B2 (zh) |
KR (1) | KR101995449B1 (zh) |
CN (2) | CN104821268B (zh) |
TW (1) | TWI560767B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI699140B (zh) * | 2017-06-27 | 2020-07-11 | 日商佳能安內華股份有限公司 | 電漿處理裝置 |
US11569070B2 (en) | 2017-06-27 | 2023-01-31 | Canon Anelva Corporation | Plasma processing apparatus |
US11600469B2 (en) | 2017-06-27 | 2023-03-07 | Canon Anelva Corporation | Plasma processing apparatus |
US11600466B2 (en) | 2018-06-26 | 2023-03-07 | Canon Anelva Corporation | Plasma processing apparatus, plasma processing method, and memory medium |
US11626270B2 (en) | 2017-06-27 | 2023-04-11 | Canon Anelva Corporation | Plasma processing apparatus |
Families Citing this family (50)
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JP5503503B2 (ja) * | 2010-11-09 | 2014-05-28 | 東京エレクトロン株式会社 | プラズマ処理装置 |
DE102012101923B4 (de) * | 2012-03-07 | 2019-11-07 | Osram Opto Semiconductors Gmbh | Substratträgeranordnung, Beschichtungsanlage mit Substratträgeranordnung und Verfahren zur Durchführung eines Beschichtungsverfahrens |
JP6001402B2 (ja) * | 2012-09-28 | 2016-10-05 | 日本特殊陶業株式会社 | 静電チャック |
JP6080571B2 (ja) * | 2013-01-31 | 2017-02-15 | 東京エレクトロン株式会社 | 載置台及びプラズマ処理装置 |
KR102112368B1 (ko) * | 2013-02-28 | 2020-05-18 | 도쿄엘렉트론가부시키가이샤 | 탑재대 및 플라즈마 처리 장치 |
KR101317942B1 (ko) * | 2013-03-13 | 2013-10-16 | (주)테키스트 | 반도체 제조용 척의 에지링 냉각모듈 |
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JP2015069770A (ja) * | 2013-09-27 | 2015-04-13 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP5938716B2 (ja) * | 2013-11-01 | 2016-06-22 | パナソニックIpマネジメント株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP6224428B2 (ja) | 2013-11-19 | 2017-11-01 | 東京エレクトロン株式会社 | 載置台にフォーカスリングを吸着する方法 |
US20150162169A1 (en) * | 2013-12-05 | 2015-06-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Etching apparatus and method |
US9368370B2 (en) * | 2014-03-14 | 2016-06-14 | Applied Materials, Inc. | Temperature ramping using gas distribution plate heat |
US9415519B2 (en) * | 2014-07-01 | 2016-08-16 | Varian Semiconductor Equipment Associates, Inc. | Composite end effector and method of making a composite end effector |
JP6345030B2 (ja) * | 2014-08-11 | 2018-06-20 | 東京エレクトロン株式会社 | プラズマ処理装置及びフォーカスリング |
CN105489527B (zh) * | 2014-09-19 | 2018-11-06 | 北京北方华创微电子装备有限公司 | 承载装置以及半导体加工设备 |
KR102233920B1 (ko) | 2014-09-30 | 2021-03-30 | 스미토모 오사카 세멘토 가부시키가이샤 | 정전 척 장치 |
JP6424700B2 (ja) * | 2015-03-26 | 2018-11-21 | 住友大阪セメント株式会社 | 静電チャック装置 |
US9903739B2 (en) * | 2015-06-11 | 2018-02-27 | Tokyo Electron Limited | Sensor chip for electrostatic capacitance measurement and measuring device having the same |
JP6512954B2 (ja) * | 2015-06-11 | 2019-05-15 | 東京エレクトロン株式会社 | フォーカスリングを検査するためのシステム、及びフォーカスリングを検査する方法 |
JP6449141B2 (ja) * | 2015-06-23 | 2019-01-09 | 東京エレクトロン株式会社 | エッチング処理方法及びプラズマ処理装置 |
JP6552346B2 (ja) * | 2015-09-04 | 2019-07-31 | 東京エレクトロン株式会社 | 基板処理装置 |
KR102634280B1 (ko) * | 2015-10-21 | 2024-02-07 | 스미토모 오사카 세멘토 가부시키가이샤 | 정전 척 장치 |
JP2017152437A (ja) * | 2016-02-22 | 2017-08-31 | 東芝メモリ株式会社 | プラズマ処理装置および半導体装置の製造方法 |
US10600621B2 (en) * | 2016-03-30 | 2020-03-24 | Tokyo Electron Limited | Plasma electrode and plasma processing device |
US9922857B1 (en) | 2016-11-03 | 2018-03-20 | Lam Research Corporation | Electrostatically clamped edge ring |
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JP6427628B2 (ja) * | 2017-06-05 | 2018-11-21 | 芝浦メカトロニクス株式会社 | プラズマ処理装置、およびプラズマ処理方法 |
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KR102335472B1 (ko) * | 2019-09-04 | 2021-12-07 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
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JP7341043B2 (ja) * | 2019-12-06 | 2023-09-08 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
JP7390219B2 (ja) * | 2020-03-11 | 2023-12-01 | 東京エレクトロン株式会社 | エッジリングの保持方法、プラズマ処理装置、及び基板処理システム |
CN115362543A (zh) * | 2020-04-02 | 2022-11-18 | 朗姆研究公司 | 具有整合式密封件的冷却边缘环 |
CN111524783A (zh) * | 2020-04-10 | 2020-08-11 | 华虹半导体(无锡)有限公司 | 等离子体处理装置 |
US20230215704A1 (en) | 2020-06-29 | 2023-07-06 | Sumitomo Osaka Cement Co., Ltd. | Electrostatic chuck device |
US20230290620A1 (en) | 2020-06-29 | 2023-09-14 | Sumitomo Osaka Cement Co., Ltd. | Electrostatic chuck |
TW202226897A (zh) * | 2020-11-06 | 2022-07-01 | 日商東京威力科創股份有限公司 | 濾波器電路 |
KR20220102201A (ko) * | 2021-01-12 | 2022-07-20 | 삼성전자주식회사 | 척 어셈블리, 그를 포함하는 반도체 소자의 제조 장치, 및 반도체 소자의 제조방법 |
JP2022111771A (ja) * | 2021-01-20 | 2022-08-01 | 東京エレクトロン株式会社 | プラズマ処理システム及びプラズマ処理方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000036490A (ja) * | 1998-07-16 | 2000-02-02 | Tokyo Electron Yamanashi Ltd | プラズマ処理装置およびその方法 |
JP2005064460A (ja) * | 2003-04-24 | 2005-03-10 | Tokyo Electron Ltd | プラズマ処理装置、フォーカスリング及び被処理体の載置装置 |
JP2005520337A (ja) * | 2002-03-12 | 2005-07-07 | 東京エレクトロン株式会社 | プラズマ処理のための改良された基板ホルダ |
JP2006319043A (ja) * | 2005-05-11 | 2006-11-24 | Hitachi High-Technologies Corp | プラズマ処理装置 |
US20100018648A1 (en) * | 2008-07-23 | 2010-01-28 | Applied Marterials, Inc. | Workpiece support for a plasma reactor with controlled apportionment of rf power to a process kit ring |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07249586A (ja) * | 1993-12-22 | 1995-09-26 | Tokyo Electron Ltd | 処理装置及びその製造方法並びに被処理体の処理方法 |
JPH10303288A (ja) * | 1997-04-26 | 1998-11-13 | Anelva Corp | プラズマ処理装置用基板ホルダー |
US6806211B2 (en) * | 2000-08-11 | 2004-10-19 | Tokyo Electron Limited | Device and method for processing substrate |
TW541586B (en) * | 2001-05-25 | 2003-07-11 | Tokyo Electron Ltd | Substrate table, production method therefor and plasma treating device |
US20040261946A1 (en) * | 2003-04-24 | 2004-12-30 | Tokyo Electron Limited | Plasma processing apparatus, focus ring, and susceptor |
US7713431B2 (en) * | 2004-06-10 | 2010-05-11 | Tokyo Electron Limited | Plasma processing method |
JP4645167B2 (ja) * | 2004-11-15 | 2011-03-09 | 東京エレクトロン株式会社 | フォーカスリング、プラズマエッチング装置及びプラズマエッチング方法。 |
JP4815298B2 (ja) * | 2006-07-31 | 2011-11-16 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
JP4992389B2 (ja) * | 2006-11-06 | 2012-08-08 | 東京エレクトロン株式会社 | 載置装置、プラズマ処理装置及びプラズマ処理方法 |
JP5198226B2 (ja) * | 2008-11-20 | 2013-05-15 | 東京エレクトロン株式会社 | 基板載置台および基板処理装置 |
JP2012049166A (ja) * | 2010-08-24 | 2012-03-08 | Hitachi High-Technologies Corp | 真空処理装置 |
-
2010
- 2010-12-22 JP JP2010286075A patent/JP5642531B2/ja active Active
-
2011
- 2011-12-09 TW TW100145563A patent/TWI560767B/zh active
- 2011-12-21 US US13/332,986 patent/US20120160808A1/en not_active Abandoned
- 2011-12-22 CN CN201410747792.9A patent/CN104821268B/zh active Active
- 2011-12-22 CN CN201110445614.7A patent/CN102569130B/zh active Active
- 2011-12-22 KR KR1020110139919A patent/KR101995449B1/ko active IP Right Grant
-
2015
- 2015-03-20 US US14/663,736 patent/US20150200080A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000036490A (ja) * | 1998-07-16 | 2000-02-02 | Tokyo Electron Yamanashi Ltd | プラズマ処理装置およびその方法 |
JP2005520337A (ja) * | 2002-03-12 | 2005-07-07 | 東京エレクトロン株式会社 | プラズマ処理のための改良された基板ホルダ |
JP2005064460A (ja) * | 2003-04-24 | 2005-03-10 | Tokyo Electron Ltd | プラズマ処理装置、フォーカスリング及び被処理体の載置装置 |
JP2006319043A (ja) * | 2005-05-11 | 2006-11-24 | Hitachi High-Technologies Corp | プラズマ処理装置 |
US20100018648A1 (en) * | 2008-07-23 | 2010-01-28 | Applied Marterials, Inc. | Workpiece support for a plasma reactor with controlled apportionment of rf power to a process kit ring |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI699140B (zh) * | 2017-06-27 | 2020-07-11 | 日商佳能安內華股份有限公司 | 電漿處理裝置 |
US11569070B2 (en) | 2017-06-27 | 2023-01-31 | Canon Anelva Corporation | Plasma processing apparatus |
US11600469B2 (en) | 2017-06-27 | 2023-03-07 | Canon Anelva Corporation | Plasma processing apparatus |
US11626270B2 (en) | 2017-06-27 | 2023-04-11 | Canon Anelva Corporation | Plasma processing apparatus |
US11756773B2 (en) | 2017-06-27 | 2023-09-12 | Canon Anelva Corporation | Plasma processing apparatus |
US11784030B2 (en) | 2017-06-27 | 2023-10-10 | Canon Anelva Corporation | Plasma processing apparatus |
US11961710B2 (en) | 2017-06-27 | 2024-04-16 | Canon Anelva Corporation | Plasma processing apparatus |
US11600466B2 (en) | 2018-06-26 | 2023-03-07 | Canon Anelva Corporation | Plasma processing apparatus, plasma processing method, and memory medium |
Also Published As
Publication number | Publication date |
---|---|
JP2012134375A (ja) | 2012-07-12 |
US20120160808A1 (en) | 2012-06-28 |
US20150200080A1 (en) | 2015-07-16 |
CN102569130B (zh) | 2014-12-31 |
CN102569130A (zh) | 2012-07-11 |
JP5642531B2 (ja) | 2014-12-17 |
KR20120071362A (ko) | 2012-07-02 |
CN104821268A (zh) | 2015-08-05 |
TW201246357A (en) | 2012-11-16 |
CN104821268B (zh) | 2017-01-11 |
KR101995449B1 (ko) | 2019-07-02 |
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