TWI560530B - - Google Patents
Info
- Publication number
- TWI560530B TWI560530B TW104117415A TW104117415A TWI560530B TW I560530 B TWI560530 B TW I560530B TW 104117415 A TW104117415 A TW 104117415A TW 104117415 A TW104117415 A TW 104117415A TW I560530 B TWI560530 B TW I560530B
- Authority
- TW
- Taiwan
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67178—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers vertical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011000756 | 2011-01-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201600935A TW201600935A (zh) | 2016-01-01 |
TWI560530B true TWI560530B (zh) | 2016-12-01 |
Family
ID=46457468
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104117415A TW201600935A (zh) | 2011-01-05 | 2011-12-07 | 塗佈、顯像裝置,塗佈、顯像方法及記憶媒體 |
TW100145046A TWI497226B (zh) | 2011-01-05 | 2011-12-07 | Coating, developing device, coating, developing method and memory medium |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100145046A TWI497226B (zh) | 2011-01-05 | 2011-12-07 | Coating, developing device, coating, developing method and memory medium |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5696658B2 (zh) |
KR (2) | KR101900771B1 (zh) |
TW (2) | TW201600935A (zh) |
WO (1) | WO2012093609A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6005604B2 (ja) * | 2012-09-13 | 2016-10-12 | 東京エレクトロン株式会社 | 現像処理装置 |
CN104597726A (zh) * | 2013-10-30 | 2015-05-06 | 沈阳芯源微电子设备有限公司 | 涂胶显影机的工艺模块结构及布局方法 |
TW202111796A (zh) * | 2019-08-19 | 2021-03-16 | 日商東京威力科創股份有限公司 | 塗布顯影裝置 |
KR102556992B1 (ko) * | 2020-09-10 | 2023-07-20 | 세메스 주식회사 | 세정 지그, 이를 포함하는 기판 처리 장치, 그리고 기판 처리 장치의 세정 방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005228917A (ja) * | 2004-02-13 | 2005-08-25 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2008277528A (ja) * | 2007-04-27 | 2008-11-13 | Tokyo Electron Ltd | 基板の処理方法、基板の処理システム及びコンピュータ読み取り可能な記憶媒体 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3280618B2 (ja) * | 1998-03-24 | 2002-05-13 | 東京エレクトロン株式会社 | 熱処理装置 |
JP3593496B2 (ja) * | 2000-07-24 | 2004-11-24 | 東京エレクトロン株式会社 | 塗布現像処理装置 |
US6879866B2 (en) * | 2003-08-04 | 2005-04-12 | Asml Netherlands B.V. | Method, computer program product and apparatus for scheduling maintenance actions in a substrate processing system |
JP4356936B2 (ja) * | 2005-01-21 | 2009-11-04 | 東京エレクトロン株式会社 | 塗布、現像装置及びその方法 |
-
2011
- 2011-12-07 TW TW104117415A patent/TW201600935A/zh unknown
- 2011-12-07 TW TW100145046A patent/TWI497226B/zh active
- 2011-12-26 WO PCT/JP2011/080046 patent/WO2012093609A1/ja active Application Filing
- 2011-12-26 KR KR1020137017552A patent/KR101900771B1/ko active IP Right Grant
- 2011-12-26 KR KR1020187026627A patent/KR101980508B1/ko active IP Right Grant
- 2011-12-28 JP JP2011287984A patent/JP5696658B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005228917A (ja) * | 2004-02-13 | 2005-08-25 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2008277528A (ja) * | 2007-04-27 | 2008-11-13 | Tokyo Electron Ltd | 基板の処理方法、基板の処理システム及びコンピュータ読み取り可能な記憶媒体 |
Also Published As
Publication number | Publication date |
---|---|
KR101900771B1 (ko) | 2018-09-20 |
TWI497226B (zh) | 2015-08-21 |
JP2012156497A (ja) | 2012-08-16 |
TW201600935A (zh) | 2016-01-01 |
JP5696658B2 (ja) | 2015-04-08 |
WO2012093609A1 (ja) | 2012-07-12 |
KR101980508B1 (ko) | 2019-05-20 |
KR20180104780A (ko) | 2018-09-21 |
KR20140002697A (ko) | 2014-01-08 |
TW201250393A (en) | 2012-12-16 |