TWI551624B - 電晶體及其製造方法 - Google Patents
電晶體及其製造方法 Download PDFInfo
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- TWI551624B TWI551624B TW101118599A TW101118599A TWI551624B TW I551624 B TWI551624 B TW I551624B TW 101118599 A TW101118599 A TW 101118599A TW 101118599 A TW101118599 A TW 101118599A TW I551624 B TWI551624 B TW I551624B
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- semiconductor
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- cyano
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- 238000000034 method Methods 0.000 title claims description 55
- 239000000203 mixture Substances 0.000 claims description 196
- 239000004065 semiconductor Substances 0.000 claims description 71
- 239000000178 monomer Substances 0.000 claims description 51
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 47
- 125000003118 aryl group Chemical group 0.000 claims description 36
- 125000000217 alkyl group Chemical group 0.000 claims description 32
- 125000004432 carbon atom Chemical group C* 0.000 claims description 28
- 125000003545 alkoxy group Chemical group 0.000 claims description 27
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- 238000000576 coating method Methods 0.000 claims description 27
- UUETXKHLQNJFSI-UHFFFAOYSA-N 1-ethynylpentacene Chemical compound C(#C)C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C12 UUETXKHLQNJFSI-UHFFFAOYSA-N 0.000 claims description 25
- 239000011230 binding agent Substances 0.000 claims description 22
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- 229910052736 halogen Inorganic materials 0.000 claims description 17
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- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 14
- 239000001257 hydrogen Substances 0.000 claims description 13
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 13
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 claims description 13
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 12
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 9
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- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 7
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 6
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- 125000004122 cyclic group Chemical group 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
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- 125000002877 alkyl aryl group Chemical group 0.000 claims description 5
- 229910052794 bromium Inorganic materials 0.000 claims description 5
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 5
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- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 4
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- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 290
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- 230000000052 comparative effect Effects 0.000 description 14
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- IKDUDTNKRLTJSI-UHFFFAOYSA-N hydrazine monohydrate Substances O.NN IKDUDTNKRLTJSI-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/02—Polyamines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/12—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
- H01B1/121—Charge-transfer complexes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/02—Polyamines
- C08G73/026—Wholly aromatic polyamines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D179/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
- C09D179/02—Polyamines
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/24—Electrically-conducting paints
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
- H10K10/488—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions the channel region comprising a layer of composite material having interpenetrating or embedded materials, e.g. a mixture of donor and acceptor moieties, that form a bulk heterojunction
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/115—Polyfluorene; Derivatives thereof
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/151—Copolymers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/40—Organosilicon compounds, e.g. TIPS pentacene
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Polymers & Plastics (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Composite Materials (AREA)
- Thin Film Transistor (AREA)
- Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
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| GBGB1108864.8A GB201108864D0 (en) | 2011-05-26 | 2011-05-26 | Transistors and methods of making them |
| GBGB1118867.9A GB201118867D0 (en) | 2011-05-26 | 2011-11-01 | Transistors and methods for making them |
| GBGB1120997.0A GB201120997D0 (en) | 2011-05-26 | 2011-12-07 | Transistors and methods for making them |
| GBGB1205022.5A GB201205022D0 (en) | 2011-05-26 | 2012-03-22 | Transistors and methods for making them |
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| TWI551624B true TWI551624B (zh) | 2016-10-01 |
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| CN (2) | CN107266680B (enExample) |
| GB (4) | GB201108864D0 (enExample) |
| TW (1) | TWI551624B (enExample) |
| WO (1) | WO2012160383A1 (enExample) |
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| GB201108864D0 (en) | 2011-05-26 | 2011-07-06 | Ct For Process Innovation The Ltd | Transistors and methods of making them |
| GB201108865D0 (en) * | 2011-05-26 | 2011-07-06 | Ct For Process Innovation The Ltd | Semiconductor compounds |
| GB2491810B (en) | 2011-05-31 | 2018-03-21 | Smartkem Ltd | Organic semiconductor compositions |
| GB201203159D0 (en) | 2012-02-23 | 2012-04-11 | Smartkem Ltd | Organic semiconductor compositions |
| KR102091906B1 (ko) * | 2013-08-28 | 2020-03-20 | 스마트켐 리미티드 | 고분자 유기 반도체 조성물 |
| EP2846371A1 (en) | 2013-09-10 | 2015-03-11 | Ecole Polytechnique Fédérale de Lausanne (EPFL) | Inverted solar cell and process for producing the same |
| JP6181318B2 (ja) | 2014-04-29 | 2017-08-16 | サビック グローバル テクノロジーズ ビー．ブイ． | 光電子工学用途のための高い導電性および吸収を有する小分子／オリゴマーの合成 |
| EP3032599A1 (en) | 2014-12-12 | 2016-06-15 | Solvay SA | Organic semiconductor composition |
| JP2016162961A (ja) * | 2015-03-04 | 2016-09-05 | 東ソー株式会社 | 有機半導体層形成用溶液、有機半導体層、および有機薄膜トランジスタ |
| JP2017098489A (ja) * | 2015-11-27 | 2017-06-01 | 東ソー株式会社 | 有機半導体層形成用溶液、有機半導体層、および有機薄膜トランジスタ |
| WO2017187162A1 (en) * | 2016-04-27 | 2017-11-02 | Neudrive Limited | Semiconducting compositions |
| EP3257849A1 (en) * | 2016-06-14 | 2017-12-20 | Solvay SA | Organic semiconductor composition and semiconducting layer obtained therefrom |
| CN106252362B (zh) * | 2016-08-31 | 2019-07-12 | 深圳市华星光电技术有限公司 | 一种阵列基板及其制备方法 |
| GB201810710D0 (en) | 2018-06-29 | 2018-08-15 | Smartkem Ltd | Sputter Protective Layer For Organic Electronic Devices |
| CN111416039A (zh) | 2019-01-07 | 2020-07-14 | 纽多维有限公司 | 制剂和层 |
| CN111808270A (zh) * | 2019-04-12 | 2020-10-23 | 纽多维有限公司 | 半导体组合物及其应用 |
| CN111808269A (zh) * | 2019-04-12 | 2020-10-23 | 纽多维有限公司 | 新型聚三芳基胺及其用途 |
| US20210028376A1 (en) * | 2019-07-22 | 2021-01-28 | Universal Display Corporation | Organic electroluminescent materials and devices |
| GB201919031D0 (en) | 2019-12-20 | 2020-02-05 | Smartkem Ltd | Sputter protective layer for organic electronic devices |
| WO2021200852A1 (ja) * | 2020-03-30 | 2021-10-07 | 帝人株式会社 | 熱可塑性樹脂との相溶性に優れた重合体 |
| CN113321792A (zh) * | 2020-04-21 | 2021-08-31 | 杭州领挚科技有限公司 | 三芳胺聚合物及其应用 |
| CN113372536A (zh) * | 2020-04-21 | 2021-09-10 | 杭州领挚科技有限公司 | 三芳胺聚合物及其制备方法与应用 |
| GB202017982D0 (en) | 2020-11-16 | 2020-12-30 | Smartkem Ltd | Organic thin film transistor |
| GB202209042D0 (en) | 2022-06-20 | 2022-08-10 | Smartkem Ltd | An integrated circuit for a flat-panel display |
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| CN101346808A (zh) * | 2005-12-28 | 2009-01-14 | 3M创新有限公司 | 底栅电极薄膜晶体管 |
| TW200904821A (en) * | 2007-03-07 | 2009-02-01 | Univ Kentucky Res Found | Silylethynylated heteroacenes and electronic devices made therewith |
| TWI314783B (en) * | 2005-05-18 | 2009-09-11 | Ricoh Co Ltd | Organic thin film transistor and active matrix display |
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| WO1997015173A1 (en) | 1995-10-17 | 1997-04-24 | Minnesota Mining And Manufacturing Company | Method for radiation-induced thermal transfer of resist for flexible printed circuitry |
| US6309763B1 (en) | 1997-05-21 | 2001-10-30 | The Dow Chemical Company | Fluorene-containing polymers and electroluminescent devices therefrom |
| GB9726810D0 (en) | 1997-12-19 | 1998-02-18 | Zeneca Ltd | Compounds composition & use |
| KR100697861B1 (ko) | 1998-03-13 | 2007-03-22 | 캠브리지 디스플레이 테크놀로지 리미티드 | 전장 발광 디바이스들 |
| JP4890706B2 (ja) | 1999-06-18 | 2012-03-07 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | ポリマーフラクションの分離方法 |
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2012
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- 2012-05-24 KR KR1020137034135A patent/KR101987209B1/ko not_active Expired - Fee Related
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2016
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Also Published As
| Publication number | Publication date |
|---|---|
| HK1245309A1 (zh) | 2018-08-24 |
| KR101987209B1 (ko) | 2019-06-10 |
| CN107266680B (zh) | 2021-01-15 |
| TW201319121A (zh) | 2013-05-16 |
| EP2715820B1 (en) | 2018-02-14 |
| GB201120997D0 (en) | 2012-01-18 |
| JP6005147B2 (ja) | 2016-10-12 |
| US10121970B2 (en) | 2018-11-06 |
| CN107266680A (zh) | 2017-10-20 |
| EP2715820A1 (en) | 2014-04-09 |
| GB201108864D0 (en) | 2011-07-06 |
| US20170005269A1 (en) | 2017-01-05 |
| WO2012160383A1 (en) | 2012-11-29 |
| CN103703581B (zh) | 2017-06-09 |
| US20140175409A1 (en) | 2014-06-26 |
| US9431145B2 (en) | 2016-08-30 |
| JP2014516210A (ja) | 2014-07-07 |
| KR20140035434A (ko) | 2014-03-21 |
| CN103703581A (zh) | 2014-04-02 |
| GB201118867D0 (en) | 2011-12-14 |
| GB201205022D0 (en) | 2012-05-09 |
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