TWI533775B - 具有訂製層之佈線基材 - Google Patents
具有訂製層之佈線基材 Download PDFInfo
- Publication number
- TWI533775B TWI533775B TW100107534A TW100107534A TWI533775B TW I533775 B TWI533775 B TW I533775B TW 100107534 A TW100107534 A TW 100107534A TW 100107534 A TW100107534 A TW 100107534A TW I533775 B TWI533775 B TW I533775B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- insulating material
- wiring substrate
- lines
- line
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims description 199
- 239000011810 insulating material Substances 0.000 claims description 114
- 239000000463 material Substances 0.000 claims description 67
- 239000012777 electrically insulating material Substances 0.000 claims description 20
- 239000002245 particle Substances 0.000 claims description 9
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 4
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 4
- 239000003822 epoxy resin Substances 0.000 claims description 2
- 229920000647 polyepoxide Polymers 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 173
- 238000000034 method Methods 0.000 description 70
- 230000008569 process Effects 0.000 description 62
- 239000004020 conductor Substances 0.000 description 33
- 239000002313 adhesive film Substances 0.000 description 14
- 230000004044 response Effects 0.000 description 9
- 239000000443 aerosol Substances 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 238000005266 casting Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- -1 viscous Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 239000012772 electrical insulation material Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004843 novolac epoxy resin Substances 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4664—Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4647—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer around previously made via studs
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/049—Wire bonding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4007—Surface contacts, e.g. bumps
- H05K3/4015—Surface contacts, e.g. bumps using auxiliary conductive elements, e.g. pieces of metal foil, metallic spheres
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4046—Through-connections; Vertical interconnect access [VIA] connections using auxiliary conductive elements, e.g. metallic spheres, eyelets, pieces of wire
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/719,136 US8476538B2 (en) | 2010-03-08 | 2010-03-08 | Wiring substrate with customization layers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201206285A TW201206285A (en) | 2012-02-01 |
| TWI533775B true TWI533775B (zh) | 2016-05-11 |
Family
ID=44530323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100107534A TWI533775B (zh) | 2010-03-08 | 2011-03-07 | 具有訂製層之佈線基材 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8476538B2 (enExample) |
| JP (1) | JP6087630B2 (enExample) |
| KR (1) | KR101851269B1 (enExample) |
| TW (1) | TWI533775B (enExample) |
| WO (1) | WO2011112409A2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9484973B1 (en) * | 2010-08-09 | 2016-11-01 | Qorvo Us, Inc. | Voltage equalization for stacked FETs in RF switches |
| TW201228507A (en) * | 2010-12-17 | 2012-07-01 | Hon Hai Prec Ind Co Ltd | Printed circuit board |
| TW201347124A (zh) * | 2012-05-07 | 2013-11-16 | 矽品精密工業股份有限公司 | 半導體封裝件及其製法 |
| JP2014216123A (ja) * | 2013-04-24 | 2014-11-17 | タイコエレクトロニクスジャパン合同会社 | 電気コネクタ組立体及びその実装構造 |
| US9431759B2 (en) | 2014-10-20 | 2016-08-30 | HGST Netherlands B.V. | Feedthrough connector for hermetically sealed electronic devices |
| US10650181B2 (en) * | 2017-09-21 | 2020-05-12 | Nokia Solutions And Networks Oy | Spatial location of vias in a printed circuit board |
| CN111566806B (zh) * | 2018-01-24 | 2024-04-30 | 京瓷株式会社 | 布线基板、电子装置以及电子模块 |
| US10790307B2 (en) | 2018-11-27 | 2020-09-29 | Qorvo Us, Inc. | Switch branch structure |
| WO2021178238A1 (en) * | 2020-03-02 | 2021-09-10 | Kuprion Inc. | Ceramic-based circuit board assemblies formed using metal nanoparticles |
| CN115248339A (zh) * | 2021-04-27 | 2022-10-28 | 旺矽科技股份有限公司 | 用于探针卡的探针安装电路板及探针装置 |
Family Cites Families (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4771537A (en) * | 1985-12-20 | 1988-09-20 | Olin Corporation | Method of joining metallic components |
| US5229549A (en) * | 1989-11-13 | 1993-07-20 | Sumitomo Electric Industries, Ltd. | Ceramic circuit board and a method of manufacturing the ceramic circuit board |
| US5310965A (en) * | 1991-08-28 | 1994-05-10 | Nec Corporation | Multi-level wiring structure having an organic interlayer insulating film |
| US5371654A (en) * | 1992-10-19 | 1994-12-06 | International Business Machines Corporation | Three dimensional high performance interconnection package |
| US6295729B1 (en) * | 1992-10-19 | 2001-10-02 | International Business Machines Corporation | Angled flying lead wire bonding process |
| US6064213A (en) * | 1993-11-16 | 2000-05-16 | Formfactor, Inc. | Wafer-level burn-in and test |
| US7282945B1 (en) * | 1996-09-13 | 2007-10-16 | International Business Machines Corporation | Wafer scale high density probe assembly, apparatus for use thereof and methods of fabrication thereof |
| US5828226A (en) * | 1996-11-06 | 1998-10-27 | Cerprobe Corporation | Probe card assembly for high density integrated circuits |
| JP3192619B2 (ja) * | 1997-10-07 | 2001-07-30 | 日本特殊陶業株式会社 | 配線基板及びその製造方法 |
| JP3188876B2 (ja) * | 1997-12-29 | 2001-07-16 | インターナショナル・ビジネス・マシーンズ・コーポレ−ション | プロダクト・チップをテストする方法、テスト・ヘッド及びテスト装置 |
| JPH11317383A (ja) * | 1998-05-06 | 1999-11-16 | Dexter Kk | 樹脂で封止した半導体チップの分断方法 |
| US6372999B1 (en) * | 1999-04-20 | 2002-04-16 | Trw Inc. | Multilayer wiring board and multilayer wiring package |
| JP3865115B2 (ja) * | 1999-09-13 | 2007-01-10 | Hoya株式会社 | 多層配線基板及びその製造方法、並びに該多層配線基板を有するウエハ一括コンタクトボード |
| US6309912B1 (en) * | 2000-06-20 | 2001-10-30 | Motorola, Inc. | Method of interconnecting an embedded integrated circuit |
| US7480988B2 (en) * | 2001-03-30 | 2009-01-27 | Second Sight Medical Products, Inc. | Method and apparatus for providing hermetic electrical feedthrough |
| US6729019B2 (en) * | 2001-07-11 | 2004-05-04 | Formfactor, Inc. | Method of manufacturing a probe card |
| US6821625B2 (en) * | 2001-09-27 | 2004-11-23 | International Business Machines Corporation | Thermal spreader using thermal conduits |
| US6857880B2 (en) * | 2001-11-09 | 2005-02-22 | Tomonari Ohtsuki | Electrical connector |
| JP2003152133A (ja) * | 2001-11-12 | 2003-05-23 | Toppan Printing Co Ltd | 半導体パッケージ用基板及びその製造方法 |
| US6831371B1 (en) * | 2002-03-16 | 2004-12-14 | Amkor Technology, Inc. | Integrated circuit substrate having embedded wire conductors and method therefor |
| JP3925283B2 (ja) * | 2002-04-16 | 2007-06-06 | セイコーエプソン株式会社 | 電子デバイスの製造方法、電子機器の製造方法 |
| US6739879B2 (en) * | 2002-07-03 | 2004-05-25 | Intel Corporation | Ball grid array circuit board jumper |
| US7047638B2 (en) * | 2002-07-24 | 2006-05-23 | Formfactor, Inc | Method of making microelectronic spring contact array |
| US6920689B2 (en) * | 2002-12-06 | 2005-07-26 | Formfactor, Inc. | Method for making a socket to perform testing on integrated circuits |
| US7682970B2 (en) * | 2003-07-16 | 2010-03-23 | The Regents Of The University Of California | Maskless nanofabrication of electronic components |
| US20050108875A1 (en) * | 2003-11-26 | 2005-05-26 | Mathieu Gaetan L. | Methods for making vertical electric feed through structures usable to form removable substrate tiles in a wafer test system |
| US7024763B2 (en) * | 2003-11-26 | 2006-04-11 | Formfactor, Inc. | Methods for making plated through holes usable as interconnection wire or probe attachments |
| US7375978B2 (en) * | 2003-12-23 | 2008-05-20 | Intel Corporation | Method and apparatus for trace shielding and routing on a substrate |
| KR20050065038A (ko) * | 2003-12-24 | 2005-06-29 | 삼성전기주식회사 | 비수직 비아가 구비된 인쇄회로기판 및 패키지 |
| JP2005327986A (ja) * | 2004-05-17 | 2005-11-24 | Seiko Epson Corp | クロスオーバ配線構造およびその電子回路装置 |
| JP4441325B2 (ja) * | 2004-05-18 | 2010-03-31 | 新光電気工業株式会社 | 多層配線の形成方法および多層配線基板の製造方法 |
| JP2006013223A (ja) * | 2004-06-28 | 2006-01-12 | Seiko Epson Corp | 配線構造 |
| KR100663942B1 (ko) * | 2005-03-24 | 2007-01-02 | 삼성전기주식회사 | 적층 세라믹 콘덴서 및 그 제조 방법 |
| KR100596602B1 (ko) * | 2005-03-30 | 2006-07-04 | 삼성전기주식회사 | 적층 세라믹 콘덴서 및 그 제조 방법 |
| TWM274641U (en) * | 2005-04-01 | 2005-09-01 | Lingsen Precision Ind Ltd | Packaging carrier for integrated circuit |
| JP2007059184A (ja) * | 2005-08-24 | 2007-03-08 | Citizen Electronics Co Ltd | キーシートモジュール |
| US20070152685A1 (en) * | 2006-01-03 | 2007-07-05 | Formfactor, Inc. | A probe array structure and a method of making a probe array structure |
| US7532391B2 (en) * | 2006-01-20 | 2009-05-12 | Sumitomo Electric Industries, Ltd. | Optical amplification module and laser light source designed to suppress photodarkening |
| JP4950500B2 (ja) * | 2006-02-06 | 2012-06-13 | キヤノン株式会社 | プリント配線基板の接合構造 |
| US7520757B2 (en) | 2006-08-11 | 2009-04-21 | Tyco Electronics Corporation | Circuit board having configurable ground link and with coplanar circuit and ground traces |
| US7836587B2 (en) * | 2006-09-21 | 2010-11-23 | Formfactor, Inc. | Method of repairing a contactor apparatus |
| US8120927B2 (en) | 2008-04-07 | 2012-02-21 | Mediatek Inc. | Printed circuit board |
| KR101243837B1 (ko) * | 2009-10-23 | 2013-03-20 | 한국전자통신연구원 | 다층 배선 연결 구조 및 그의 제조 방법 |
-
2010
- 2010-03-08 US US12/719,136 patent/US8476538B2/en not_active Expired - Fee Related
-
2011
- 2011-03-03 WO PCT/US2011/026960 patent/WO2011112409A2/en not_active Ceased
- 2011-03-03 JP JP2012557087A patent/JP6087630B2/ja not_active Expired - Fee Related
- 2011-03-03 KR KR1020127026260A patent/KR101851269B1/ko not_active Expired - Fee Related
- 2011-03-07 TW TW100107534A patent/TWI533775B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130037203A (ko) | 2013-04-15 |
| JP2013522874A (ja) | 2013-06-13 |
| TW201206285A (en) | 2012-02-01 |
| KR101851269B1 (ko) | 2018-04-23 |
| WO2011112409A2 (en) | 2011-09-15 |
| US8476538B2 (en) | 2013-07-02 |
| US20110214910A1 (en) | 2011-09-08 |
| WO2011112409A3 (en) | 2012-01-19 |
| JP6087630B2 (ja) | 2017-03-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI533775B (zh) | 具有訂製層之佈線基材 | |
| US8984748B2 (en) | Singulated semiconductor device separable electrical interconnect | |
| US8988093B2 (en) | Bumped semiconductor wafer or die level electrical interconnect | |
| CN101625375B (zh) | 探针卡及其组装方法 | |
| US8981809B2 (en) | Compliant printed circuit semiconductor tester interface | |
| KR101923760B1 (ko) | 정전기 방전 보호를 위한 수직 절환 포메이션 | |
| US8272124B2 (en) | Anchoring carbon nanotube columns | |
| JP4171513B2 (ja) | コンタクタ、該コンタクタを備えたコンタクトストラクチャ、プローブカード、及び、試験装置 | |
| TWI566351B (zh) | 半導體裝置及其製作方法 | |
| US20010011907A1 (en) | Test interconnect for bumped semiconductor components and method of fabrication | |
| US20070290306A1 (en) | Wiring substrate and manufacturing method thereof, and semiconductor apparatus | |
| KR20010006931A (ko) | 접점 구조물의 패키징 및 상호접속부 | |
| CN101584033A (zh) | 具有柔顺性的微电子组件及其方法 | |
| WO2006071611A1 (en) | Microelectronic package having stacked semiconductor devices and a process for its fabrication | |
| US7097462B2 (en) | Patch substrate for external connection | |
| US20160143139A1 (en) | Electronic component device and method for manufacturing the same | |
| CN101443667A (zh) | 空气桥结构及制造和使用空气桥结构的方法 | |
| TWI585426B (zh) | 電子裝置之基板及包含其之電子裝置 | |
| US20100102422A1 (en) | Semiconductor device | |
| JP2004317162A (ja) | プローブカード、プローブピン及びその製造方法 | |
| CN108305864B (zh) | 端子 | |
| KR100915326B1 (ko) | 전기 검사 장치의 제조 방법 | |
| US9673063B2 (en) | Terminations | |
| TW201828396A (zh) | 新型端子 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |