KR101851269B1 - 맞춤 층들을 갖는 배선 기판 - Google Patents

맞춤 층들을 갖는 배선 기판 Download PDF

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Publication number
KR101851269B1
KR101851269B1 KR1020127026260A KR20127026260A KR101851269B1 KR 101851269 B1 KR101851269 B1 KR 101851269B1 KR 1020127026260 A KR1020127026260 A KR 1020127026260A KR 20127026260 A KR20127026260 A KR 20127026260A KR 101851269 B1 KR101851269 B1 KR 101851269B1
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KR
South Korea
Prior art keywords
traces
layer
insulating material
electrically conductive
electrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020127026260A
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English (en)
Korean (ko)
Other versions
KR20130037203A (ko
Inventor
벤자민 엔. 엘드리지
개탄 엘. 매튜
Original Assignee
폼팩터, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 폼팩터, 인크. filed Critical 폼팩터, 인크.
Publication of KR20130037203A publication Critical patent/KR20130037203A/ko
Application granted granted Critical
Publication of KR101851269B1 publication Critical patent/KR101851269B1/ko
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
    • H05K3/4046—Through-connections; Vertical interconnect access [VIA] connections using auxiliary conductive elements, e.g. metallic spheres, eyelets, pieces of wire
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4647—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer around previously made via studs
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4664—Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/04—Soldering or other types of metallurgic bonding
    • H05K2203/049—Wire bonding
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4007—Surface contacts, e.g. bumps
    • H05K3/4015—Surface contacts, e.g. bumps using auxiliary conductive elements, e.g. pieces of metal foil, metallic spheres
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
KR1020127026260A 2010-03-08 2011-03-03 맞춤 층들을 갖는 배선 기판 Expired - Fee Related KR101851269B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/719,136 US8476538B2 (en) 2010-03-08 2010-03-08 Wiring substrate with customization layers
US12/719,136 2010-03-08
PCT/US2011/026960 WO2011112409A2 (en) 2010-03-08 2011-03-03 Wiring substrate with customization layers

Publications (2)

Publication Number Publication Date
KR20130037203A KR20130037203A (ko) 2013-04-15
KR101851269B1 true KR101851269B1 (ko) 2018-04-23

Family

ID=44530323

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127026260A Expired - Fee Related KR101851269B1 (ko) 2010-03-08 2011-03-03 맞춤 층들을 갖는 배선 기판

Country Status (5)

Country Link
US (1) US8476538B2 (enExample)
JP (1) JP6087630B2 (enExample)
KR (1) KR101851269B1 (enExample)
TW (1) TWI533775B (enExample)
WO (1) WO2011112409A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9484973B1 (en) * 2010-08-09 2016-11-01 Qorvo Us, Inc. Voltage equalization for stacked FETs in RF switches
TW201228507A (en) * 2010-12-17 2012-07-01 Hon Hai Prec Ind Co Ltd Printed circuit board
TW201347124A (zh) * 2012-05-07 2013-11-16 矽品精密工業股份有限公司 半導體封裝件及其製法
JP2014216123A (ja) * 2013-04-24 2014-11-17 タイコエレクトロニクスジャパン合同会社 電気コネクタ組立体及びその実装構造
US9431759B2 (en) 2014-10-20 2016-08-30 HGST Netherlands B.V. Feedthrough connector for hermetically sealed electronic devices
US10650181B2 (en) * 2017-09-21 2020-05-12 Nokia Solutions And Networks Oy Spatial location of vias in a printed circuit board
JP7069222B2 (ja) * 2018-01-24 2022-05-17 京セラ株式会社 配線基板、電子装置及び電子モジュール
US10790307B2 (en) 2018-11-27 2020-09-29 Qorvo Us, Inc. Switch branch structure
US12016118B2 (en) * 2020-03-02 2024-06-18 Kuprion Inc. Ceramic-based circuit board assemblies formed using metal nanoparticles
CN115248339A (zh) * 2021-04-27 2022-10-28 旺矽科技股份有限公司 用于探针卡的探针安装电路板及探针装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003152133A (ja) * 2001-11-12 2003-05-23 Toppan Printing Co Ltd 半導体パッケージ用基板及びその製造方法
JP2006013223A (ja) * 2004-06-28 2006-01-12 Seiko Epson Corp 配線構造
US20070074903A1 (en) * 2005-08-24 2007-04-05 Citizens Electronic Co., Ltd. Key sheet module

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4771537A (en) * 1985-12-20 1988-09-20 Olin Corporation Method of joining metallic components
US5229549A (en) * 1989-11-13 1993-07-20 Sumitomo Electric Industries, Ltd. Ceramic circuit board and a method of manufacturing the ceramic circuit board
US5310965A (en) * 1991-08-28 1994-05-10 Nec Corporation Multi-level wiring structure having an organic interlayer insulating film
US6295729B1 (en) * 1992-10-19 2001-10-02 International Business Machines Corporation Angled flying lead wire bonding process
US5371654A (en) 1992-10-19 1994-12-06 International Business Machines Corporation Three dimensional high performance interconnection package
US6064213A (en) 1993-11-16 2000-05-16 Formfactor, Inc. Wafer-level burn-in and test
US7282945B1 (en) * 1996-09-13 2007-10-16 International Business Machines Corporation Wafer scale high density probe assembly, apparatus for use thereof and methods of fabrication thereof
US5828226A (en) 1996-11-06 1998-10-27 Cerprobe Corporation Probe card assembly for high density integrated circuits
JP3192619B2 (ja) * 1997-10-07 2001-07-30 日本特殊陶業株式会社 配線基板及びその製造方法
JP3188876B2 (ja) 1997-12-29 2001-07-16 インターナショナル・ビジネス・マシーンズ・コーポレ−ション プロダクト・チップをテストする方法、テスト・ヘッド及びテスト装置
JPH11317383A (ja) * 1998-05-06 1999-11-16 Dexter Kk 樹脂で封止した半導体チップの分断方法
US6372999B1 (en) 1999-04-20 2002-04-16 Trw Inc. Multilayer wiring board and multilayer wiring package
JP3865115B2 (ja) * 1999-09-13 2007-01-10 Ｈｏｙａ株式会社 多層配線基板及びその製造方法、並びに該多層配線基板を有するウエハ一括コンタクトボード
US6309912B1 (en) 2000-06-20 2001-10-30 Motorola, Inc. Method of interconnecting an embedded integrated circuit
US7480988B2 (en) * 2001-03-30 2009-01-27 Second Sight Medical Products, Inc. Method and apparatus for providing hermetic electrical feedthrough
US6729019B2 (en) 2001-07-11 2004-05-04 Formfactor, Inc. Method of manufacturing a probe card
US6821625B2 (en) * 2001-09-27 2004-11-23 International Business Machines Corporation Thermal spreader using thermal conduits
US6857880B2 (en) 2001-11-09 2005-02-22 Tomonari Ohtsuki Electrical connector
US6831371B1 (en) 2002-03-16 2004-12-14 Amkor Technology, Inc. Integrated circuit substrate having embedded wire conductors and method therefor
JP3925283B2 (ja) * 2002-04-16 2007-06-06 セイコーエプソン株式会社 電子デバイスの製造方法、電子機器の製造方法
US6739879B2 (en) 2002-07-03 2004-05-25 Intel Corporation Ball grid array circuit board jumper
US7047638B2 (en) 2002-07-24 2006-05-23 Formfactor, Inc Method of making microelectronic spring contact array
US6920689B2 (en) 2002-12-06 2005-07-26 Formfactor, Inc. Method for making a socket to perform testing on integrated circuits
US7682970B2 (en) * 2003-07-16 2010-03-23 The Regents Of The University Of California Maskless nanofabrication of electronic components
US20050108875A1 (en) 2003-11-26 2005-05-26 Mathieu Gaetan L. Methods for making vertical electric feed through structures usable to form removable substrate tiles in a wafer test system
US7024763B2 (en) 2003-11-26 2006-04-11 Formfactor, Inc. Methods for making plated through holes usable as interconnection wire or probe attachments
US7375978B2 (en) 2003-12-23 2008-05-20 Intel Corporation Method and apparatus for trace shielding and routing on a substrate
KR20050065038A (ko) * 2003-12-24 2005-06-29 삼성전기주식회사 비수직 비아가 구비된 인쇄회로기판 및 패키지
JP2005327986A (ja) * 2004-05-17 2005-11-24 Seiko Epson Corp クロスオーバ配線構造およびその電子回路装置
JP4441325B2 (ja) * 2004-05-18 2010-03-31 新光電気工業株式会社 多層配線の形成方法および多層配線基板の製造方法
KR100663942B1 (ko) * 2005-03-24 2007-01-02 삼성전기주식회사 적층 세라믹 콘덴서 및 그 제조 방법
KR100596602B1 (ko) * 2005-03-30 2006-07-04 삼성전기주식회사 적층 세라믹 콘덴서 및 그 제조 방법
TWM274641U (en) 2005-04-01 2005-09-01 Lingsen Precision Ind Ltd Packaging carrier for integrated circuit
US20070152685A1 (en) 2006-01-03 2007-07-05 Formfactor, Inc. A probe array structure and a method of making a probe array structure
US7532391B2 (en) * 2006-01-20 2009-05-12 Sumitomo Electric Industries, Ltd. Optical amplification module and laser light source designed to suppress photodarkening
JP4950500B2 (ja) 2006-02-06 2012-06-13 キヤノン株式会社 プリント配線基板の接合構造
US7520757B2 (en) 2006-08-11 2009-04-21 Tyco Electronics Corporation Circuit board having configurable ground link and with coplanar circuit and ground traces
US7836587B2 (en) 2006-09-21 2010-11-23 Formfactor, Inc. Method of repairing a contactor apparatus
US8120927B2 (en) 2008-04-07 2012-02-21 Mediatek Inc. Printed circuit board
KR101243837B1 (ko) * 2009-10-23 2013-03-20 한국전자통신연구원 다층 배선 연결 구조 및 그의 제조 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003152133A (ja) * 2001-11-12 2003-05-23 Toppan Printing Co Ltd 半導体パッケージ用基板及びその製造方法
JP2006013223A (ja) * 2004-06-28 2006-01-12 Seiko Epson Corp 配線構造
US20070074903A1 (en) * 2005-08-24 2007-04-05 Citizens Electronic Co., Ltd. Key sheet module

Also Published As

Publication number Publication date
WO2011112409A2 (en) 2011-09-15
TWI533775B (zh) 2016-05-11
US20110214910A1 (en) 2011-09-08
US8476538B2 (en) 2013-07-02
WO2011112409A3 (en) 2012-01-19
KR20130037203A (ko) 2013-04-15
JP6087630B2 (ja) 2017-03-01
JP2013522874A (ja) 2013-06-13
TW201206285A (en) 2012-02-01

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