TWI529792B - Retainer unit and scribing device - Google Patents

Description

Holder unit and scribing device

The present invention relates to a holder unit for forming a scribe line on a substrate of a brittle material such as a glass substrate, a ceramic substrate or a ruthenium substrate, and a scribe device having the holder unit.

In the manufacturing steps of a flat panel display panel such as a liquid crystal display panel or an organic electroluminescence (EL) panel or a solar cell, a step of dividing a brittle material substrate such as a mother glass substrate is provided. In the breaking step, a scribing device as described in Patent Document 1 is usually used. Further, in the breaking step, the scribing wheel is placed on the surface of the brittle material substrate while the load of the scribing wheel provided on the scribing device is suitable for various conditions such as the material and thickness of the brittle material substrate. Rolling to form a scribe line, the brittle material substrate is separated along the scribe line by applying a specific force to the brittle material substrate, thereby manufacturing a single panel or various substrates.

For example, as shown in the following Patent Document 1, the scribing device is formed such that the rotating shaft portion of the holder is inserted into the bearing, and the holder is rotatable as the scribing head moves.

The bearing in which the rotating shaft portion of the holder is inserted will be described with reference to Fig. 6 . Further, the bearing shown in Fig. 6 is a commercially available bearing called a dustproof type, Fig. 6(a) shows a front view of the bearing 50, and Fig. 6(b) shows a cross-sectional view taken along line A-A of the bearing 50. The bearing 50 includes a large outer ring 51 on the outer side, a small inner ring 52 on the inner side, a plurality of rotating bodies 53 disposed between the outer ring 51 and the inner ring 52, and a foreign body 51 for preventing foreign matter from entering the outer ring 51 and the inner ring 51. Ring 52 and so on Do not install the sealing member 54.

At this time, the bearing has the following type: as shown by the area surrounded by the broken line in Fig. 6(b), the type of the gap between the end portion of the inner ring 52 side of the sealing member 54 and the side of the inner ring 52; and the seal The end of the member 54 on the inner ring 52 side is of a type in contact with the side of the inner ring 52.

In the type in which a gap is provided between the side of the inner ring 52 side of the sealing member 54 and the side surface of the inner ring 52 as shown in Fig. 6(b), the friction caused by the sealing member 54 is less, and it is suitable for high-speed rotation. Time. On the other hand, in the type in which the side surface on the inner ring 52 side of the sealing member 54 is in contact with the side surface of the inner ring 52, dustproofness and water repellency are high, and therefore it can be used separately depending on the application.

Further, in the process of increasing the speed of the breaking step as the size of the brittle material substrate is gradually increased, the side surface and the inner side of the inner ring 52 side of the sealing member 54 shown in Fig. 6(b) are often used in the scribing device. A bearing of the type of gap is provided between the sides of the ring 52.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2011-225001

[Patent Document 2] International Publication WO2004/007164

When such a scribing device is used to scribe or break a brittle material substrate such as glass, there is a problem in that foreign matter such as minute glass swarf enters from the gap existing between the inner ring 52 and the sealing member 54, and is generated. The rotation of the bearing is poor, and the movement of the holder is poor.

Here, the scribing apparatus includes a scribing apparatus for more efficiently performing a step of dividing the bonded substrate. For example, as shown in the above Patent Document 2, a scribing head is also provided on the lower side of the brittle material substrate. Further, the problem that the rotation of the bearing is caused by the foreign matter entering from the gap existing between the inner ring 52 and the sealing member 54 is particularly common in the scribing head on the lower side of the scribing device on which the scribing head is disposed.

Therefore, the present inventors have conducted various studies in order to eliminate this problem, and as a result, it has been considered that a dustproof member that blocks a gap existing in a bearing is disposed on a bearing of a lower scribing head in a scribing device in which a scribing head is disposed above and below. The above problems can be eliminated, thereby completing the present invention.

That is, the present invention has been made to solve the above problems, and it is an object of the invention to provide a scribing head which is provided on the lower side of a scribing device in which a scribing head is disposed above and below, and which prevents rotation of a foreign object from entering the inside of the bearing. Line device.

In order to achieve the above object, a first aspect of the present invention is a holder unit, comprising: a holder including a wheel holding portion for holding a scribing wheel for scribing a brittle material substrate, and a rotating shaft And a bearing mounted on the rotating shaft portion; the bearing includes: an outer ring; an inner ring located inside the outer ring; and a plurality of rotating bodies disposed between the outer ring and the inner ring; a sealing member disposed to cover the outer ring and the inner ring and not in direct contact with the outer ring or the inner ring; and on the wheel holding portion side of the bearing, the outer ring or the outer ring is blocked a dustproof member between the inner ring and the sealing member.

According to the first aspect of the present invention, in the holder unit, the dustproof member is disposed on the wheel holding portion side of the bearing so as to block the gap formed between the inner ring or the outer ring of the bearing and the sealing member. The simple structure makes it difficult for foreign matter such as glass swarf generated when the brittle material substrate is cut off to enter the bearing.

Further, a second aspect of the present invention is a scribing apparatus characterized in that it is provided with a scribing head including a holder unit, and the holder unit includes a scribing wheel for scribing a brittle material substrate. a holder; the holder includes a wheel holding portion for holding the scribing wheel; and a rotating shaft portion; and a bearing attached to the rotating shaft portion; the bearing includes: an outer ring; and an inner ring located at the outer ring a plurality of rotating bodies disposed between the outer ring and the inner ring; and a sealing member covering the outer ring and the inner ring and not in direct contact with the outer ring or the inner ring And a dustproof member that blocks a gap between the outer ring or the inner ring and the sealing member is disposed on the wheel holding portion side of the bearing.

According to the second aspect of the present invention, in the scribing device, the dust-proof member is disposed on the wheel holding portion side of the bearing so as to block the gap formed between the inner ring or the outer ring of the bearing and the sealing member. The simple structure makes it difficult for foreign matter such as glass swarf generated when the brittle material substrate is cut off to enter the bearing.

Further, a third aspect of the present invention is a holder unit, comprising: a holder for holding a line for scribing a substrate of a brittle material; a retainer joint including a cutter wheel holder holding portion and a rotating shaft portion for holding the holder; and a bearing attached to the rotating shaft portion; the bearing includes: an outer ring; an inner ring located at the above An inner side of the outer ring; a plurality of rotating bodies disposed between the outer ring and the inner ring; and a sealing member covering the outer ring and the inner ring and not directly adjacent to the outer ring or the inner ring The contact holder is disposed so as to be disposed on the cutter wheel holder holding portion side of the bearing, and a dustproof member that blocks a gap between the outer ring or the inner ring and the sealing member is disposed.

According to the third aspect of the present invention, in the holder unit, the dustproof member is disposed on the cutter wheel holder holding portion side of the bearing so as to block the gap formed between the inner ring or the outer ring of the bearing and the sealing member. Therefore, it is possible to easily introduce foreign matter such as glass swarf generated when the brittle material substrate is cut off at a low cost into the bearing. Further, since the holder for holding the scribing wheel is detachably held by the holder holding portion of the holder joint, the replacement of the scribing wheel as a consumable can be easily performed by attaching and detaching the holder.

Further, a fourth aspect of the present invention is a scribing apparatus characterized in that it is provided with a scribing head including a holder unit, and the holder unit includes a scribing wheel for drawing a brittle material substrate. a holder for holding the scribing wheel; a holder joint including a cutter holder holding portion for holding the holder, and a rotating shaft portion; and a bearing attached to the rotating shaft portion; the bearing Including: an outer ring; an inner ring located on the inner side of the outer ring; a plurality of rotating bodies disposed between the outer ring and the inner ring; and a sealing member disposed to cover the outer ring and the inner ring and not in direct contact with the outer ring or the inner ring; A dustproof member that blocks a gap between the outer ring or the inner ring and the sealing member is disposed on the cutter holder holding portion side of the bearing.

According to the fourth aspect of the present invention, in the scribing device, the dustproof member is disposed on the cutter wheel holder holding portion side of the bearing so as to block the gap formed between the inner ring or the outer ring of the bearing and the sealing member. Therefore, it is possible to easily introduce foreign matter such as glass swarf generated when the brittle material substrate is cut off at a low cost into the bearing. Further, since the holder for holding the scribing wheel is detachably held by the holder holding portion of the holder joint, the replacement of the scribing wheel as a consumable can be easily performed by attaching and detaching the holder.

Hereinafter, embodiments of the present invention will be described using the drawings. However, the embodiment shown below shows an example of a scribing device for embodying the technical idea of the present invention, and is not intended to be specific to the scribing device, and the present invention is also applicable to the scope of the patent application. Other embodiments are included.

[Embodiment 1]

Fig. 1 is a schematic view showing a scribing device 1 according to an embodiment of the present invention. The scribing device 1 includes a support portion (not shown) that supports a brittle material substrate 2 such as a glass bonded substrate such as a liquid crystal panel. Further, a scribing head 10a is movably provided on the lower surface side of the brittle material substrate 2, on the upper surface The side is movably provided with a scribing head 10b.

The scribing head 10a includes a body 11 and a holder unit 12 mounted to the body 11. Further, details regarding the holder unit 12 will be described below. Further, since the scribing head 10b has the same configuration as the scribing head 10a, the description thereof is omitted.

Further, although not specifically illustrated, the scribing device 1 includes an elevating mechanism for bringing the scribing heads 10a and 10b closer to or away from the brittle material substrate 2, and moving the scribing heads 10a and 10b in the breaking step. Mobile agency. Further, the elevating mechanism and the moving mechanism may be provided integrally with the scribing heads 10a and 10b, or may be provided separately.

Further, the scribing device 1 includes an image recognition device such as a CCD (Charge Coupled Device) camera (not shown), and the image recognition device recognizes the alignment mark on the brittle material substrate 2 by the image recognition device. The position adjustment of the brittle material substrate 2 is performed.

Next, the holder unit 12 will be described using FIG. The holder unit 12 includes a cylindrical holder 20, a scribing wheel 30, two bearings 50a, 50b, and a cylindrical spacer 40. Further, Fig. 2 shows a front view of the holder unit 12, and shows a cross-sectional view of the bearings 50a, 50b and the spacer 40.

At the front end of the holder 20, the scribing wheel 30 is rotatably held, and the cylindrical portion of the holder 20 is provided with a spacer for retaining the holder 20 so as to be rotatably held by the cylindrical spacer 40. 1. Second bearing 50a, 50b.

More specifically, the holder 20 includes a wheel holding portion 21 and a rotating shaft portion 22 connected to the wheel holding portion 21. Further, the front end side of the cylindrical wheel holding portion 21 has a triangular shape, and the front end of the triangular shape is formed to be inserted. The groove 23 of the scribing wheel 30. In the groove 23, a pin hole 24 for fixing the scribing wheel 30 is formed. Further, a pin (not shown) is inserted into the pin hole 24, and the scribing wheel 30 is rotatably attached.

The scribing wheel 30 is a disc-shaped member having a thickness of about 0.65 mm formed of, for example, sintered diamond, and has a through hole at the center. Further, the scribing wheel 30 has a V-shaped blade that forms a ridge line along the outer peripheral portion. The inclined faces on both sides of the ridge line generally intersect each other at an angle of 90 to 165°, and the inclined faces form ridge lines. Further, in the wheel holding portion 21, the pin shutter 25 is integrally formed by the screw 26 to cover the pin hole 24 from the outside.

The cylindrical shaft portion 22 of the holder 20 is inserted into the openings of the bearings 50a, 50b and the spacer 40. Further, the lower end of the rotating shaft portion 22 is fixed to the bearing 50b by a screw or the like.

Here, the replacement operation of the scribing wheel 30 will be described. Furthermore, the scribing wheel 30 is a consumable item and must be replaced periodically. Further, since the scribing wheel 30 is very small, it is difficult to directly perform the replacement work in a state where the holder unit 12 is attached to the main body 11 of the scribing head 10a. Therefore, the holder unit 12 is usually first unloaded from the main body 11, and secondly, The scribing wheel 30 is removed from the holder 20 and replaced.

The bearings 50a, 50b are the same as those used in the previously known scribing apparatus described with reference to Fig. 6, and therefore, the same reference numerals will be used. The bearing 50a includes a larger outer outer ring 51, a smaller inner inner ring 52, a plurality of rotating bodies 53 disposed between the outer ring 51 and the inner ring 52, and a retainer for holding the rotating body 53. (not shown) and attached to the upper side and the lower side of the rotating body 53 in order to prevent foreign matter from entering between the outer ring 51 and the inner ring 52. Side sealing member 54.

At this time, a locking groove 55 having a U-shaped cross section is formed on the inner circumferential surface side of the outer ring 51 of the bearing 50a, and the end portion of the sealing member 54 on the outer ring 51 side is bent into a U shape. Then, the bending portion of the sealing member 54 is fitted into the locking groove 55 by the elastic force of the bent portion of the sealing member 54, and the sealing member 54 is fixed. On the other hand, at this time, the bearing 50a is of a type in which a gap is formed between the end portion of the sealing member 54 on the inner ring 52 side and the side surface of the inner ring 52.

In the type in which the side surface of the inner ring 52 side of the sealing member 54 is provided with a gap between the side surface of the inner ring 52 and the side surface of the inner ring 52, the friction caused by the sealing member 54 is less, and it is suitable for the case where high-speed rotation is required. A bearing 50a of this type is also used in 1. Further, although the bearing 50b has a slight difference in shape other than the outer ring 51, it is also substantially the same as the bearing 50a, and thus the description thereof will be omitted.

When the bearings 50a and 50b are used in the holder unit 12, as described above, when the brittle material substrate 2 such as glass is scribed or broken, there is a slight foreign matter such as glass dust from the inner ring 52 and the seal. The gap existing between the members 54 enters, resulting in a poor rotation of the bearing. This problem is apt to occur in the holder unit 12 of the lower side scribing head 10a, and is particularly likely to occur on the upper surface side of the bearing 50a on the wheel holding portion 21 side.

Therefore, in the present embodiment, the dust-proof member 60 is disposed above the bearing 50a so as to block the gap between the inner ring 52 located on the upper surface side of the bearing 50a and the sealing member 54. Therefore, in the breaking step of the brittle material substrate 2, even if the foreign matter falls onto the bearing 50a, the dustproof member 60 can be made to prevent the foreign matter from entering the gap existing between the inner ring 52 and the sealing member 54.

The dust-proof member 60 is shaped like a ring of the bearing 50a to form a ring. shape. Further, it is preferable that the frictional resistance of the surface is as low as possible, and it is formed of a fluororesin, a ruthenium rubber, a metal such as aluminum or stainless steel, or the like. Further, it is possible to form not only a single layer material but also a plurality of materials having different properties. Further, the end portion on the outer side of the dust-proof member 60 is formed so as not to reach the outer ring 51 so as not to affect the rotation of the bearing 50a as much as possible.

Further, in terms of preventing entry of foreign matter, the dust-proof member 60 is preferably in close contact with the upper surface of the bearing 50a as much as possible, and thus can be attached to the upper surface of the inner ring 52. Alternatively, as shown in FIG. 2, on the lower side of the wheel holding portion 21, a protruding portion 27 is provided along the circumference to form a state in which the lower end of the protruding portion 27 is in contact with the surface of the dustproof member 60, so that the dustproof member 60 and the wheel are held. No gap is created between the portions 21. At this time, in consideration of the influence on the rotation, the region where the lower end of the protruding portion 27 is in contact with the surface of the dustproof member 60 is preferably as small as possible. Therefore, as shown in FIG. 2, the lower end of the protruding portion 27 has a structure including a segment. Further, the section of the protruding portion 27 that is in contact with the dust-proof member 60 is disposed in a region substantially the same as the upper surface of the inner ring 52 of the bearing 50a. Further, by providing the protruding portion 27, foreign matter such as glass swarf is more difficult to enter the upper surface of the bearing 50a. Further, the protruding portion 27 does not need to protrude over the entire circumference of the wheel holding portion 21, and may be configured to protrude at a plurality of locations on the circumference. Further, the front end of the protruding portion 27 may be bent downward to regulate the movement of the dust-proof member 60 in the lateral direction.

By disposing the dustproof member 60 as described above, it is possible to prevent foreign matter from entering the gap existing between the inner ring 52 and the sealing member 54. In particular, by adding the dustproof member 60 to the conventional scribing device 1, the foreign matter can be prevented from entering, and therefore the number of parts can be minimized. Also, in particular, there is no need for the scribing device 1 The other configuration is largely changed, so that the manufacturing cost of the device can be prevented from increasing.

Further, the dust-proof member 60 may be disposed not only on the bearing 50a on the upper side of the holder unit 12 of the lower scribing head 10a but also on the lower side of the holder of the upper-side scribing head 10b. side. Further, the upper scribing head 10b has a shape in which the scribing head 10a shown in Fig. 2 is turned upside down, and the bearing on the lower side becomes the bearing 50a. Further, it can also be used in a scribing head of a scribing device in which the scribing head is disposed only on the upper side or only on the lower side.

[Embodiment 2]

Similarly to the scribing device 1 of the first embodiment, the scribing device according to the embodiment of the present invention includes a scribing head on the lower surface side and the upper surface side of the brittle material substrate. Further, a holder unit is attached to each of the bodies of the scribing heads. The configuration of the holder unit 120 shown in Fig. 3 is different from that of the holder unit 12 of the first embodiment. The same components as those of the holder unit 12 of the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

The holder unit 120 includes a scribing wheel 300, a holder 230 that rotatably holds the scribing wheel 300, and a cylindrical holder joint 200 including two bearings 50a, 50b and a cylindrical spacer 40. Further, Fig. 3 shows a front view of the holder unit 120, and shows a cross-sectional view of the bearings 50a, 50b and the spacer 40.

A holder 230 is attached to the front end of the holder joint 200, and a scribing wheel 300 is rotatably held at a front end of the holder 230, and a cylindrical portion of the holder joint 200 is interposed between the cylindrical spacers 40. Providing the first and second bearings 50a for holding the holder joint 200 in a rotatable manner, 50b.

More specifically, the holder joint 200 includes a cutter holder holder 210 and a rotary shaft portion 220 connected to the cutter holder holding portion 210. Further, the cylindrical cutter wheel holder holding portion 210 is formed with a circular opening 240, and a magnet 250 is embedded at the bottom of the opening 240.

The holder 230 is a substantially cylindrical member, and flat portions 231a and 231b are provided on the front end side thereof. Further, in Fig. 3, an enlarged view of the front end side of the holder 230 indicates an enlarged view when viewed from the lateral direction. Further, a groove 232 for holding the scribing wheel 300 is formed between the flat portion 231a and the flat portion 231b. Moreover, the through holes 233 for fixing the scribing wheel 300 are formed in the flat portions 231a and 231b, and the pin 234 is inserted into the through hole 233, and the scribing wheel 300 is rotatably attached. Further, a mounting portion 235 for positioning is provided on the lower end side of the holder 230. The mounting portion 235 includes an inclined portion and a flat portion.

Further, the cutter holder holding portion 210 is attached with a parallel pin 260 penetrating the inside of the opening 240, and the parallel pin 260 is in contact with the inclined portion of the mounting portion 235 constituting the holder 230, and the holder 230 is positioned.

Similarly to the first embodiment, the scribing wheel 300 includes a disk-shaped member having a thickness of about 0.65 mm formed of, for example, sintered diamond. Further, in the same manner as in the first embodiment, the cylindrical rotating shaft portion 220 of the holder joint 200 is inserted into the openings of the cylinders of the bearings 50a and 50b and the spacer 40.

Here, a method of attaching the holder 230 to the holder joint 200 will be described. As shown in FIG. 3, the mounting portion 235 side of the holder 230 is inserted into the opening 240 of the cutter holder holder 210. At this time, the lower end side of the holder 230 is attracted by the magnet 250, and the inclined portion of the mounting portion 235 is connected to the parallel pin 260. Touch to locate. Then, the holder 230 is brought into contact with the magnet to fix the holder 230. Conversely, when the holder 230 is detached from the holder joint 200, it can be easily removed only by pulling out the holder 230.

Similarly to the first embodiment, the bearings 50a and 50b are provided with a gap between the inner ring 52 side of the sealing member 54 and the side surface of the inner ring 52. Further, since the bearings 50a and 50b are used in the holder joint 200, foreign matter such as minute glass dust enters from the gap existing between the inner ring 52 and the sealing member 54 in the breaking step of the brittle material substrate 2, The resulting bearing is poorly rotated.

Therefore, in the second embodiment, the dust-proof member 600 is also disposed above the bearing 50a so as to block the gap. Therefore, in the breaking step of the brittle material substrate 2, even if the foreign matter falls onto the bearing 50a, the dustproof member 600 can be made difficult to enter the gap existing between the inner ring 52 and the sealing member 54.

The dust-proof member 600 also has a circular ring shape in accordance with the annular shape of the bearing 50a. Further, it is preferable that the frictional resistance of the surface is as low as possible, and it is formed of a fluororesin, a ruthenium rubber, a metal such as aluminum or stainless steel, or the like.

Further, in terms of preventing entry of foreign matter, the dust-preventing member 600 is preferably adhered to the upper surface of the bearing 50a as much as possible, and thus can be attached to the upper surface of the inner ring 52. Alternatively, as shown in FIG. 3, on the lower side of the cutter holder holder 210, a projection 270 may be circumferentially provided to form a state in which the lower end of the projection 270 is in contact with the surface of the dustproof member 600, and the dustproof member is provided. There is no gap between the 600 and the cutter wheel holder holding portion 210. At this time, the lower end of the protruding portion 270 has a structure including a segment as in the first embodiment. Moreover, the section of the protruding portion 270 that is in contact with the dustproof member 600 is disposed. It is substantially the same area as the upper surface of the inner ring 52 of the bearing 50a.

By disposing the dust-proof member 600 as described above, it is possible to prevent foreign matter from entering the gap existing between the inner ring 52 and the sealing member 54, and only the dust-proof member 600 is added. Therefore, the number of parts can be minimized. Further, in particular, it is not necessary to greatly change the other configuration of the scribing device 1, and it is also possible to prevent an increase in the manufacturing cost of the device.

Further, in the second embodiment, when the scribing wheel 300 is replaced, it is not necessary to remove the holder unit as a whole from the scribing head, and the holder 230 can be pulled out from the cutter holder holder 210. When the 230 is replaced, in the case of such a scribing device, the replacement of the scribing wheel 300 is facilitated. On the other hand, since the holder joint 200 is not required to be detached from the scribing head, the surface of the bearing 50a is performed. Since the chance of cleaning is also reduced, the effect obtained by arranging the dust-proof member 600 at the position where the gap of the bearing 50a is blocked is further increased.

Further, similarly to the first embodiment, the dust-preventing member 600 can be disposed not only on the bearing 50a on the upper side of the holder joint 200 of the lower scribing head but also on the holder of the upper-side scribing head. Under the side of the bearing.

[Embodiment 3]

Next, the third embodiment will be described. The third embodiment is a holder unit 12a obtained by modifying a part of the holder unit 12 described in the first embodiment. In the same manner as the holder unit 12, the same components as those of the holder unit 12 are denoted by the same reference numerals, and description thereof will be omitted. Fig. 4 is a front view showing the holder unit 12a of the third embodiment, and showing sectional views of the bearings 50a and 50b and the spacer 40.

The holder unit 12a differs from the holder unit 12 in that a cylindrical mask 28 is attached to the outer circumference of the cylindrical portion of the wheel holding portion 21. The mask 28 is a member formed of a metal such as aluminum or a resin, and has a size such as to cover the entire upper surface of the bearing 50a. By using the holder unit 12a, the gap between the body 11 and the holder unit 12a can be made smaller than in the case of using the holder unit 12 without the mask 28. Therefore, the mask 28 can be used to block most of the fallen foreign matter, so that the foreign matter can be further reduced toward the bearing 50a side.

The mask 28 is inserted from the front end side of the holder 20 holding the scribing wheel 30, and is attached to the holder by engaging the inner peripheral side of the mask 28 with the protruding portion 27 provided on the wheel holding portion 21 or the like. 20 on. Therefore, the removal of the mask 28 can also be easily performed.

[Embodiment 4]

Next, the fourth embodiment will be described. The fourth embodiment is a holder unit 120a obtained by partially modifying the holder unit 120 described in the second embodiment. In the same manner as the holder unit 120, the same components as those of the holder unit 120 are denoted by the same reference numerals, and description thereof will be omitted. Fig. 5 is a front view showing the holder unit 120a of the fourth embodiment, and showing a cross-sectional view of the bearings 50a and 50b and the spacer 40.

The holder unit 120a is different from the holder unit 120 in that a cylindrical mask 280 is attached to the outer circumference of the cylindrical portion of the cutter holder holder 210. Similarly to the mask of the third embodiment, the mask 280 is a member formed of a metal such as aluminum or a resin, and has a gap such as covering the entire upper surface of the bearing 50a and substantially blocking the gap with the scribing head body 11. size.

The mask 280 is inserted from the front end side of the holder joint 200, and is attached to the holder 20 by engaging the inner peripheral side of the mask 280 with the protruding portion 270 or the like provided in the cutter holder holding portion 210. Further, the screw 290 is attached to the side surface of the cutter holder holding portion 210 via a screw hole, and the movement of the shield 280 to the upper side is regulated by the attachment of the screw 290. Therefore, in the use of the scribing device, the mask 280 can be reliably prevented from falling off, and when the mask 280 is removed, the cover can be easily removed by removing the screw 290.

Further, in the first embodiment, the second embodiment, the third embodiment, and the fourth embodiment, the holder unit includes the two bearings 50a and 50b. However, the bearing unit may include one bearing or may have more bearings. In this case, the dustproof member may be disposed on the upper side of the uppermost bearing of the holder unit mounted on the lower scribing head.

1‧‧‧ scribe device

2‧‧‧Battery substrate

10a‧‧‧Drawing head

10b‧‧‧Drawing head

11‧‧‧Ontology

12‧‧‧Holding unit

12a‧‧‧Holding unit

20‧‧‧Holding

21‧‧‧ Wheelkeeping Department

22‧‧‧Rotary shaft

23‧‧‧ slot

24‧‧ ‧ pinhole

25‧‧‧ pin shield

26‧‧‧ screws

27‧‧‧Protruding

28‧‧‧ mask

30‧‧‧marking wheel

40‧‧‧ spacers

50‧‧‧ bearing

50a‧‧‧ bearing

50b‧‧‧ bearing

51‧‧‧Outer Ring

52‧‧‧ Inner Ring

53‧‧‧ rotating body

54‧‧‧ Sealing members

55‧‧‧ card slot

60‧‧‧Dust-proof components

120‧‧‧Holding unit

120a‧‧‧Holding unit

200‧‧‧Holding connector

210‧‧‧Cutter wheel holder retention unit

220‧‧‧Rotary shaft

230‧‧‧Holding

231a‧‧‧flat

231b‧‧‧flat

232‧‧‧ slots

233‧‧‧through holes

234‧‧ ‧ sales

235‧‧‧Installation Department

240‧‧‧ openings

250‧‧‧ magnet

260‧‧‧ parallel sales

270‧‧‧ protruding parts

280‧‧‧ mask

290‧‧‧ screws

300‧‧‧marking wheel

600‧‧‧Dust-proof components

Fig. 1 is a schematic view showing a scribing apparatus of the first embodiment.

Fig. 2 is a front view of the holder unit of the first embodiment.

Fig. 3 is a front view of the holder unit of the second embodiment.

Fig. 4 is a front view of the holder unit of the third embodiment.

Fig. 5 is a front view of the holder unit of the fourth embodiment.

Figure 6 (a), (b) is a front view and a cross-sectional view of the bearing.

12‧‧‧Holding unit

20‧‧‧Holding

21‧‧‧ Wheelkeeping Department

22‧‧‧Rotary shaft

23‧‧‧ slot

24‧‧ ‧ pinhole

25‧‧‧ pin shield

26‧‧‧ screws

27‧‧‧Protruding

30‧‧‧marking wheel

40‧‧‧ spacers

50a‧‧‧ bearing

50b‧‧‧ bearing

51‧‧‧Outer Ring

52‧‧‧ Inner Ring

53‧‧‧ rotating body

54‧‧‧ Sealing members

55‧‧‧ card slot

60‧‧‧Dust-proof components

Claims (10)

A holder unit, comprising: a holder comprising a wheel holding portion for holding a scribing wheel for scribing a brittle material substrate; and a rotating shaft portion; and a bearing mounted to the rotating shaft portion; The bearing includes: an outer ring; an inner ring located inside the outer ring; a plurality of rotating bodies disposed between the outer ring and the inner ring; and a sealing member covering the outer ring and the inner ring And not disposed in direct contact with the outer ring or the inner ring; and a dust-proof member that blocks a gap between the outer ring or the inner ring and the sealing member is disposed on the wheel holding portion side of the bearing; The dust-proof member is fixed to the inner ring of the bearing and an outer end portion thereof is formed so as not to reach the outer ring. The holder unit of claim 1, wherein the wheel holding portion is disposed in a state in which an end portion on the side of the rotating shaft portion is in contact with the dustproof member. A scribing device characterized in that it is provided with a scribing head including a holder unit, the holder unit comprising: a scribing wheel for scribing a brittle material substrate; and a holder for containing a wheel holding portion of the scribing wheel and a rotating shaft portion; and a bearing attached to the rotating shaft portion; The bearing includes: an outer ring; an inner ring located inside the outer ring; a plurality of rotating bodies disposed between the outer ring and the inner ring; and a sealing member covering the outer ring and the inner ring And not disposed in direct contact with the outer ring or the inner ring; and a dust-proof member that blocks a gap between the outer ring or the inner ring and the sealing member is disposed on the wheel holding portion side of the bearing; The dust-proof member is fixed to the inner ring of the bearing and an outer end portion thereof is formed so as not to reach the outer ring. The scribe line device according to claim 3, wherein the wheel holding portion is disposed in a state in which an end portion on the side of the rotating shaft portion is in contact with the dustproof member. The scribing device of claim 3 or 4, wherein the scribing head is disposed above the substrate of the brittle material. A holder unit, comprising: a holder for holding a scribing wheel for scribing a brittle material substrate; a holder joint including a holder holder holding portion for holding the holder, and a rotation shaft And a bearing mounted on the rotating shaft portion; the bearing includes: an outer ring; an inner ring located inside the outer ring; a plurality of rotating bodies disposed between the outer ring and the inner ring; and a sealing member disposed to cover the outer ring and the inner ring and not in direct contact with the outer ring or the inner ring; a dust-proof member that blocks a gap between the outer ring or the inner ring and the sealing member is disposed on the cutter holder holding portion side of the bearing; the dust-proof member is fixed to the inner ring of the bearing and outside thereof The end portion is formed so as not to reach the outer ring. The holder unit of claim 6, wherein the cutter holder holding portion is disposed in a state in which an end portion on the side of the rotation shaft portion is in contact with the dustproof member. A scribing device, characterized in that it is provided with a scribing head including a holder unit, the holder unit comprising: a scribing wheel for scribing a brittle material substrate; and a holder for maintaining the above a scribing wheel; a retainer joint including a cutter wheel holder holding portion and a rotating shaft portion for holding the holder; and a bearing attached to the rotating shaft portion; the bearing includes: an outer ring; an inner ring located at An inner side of the outer ring; a plurality of rotating bodies disposed between the outer ring and the inner ring; and a sealing member disposed to cover the outer ring and the inner ring and not in direct contact with the outer ring or the inner ring; and on the side of the cutter holder holding portion of the bearing a dust-proof member having a ring or a gap between the inner ring and the sealing member; the dust-proof member being fixed to the inner ring of the bearing and having an outer end portion formed so as not to reach the outer ring. The scribing device of claim 8, wherein the cutter holder holding portion is disposed in a state in which an end portion on the side of the rotating shaft portion is in contact with the dustproof member. The scribing device of claim 8 or 9, wherein the scribing head is disposed above the substrate of the brittle material.