TWI518313B - 透明基板的表面圖案不良測定裝置 - Google Patents

透明基板的表面圖案不良測定裝置 Download PDF

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Publication number
TWI518313B
TWI518313B TW103135703A TW103135703A TWI518313B TW I518313 B TWI518313 B TW I518313B TW 103135703 A TW103135703 A TW 103135703A TW 103135703 A TW103135703 A TW 103135703A TW I518313 B TWI518313 B TW I518313B
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TW
Taiwan
Prior art keywords
substrate
light
reflected
laser beam
deflected
Prior art date
Application number
TW103135703A
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English (en)
Chinese (zh)
Other versions
TW201514480A (zh
Inventor
全載弼
白承丸
金澤兼
金德鎬
Original Assignee
技佳唯斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 技佳唯斯股份有限公司 filed Critical 技佳唯斯股份有限公司
Publication of TW201514480A publication Critical patent/TW201514480A/zh
Application granted granted Critical
Publication of TWI518313B publication Critical patent/TWI518313B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW103135703A 2013-10-15 2014-10-15 透明基板的表面圖案不良測定裝置 TWI518313B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020130122388A KR101446061B1 (ko) 2013-10-15 2013-10-15 투명 기판의 표면 패턴 불량 측정 장치

Publications (2)

Publication Number Publication Date
TW201514480A TW201514480A (zh) 2015-04-16
TWI518313B true TWI518313B (zh) 2016-01-21

Family

ID=51996170

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103135703A TWI518313B (zh) 2013-10-15 2014-10-15 透明基板的表面圖案不良測定裝置

Country Status (4)

Country Link
JP (1) JP5976750B2 (ja)
KR (1) KR101446061B1 (ja)
CN (1) CN104568984B (ja)
TW (1) TWI518313B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016204920A1 (en) * 2015-06-18 2016-12-22 Applied Materials, Inc. In-situ metrology method for thickness measurement during pecvd processes
KR102554867B1 (ko) 2015-09-09 2023-07-14 삼성전자주식회사 기판 검사 장치
CN109580660A (zh) * 2018-12-29 2019-04-05 重庆荣成玻璃制品有限公司 玻璃生产用侧面光检测装置
KR102043660B1 (ko) * 2019-01-15 2019-11-12 주식회사 에이치비테크놀러지 투명층 검사 광학계 및 그를 포함하는 투명층 검사 장치
KR20200140639A (ko) * 2019-06-07 2020-12-16 주식회사 엘지화학 편광판의 접착제얼룩 검사장치 및 편광판의 접착제얼룩 검사방법
KR102326795B1 (ko) * 2020-06-26 2021-11-17 (주) 제이와이 합성수지 코팅 기판 검사용 조명 장치 및 이에 따른 검사 방법

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01107139A (ja) * 1987-10-20 1989-04-25 Fujitsu Ltd パターン検知装置
JPH02116703A (ja) * 1988-10-27 1990-05-01 Matsushita Electric Ind Co Ltd ガラス基板上の回路パターンの検査装置
JP2924289B2 (ja) * 1991-05-31 1999-07-26 株式会社日立製作所 回路基板のガラス量測定方法及びその装置
JP2545314B2 (ja) * 1991-08-02 1996-10-16 財団法人鉄道総合技術研究所 トロリ―線の摩耗測定方法
JPH0580497A (ja) * 1991-09-20 1993-04-02 Canon Inc 面状態検査装置
JPH0755721A (ja) * 1993-08-20 1995-03-03 Konica Corp シート材の検査装置
JPH09119901A (ja) * 1995-10-24 1997-05-06 Nkk Corp 表面検査装置
JP2001059710A (ja) 1999-08-25 2001-03-06 Central Japan Railway Co トロリ線摩耗量測定装置
KR100611977B1 (ko) 2004-04-16 2006-08-11 삼성전자주식회사 폴리곤 미러 및 이를 채용한 주사 광학 장치
JP4960026B2 (ja) * 2006-06-09 2012-06-27 富士フイルム株式会社 フイルムの欠陥検査装置及びフイルムの製造方法
US8466960B2 (en) * 2009-02-16 2013-06-18 Ricoh Company, Ltd. Liquid droplet recognition apparatus, raindrop recognition apparatus, and on-vehicle monitoring apparatus
CN102645437A (zh) * 2012-04-11 2012-08-22 法国圣戈班玻璃公司 光学测量装置和光学测量方法

Also Published As

Publication number Publication date
CN104568984B (zh) 2017-12-15
JP2015078985A (ja) 2015-04-23
CN104568984A (zh) 2015-04-29
TW201514480A (zh) 2015-04-16
JP5976750B2 (ja) 2016-08-24
KR101446061B1 (ko) 2014-10-01

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