TWI498364B - 低介電常數及低光澤度之聚醯亞胺膜及其製備方法 - Google Patents

低介電常數及低光澤度之聚醯亞胺膜及其製備方法 Download PDF

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TWI498364B
TWI498364B TW103115180A TW103115180A TWI498364B TW I498364 B TWI498364 B TW I498364B TW 103115180 A TW103115180 A TW 103115180A TW 103115180 A TW103115180 A TW 103115180A TW I498364 B TWI498364 B TW I498364B
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dianhydride
polyimine
bis
layer
film
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chun ting Lai
Chih Wei Lin
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Taimide Technology Inc
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Description

低介電常數及低光澤度之聚醯亞胺膜及其製備方法
本發明係關於一種聚醯亞胺膜,尤其是一種低介電常數之聚醯亞胺膜。
隨著技術發展及產品需求,印刷電路板之尺寸趨向輕、薄、短、小,而因應無線網路及通訊產品之頻率高頻化,傳輸速率快之高頻基板逐漸成為發展重點。作為高頻通訊基板所使用的材料,能夠快速傳送資料為基本要求,且在傳送過程中不能造成資料損失或被干擾。
已知電子訊號在金屬導線間傳遞所造成的延遲,係為半導體元件速度受限的主要原因。為了降低訊號傳遞之時間延遲,可以低介電常數之材料作為導線間絕緣層,以降低導線間的電容值、提升元件運作速度、及降低雜訊干擾。絕緣層係阻絕電流通過,而具備較低介電常數(Dielectric Constant,Dk )之絕緣材料可避免於線路上形成不必要的雜散電容(stray capacitance)。另外,該材料若造成損耗會浪費電能,故要求材料之損耗因子(Dissipation Factor,Df )越小越好。
聚醯亞胺(PI)具備良好耐熱性、耐化性、機械強度與高電阻抗等特性,已大量應用於電子產業,例如作為印刷電路板材料。然而,習 知聚醯亞胺膜具有高介電常數及高損耗因子,作為高頻材料仍有缺點與限制。又,為了防止電路設計被抄襲,必須以低透光性的覆蓋膜遮蓋設計,而為了達到質感與美觀,低光澤度的覆蓋膜係有其需求。因此,發展可同時達到上述所欲特性之聚醯亞胺膜仍有其必要性。
本發明係提供一種聚醯亞胺膜,係包括:構成該膜主結構之聚醯亞胺,係由二胺單體及二酐單體經縮合反應而形成;碳黑,佔該膜總重量之0.5wt%至5wt%;以及含氟高分子,佔該膜總重量之15wt%至40wt%;其中,該碳黑及該含氟高分子係分佈於該聚醯亞胺膜中,該聚醯亞胺膜之介電常數(Dk )低於3.05,且光澤度值為10以下。
於實施例中,本發明亦提供一種多層聚醯亞胺膜,係包括:第一聚醯亞胺層,包括構成該膜主結構之聚醯亞胺;佔該第一聚醯亞胺層總重量之0.5wt%至5wt%之碳黑;佔該第一聚醯亞胺層總重量之15wt%至40wt%之含氟高分子;且該碳黑及該含氟高分子係分佈於該第一聚醯亞胺層中;第二聚醯亞胺層,至少包括構成該膜主結構之聚醯亞胺;其中,該第一聚醯亞胺層之厚度為h1,該第二聚醯亞胺層之厚度為h2,且h2/h1之值為1/5以下。
於實施例中,本發明亦提供一種製備多層聚醯亞胺膜之方法,係包括:製備第一聚醯胺酸溶液,其包括二胺單體、二酐單體、碳黑及含氟高分子;將該第一聚醯胺酸溶液塗佈於一基板上,並烘烤以形成第一聚醯亞胺層;製備第二聚醯胺酸溶液,其包括二胺單體及二酐單體;將該第二聚醯胺酸溶液塗佈於該第一聚醯亞胺層上,並烘烤以於該第一聚醯 亞胺層上形成第二聚醯亞胺層;其中,該第一聚醯亞胺層之厚度為h1,該第二聚醯亞胺層之厚度為h2,且h2/h1之值為1/5以下。
1‧‧‧第一聚醯亞胺層
11‧‧‧聚醯亞胺
12‧‧‧碳黑
13‧‧‧含氟高分子
2‧‧‧第二聚醯亞胺層
第1圖係繪示依據本發明之多層聚醯亞胺膜之一實施例。
本發明所提供之聚醯亞胺膜,係包括聚醯亞胺、碳黑、及含氟高分子,且具有所欲的低介電常數(Dk )、低光澤度值、低損耗因子(Df )、及高遮蔽度。
該聚醯亞胺膜係包含碳黑,係分佈於該聚醯亞胺膜中。以該膜總重量為基礎,該碳黑之比例為0.5wt%至5wt%,例如:0.5、0.7、0.9、1、1.5、2、2.5、3、3.5、4、4.5、5wt%,或前述任兩點之間之值。於實施例中,該碳黑之比例可為0.5至4.5wt%,較佳為0.5至3wt%,更佳為1至3wt%。
該聚醯亞胺膜中另包括含氟高分子(fluorine-containing polymer)。該含氟高分子可以分子型式獨立存在於該聚醯亞胺膜中,或,以該含氟高分子之部分或全部官能基與聚醯亞胺分子產生化學反應(如:共價結合)之型式存在於該聚醯亞胺膜中。
該含氟高分子可為,舉例但非限定,氟烴類(fluorocarbons)。具體而言,該含氟高分子之實例包括氟化聚烯(fluorinated polyalkene)、具有氟取代基之聚烷、具有氟取代基之聚烷氧、氯氟烴(chlorofluorocarbons)等
於部分實施例中,該含氟高分子為聚四氟乙烯(polytetrafluoroethylene(PTFE))、聚全氟乙丙烯(polyfluorinated ethylene propylene(FEP))、全氟亞乙烯基(polyfluorinated vinylidene(PVDF))之聚合物、全氟烷氧基(perfluoroalkoxy(PFA))之聚合物、三氟氯乙烯(chlorotrifluoroethylene(CTFE))之聚合物、乙烯-三氟氯乙烯(ethylene chlorotrifuloroethylene(ECTFE))之聚合物等,可單獨使用或組合使用。
於實施例中,以該膜總重量為基礎,該含氟高分子比例為15wt%至40wt%,例如:16、17、20、22、25、28、30、32、35、37、38、39、40wt%,或前述任兩點之間之值。於部分實施例中,該含氟高分子之比例可為20至40wt%。於部分實施例中,該含氟高分子之比例可為15至30wt%,較佳為15至25wt%。
所採用的含氟高分子為粉體狀,該含氟高分子之平均粒徑為約1至10μm,例如,1μm、2μm、2.5μm、3μm、4μm、5μm、6μm、7μm、7.5μm、8μm、9μm、10μm或前述任兩點之間之值。於一些實施例中,可採用平均粒徑為1至5μm之含氟高分子。於另一些實施例中,可採用平均粒徑為6至10μm之含氟高分子。於較佳實施例中,該含氟高分子之平均粒徑為約2至8μm。
本發明之聚醯亞胺膜可為單層膜或多層膜,例如雙層膜、三層膜等。於多層膜之實施例中,至少一層膜係如前述,包括碳黑及含氟高分子,而其餘層之聚醯亞胺膜則可包括相同或不同之添加物。另外,於多層膜之實施例中,各層聚醯亞胺所採用之二胺及二酐單體可互為相同或不同。
於一實施例中,該多層聚醯亞胺膜,如第1圖所示,係包括第一聚醯亞胺層1及第二聚醯亞胺層2,該第二聚醯亞胺層2係設置於該第 一聚醯亞胺層1之一表面上,且與該第一聚醯亞胺層1之表面為直接接觸。第一聚醯亞胺層1包括:構成該層主結構之聚醯亞胺11、碳黑12、含氟高分子13,且該碳黑12及該含氟高分子13呈顆粒狀並分佈於該第一聚醯亞胺層的主結構中。第二聚醯亞胺層2則至少包括構成該層主結構之聚醯亞胺。於實施例中,以該第一聚醯亞胺層1之總重量為基礎,該碳黑12為0.5wt%至3wt%,該含氟高分子13為15wt%至40wt%。
於該多層聚醯亞胺膜中,該第一聚醯亞胺層1之厚度為h1,該第二聚醯亞胺層2之厚度為h2,而h2/h1之值為1/5以下,例如,舉例但非限制,1/5、1/6、1/7、1/8、1/10、1/12、1/15、或前述任兩點之間之值。
於一實施例中,如第1圖所示之雙層聚醯亞胺膜可依以下方法製備。首先,將選定作為第一聚醯亞胺層成分之二胺單體及二酐單體置於溶劑中作用,以獲得第一聚醯胺酸溶液。將碳黑及含氟高分子加入該第一聚醯胺酸溶液中,混合均勻後,於一玻璃平板或不銹鋼平板上塗佈成層。接著以約90℃至約350℃之溫度烘烤,而形成第一聚醯亞胺層。
再以選定作為第二聚醯亞胺層成分之二胺單體及二酐單體置於溶劑中以獲得第二聚醯胺酸溶液,其所使用之單體可與第一聚醯胺酸溶液為相同或不同。將該第二聚醯胺酸溶液於該第一聚醯亞胺層上塗佈成層,以約90℃至約350℃之溫度烘烤,而形成第二聚醯亞胺層。據此,即可獲得具有雙層結構之多層聚醯亞胺膜。
本發明之聚醯亞胺膜可利用熱轉化或化學轉化的方式形成。若採用化學轉化的方式,則於塗佈步驟前,可將脫水劑及催化劑添加至該聚醯胺酸溶液中。前述所使用之溶劑、脫水劑及催化劑均可為本技術領域 習知者。該溶劑可為非質子性極性溶劑,例如二甲基乙醯胺(DMAC)、N,N'-二甲基甲醯胺(DMF)、N-甲基吡咯啶酮(NMP)、二甲亞碸(DMSO)、四甲基碸、N,N'-二甲基-N,N'-丙烯基脲(DMPU)等。該脫水劑可為脂肪族酸酐(如醋酸酐及丙酸酐)、芳香族酸酐(如苯酸酐及鄰苯二甲酸酐)等。該催化劑可為雜環三級胺(例如甲吡啶(picoline)、吡啶等)、脂肪族三級胺(例如三乙基胺(TEA)等)、芳香族三級胺(例如二甲苯胺等)等。聚醯胺酸:脫水劑:催化劑之莫耳比為1:2:1,即對每莫耳之聚醯胺酸,使用約2莫耳之脫水劑及約1莫耳之催化劑。
於本發明中,由二胺單體及二酐單體經縮合反應而形成聚醯亞胺,且該二胺單體與該二酐單體以約為等莫耳之比例進行反應。
於實施例中,該二胺單體可為2,2’-雙(三氟甲基)聯苯胺(2,2'-Bis(trifluoromethyl)benzidine(TFMB))、4,4'-二胺基二苯醚(4,4'-oxydianiline(4,4'-ODA))、對苯二胺(phenylenediamine(p-PDA))、1,3-雙(4'-胺基苯氧基)苯(1,3-bis(4-aminophenoxy)benzene(TPER))、1,4-雙(4-胺基苯氧基)苯(1,4-bis(4-aminophenoxy)benzene(TPEQ))、4,4’-二胺基-2,2’-二甲基-1,1’-聯苯(2,2'-dimethyl[1,1'-biphenyl]-4,4'-diamine(m-TB-HG))、1,3-雙(3-胺基苯氧基)苯(1,3’-Bis(3-aminophenoxy)benzene(APBN))、3,5-二胺基三氟甲苯(3,5-Diaminobenzotrifluoride(DABTF))、2,2'-雙[4-(4-胺基苯氧基苯基)]丙烷(2,2'-bis[4-(4-aminophenoxy)phenyl]propane(BAPP))、6-胺基-2-(4-胺基苯基)-苯并噁唑(6-amino-2-(4-aminophenyl)benzoxazole(6PBOA))、5-胺基-2-(4-胺基苯基)-苯并噁唑(5-amino-2-(4-aminophenyl)benzoxazole(5PBOA))等,可單獨使用或組合使用。
於實施例中,該二酐單體可為3,3',4,4'-聯苯四羧酸二酸酐(3,3',4,4'-biphenyltetracarboxylic dianhydride(BPDA))、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酸酐(2,2-bis[4-(3,4dicarboxyphenoxy)phenyl]propane dianhydride(BPADA))、均苯四甲酸二酸酐(pyromellitic dianhydride(PMDA))、4,4'-(六氟異丙烯)二酞酸酐(2,2'-Bis-(3,4-Dicarboxyphenyl)hexafluoropropane dianhydride(6FDA))、二苯醚四甲酸二酸酐(4,4-Oxydiphthalic anhydride(ODPA))、苯酮四羧酸二酸酐(Benzophenonetetracarboxylic dianhydride(BTDA))、3,3',4,4'-二環己基四甲酸二酐(3,3',4,4'-dicyclohexyltetracarboxylic acid dianhydride(HBPDA)等,可單獨使用或組合使用。
於一些實施例中,單層聚醯亞胺膜之二胺單體為2,2’-雙(三氟甲基)聯苯胺(TFMB),而二酐單體為3,3',4,4'-聯苯四羧酸二酸酐(BPDA)、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酸酐(BPADA)、或其組合。
於另一些實施例中,係製備多層聚醯亞胺膜,其中,第一層之二胺單體為2,2’-雙(三氟甲基)聯苯胺(TFMB),而二酐單體為3,3',4,4'-聯苯四羧酸二酸酐(BPDA)、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酸酐(BPADA)、或其組合。第二層之二胺單體及二酐單體可與第一層相同,或,該二胺單體為4,4'-二胺基二苯醚(4,4'-ODA),而該二酐單體為均苯四甲酸二酸酐(PMDA)。
本發明之聚醯亞胺膜具有下列至少一項之膜特性:介電常數(Dk )低於3.05、損失因子(Df )低於0.0115、光澤度值為10以下、光穿透率低於30%。
於實施例中,該介電常數(Dk )係低於約3.05,例如3.04、3.0、2.8、2.5、2.0、1.5、1.2等,或前述任兩點之間之值。該損失因子(Df)則低於約0.0115,例如0.011、0.010、0.008、0.005、0.002、0.001等,或前述任兩點之間之值。該光澤度值為10以下,例如:9.9、9.5、9、8、7、6、5、3、1、0.1等,或前述任兩點之間之值。該光穿透率係低於30%,例如:29%、25%、20%、15%、10%、5%、1%、0.5%、0.1%等,或前述任兩點之間之值。
於一實施例中,該單層聚醯亞胺膜係同時具有低於3.05之介電常數(Dk )、低於0.0115之損失因子(Df )、10以下之光澤度值、及低於30%之光穿透率。
於一較佳實施例中,該單層聚醯亞胺膜係具有下列至少一項之膜特性:介電常數(Dk )為2.99以下、損失因子(Df )為0.011以下、光澤度值為9.6以下、光穿透率低於30%。
於另一實施例中,該雙層聚醯亞胺膜係同時具有低於3.05之介電常數(Dk )、低於0.0115之損失因子(Df )、10以下之光澤度值、及低於30%之光穿透率。
以下以實施例詳述本發明。
實施例 <實施例1>
將69.11克之TFMB與412.5克之DMAc置入三頸燒瓶內。於30℃下攪拌至完全溶解後再加入56.83克之BPDA與11.23克之BPADA(TFMB、BPDA與BPADA單體總重量百分率為25wt%)。接著,續持攪拌 並於25℃持續反應20個小時,即可獲得第一聚醯胺酸溶液,其於25℃之旋轉黏度為140,000cps。於所得第一聚醯胺酸溶液中加入24.2克之PTFE粉末(佔單體總重量之15wt%)及4.24克之碳黑(型號SB4A,購自ORION公司)(佔單體總重量之3wt%),攪拌均勻後再加入醋酸酐及甲基吡啶作為催化劑(添加比例為聚醯胺酸溶液:醋酸酐:甲基吡啶之莫耳比為約1:2:1),脫泡完塗佈於玻璃板上,並放入80℃的烘箱內加熱約30分鐘,以移除大多數的溶劑。接著,將上述塗佈有聚醯胺酸溶液的玻璃板放入170℃~260℃的烘箱內,加熱約4小時,以令聚醯胺酸溶液烤乾成膜。所得聚醯亞胺膜厚度為12μm。
<實施例2>
重複實施例1之步驟製備單層聚醯亞胺膜,但PTFE含量改為45.72克(佔單體總重量之25wt%)。
<實施例3>
重複實施例1之步驟製備單層聚醯亞胺膜,但PTFE含量改為91.45克(佔單體總重量之40wt%)。
<實施例4>
重複實施例2之步驟製備單層聚醯亞胺膜,但碳黑含量改為0.69克(佔單體總重量之0.5wt%)。
<實施例5>
重複實施例2之步驟製備單層聚醯亞胺膜,但碳黑含量改為7.22克(佔單體總重量之5wt%)。
<實施例6>
重複實施例1之步驟製備單層聚醯亞胺膜,但碳黑含量改為7.22克(佔單體總重量之5wt%)。
<實施例7>
重複實施例1之步驟製備單層聚醯亞胺膜,但碳黑含量改為0.69克(佔單體總重量之0.5wt%)。
<實施例8>
重複實施例3之步驟製備單層聚醯亞胺膜,但碳黑含量改為0.69克(佔單體總重量之0.5wt%)。
<實施例9> 製備雙層聚醯亞胺膜
第一層聚醯亞胺膜係重複實施例6之步驟而形成。將所得第一聚醯亞胺層固定於玻璃板上。接著,重複實施例1之步驟以製備第二層聚醯亞胺膜,將脫泡完之第二聚醯胺酸溶液塗佈於該第一聚醯亞胺層上再進行烘烤,但各成份重量改為:37.15克的ODA、12.14克的PDA、88.21克的PMDA,單體佔反應溶液總重量之百分比約25wt%,且不添加PTFE粉末及碳黑。所得雙層聚醯亞胺膜之總厚度為14.4μm,其中,第一層厚度為12μm,第二層厚度為2.4μm。
<比較例1>
重複實施例4之步驟製備單層聚醯亞胺膜,但不添加PTFE。
<比較例2>
重複實施例3之步驟製備單層聚醯亞胺膜,但不添加碳黑。
<比較例3>
重複實施例4之步驟製備單層聚醯亞胺膜,但PTFE含量改為10wt%。
<比較例4>
重複實施例4之步驟製備單層聚醯亞胺膜,但PTFE含量改為45wt%。
<比較例5>
重複實施例1之步驟製備單層聚醯亞胺膜,但碳黑含量改為7wt%。
<比較例6> 製備雙層聚醯亞胺膜
重複實施例9之步驟製備雙層聚醯亞胺膜,但所得雙層聚醯亞胺膜之總厚度改為15μm,其中,第一層厚度為12μm,第二層厚度為3μm。
將上述實施例與比較例之薄膜進行下列測試,測試結果如表1及表2所示。
介電常數(Dk)及損耗因子(Df) :將待測樣品於去離子水中浸泡約10分鐘,接著置於烘箱中以溫度約110℃烘烤約30分鐘進行乾燥。以精密阻抗分析儀(型號Agilent 4294A)測量該待測樣品之Dk/Df值。
光澤度值(GU) :60度角光澤度測量係以手持式光澤度計(型號:Micro Tri Gloss-BYK Gardner)測得。
光穿透率(TT) (%):以霧度計(型號:Nippon Denshoku NDH 2000 Haze Meter)測得。
表1、單層聚醯亞胺膜之測試結果。
本發明之聚醯亞胺膜,係藉由添加適量的PTFE(15-40wt%)以達到降低介電常數、損失因子、及60度光澤度值,同時並藉由添加適量的碳黑(0.5-5wt%),以達到足夠低的光穿透率。
如表1所示,相較於實施例4,比較例1、3雖然添加相同比例之碳黑(0.5wt%),但PTFE添加量過低時,聚醯亞胺膜的Dk、Df、光穿透 率、光澤度之數值均過高,無法達到所欲之薄膜性質。
相較於實施例3及8,比較例2顯示添加相同比例之適量PTFE,但未添加碳黑時,仍無法獲得所欲之低光穿透率(低於30%)之聚醯亞胺膜。
比較例4及5則分別顯示,當PTFE及碳黑其中任一者添加量過高時,會無法成膜。詳細而言,比較例4及5之聚醯亞胺膜質地過脆,自玻璃板剝離時碎裂,而無法獲得完整的聚醯亞胺膜。
另外,在製備多層聚醯亞胺膜時,實施例9之具有特定雙層厚度比例之薄膜具有所欲性質;相對地,比較例6則顯示,當h1/h2之厚度比例過高時,所得薄膜之介電常數(Dk)及損失因子(Df)皆顯著上升,不利於後續應用。
綜上述,本發明所提供之聚醯亞胺膜,係以較佳的單體組合形成聚醯亞胺,並採用特定比例之碳黑及含氟高分子,於多層結構中還必須具備特定的各層厚度比例,才能獲得具有所欲低介電常數(Dk )、低光澤度值、低損耗因子(Df )、及高遮蔽度之聚醯亞胺膜。
上述特定實施例之內容係為了詳細說明本發明,然而,該等實施例係僅用於說明,並非意欲限制本發明。熟習本領域之技藝者可理解,在不悖離後附申請專利範圍所界定之範疇下針對本發明所進行之各種變化或修改係落入本發明之一部分。
1‧‧‧第一聚醯亞胺層
11‧‧‧聚醯亞胺
12‧‧‧碳黑
13‧‧‧含氟高分子
2‧‧‧第二聚醯亞胺層

Claims (16)

  1. 一種聚醯亞胺膜,係包括:構成該膜主結構之聚醯亞胺,係由二胺單體及二酐單體經縮合反應而形成;碳黑,佔該膜總重量之0.5wt%至5wt%;以及含氟高分子,佔該膜總重量之15wt%至40wt%;其中,該碳黑及該含氟高分子係分佈於該聚醯亞胺膜中,該聚醯亞胺膜之介電常數(Dk)低於3.05,且光澤度值為10以下。
  2. 如申請專利範圍第1項所述之聚醯亞胺膜,其中,該含氟高分子係選自由聚四氟乙烯(PTFE)、聚全氟乙丙烯(FEP)、全氟亞乙烯基(PVDF)聚合物、全氟烷氧基(PFA)聚合物、三氟氯乙烯(CTFE)聚合物、及乙烯-三氟氯乙烯(ECTFE)聚合物所成群組之一種或多種。
  3. 如申請專利範圍第1項所述之聚醯亞胺膜,其中,該含氟高分子之平均粒徑為約1至10μm。
  4. 如申請專利範圍第1項所述之聚醯亞胺膜,其中,該二胺單體係選自由2,2’-雙(三氟甲基)聯苯胺(TFMB)、4,4'-二胺基二苯醚(4,4'-ODA)、對苯二胺(p-PDA)、1,3-雙(4'-胺基苯氧基)苯(TPER)、1,4-雙(4-胺基苯氧基)苯(TPEQ)、4,4’-二胺基-2,2’-二甲基-1,1’-聯苯(m-TB-HG)、1,3-雙(3-胺基苯氧基)苯(APBN)、3,5-二胺基三氟甲苯(DABTF)、2,2’-雙(三氟甲基)聯苯胺(TFMB)、2,2'-雙[4-(4-胺基苯氧基苯基)]丙烷(BAPP)、6-胺基-2-(4-胺基苯基)-苯并噁唑(6PBOA)、及5-胺基-2-(4-胺基苯基)-苯并噁唑(5PBOA) 所成群組之一種或多種。
  5. 如申請專利範圍第1項所述之聚醯亞胺膜,其中,該二酐單體係選自由3,3',4,4'-聯苯四羧酸二酸酐(BPDA)、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酸酐(BPADA)、均苯四甲酸二酸酐(PMDA)、3,3',4,4'-聯苯四羧酸二酸酐(BPDA)、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酸酐(BPADA)、4,4'-(六氟異丙烯)二酞酸酐(6FDA)、二苯醚四甲酸二酸酐(ODPA)、苯酮四羧酸二酸酐(BTDA)、3,3',4,4'-二環己基四甲酸二酐(HBPDA)所成群組之一種或多種。
  6. 如申請專利範圍第1項所述之聚醯亞胺膜,其損失因子(Df)係低於0.0115。
  7. 如申請專利範圍第1項所述之聚醯亞胺膜,其光穿透率係低於30%。
  8. 一種多層聚醯亞胺膜之結構,係包括:第一聚醯亞胺層,其為如申請專利範圍第1至7項任一項所述之聚醯亞胺膜;及第二聚醯亞胺層,至少包括構成該膜主結構之聚醯亞胺;其中,該第一聚醯亞胺層之厚度為h1,該第二聚醯亞胺層之厚度為h2,且h2/h1之值為1/5以下。
  9. 如申請專利範圍第8項所述之多層聚醯亞胺膜的結構,其中,該第一及第二聚醯亞胺層之聚醯亞胺係由二胺單體及二酐單體經縮合反應而形成,且該兩層之聚醯亞胺為相同或不同。
  10. 如申請專利範圍第9項所述之多層聚醯亞胺膜的結構,其中,該第一聚醯亞胺層之二胺單體為2,2’-雙(三氟甲基)聯苯胺(TFMB),且第二聚醯亞 胺層之二胺單體係選自由2,2’-雙(三氟甲基)聯苯胺(TFMB)、4,4'-二胺基二苯醚(4,4'-ODA)、對苯二胺(p-PDA)、1,3-雙(4'-胺基苯氧基)苯(TPER)、1,4-雙(4-胺基苯氧基)苯(TPEQ)、4,4’-二胺基-2,2’-二甲基-1,1’-聯苯(m-TB-HG)、1,3-雙(3-胺基苯氧基)苯(APBN)、3,5-二胺基三氟甲苯(DABTF)、2,2’-雙(三氟甲基)聯苯胺(TFMB)、2,2'-雙[4-(4-胺基苯氧基苯基)]丙烷(BAPP)、6-胺基-2-(4-胺基苯基)-苯并噁唑(6PBOA)、及5-胺基-2-(4-胺基苯基)-苯并噁唑(5PBOA)所成群組之一種或多種。
  11. 如申請專利範圍第9項所述之多層聚醯亞胺膜的結構,其中,該第一聚醯亞胺層之二酐單體為3,3',4,4'-聯苯四羧酸二酸酐(BPDA)、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酸酐(BPADA)、或其組合,且第二聚醯亞胺層之二酐單體係選自由3,3',4,4'-聯苯四羧酸二酸酐(BPDA)、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酸酐(BPADA)、均苯四甲酸二酸酐(PMDA)、3,3',4,4'-聯苯四羧酸二酸酐(BPDA)、2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酸酐(BPADA)、4,4'-(六氟異丙烯)二酞酸酐(6FDA)、二苯醚四甲酸二酸酐(ODPA)、苯酮四羧酸二酸酐(BTDA)、3,3',4,4'-二環己基四甲酸二酐(HBPDA)所成群組之一種或多種。
  12. 如申請專利範圍第8項所述之多層聚醯亞胺膜的結構,其具有選自下列至少一種膜特性:低於3.05之介電常數(Dk)、10以下之光澤度值、低於0.0115之損失因子(Df)、及低於30%之光穿透率。
  13. 一種製備多層聚醯亞胺膜之方法,係包括:製備第一聚醯胺酸溶液,其包括二胺單體、二酐單體、碳黑及含氟高分子; 將該第一聚醯胺酸溶液塗佈於一基板上,並加熱以形成第一聚醯亞胺層;製備第二聚醯胺酸溶液,其包括二胺單體及二酐單體;及將該第二聚醯胺酸溶液塗佈於該第一聚醯亞胺層上,並加熱以於該第一聚醯亞胺層上形成第二聚醯亞胺層;其中,該第一聚醯亞胺層之厚度為h1,該第二聚醯亞胺層之厚度為h2,且h2/h1之值為1/5以下。
  14. 如申請專利範圍第13項所述之方法,其中,該碳黑係佔該第一聚醯亞胺膜總重量之0.5wt%至5wt%。
  15. 如申請專利範圍第13項所述之方法,其中,該含氟高分子係佔該第一聚醯亞胺膜總重量之15wt%至40wt%。
  16. 如申請專利範圍第13項所述之方法,進一步包括於塗佈前,將脫水劑及催化劑添加至該第一聚醯胺酸溶液及該第二聚醯胺酸溶液中。
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