TWI478205B - Discharge lamp - Google Patents

Discharge lamp Download PDF

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Publication number
TWI478205B
TWI478205B TW101141748A TW101141748A TWI478205B TW I478205 B TWI478205 B TW I478205B TW 101141748 A TW101141748 A TW 101141748A TW 101141748 A TW101141748 A TW 101141748A TW I478205 B TWI478205 B TW I478205B
Authority
TW
Taiwan
Prior art keywords
discharge lamp
shaft portion
metal
metal port
lamp according
Prior art date
Application number
TW101141748A
Other languages
English (en)
Chinese (zh)
Other versions
TW201308393A (zh
Inventor
菊池孝幸
Original Assignee
尼康股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 尼康股份有限公司 filed Critical 尼康股份有限公司
Publication of TW201308393A publication Critical patent/TW201308393A/zh
Application granted granted Critical
Publication of TWI478205B publication Critical patent/TWI478205B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/56—Cooling arrangements using liquid coolants
    • F21V29/58—Cooling arrangements using liquid coolants characterised by the coolants
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/70—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks
    • F21V29/83—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks the elements having apertures, ducts or channels, e.g. heat radiation holes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/62—Connection of wires protruding from the vessel to connectors carried by the separate part
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
TW101141748A 2007-04-12 2008-04-10 Discharge lamp TWI478205B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US90765407P 2007-04-12 2007-04-12

Publications (2)

Publication Number Publication Date
TW201308393A TW201308393A (zh) 2013-02-16
TWI478205B true TWI478205B (zh) 2015-03-21

Family

ID=39875459

Family Applications (2)

Application Number Title Priority Date Filing Date
TW101141748A TWI478205B (zh) 2007-04-12 2008-04-10 Discharge lamp
TW097113076A TWI411003B (zh) 2007-04-12 2008-04-10 A discharge lamp, a connecting cable, a light source device and an exposure device

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW097113076A TWI411003B (zh) 2007-04-12 2008-04-10 A discharge lamp, a connecting cable, a light source device and an exposure device

Country Status (5)

Country Link
JP (2) JP5131468B2 (ja)
KR (8) KR101549670B1 (ja)
CN (1) CN101548133B (ja)
TW (2) TWI478205B (ja)
WO (1) WO2008129931A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101549670B1 (ko) * 2007-04-12 2015-09-03 가부시키가이샤 니콘 방전램프, 접속용 케이블, 광원장치 및 노광장치
JP4991834B2 (ja) 2009-12-17 2012-08-01 シャープ株式会社 車両用前照灯
JP5232815B2 (ja) 2010-02-10 2013-07-10 シャープ株式会社 車両用前照灯
JP5053415B2 (ja) * 2010-05-17 2012-10-17 シャープ株式会社 発光装置、照明装置および車両用前照灯
US8733996B2 (en) 2010-05-17 2014-05-27 Sharp Kabushiki Kaisha Light emitting device, illuminating device, and vehicle headlamp
US9816677B2 (en) 2010-10-29 2017-11-14 Sharp Kabushiki Kaisha Light emitting device, vehicle headlamp, illumination device, and laser element
TWI771788B (zh) * 2014-03-28 2022-07-21 日商尼康股份有限公司 光源裝置
DE102016102187B3 (de) * 2016-02-09 2017-08-10 Heraeus Noblelight Gmbh Vorrichtung für die Behandlung eines Substrats mit UV-Strahlung und Verwendung der Vorrichtung
KR102334956B1 (ko) * 2018-11-01 2021-12-02 주식회사 엘지화학 차량용 램프 및 이의 제조 방법
JP7178240B2 (ja) * 2018-11-14 2022-11-25 東京エレクトロン株式会社 光照射装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0432154A (ja) * 1990-05-25 1992-02-04 Iwasaki Electric Co Ltd メタルハライドランプ装置
JPH0528968A (ja) * 1991-07-18 1993-02-05 Iwasaki Electric Co Ltd メタルハライドランプ装置
JPH08102298A (ja) * 1994-09-30 1996-04-16 Hamamatsu Photonics Kk 照明装置
JP2002541630A (ja) * 1999-03-31 2002-12-03 イマックス コーポレーション アークランプの冷却方法
TW543074B (en) * 2000-09-28 2003-07-21 Harison Toshiba Lighting Corp Discharge lamp and ultra-violet light irradiation apparatus
TWI240941B (en) * 2003-06-19 2005-10-01 Harison Toshiba Lighting Corp Low pressure discharge lamp
TWI260034B (en) * 2001-12-20 2006-08-11 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Compact low-pressure discharge lamp
TWI267108B (en) * 2004-01-20 2006-11-21 Sony Corp Discharge lamp, electrode for discharge lamp, method for producing electrode for discharge lamp, and illuminating device
TWI278895B (en) * 2002-04-26 2007-04-11 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Low-pressure discharge lamp with a device for switching it off at the end of its service life

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5611897Y2 (ja) * 1976-07-02 1981-03-18
JPS5744570Y2 (ja) * 1978-06-29 1982-10-01
JPS60154435A (ja) * 1984-01-24 1985-08-14 Nec Corp 超高圧水銀ランプ用ハウジング
DE3581056D1 (de) * 1984-11-06 1991-02-07 Philips Nv Schalteinrichtung zum betrieb einer hochdruckentladungslampe.
JPH0411326Y2 (ja) * 1985-08-15 1992-03-19
JPS63160192A (ja) * 1986-12-23 1988-07-02 株式会社明電舎 高周波加熱装置の接続導体
US4965484A (en) * 1989-03-10 1990-10-23 Tencor Instruments Vapor discharge lamp with gradient temperature control
JPH07288112A (ja) * 1994-04-15 1995-10-31 Ushio Inc 誘電体バリヤ放電ランプ装置
JP3189661B2 (ja) 1996-02-05 2001-07-16 ウシオ電機株式会社 光源装置
JPH1055713A (ja) * 1996-08-08 1998-02-24 Ushio Inc 紫外線照射装置
DE19701195A1 (de) * 1997-01-15 1998-07-16 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Kompakte Niederdruckentladungslampe
JP3517583B2 (ja) 1998-03-27 2004-04-12 キヤノン株式会社 露光装置、デバイス製造方法及び放電灯
JP3041298B2 (ja) * 1998-05-12 2000-05-15 ウシオ電機株式会社 高圧放電ランプ
US6566815B2 (en) * 2000-01-14 2003-05-20 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Reflector high-pressure discharge lamp unit
JP3606149B2 (ja) * 2000-02-01 2005-01-05 ウシオ電機株式会社 光源装置
TW514955B (en) * 2000-09-21 2002-12-21 Ushio Electric Inc Short-arc discharge lamp
JP2002150995A (ja) * 2000-11-15 2002-05-24 Harison Toshiba Lighting Corp 直流高圧放電ランプおよび半導体露光装置
WO2003012824A1 (en) * 2001-08-02 2003-02-13 Koninklijke Philips Electronics N.V. Low-pressure gas discharge lamp
JP3910910B2 (ja) * 2001-11-30 2007-04-25 ハリソン東芝ライティング株式会社 外部電極放電ランプ
DE10231258A1 (de) * 2002-07-11 2004-01-22 Philips Intellectual Property & Standards Gmbh Entladungslampe mit Kühleinrichtung
KR101549670B1 (ko) * 2007-04-12 2015-09-03 가부시키가이샤 니콘 방전램프, 접속용 케이블, 광원장치 및 노광장치

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0432154A (ja) * 1990-05-25 1992-02-04 Iwasaki Electric Co Ltd メタルハライドランプ装置
JPH0528968A (ja) * 1991-07-18 1993-02-05 Iwasaki Electric Co Ltd メタルハライドランプ装置
JPH08102298A (ja) * 1994-09-30 1996-04-16 Hamamatsu Photonics Kk 照明装置
JP2002541630A (ja) * 1999-03-31 2002-12-03 イマックス コーポレーション アークランプの冷却方法
TW543074B (en) * 2000-09-28 2003-07-21 Harison Toshiba Lighting Corp Discharge lamp and ultra-violet light irradiation apparatus
TWI260034B (en) * 2001-12-20 2006-08-11 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Compact low-pressure discharge lamp
TWI278895B (en) * 2002-04-26 2007-04-11 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Low-pressure discharge lamp with a device for switching it off at the end of its service life
TWI240941B (en) * 2003-06-19 2005-10-01 Harison Toshiba Lighting Corp Low pressure discharge lamp
TWI267108B (en) * 2004-01-20 2006-11-21 Sony Corp Discharge lamp, electrode for discharge lamp, method for producing electrode for discharge lamp, and illuminating device

Also Published As

Publication number Publication date
KR20210090288A (ko) 2021-07-19
KR102144972B1 (ko) 2020-08-14
TW200905719A (en) 2009-02-01
KR20100014216A (ko) 2010-02-10
KR20140141694A (ko) 2014-12-10
WO2008129931A1 (ja) 2008-10-30
TWI411003B (zh) 2013-10-01
KR101599180B1 (ko) 2016-03-03
KR20160025634A (ko) 2016-03-08
CN101548133A (zh) 2009-09-30
KR101994887B1 (ko) 2019-07-02
KR20170021913A (ko) 2017-02-28
KR101549670B1 (ko) 2015-09-03
JP2008262910A (ja) 2008-10-30
KR20200097819A (ko) 2020-08-19
JP5131468B2 (ja) 2013-01-30
JP5569824B2 (ja) 2014-08-13
KR101881789B1 (ko) 2018-07-25
KR20190077613A (ko) 2019-07-03
TW201308393A (zh) 2013-02-16
JP2012253041A (ja) 2012-12-20
CN101548133B (zh) 2014-03-12
KR102277930B1 (ko) 2021-07-16
KR20180086282A (ko) 2018-07-30
KR101834803B1 (ko) 2018-03-06

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