TWI426307B - 光/電混合基板 - Google Patents

光/電混合基板 Download PDF

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Publication number
TWI426307B
TWI426307B TW097117123A TW97117123A TWI426307B TW I426307 B TWI426307 B TW I426307B TW 097117123 A TW097117123 A TW 097117123A TW 97117123 A TW97117123 A TW 97117123A TW I426307 B TWI426307 B TW I426307B
Authority
TW
Taiwan
Prior art keywords
wiring
layer
optical
pad
cladding layer
Prior art date
Application number
TW097117123A
Other languages
English (en)
Chinese (zh)
Other versions
TW200848816A (en
Inventor
山本貴功
柳澤賢司
Original Assignee
新光電氣工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新光電氣工業股份有限公司 filed Critical 新光電氣工業股份有限公司
Publication of TW200848816A publication Critical patent/TW200848816A/zh
Application granted granted Critical
Publication of TWI426307B publication Critical patent/TWI426307B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0274—Optical details, e.g. printed circuits comprising integral optical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/20—Configurations of stacked chips
    • H10W90/293—Configurations of stacked chips characterised by non-galvanic coupling between the chips, e.g. capacitive coupling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Structure Of Printed Boards (AREA)
TW097117123A 2007-05-14 2008-05-09 光/電混合基板 TWI426307B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007127906A JP5155596B2 (ja) 2007-05-14 2007-05-14 光電気混載基板の製造方法

Publications (2)

Publication Number Publication Date
TW200848816A TW200848816A (en) 2008-12-16
TWI426307B true TWI426307B (zh) 2014-02-11

Family

ID=40027570

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097117123A TWI426307B (zh) 2007-05-14 2008-05-09 光/電混合基板

Country Status (4)

Country Link
US (1) US7596289B2 (https=)
JP (1) JP5155596B2 (https=)
KR (1) KR101435092B1 (https=)
TW (1) TWI426307B (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010139562A (ja) * 2008-12-09 2010-06-24 Shinko Electric Ind Co Ltd 光導波路、光導波路搭載基板及び光送受信装置
TWI406020B (zh) * 2009-01-13 2013-08-21 Mutual Tek Ind Co Ltd 光電混合線路板及其製造方法
JP5461897B2 (ja) * 2009-06-19 2014-04-02 新光電気工業株式会社 光導波路積層配線基板及びその製造方法と実装構造
KR101079867B1 (ko) * 2009-11-13 2011-11-04 삼성전기주식회사 광기판 및 그 제조방법
CN102556889B (zh) * 2011-12-11 2014-04-02 富泰华精密电子（郑州）有限公司 连杆升降机构
JP2013186310A (ja) * 2012-03-08 2013-09-19 Shinko Electric Ind Co Ltd 光電気複合基板及びその製造方法
JP6137777B2 (ja) * 2012-04-17 2017-05-31 インターナショナル・ビジネス・マシーンズ・コーポレーションＩｎｔｅｒｎａｔｉｏｎａｌ Ｂｕｓｉｎｅｓｓ Ｍａｃｈｉｎｅｓ Ｃｏｒｐｏｒａｔｉｏｎ 半導体上の発光素子または受光素子と光導波路との間の光の接続損失を低減させることに役立つ、スペーサ樹脂パターンの設計
JP6080155B2 (ja) * 2012-11-08 2017-02-15 日東電工株式会社 光電気混載基板
JP6474060B2 (ja) * 2013-10-31 2019-02-27 日東電工株式会社 光電気混載基板
CN105408791B (zh) * 2014-04-24 2017-09-05 华为技术有限公司 单模垂直腔面发射激光器收发模块及光信号传播方法
EP2993462B1 (en) * 2014-08-12 2019-05-22 Personal Genomics Inc. Optical sensor comprising a waveguide
JP6469469B2 (ja) * 2015-02-06 2019-02-13 富士通コンポーネント株式会社 光導波路モジュール
US9899355B2 (en) * 2015-09-30 2018-02-20 Taiwan Semiconductor Manufacturing Co., Ltd. Three-dimensional integrated circuit structure
US9721812B2 (en) * 2015-11-20 2017-08-01 International Business Machines Corporation Optical device with precoated underfill
US10209466B2 (en) * 2016-04-02 2019-02-19 Intel IP Corporation Integrated circuit packages including an optical redistribution layer
JP6637368B2 (ja) * 2016-04-06 2020-01-29 新光電気工業株式会社 光導波路装置及びその製造方法
US10168495B1 (en) * 2017-06-28 2019-01-01 Kyocera Corporation Optical waveguide and optical circuit board
JP7118731B2 (ja) * 2018-05-18 2022-08-16 新光電気工業株式会社 光導波路搭載基板、光送受信装置
JP7280031B2 (ja) * 2018-11-14 2023-05-23 新光電気工業株式会社 光導波路搭載基板、光通信装置及び光導波路搭載基板の製造方法
JP7489820B2 (ja) * 2020-04-27 2024-05-24 新光電気工業株式会社 光導波路基板及び光導波路製造方法
CN116134351A (zh) * 2020-09-30 2023-05-16 日东电工株式会社 光电混载基板、光元件安装光电混载基板及其制造方法
WO2024262042A1 (ja) * 2023-06-23 2024-12-26 株式会社レゾナック 光電複合配線板の製造方法、光電複合配線板、半導体パッケージ及び積層フィルム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW460717B (en) * 1999-03-30 2001-10-21 Toppan Printing Co Ltd Optical wiring layer, optoelectric wiring substrate mounted substrate, and methods for manufacturing the same
US6739761B2 (en) * 1999-05-28 2004-05-25 Toppan Printing Co., Ltd. Optical-electric printed wiring board, printed circuit board, and method of fabricating optical-electric printed wiring board
JP2006171641A (ja) * 2004-12-20 2006-06-29 Sony Corp 光導波シートのミラー面形成用の加工ヘッド、加工装置および光導波シートのミラー面の形成方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19826648B4 (de) * 1998-06-16 2005-07-28 Siemens Ag Schaltungsträger mit einer optischen Schicht und optoelektronisches Bauelement
US6785447B2 (en) * 1998-10-09 2004-08-31 Fujitsu Limited Single and multilayer waveguides and fabrication process
JP2002277694A (ja) * 2001-03-19 2002-09-25 Mitsubishi Electric Corp 光導波路および電気回路を有する基板およびその製造方法
JP2003304953A (ja) 2002-04-16 2003-10-28 Kawajun Co Ltd 寸法調整自在商品陳列用トレー
JP4023285B2 (ja) * 2002-10-24 2007-12-19 ソニー株式会社 光・電気配線混載ハイブリッド回路基板及びその製造方法並びに光・電気配線混載ハイブリッド回路モジュール及びその製造方法
JP2005062557A (ja) * 2003-08-15 2005-03-10 Canon Inc 光素子装置、それを用いた二次元光導波路素子及び光電融合配線基板
JP4260650B2 (ja) * 2004-02-26 2009-04-30 新光電気工業株式会社 光電気複合基板及びその製造方法
KR100623477B1 (ko) * 2004-08-25 2006-09-19 한국정보통신대학교 산학협력단 광섬유 다발을 이용한 광 인쇄회로기판 및 광연결 블록
JP4447428B2 (ja) * 2004-10-19 2010-04-07 新光電気工業株式会社 光導波路の製造方法
JP2006120956A (ja) * 2004-10-22 2006-05-11 Ibiden Co Ltd 多層プリント配線板
JP5064109B2 (ja) * 2007-05-11 2012-10-31 新光電気工業株式会社 光導波路及びその製造方法、並びに光電気混載基板及びその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW460717B (en) * 1999-03-30 2001-10-21 Toppan Printing Co Ltd Optical wiring layer, optoelectric wiring substrate mounted substrate, and methods for manufacturing the same
US6739761B2 (en) * 1999-05-28 2004-05-25 Toppan Printing Co., Ltd. Optical-electric printed wiring board, printed circuit board, and method of fabricating optical-electric printed wiring board
JP2006171641A (ja) * 2004-12-20 2006-06-29 Sony Corp 光導波シートのミラー面形成用の加工ヘッド、加工装置および光導波シートのミラー面の形成方法

Also Published As

Publication number Publication date
JP5155596B2 (ja) 2013-03-06
US7596289B2 (en) 2009-09-29
JP2008281923A (ja) 2008-11-20
KR20080100767A (ko) 2008-11-19
KR101435092B1 (ko) 2014-08-27
TW200848816A (en) 2008-12-16
US20080285911A1 (en) 2008-11-20

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