TWI421706B - 資訊處理裝置、資訊處理方法和記憶媒體 - Google Patents

資訊處理裝置、資訊處理方法和記憶媒體 Download PDF

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Publication number
TWI421706B
TWI421706B TW098101236A TW98101236A TWI421706B TW I421706 B TWI421706 B TW I421706B TW 098101236 A TW098101236 A TW 098101236A TW 98101236 A TW98101236 A TW 98101236A TW I421706 B TWI421706 B TW I421706B
Authority
TW
Taiwan
Prior art keywords
information
exposure
regions
processing
standard
Prior art date
Application number
TW098101236A
Other languages
English (en)
Chinese (zh)
Other versions
TW200947232A (en
Inventor
板井大介
川內義洋
小澤邦貴
Original Assignee
佳能股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 佳能股份有限公司 filed Critical 佳能股份有限公司
Publication of TW200947232A publication Critical patent/TW200947232A/zh
Application granted granted Critical
Publication of TWI421706B publication Critical patent/TWI421706B/zh

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70508—Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/706835—Metrology information management or control
    • G03F7/706837—Data analysis, e.g. filtering, weighting, flyer removal, fingerprints or root cause analysis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Data Mining & Analysis (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW098101236A 2008-01-21 2009-01-14 資訊處理裝置、資訊處理方法和記憶媒體 TWI421706B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008010997 2008-01-21
JP2008046901A JP5127507B2 (ja) 2007-02-27 2008-02-27 情報処理装置、情報処理方法、プログラムおよび露光システム

Publications (2)

Publication Number Publication Date
TW200947232A TW200947232A (en) 2009-11-16
TWI421706B true TWI421706B (zh) 2014-01-01

Family

ID=40877129

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098101236A TWI421706B (zh) 2008-01-21 2009-01-14 資訊處理裝置、資訊處理方法和記憶媒體

Country Status (4)

Country Link
US (1) US9057966B2 (https=)
JP (1) JP5127507B2 (https=)
KR (1) KR101067209B1 (https=)
TW (1) TWI421706B (https=)

Cited By (1)

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TWI646414B (zh) * 2017-02-09 2019-01-01 日商三菱電機股份有限公司 不良原因推定裝置以及不良原因推定方法

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JP5127507B2 (ja) 2007-02-27 2013-01-23 キヤノン株式会社 情報処理装置、情報処理方法、プログラムおよび露光システム
US8239152B2 (en) * 2007-02-27 2012-08-07 Canon Kabushiki Kaisha Information processing apparatus, information processing method, and computer program product
JP5503564B2 (ja) * 2011-01-18 2014-05-28 東京エレクトロン株式会社 処理装置の異常判定システム及びその異常判定方法
US10295993B2 (en) * 2011-09-01 2019-05-21 Kla-Tencor Corporation Method and system for detecting and correcting problematic advanced process control parameters
TWI840811B (zh) 2015-02-23 2024-05-01 日商尼康股份有限公司 基板處理系統及基板處理方法、以及元件製造方法
KR102688211B1 (ko) 2015-02-23 2024-07-24 가부시키가이샤 니콘 계측 장치, 리소그래피 시스템 및 노광 장치, 그리고 디바이스 제조 방법
HK1246871A1 (en) * 2015-02-23 2018-09-14 Nikon Corporation Measurement device, lithography system and exposure device, and management method, superposition measurement method and device manufacturing method
US12309346B2 (en) * 2016-07-26 2025-05-20 Qcify Inc. Product target quality control system with intelligent sorting
WO2021006287A1 (ja) * 2019-07-10 2021-01-14 ソニーセミコンダクタソリューションズ株式会社 異常検出装置と異常検出方法およびプログラムと情報処理システム
CN114003597B (zh) * 2020-07-13 2025-04-04 长鑫存储技术有限公司 半导体器件测量数据的处理方法、处理系统及计算机设备
US20220011678A1 (en) * 2020-07-13 2022-01-13 Changxin Memory Technologies, Inc. Processing method and processing system for measurement data of semiconductor device, computer device and computer readable storage medium

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Also Published As

Publication number Publication date
JP2009200450A (ja) 2009-09-03
KR20090080488A (ko) 2009-07-24
TW200947232A (en) 2009-11-16
US9057966B2 (en) 2015-06-16
JP5127507B2 (ja) 2013-01-23
KR101067209B1 (ko) 2011-09-22
US20090187379A1 (en) 2009-07-23

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