TWI417550B - 探針卡 - Google Patents

探針卡 Download PDF

Info

Publication number
TWI417550B
TWI417550B TW097115639A TW97115639A TWI417550B TW I417550 B TWI417550 B TW I417550B TW 097115639 A TW097115639 A TW 097115639A TW 97115639 A TW97115639 A TW 97115639A TW I417550 B TWI417550 B TW I417550B
Authority
TW
Taiwan
Prior art keywords
probe
probes
end portion
probe card
marking
Prior art date
Application number
TW097115639A
Other languages
English (en)
Chinese (zh)
Other versions
TW200902982A (en
Inventor
Shigeki Ishikawa
Takashi Nidaira
Original Assignee
Nhk Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nhk Spring Co Ltd filed Critical Nhk Spring Co Ltd
Publication of TW200902982A publication Critical patent/TW200902982A/zh
Application granted granted Critical
Publication of TWI417550B publication Critical patent/TWI417550B/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06722Spring-loaded

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
TW097115639A 2007-04-27 2008-04-25 探針卡 TWI417550B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007119059 2007-04-27
PCT/JP2008/058043 WO2008136395A1 (ja) 2007-04-27 2008-04-25 プローブカード

Publications (2)

Publication Number Publication Date
TW200902982A TW200902982A (en) 2009-01-16
TWI417550B true TWI417550B (zh) 2013-12-01

Family

ID=39943502

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097115639A TWI417550B (zh) 2007-04-27 2008-04-25 探針卡

Country Status (3)

Country Link
JP (1) JP5145332B2 (ja)
TW (1) TWI417550B (ja)
WO (1) WO2008136395A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6084140B2 (ja) * 2013-09-06 2017-02-22 ヤマハファインテック株式会社 電気検査装置
JP7254450B2 (ja) * 2018-05-16 2023-04-10 日本電産リード株式会社 プローブ、検査治具、検査装置、及びプローブの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0662381U (ja) * 1993-01-29 1994-09-02 安藤電気株式会社 スプリングピン式プローブカードとtab
TW468231B (en) * 1999-12-22 2001-12-11 Ando Electric Tab, probe card, tab handler and method for measuring IC chip
TWI269879B (en) * 2003-02-21 2007-01-01 Nhk Spring Co Ltd Chip-mounting tape inspecting method and probe unit used for inspection

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136844A (ja) * 1985-12-11 1987-06-19 Mitsubishi Electric Corp プロ−ビング装置
JP2006266893A (ja) * 2005-03-24 2006-10-05 Yamaha Corp プローブユニット

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0662381U (ja) * 1993-01-29 1994-09-02 安藤電気株式会社 スプリングピン式プローブカードとtab
TW468231B (en) * 1999-12-22 2001-12-11 Ando Electric Tab, probe card, tab handler and method for measuring IC chip
TWI269879B (en) * 2003-02-21 2007-01-01 Nhk Spring Co Ltd Chip-mounting tape inspecting method and probe unit used for inspection

Also Published As

Publication number Publication date
JP5145332B2 (ja) 2013-02-13
WO2008136395A1 (ja) 2008-11-13
TW200902982A (en) 2009-01-16
JPWO2008136395A1 (ja) 2010-07-29

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees