WO2008136395A1 - プローブカード - Google Patents

プローブカード Download PDF

Info

Publication number
WO2008136395A1
WO2008136395A1 PCT/JP2008/058043 JP2008058043W WO2008136395A1 WO 2008136395 A1 WO2008136395 A1 WO 2008136395A1 JP 2008058043 W JP2008058043 W JP 2008058043W WO 2008136395 A1 WO2008136395 A1 WO 2008136395A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
probes
thickness direction
board thickness
inspecting object
Prior art date
Application number
PCT/JP2008/058043
Other languages
English (en)
French (fr)
Inventor
Shigeki Ishikawa
Takashi Nidaira
Original Assignee
Nhk Spring Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nhk Spring Co., Ltd. filed Critical Nhk Spring Co., Ltd.
Priority to JP2009512969A priority Critical patent/JP5145332B2/ja
Priority to TW097115639A priority patent/TWI417550B/zh
Publication of WO2008136395A1 publication Critical patent/WO2008136395A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded

Abstract

　長手方向が検査対象の表面に対してその表面と略直交する方向から接触するプローブを用いる場合であっても、プローブと検査対象との位置合わせを容易にかつ適確に行うため、各々が導電性材料からなり、長手方向の一端が検査対象の表面に対して当該表面と略直交する方向から接触する複数のプローブと、各々が板厚方向に貫通して複数のプローブのいずれかを収容する複数の孔部を有するとともに、板厚方向に貫通する第１開口部を有するプローブホルダと、プローブホルダに固着され、複数のプローブおよび回路構造と電気的に接続される配線部を有するとともに、板厚方向に貫通して第１開口部と連通する第２開口部を有する配線基板と、前記第１および第２開口部を前記プローブホルダおよび前記配線基板の板厚方向に延長した３次元領域の内部に位置する先端部をそれぞれ有する複数のマーク部材と、を備える。
PCT/JP2008/058043 2007-04-27 2008-04-25 プローブカード WO2008136395A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009512969A JP5145332B2 (ja) 2007-04-27 2008-04-25 プローブカード
TW097115639A TWI417550B (zh) 2007-04-27 2008-04-25 探針卡

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007119059 2007-04-27
JP2007-119059 2007-04-27

Publications (1)

Publication Number Publication Date
WO2008136395A1 true WO2008136395A1 (ja) 2008-11-13

Family

ID=39943502

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058043 WO2008136395A1 (ja) 2007-04-27 2008-04-25 プローブカード

Country Status (3)

Country Link
JP (1) JP5145332B2 (ja)
TW (1) TWI417550B (ja)
WO (1) WO2008136395A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015033744A1 (ja) * 2013-09-06 2015-03-12 ヤマハファインテック株式会社 電気検査装置
CN110501538A (zh) * 2018-05-16 2019-11-26 日本电产理德股份有限公司 探针、检查夹具、检查装置、以及探针的制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0662381U (ja) * 1993-01-29 1994-09-02 安藤電気株式会社 スプリングピン式プローブカードとｔａｂ
WO2004074858A1 (ja) * 2003-02-21 2004-09-02 Nhk Spring Co., Ltd. チップ実装用テープの検査方法及び検査に用いるプローブユニット
JP2006266893A (ja) * 2005-03-24 2006-10-05 Yamaha Corp プローブユニット

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136844A (ja) * 1985-12-11 1987-06-19 Mitsubishi Electric Corp プロ−ビング装置
JP2001185588A (ja) * 1999-12-22 2001-07-06 Ando Electric Co Ltd Ｔａｂ、プローブカード、ｔａｂハンドラ、及びｉｃチップ測定方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0662381U (ja) * 1993-01-29 1994-09-02 安藤電気株式会社 スプリングピン式プローブカードとｔａｂ
WO2004074858A1 (ja) * 2003-02-21 2004-09-02 Nhk Spring Co., Ltd. チップ実装用テープの検査方法及び検査に用いるプローブユニット
JP2006266893A (ja) * 2005-03-24 2006-10-05 Yamaha Corp プローブユニット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015033744A1 (ja) * 2013-09-06 2015-03-12 ヤマハファインテック株式会社 電気検査装置
CN110501538A (zh) * 2018-05-16 2019-11-26 日本电产理德股份有限公司 探针、检查夹具、检查装置、以及探针的制造方法

Also Published As

Publication number Publication date
JPWO2008136395A1 (ja) 2010-07-29
JP5145332B2 (ja) 2013-02-13
TWI417550B (zh) 2013-12-01
TW200902982A (en) 2009-01-16

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