TWI402206B - 剪刀式升舉傳送自動控制儀器 - Google Patents

剪刀式升舉傳送自動控制儀器 Download PDF

Info

Publication number
TWI402206B
TWI402206B TW098133894A TW98133894A TWI402206B TW I402206 B TWI402206 B TW I402206B TW 098133894 A TW098133894 A TW 098133894A TW 98133894 A TW98133894 A TW 98133894A TW I402206 B TWI402206 B TW I402206B
Authority
TW
Taiwan
Prior art keywords
coupled
platform
linear
end effector
base
Prior art date
Application number
TW098133894A
Other languages
English (en)
Chinese (zh)
Other versions
TW201022111A (en
Inventor
栗田真一
松本隆之
安瓦蘇華
Original Assignee
應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TW201022111A publication Critical patent/TW201022111A/zh
Application granted granted Critical
Publication of TWI402206B publication Critical patent/TWI402206B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0096—Program-controlled manipulators co-operating with a working support, e.g. work-table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
    • B66F7/06—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported by levers for vertical movement
    • B66F7/065—Scissor linkages, i.e. X-configuration
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7612—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by lifting arrangements, e.g. lift pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7624—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Structural Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW098133894A 2008-10-07 2009-10-06 剪刀式升舉傳送自動控制儀器 TWI402206B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/247,135 US8272830B2 (en) 2008-10-07 2008-10-07 Scissor lift transfer robot

Publications (2)

Publication Number Publication Date
TW201022111A TW201022111A (en) 2010-06-16
TWI402206B true TWI402206B (zh) 2013-07-21

Family

ID=42075949

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098133894A TWI402206B (zh) 2008-10-07 2009-10-06 剪刀式升舉傳送自動控制儀器

Country Status (6)

Country Link
US (1) US8272830B2 (https=)
JP (1) JP5537552B2 (https=)
KR (1) KR101292135B1 (https=)
CN (1) CN102165575B (https=)
TW (1) TWI402206B (https=)
WO (1) WO2010042448A2 (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130277632A1 (en) * 2008-09-03 2013-10-24 Cemb S.P.A. Lifting device, particularly for lifting wheels and the like, for wheel balancing and tire moving machines
JP2010158759A (ja) * 2008-12-08 2010-07-22 Daihen Corp ワーク搬送装置
US9691650B2 (en) * 2009-09-29 2017-06-27 Applied Materials, Inc. Substrate transfer robot with chamber and substrate monitoring capability
US10265868B2 (en) * 2010-01-22 2019-04-23 Applied Materials, Inc. Transfer robot with substrate cooling
KR101230467B1 (ko) 2010-07-29 2013-02-25 주식회사 티이에스 기판 이송 유닛 및 이를 포함하는 기판 이송 장치
US20120223540A1 (en) * 2011-03-01 2012-09-06 L&W Engineering, Inc. Recreational Vehicle Lift Mechanism
KR101167120B1 (ko) * 2011-05-30 2012-07-20 주은유브이텍 주식회사 자외선 경화장치
JP5896549B2 (ja) * 2011-07-20 2016-03-30 株式会社ダイヘン 冷却ユニット及びこれを用いたワーク搬送装置
JP5364769B2 (ja) * 2011-09-26 2013-12-11 株式会社安川電機 搬送ロボットおよび基板処理装置
US20130309048A1 (en) * 2012-05-16 2013-11-21 Lam Research Ag Apparatus and method for transporting wafer-shaped articles
US10424498B2 (en) 2013-09-09 2019-09-24 Persimmon Technologies Corporation Substrate transport vacuum platform
US9387869B1 (en) 2015-04-16 2016-07-12 Aviad Berger Luggage with mechanically integrated trolley
US10052764B2 (en) 2016-06-16 2018-08-21 Toyota Motor Engineering & Manufacutring North America, Inc. Automated and adjustable platform surface
US10470841B2 (en) 2017-03-28 2019-11-12 Steris Inc. Robot-based rack processing system
CA3065867A1 (en) * 2017-06-02 2018-12-06 Ducker Group Gmbh Pallet robot having scissor-lift members
CN107225554B (zh) * 2017-06-19 2020-07-14 中电投宣化新能源发电有限公司 一种用于光伏发电装置维护工作的智能巡检设备
CN108145734B (zh) * 2017-12-26 2020-12-29 浙江勃嘉工业自动化有限公司 一种便于拆卸的自动化机械手
KR102405917B1 (ko) * 2020-04-06 2022-06-07 한국기계연구원 적층형 모듈 로봇
KR102405918B1 (ko) * 2020-04-27 2022-06-07 한국기계연구원 리프트 모듈 및 적층형 모듈 로봇
US11602064B2 (en) 2020-09-01 2023-03-07 Applied Materials, Inc. Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
CN112357581A (zh) * 2020-12-30 2021-02-12 彩虹（合肥）液晶玻璃有限公司 一种玻璃基板风干及传送装置
JP7845783B2 (ja) * 2022-01-17 2026-04-14 東京エレクトロン株式会社 基板処理装置、および漏液検知方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10335413A (ja) * 1997-05-29 1998-12-18 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH1187456A (ja) * 1997-09-12 1999-03-30 Dainippon Screen Mfg Co Ltd 基板処理装置
US6662673B1 (en) * 1999-04-08 2003-12-16 Applied Materials, Inc. Linear motion apparatus and associated method
US20080190707A1 (en) * 2007-02-13 2008-08-14 Tobias Hoth Lifting device

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993675A (en) * 1959-04-23 1961-07-25 Marie W Tatter Adjustable seats having lazy tong supports
US3901356A (en) * 1972-03-15 1975-08-26 Bear Manufacturing Corp Lift mechanism
SE450486B (sv) * 1983-08-29 1987-06-29 Edmo Torbjoern Ab Lyftbordskonstruktion
JPS62148188A (ja) * 1985-12-23 1987-07-02 三菱電機株式会社 産業用ロボツト装置
US4744712A (en) * 1986-05-06 1988-05-17 Ron Mitchell Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes
JPH01118882U (https=) * 1988-02-08 1989-08-11
JPH0611607B2 (ja) * 1990-07-11 1994-02-16 弘一 吉川 重量物の移動装置
DE4336662A1 (de) * 1993-10-27 1995-05-04 Stamm Johann Scherenhubtisch
JPH08124990A (ja) 1994-10-20 1996-05-17 Dainippon Screen Mfg Co Ltd 基板昇降装置
JPH08162516A (ja) * 1994-12-09 1996-06-21 Dainippon Screen Mfg Co Ltd 基板搬送装置
US5667353A (en) * 1995-03-31 1997-09-16 Inspex Inc. Robot system
US5722513A (en) * 1995-06-20 1998-03-03 Pentalift Equipment Corporation Scissor lift
JPH11129184A (ja) * 1997-09-01 1999-05-18 Dainippon Screen Mfg Co Ltd 基板処理装置および基板搬入搬出装置
JPH1187460A (ja) 1997-09-09 1999-03-30 Dainippon Screen Mfg Co Ltd 基板収納容器供給装置
US6182796B1 (en) * 1997-10-31 2001-02-06 Mohawk Resources Ltd. Vehicle lift
US6742768B2 (en) * 2002-03-07 2004-06-01 Transportes Continuos Interiores, S.A. Scissor lifting table
US6679479B1 (en) * 2002-06-27 2004-01-20 Steel Equipment Specialists, Llc Scissor lift mechanism
KR100531568B1 (ko) 2003-07-09 2005-11-29 주식회사 아바코 평판디스플레이 제조라인의 카세트 이송장치
DE10357609A1 (de) * 2003-12-10 2005-07-21 Kuka Roboter Gmbh Handhabungsgerät wie Industrieroboter und Verfahren zum Beeinflussen einer Umgebungsbedingung in einem solchen
JP4164034B2 (ja) * 2004-01-16 2008-10-08 大日本スクリーン製造株式会社 基板処理装置
US20060156851A1 (en) * 2004-12-02 2006-07-20 Jacobsen Stephen C Mechanical serpentine device
JP4719010B2 (ja) 2005-01-21 2011-07-06 日本電産サンキョー株式会社 産業用ロボット
JP2008001474A (ja) * 2006-06-22 2008-01-10 Nsk Ltd 昇降装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10335413A (ja) * 1997-05-29 1998-12-18 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH1187456A (ja) * 1997-09-12 1999-03-30 Dainippon Screen Mfg Co Ltd 基板処理装置
US6662673B1 (en) * 1999-04-08 2003-12-16 Applied Materials, Inc. Linear motion apparatus and associated method
US20080190707A1 (en) * 2007-02-13 2008-08-14 Tobias Hoth Lifting device

Also Published As

Publication number Publication date
TW201022111A (en) 2010-06-16
JP5537552B2 (ja) 2014-07-02
KR101292135B1 (ko) 2013-08-16
JP2012505548A (ja) 2012-03-01
US20100086380A1 (en) 2010-04-08
CN102165575A (zh) 2011-08-24
KR20110070897A (ko) 2011-06-24
WO2010042448A3 (en) 2010-07-22
US8272830B2 (en) 2012-09-25
WO2010042448A2 (en) 2010-04-15
CN102165575B (zh) 2014-07-09

Similar Documents

Publication Publication Date Title
TWI402206B (zh) 剪刀式升舉傳送自動控制儀器
US9691650B2 (en) Substrate transfer robot with chamber and substrate monitoring capability
US9245783B2 (en) Vacuum robot with linear translation carriage
KR101359062B1 (ko) 산업용 로봇
CN102069492B (zh) 手臂机构及具备该机构的真空机器人
KR100234539B1 (ko) 반도체장치 제조용 식각 장치
US11227784B2 (en) Thin plate substrate-holding device and transfer robot provided with this holding device
US7850414B2 (en) Linear transfer mechanism and transfer robot using the same
JP5324211B2 (ja) ワーク搬送装置
CN100466160C (zh) 大面积基板处理系统
KR100438502B1 (ko) 웨이퍼 가공 시스템
JP6860562B2 (ja) 電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法
JP2013141015A (ja) 複数レベルのロードロックチャンバ、移送チャンバ、及びこれにインターフェイスするのに適したロボット
JP7462339B2 (ja) 基板移送ロボットをチャンバ内で走行させるための走行ロボット
KR20100044606A (ko) 인라인 반도체 제조시스템
JP2011517134A (ja) クリーン移送ロボット
US9412634B2 (en) Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM
US12027411B2 (en) Integrated tool lift
JP2014144527A (ja) 産業用ロボット
JP3907889B2 (ja) 基板搬送装置
KR102110307B1 (ko) 웨이퍼 이송 장치
KR20200025653A (ko) 기판 반송 장치 및 기판 처리 장치
KR20210023686A (ko) 이송 장치