KR101292135B1 - 시저 리프트 이송 로봇 - Google Patents

시저 리프트 이송 로봇 Download PDF

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Publication number
KR101292135B1
KR101292135B1 KR1020117010574A KR20117010574A KR101292135B1 KR 101292135 B1 KR101292135 B1 KR 101292135B1 KR 1020117010574 A KR1020117010574 A KR 1020117010574A KR 20117010574 A KR20117010574 A KR 20117010574A KR 101292135 B1 KR101292135 B1 KR 101292135B1
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KR
South Korea
Prior art keywords
coupled
platform
support members
transfer robot
assembly
Prior art date
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KR1020117010574A
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English (en)
Korean (ko)
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KR20110070897A (ko
Inventor
시니치 쿠리타
타카유키 마츠모토
수하일 앤워
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Publication of KR20110070897A publication Critical patent/KR20110070897A/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/0096—Program-controlled manipulators co-operating with a working support, e.g. work-table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
    • B66F7/06—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported by levers for vertical movement
    • B66F7/065—Scissor linkages, i.e. X-configuration
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7612—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by lifting arrangements, e.g. lift pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7624—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Structural Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020117010574A 2008-10-07 2009-10-05 시저 리프트 이송 로봇 Active KR101292135B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/247,135 2008-10-07
US12/247,135 US8272830B2 (en) 2008-10-07 2008-10-07 Scissor lift transfer robot
PCT/US2009/059570 WO2010042448A2 (en) 2008-10-07 2009-10-05 Scissor lift transfer robot

Publications (2)

Publication Number Publication Date
KR20110070897A KR20110070897A (ko) 2011-06-24
KR101292135B1 true KR101292135B1 (ko) 2013-08-16

Family

ID=42075949

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117010574A Active KR101292135B1 (ko) 2008-10-07 2009-10-05 시저 리프트 이송 로봇

Country Status (6)

Country Link
US (1) US8272830B2 (https=)
JP (1) JP5537552B2 (https=)
KR (1) KR101292135B1 (https=)
CN (1) CN102165575B (https=)
TW (1) TWI402206B (https=)
WO (1) WO2010042448A2 (https=)

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US20130277632A1 (en) * 2008-09-03 2013-10-24 Cemb S.P.A. Lifting device, particularly for lifting wheels and the like, for wheel balancing and tire moving machines
JP2010158759A (ja) * 2008-12-08 2010-07-22 Daihen Corp ワーク搬送装置
US9691650B2 (en) * 2009-09-29 2017-06-27 Applied Materials, Inc. Substrate transfer robot with chamber and substrate monitoring capability
US10265868B2 (en) * 2010-01-22 2019-04-23 Applied Materials, Inc. Transfer robot with substrate cooling
KR101230467B1 (ko) 2010-07-29 2013-02-25 주식회사 티이에스 기판 이송 유닛 및 이를 포함하는 기판 이송 장치
US20120223540A1 (en) * 2011-03-01 2012-09-06 L&W Engineering, Inc. Recreational Vehicle Lift Mechanism
KR101167120B1 (ko) * 2011-05-30 2012-07-20 주은유브이텍 주식회사 자외선 경화장치
JP5896549B2 (ja) * 2011-07-20 2016-03-30 株式会社ダイヘン 冷却ユニット及びこれを用いたワーク搬送装置
JP5364769B2 (ja) * 2011-09-26 2013-12-11 株式会社安川電機 搬送ロボットおよび基板処理装置
US20130309048A1 (en) * 2012-05-16 2013-11-21 Lam Research Ag Apparatus and method for transporting wafer-shaped articles
US10424498B2 (en) 2013-09-09 2019-09-24 Persimmon Technologies Corporation Substrate transport vacuum platform
US9387869B1 (en) 2015-04-16 2016-07-12 Aviad Berger Luggage with mechanically integrated trolley
US10052764B2 (en) 2016-06-16 2018-08-21 Toyota Motor Engineering & Manufacutring North America, Inc. Automated and adjustable platform surface
US10470841B2 (en) 2017-03-28 2019-11-12 Steris Inc. Robot-based rack processing system
CA3065867A1 (en) * 2017-06-02 2018-12-06 Ducker Group Gmbh Pallet robot having scissor-lift members
CN107225554B (zh) * 2017-06-19 2020-07-14 中电投宣化新能源发电有限公司 一种用于光伏发电装置维护工作的智能巡检设备
CN108145734B (zh) * 2017-12-26 2020-12-29 浙江勃嘉工业自动化有限公司 一种便于拆卸的自动化机械手
KR102405917B1 (ko) * 2020-04-06 2022-06-07 한국기계연구원 적층형 모듈 로봇
KR102405918B1 (ko) * 2020-04-27 2022-06-07 한국기계연구원 리프트 모듈 및 적층형 모듈 로봇
US11602064B2 (en) 2020-09-01 2023-03-07 Applied Materials, Inc. Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
CN112357581A (zh) * 2020-12-30 2021-02-12 彩虹（合肥）液晶玻璃有限公司 一种玻璃基板风干及传送装置
JP7845783B2 (ja) * 2022-01-17 2026-04-14 東京エレクトロン株式会社 基板処理装置、および漏液検知方法

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JPH08124990A (ja) * 1994-10-20 1996-05-17 Dainippon Screen Mfg Co Ltd 基板昇降装置
JPH10335413A (ja) * 1997-05-29 1998-12-18 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH1187456A (ja) * 1997-09-12 1999-03-30 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2006224297A (ja) * 2005-01-21 2006-08-31 Nidec Sankyo Corp 産業用ロボット

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JPH0611607B2 (ja) * 1990-07-11 1994-02-16 弘一 吉川 重量物の移動装置
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JPH08162516A (ja) * 1994-12-09 1996-06-21 Dainippon Screen Mfg Co Ltd 基板搬送装置
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JPH11129184A (ja) * 1997-09-01 1999-05-18 Dainippon Screen Mfg Co Ltd 基板処理装置および基板搬入搬出装置
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Publication number Priority date Publication date Assignee Title
JPH08124990A (ja) * 1994-10-20 1996-05-17 Dainippon Screen Mfg Co Ltd 基板昇降装置
JPH10335413A (ja) * 1997-05-29 1998-12-18 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH1187456A (ja) * 1997-09-12 1999-03-30 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2006224297A (ja) * 2005-01-21 2006-08-31 Nidec Sankyo Corp 産業用ロボット

Also Published As

Publication number Publication date
TW201022111A (en) 2010-06-16
JP5537552B2 (ja) 2014-07-02
JP2012505548A (ja) 2012-03-01
US20100086380A1 (en) 2010-04-08
CN102165575A (zh) 2011-08-24
TWI402206B (zh) 2013-07-21
KR20110070897A (ko) 2011-06-24
WO2010042448A3 (en) 2010-07-22
US8272830B2 (en) 2012-09-25
WO2010042448A2 (en) 2010-04-15
CN102165575B (zh) 2014-07-09

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