TWI397942B - Excimer lamp - Google Patents

Excimer lamp Download PDF

Info

Publication number
TWI397942B
TWI397942B TW097148239A TW97148239A TWI397942B TW I397942 B TWI397942 B TW I397942B TW 097148239 A TW097148239 A TW 097148239A TW 97148239 A TW97148239 A TW 97148239A TW I397942 B TWI397942 B TW I397942B
Authority
TW
Taiwan
Prior art keywords
inner tube
ultraviolet ray
discharge
tube
excimer lamp
Prior art date
Application number
TW097148239A
Other languages
English (en)
Chinese (zh)
Other versions
TW200941540A (en
Inventor
Shigeki Fujisawa
Yukihiro Morimoto
Nobuyuki Hishinuma
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200941540A publication Critical patent/TW200941540A/zh
Application granted granted Critical
Publication of TWI397942B publication Critical patent/TWI397942B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/305—Flat vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
    • H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
TW097148239A 2008-03-19 2008-12-11 Excimer lamp TWI397942B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008071076A JP4998832B2 (ja) 2008-03-19 2008-03-19 エキシマランプ

Publications (2)

Publication Number Publication Date
TW200941540A TW200941540A (en) 2009-10-01
TWI397942B true TWI397942B (zh) 2013-06-01

Family

ID=41123383

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097148239A TWI397942B (zh) 2008-03-19 2008-12-11 Excimer lamp

Country Status (4)

Country Link
JP (1) JP4998832B2 (ko)
KR (1) KR101158965B1 (ko)
CN (1) CN101540264B (ko)
TW (1) TWI397942B (ko)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5200749B2 (ja) * 2008-08-08 2013-06-05 ウシオ電機株式会社 エキシマランプ
JP5892754B2 (ja) * 2011-09-22 2016-03-23 株式会社オーク製作所 エキシマランプおよび放電ランプの点灯方法
WO2013114718A1 (ja) * 2012-02-02 2013-08-08 ウシオ電機株式会社 エキシマランプおよびエキシマランプの発光管の製造方法
CN104568535A (zh) * 2013-10-29 2015-04-29 中芯国际集成电路制造(上海)有限公司 Vpd样品收集方法
JP5928848B2 (ja) * 2014-04-22 2016-06-01 ウシオ電機株式会社 光照射装置およびロングアーク型放電ランプ
JP5915976B2 (ja) * 2014-07-08 2016-05-11 ウシオ電機株式会社 ロングアーク型放電ランプおよび光照射装置
CN105810552A (zh) * 2015-02-27 2016-07-27 常州大恒环保科技有限公司 一种短波紫外光产生方法及其装置
JP6788842B2 (ja) * 2017-03-29 2020-11-25 ウシオ電機株式会社 水処理装置
KR102442405B1 (ko) * 2018-11-07 2022-09-13 우시오덴키 가부시키가이샤 롱 아크형 방전 램프
CN112117181A (zh) * 2020-10-10 2020-12-22 罗璐 一种准分子灯及美容仪
CN112043972B (zh) * 2020-10-10 2022-10-11 罗璐 一种夹壁管状的准分子灯及美容仪
CN112043970A (zh) * 2020-10-10 2020-12-08 罗璐 一种准分子真空紫外美容仪
CN112133624A (zh) * 2020-10-10 2020-12-25 罗璐 一种端面具有冷却气室的准分子灯及美容仪
CN112169179A (zh) * 2020-10-10 2021-01-05 罗璐 一种盲端工作的准分子灯及美容仪
KR102647084B1 (ko) * 2021-02-24 2024-04-16 김진우 플라즈마 램프 장치
JP2023158283A (ja) * 2022-04-18 2023-10-30 スタンレー電気株式会社 エキシマランプ、ランプユニット、及びエキシマランプの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004127710A (ja) * 2002-10-02 2004-04-22 Japan Storage Battery Co Ltd エキシマランプ及びこの放電用容器
TW200532741A (en) * 2004-03-25 2005-10-01 Ushio Electric Inc Excimer lamp
TW200601381A (en) * 2004-06-24 2006-01-01 Ushio Electric Inc Excimer lamp
JP2006012680A (ja) * 2004-06-28 2006-01-12 Ushio Inc エキシマランプ
TW200739658A (en) * 2005-12-28 2007-10-16 Ushio Electric Inc Excimer lamp

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08248199A (ja) * 1995-03-13 1996-09-27 Shinko Pantec Co Ltd 紫外線照射装置
JP2001307681A (ja) * 2000-04-18 2001-11-02 Japan Storage Battery Co Ltd 無声放電灯
JP3580233B2 (ja) * 2000-09-19 2004-10-20 ウシオ電機株式会社 誘電体バリア放電ランプ装置
JP2003104745A (ja) * 2001-09-28 2003-04-09 Watanabe Shoko:Kk 紫外殺菌ランプ用石英チューブ
JP4457768B2 (ja) * 2004-06-15 2010-04-28 ウシオ電機株式会社 エキシマランプ
JP4501830B2 (ja) 2005-09-28 2010-07-14 ウシオ電機株式会社 エキシマランプ及び紫外線照射装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004127710A (ja) * 2002-10-02 2004-04-22 Japan Storage Battery Co Ltd エキシマランプ及びこの放電用容器
TW200532741A (en) * 2004-03-25 2005-10-01 Ushio Electric Inc Excimer lamp
TW200601381A (en) * 2004-06-24 2006-01-01 Ushio Electric Inc Excimer lamp
JP2006012680A (ja) * 2004-06-28 2006-01-12 Ushio Inc エキシマランプ
TW200739658A (en) * 2005-12-28 2007-10-16 Ushio Electric Inc Excimer lamp

Also Published As

Publication number Publication date
KR101158965B1 (ko) 2012-06-21
JP4998832B2 (ja) 2012-08-15
CN101540264A (zh) 2009-09-23
KR20090100229A (ko) 2009-09-23
TW200941540A (en) 2009-10-01
JP2009230867A (ja) 2009-10-08
CN101540264B (zh) 2012-09-19

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