TW200739658A - Excimer lamp - Google Patents

Excimer lamp

Info

Publication number
TW200739658A
TW200739658A TW095137604A TW95137604A TW200739658A TW 200739658 A TW200739658 A TW 200739658A TW 095137604 A TW095137604 A TW 095137604A TW 95137604 A TW95137604 A TW 95137604A TW 200739658 A TW200739658 A TW 200739658A
Authority
TW
Taiwan
Prior art keywords
tube
electrode
inside tube
outside
supporting member
Prior art date
Application number
TW095137604A
Other languages
Chinese (zh)
Other versions
TWI404113B (en
Inventor
Masahide Kiyose
Noritaka Takezoe
Takumi Yamane
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200739658A publication Critical patent/TW200739658A/en
Application granted granted Critical
Publication of TWI404113B publication Critical patent/TWI404113B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H01J61/0672—Main electrodes for low-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H01J61/541—Igniting arrangements, e.g. promoting ionisation for starting using a bimetal switch
    • H01J61/542—Igniting arrangements, e.g. promoting ionisation for starting using a bimetal switch and an auxiliary electrode inside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0001—Electrodes and electrode systems suitable for discharge tubes or lamps
    • H01J2893/0002—Construction arrangements of electrode systems

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

To provide an excimer lamp with a long life of which an inside tube is not broken even if an inside electrode moves toward the inside tube connection part in accordance with switch-on and switch-off. The excimer lamp has a discharging container 1 of double tube structure, of which the space between an outside tube 2 and an inside tube 3 made of glass, arranged coaxially, is formed into a discharging space. An outside electrode 4 is formed on outer face of the outside tube 2 and an inside electrode 5 is formed on inner face of the inside tube 3. The inside electrode 5 is a plate-shaped electrode made of metal extending in longitudinal direction while curving along inner face of the inside tube 3. A supporting member 6 for supporting the inside tube 3 is fixed to the inside tube connection part 30 side of the outside tube 2 between the outside tube 2 and the inside tube 3, and a space is formed between the supporting member 6 and the inside tube 3. A part 7 stopping the collision of the inside electrode 5 is formed on the inside tube 3 at a position shifted from the position facing the supporting member 6 toward center side in longitudinal direction of the discharging container 1.
TW095137604A 2005-12-28 2006-10-12 Excimer lamp TWI404113B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005377555A JP4816075B2 (en) 2005-12-28 2005-12-28 Excimer lamp

Publications (2)

Publication Number Publication Date
TW200739658A true TW200739658A (en) 2007-10-16
TWI404113B TWI404113B (en) 2013-08-01

Family

ID=38304862

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137604A TWI404113B (en) 2005-12-28 2006-10-12 Excimer lamp

Country Status (3)

Country Link
JP (1) JP4816075B2 (en)
KR (1) KR101004953B1 (en)
TW (1) TWI404113B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI397942B (en) * 2008-03-19 2013-06-01 Ushio Electric Inc Excimer lamp
TWI407482B (en) * 2010-02-17 2013-09-01 Ushio Electric Inc Discharge lamp
TWI423298B (en) * 2008-03-10 2014-01-11 Ushio Electric Inc An excimer lamp and a method for manufacturing the excimer lamp
CN112043970A (en) * 2020-10-10 2020-12-08 罗璐 Quasi-molecule vacuum ultraviolet beauty instrument

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6107789B2 (en) * 2014-10-30 2017-04-05 ウシオ電機株式会社 Excimer discharge lamp
JP7106945B2 (en) * 2018-04-02 2022-07-27 ウシオ電機株式会社 Excimer lamp, light irradiation device, and ozone generator
KR102116867B1 (en) 2018-05-08 2020-05-29 주식회사 원익큐엔씨 Surface treatment device for implant
JP7462524B2 (en) 2020-09-17 2024-04-05 株式会社オーク製作所 Excimer lamps, UV irradiation devices and ozone generators
CN112117181A (en) * 2020-10-10 2020-12-22 罗璐 Excimer lamp and beauty instrument

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3082638B2 (en) * 1995-10-02 2000-08-28 ウシオ電機株式会社 Dielectric barrier discharge lamp
JP3346291B2 (en) * 1998-07-31 2002-11-18 ウシオ電機株式会社 Dielectric barrier discharge lamp and irradiation device
JP3692987B2 (en) * 2001-09-17 2005-09-07 ウシオ電機株式会社 Dielectric barrier discharge lamp device
DE10213327C1 (en) * 2002-03-25 2003-06-18 Heraeus Noblelight Gmbh Discharge vessel used for dielectric barrier discharge lamps made from silica glass has a protective device consisting of a self-supporting component which is made from a part of a material absorbing ultraviolet radiation
JP3975826B2 (en) * 2002-05-16 2007-09-12 ウシオ電機株式会社 Lamp vessel
JP4029715B2 (en) * 2002-10-18 2008-01-09 ウシオ電機株式会社 Excimer discharge lamp
JP4461707B2 (en) * 2003-05-06 2010-05-12 ウシオ電機株式会社 Excimer lamp

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI423298B (en) * 2008-03-10 2014-01-11 Ushio Electric Inc An excimer lamp and a method for manufacturing the excimer lamp
TWI397942B (en) * 2008-03-19 2013-06-01 Ushio Electric Inc Excimer lamp
TWI407482B (en) * 2010-02-17 2013-09-01 Ushio Electric Inc Discharge lamp
CN112043970A (en) * 2020-10-10 2020-12-08 罗璐 Quasi-molecule vacuum ultraviolet beauty instrument

Also Published As

Publication number Publication date
TWI404113B (en) 2013-08-01
KR20070070055A (en) 2007-07-03
KR101004953B1 (en) 2010-12-28
JP4816075B2 (en) 2011-11-16
JP2007179891A (en) 2007-07-12

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