200834647 九、發明說明 【發明所屬之技術領域】 本發明關於放電燈，特別關於使用改善了真空 之短波長側的透過特性的特定合成石英玻璃作爲形 容器全體或例如光放射用窗構件等的放電容器的一 材料的放電燈。 【先前技術】 現在，放射紫外光特別包含真空紫外光之光; 燈，在各種領域被廣泛的利用中，例如，利用氙準 之液晶用玻璃基板洗浄裝置、或利用重氫燈之真空 領域的分光測定裝置等爲眾所皆知。 這些的放電燈之放電容器是藉由具有例如對真 光之光透過性的合成石英玻璃來形成。 在近年，對放射這種真空紫外光之放電燈，被 更高輸出來放射例如真空紫外光，對於這種要求， 善構成放電容器之合成石英玻璃本身的特性（例如 利文獻1〜專利文獻3 )。 例如，在專利文獻1的特開2005-306650號公 示有將波長165 nm之分光透過率作爲65 %以上，且 〜10000 wt. ppm的濃度添加氟，並且以未滿5χ1〇 cm3的比率含有氫分子之合成石英玻璃，並且顯示 石英玻璃對放電燈等之利用可能性。 又，在專利文獻2的日本特開2005-310455號 紫外光 成放電 部分之 的放電 分子燈 紫外光 空紫外 要求以 進行改 參照專 報，揭 以20 0 16個/ 該合成 公報， 200834647 記載有：作爲形成具有波長20〇 nm以下的發光光譜之紫 外線燈的發光容器的材料，利用波長1 6 5 nm之分光透過 率爲65 %以上、氟濃度爲200〜10000 wt. ppm，且OH基 的含有量爲10 wt· ppm以下之合成石英玻璃。 且，在專利文獻3的日本特開2001-019450號公報， 揭示有：氟濃度爲100 ppm以上並且OH基的含有量爲 100 ppm以下，且，假想温度爲110()°C以下之合成石英玻 璃。又，在段落003 3記載有：當氟濃度超過3 000 ppm 時’則耐紫外線性降低之情事。且，顯示有：作爲放射由 紫外光域至真空紫外光域之光的例如低壓水銀燈、準分子 燈、重氫燈等的封入管之形成材料之利用可能性。 [專利文獻1]日本特開2005-306650號公報 [專利文獻2]日本特開2005-310455號公報 [專利文獻3]日本特開200 1 -0 1 9450號公報 【發明內容】 [發明所欲解決之課題] 但，在使用上述專利文獻1〜專利文獻3所記載的合 成石英玻璃中的任一者構成放電燈之情況，無法獲得充分 的耐紫外光特性。 即，當例如以氙準分子燈爲例進行說明，在氙準分子 燈之放電容器的內部，氙的準分子放射，波長145 nm〜 1 60 nm之合成石英玻璃之紫外吸收端的光也被放射，受到 此紫外光吸收端附近的光爲形成放電容器之合成石英玻璃 -5- 200834647 所吸收，造成放電容器的温度上昇的結果，合成石英玻璃 之紫外吸收端朝長波長側偏移，因此，會產生氣的準分子 放射受到合成石英玻璃所吸收的程度更爲增加，放電容器 的温度更進一步上昇之惡性循環，造成合成石英玻璃的真 空紫外光透過特性降低（劣化）。 然後，因真空紫外光透過特性降低（劣化），造成在 放電容器的內部所放射的真空紫外光被形成放電容器之合 成石英玻璃所吸收的比率增加，紫外光歪斜的蓄積增大， 產生破壊爲止的時間（燈壽命）變短之問題產生。 又，短波長領域的真空紫外光的透過率降低的這一件 事也爲一大問題。 這樣的問題，不僅是氙準分子燈，在放射含有真空紫 外光的光之放電燈中也會產生。 本發明是爲了解決上述問題而開發完成之發明，其目 的在於提供，真空紫外光的放射強度高，且具有充分長的 燈壽命之放電燈。 [用以解決課題之手段] 本發明的放電燈是在放電容器的內部放射包含波長 1 90 nm以下的紫外光之光的放電燈，其特徵爲：前記放電 容器的至少一部分是由氟含有量爲7000 wt. ppm以上 3 0000 wt· ppm以下、且假想温度Tf爲75 0°C以上l〇〇〇°C 以下之合成石英玻璃所構成。 在於本發明的放電燈，作爲形成前記放電容器之合成 -6 - 200834647 石英玻璃，理想爲使用氟含有量爲1 0000 Wt. ppm以上 3 0000 wt. ppm以下者，且，理想爲使用OH基的含有量爲 3 0 wt. ppm以下者。 [發明效果] 若根據本發明的放電燈的話，形成放電容器的至少一 部分之氟含有量及假想温度爲被適當化的合成石英玻璃 (以下稱爲「特定合成石英玻璃」）是該特定合成石英玻 璃之紫外吸收端朝短波長側偏移，具有優良之真空紫外光 域的紫外光透過特性者，所以，能以充分高的放射強度放 射真空紫外光。 並且’藉由特定合成石英玻璃爲紫外吸收端朝短波長 側偏移者’能夠減低放在電容器的內部所放射的波長1 9 〇 nm以下的真空紫外光受到形成放電容器之特定合成石英 玻璃所吸收的比率，所以，可確實地抑制因真空紫外光的 放射造成對特定合成石英玻璃之損傷特別是蓄積紫外光歪 斜，其結果，能夠構成耐紫外光特性（紫外線耐久性） 高、具有極長的燈壽命者。 又’除了特定合成石英玻璃做成氟含有量及假想温度 被適當化者外’且，作成含有特定濃度之〇H基，藉此 OH基的作用，可更進一步減輕紫外光歪斜，所以，能夠 確實地獲得高耐紫外光特性，能夠使放電燈具有更長的燈 壽命。 200834647 【實施方式】 本發明的放電燈是使用氟含有量（濃度）及假想温度 被適當化的特定合成石英玻璃，作爲形成放電容器全體或 例如光放射用窗構件等的放電容器的一部分之材料，改善 真空紫外光之短波長側的透過特性的放電燈。以下，以氣 準分子燈爲例，說明關於本發明。 圖1-A是顯示本發明之氙準‘分子燈的一例之槪略結構 之説明用斷面圖，圖1-B是顯示圖1-A所示的氙準分子燈 的與放電容器的管軸垂直之剖面的斷面圖。 此氙準分子燈（以下僅稱爲「準分子燈」）丨〇是具備 有雙重管構造的放電容器11，該放電容器具有由合成石英 玻璃所構成的圓筒狀外側管1 2 ;在此外側管12內，與其 管軸配置於同軸上，且具有較該外側管1 2的內徑更小的 外徑，且由合成石英玻璃所構成的圓筒狀內側管1 3，外側 管1 2與內側管1 3在兩端部被熔融接合，外側管1 2與內 側管1 3之間形成有氣密地封合的環狀放電空間S。由例 如金屬網等的導電性材料所構成之網狀外部電極1 5密接 設置於外側管1 2的外周面，並且由例如鋁板所構成的內 部電極1 6密接設置於內側管1 3的內周面。又，在放電空 間S內，塡充有藉由準分子放電形成準分子之作爲放電用 氣體的氣氣。 在此準分子燈10，例如，利用以高頻電源（未圖 示），將控制成適當大小之高頻電壓施加於外部電極15 與內部電極1 6之間，使得在放電空間s內產生準分子放 -8 - 200834647 電，藉由此準分子放電，形成由氙氣（放電用氣體） 生之準分子，在放電容器11的內部，放射包含波長 nm以下的真空紫外光之光。 在上述準分子燈10，形成放電容器11之合成石 璃爲（1)氟含有量爲7000 wt. ppm以上30000 wt. 以下，且（2)假想温度Tf爲750°C以上1 000°C以下i 符合上述（1)及（2)兩個條件之特定合成石 璃，是真空紫外光域之紫外吸收端被朝短波長側偏移 爲具有優良之真空紫外光域的紫外光透過特性者，具 由該特定合成石英玻璃所構成的放電容器11之準分 1 〇，能夠以高的放射強度放射真空紫外光，並且具有 燈壽命。 另外，在合成石英玻璃爲未符合上述（1)及（2 少其中一方的條件之情況，例如，即使合成石英玻璃 含有量爲上述範圍內之情況，而假想温度Tf爲由上 度範圍偏移之情況，無法構成具有充分高的真空紫外 過特性及充分高的耐紫外光特性（紫外線耐久性）之 子燈，即，無法構成具有極長的燈壽命者。 又，在氟含有量爲超過30000 wt. ppm之情況， 出至放電空間內部，爲了使準分子燈在預定的狀態作 而需要更大的燈電壓、燈輸入，伴隨此，放電容器1 温度上昇，紫外吸收端朝長波長側偏移，造成真空紫 的放射強度降低，並且容易蓄積因真空紫外光的放射 生之紫外光歪斜，使燈壽命變短。 所產 190 英玻 ppm f ° 英玻 ，成 備有 子燈 長的 )至 之氟 述温 光透 準分 氟析 動， 1的 外光 所產 -9- 200834647 在合成石英玻璃之氟含有量符合上述條件（2)之情 況即假想温度Tf爲75(TC以上1 000°C以下之情況，理想 爲10000 wt· ppm以上3 00 00 wt· ppm以下。這樣的合成 石英玻璃會成爲具有更高的真空紫外光透過特性及更高的 耐紫外光特性者，具備有由該特定合成石英玻璃所構成之 放電容器的準分子燈1 0能以高的放射強度放射真空紫外 光，並且成爲具有更長的燈壽命者。 假想温度Tf爲關於玻璃的構造（密度）之指標，爲 以下述方式所求得的値。 即，首先，例如對與製作燈製作時相同的玻璃管之一 部分，進行與燈相同的熱處理’由相互不同的複數個部 位，切出各爲1 5 mm正方左右的大小之樣品。 其次，對各樣品之紅外透過光譜，使用例如紅外分光 裝置「Magna760」 （Nicoket社製），藉由透過法，在波 數2000〜40 00 cnT1的範圍，以分解能2 cnT1、波數間隔 0.0 62 5 cnT1、32次累計進行測定。 求取藉此所獲得的紅外透過光譜資料之波數2260CHT1 的吸收帶之峰値波數，將各樣品之峰値波數的平均値作爲 該準分子燈之峰値波數AfcnT1]，由下述數學式算出。 [數學式1] 作^一 143809^ 2iy (A-222B, 64) IB-m 在上述數學式1，Tf爲假想温度pc ]，A爲峰値波數 -10- 200834647 [cnT1] ’ 〇：及/5分別爲由下述數學式2所獲得的値，數學 式2之F爲氟含有量（濃度）[ιη〇1%]。 [數學式2] 4611 ψ}2 +108, 4?37[：F]-27, 3180 0060 wf lieg [F] +1, 0-4f a 又，在上述準分子燈10，形成放電容器11的特定合 成石英玻璃’除了氟含有量及假想温度爲適當化以外， 且，以30 wt· ppm以下的比率含有0H基爲佳。 一般’作爲0H基的作用，確認了紫外光歪斜的成長 緩和效果及紫外光歪斜的助長效果，但，藉由OH基的含 有量爲30 wt· ppm以下，可有效地發現紫外光歪斜的成長 緩和效果，可使準分子燈1 〇成爲更確實地具有預期的燈 壽命者。 另外，在OH基的含有量超過30 wt. ppm之情況，準 分子燈1〇的燈壽命比起實質不含有OH基者，反而變 短。 上述結構之準分子燈1 0，例如能以下述方式加以製 作。即’首先，藉由將由氟含有量爲上述範圍內之合成石 英玻璃（原材料）所構成的圓筒狀裸管之兩端部，以外端 朝徑方向外側擴展延伸的方式加工成喇叭狀，預先製作構 成內側管之圓筒狀內側管構成用裸管，在由與此內側管構 成用裸管相同的合成石英玻璃所構成、具有較內側管構成 用裸管之外徑更大的內徑、且構成外側管之圓筒狀外側管 -11 - 200834647 構成用裸管之內部，插入內側管構成用裸管並配置於同軸 上，再利用由管軸方向外方側以例如加熱器等進行加熱， 使外側管構成用裸管之內周面與內側管構成用裸管之端部 部分的前端面熔著，藉此，製作在外側管1 2與內側管1 3 之間形成有管狀放電空間S之雙重管構造的燈前驅體。在 此，作爲放電容器形成材料（原材料）之合成石英玻璃的 假想温度T F爲未符合上述條件（2 )者。其次，將如此所 獲得之燈前驅體在例如電氣爐等進行加熱處理後，例如由 電氣爐內取出並冷卻，然後，將作爲放電用氣體的氙氣封 入至燈前驅體之放電空間S內，並且將外部電極1 5及內 部電極1 6配設於預定的位置，藉此獲得如圖1所示結構 的準分子燈1 0。 在對燈前驅體進行加熱處理之際的加熱處理條件，能 夠針對例如形成燈前驅體的合成石英玻璃之作爲加熱處理 後的目標之假想温度及作爲放電容器形成材料之合成石英 玻璃（原材料）的假想温度之関係加以設定，由製造燈時 的良品率之觀點來看，實際上，加熱温度（電氣爐內的温 度）爲例如900〜1150°C、加熱時間（電氣爐內的保持時 間）爲例如1〜1 0小時爲佳。 又，加熱處理後的燈前驅體之冷卻，能夠藉由停止例 如電氣爐的加熱，在該狀態下放置於電氣爐內，或，例如 在打開管狀開閉式爐的狀態予以放置來進行。進行這樣的 冷卻處理所需之時間（放置時間），例如爲0.5〜1 0小時 左右。 -12- 200834647 因此，若根據上述結構的準分子燈1 0的話，藉 電容器11是以氟濃度爲7000 Wt· ppm以上3 00 00 wt. 以下、且假想温度Tf爲750 °C以上1000 以下之特 成石英玻璃所構成，能夠以高的放射強度放射，在放 器1 1的內部（放電空間S內）所放射的真空紫外光 且能獲得極長的燈壽命。此理由如以下所述。 即，亦如上述專利文獻1〜專利文獻3所記載， 使合成石英玻璃含有氟，可利用Si與F之結合（ξ 結合）的作用，適當地切斷Si與Ο之合成石英玻璃 不穩定構造（例如結合角歪斜三Si-O-Si^結合），藉 可獲得緩和了合成石英玻璃中的潛在內部應力，使合 英玻璃之紫外吸收端朝短波長側偏錫，可提升紫外線 率之所δ胃「不穩定構造緩和效果」。但，在上述專利 1〜專利文獻中的任一者，當合成石英玻璃之氟含有 多時’則會產生問題。例如在專利文獻3，記載有「 有氟濃度爲超過3000 wt· ppm之情況，會有產生還元 陷’造成耐紫外線性降低之虞」，實際上，氟含有量 未滿3000 wt· ppm。又，在專利文獻1及專利文獻2 樣地’實際上、氟含有量作成500〇 wt. ppm以下。 在利用含有至今合成石英玻璃所沒有的濃度即 wt· ppm以上30〇〇〇 wt· ppm以下的濃度之氟的合成石 璃’若根據本發明，合成石英玻璃，藉由進行加熱處 使得合成石英玻璃的構造的容易產生，成爲密度高 態’換言之’假想温度成爲較加熱處理前的狀態之假 由放 ppm 定合 電容 ，並 藉由 Si-F 中的 此， 成石 透過 文獻 量過 在含 型缺 作成 也同 7000 英玻 理， 之狀 想温 -13- 200834647 度低的750 °C以上l〇〇〇°C以下之狀態（特定合成石英玻 璃），可確實地獲得更高的不穩定構造緩和效果，可使紫 外吸收端確實地朝短波長側偏移，成爲具有高紫外線透過 率者，所以，準分子燈1 〇成爲能以高的放射強度放射真 空紫外光者。 又，藉由使紫外吸收端朝短波長側偏移，使得在放電 容器1 1的內部所放射的波長1 90 nm以下的真空紫外光被 形成放電容器1 1的特定合成石英玻璃吸收之比率降低， 所以，可確實地抑制因真空紫外光對特定合成石英玻璃所 造成之損傷特別是蓄積紫外光歪歪斜，且，可構成耐紫外 光特性（紫外線耐久性）高，具有極長的燈壽命者之準分 子燈1 0。 如以上所述，在本發明，在於準分子燈1 0的製造製 程進行加熱處理，至今爲止，在製造由合成石英玻璃所構 成之物例，如燈的放電容器或各種透鏡等的光學零件時， 需要除去加工歪斜（應力）而賦予必要的光學，而進行例 如均質化、成形、退火等的熱處理。 但，在本發明之準分子燈10，形成放電容器11之合 成石英玻璃爲藉由謀求氟含有量及假想温度雙方之適當化 者，可獲得上述效果的同時，亦可獲得除去加工歪斜（應 力）之除去效果。 因此，若根據本發明的話，能夠以不會與製造以往結 構者所需的時間有大差異，且能夠較容易製作具有期望性 能之準分子燈1 0。 -14- 200834647 以下，說明關於用來確認本發明的效果之實験例。 <實験例1 > [準分子燈的製作] 分別使用依據下述表1，以相互不同之含有量（濃 度）含有氟的8種類合成石英玻璃（原材料），形成8個 燈前驅體，對各燈前驅體，使用電氣爐，相互地在相同的 加熱處理條件進行加熱處理（亦包含冷卻處理）後，將內 部電極及外部電極配置於預定位置，並且將氙氣塡充於放 電空間內，藉此製作如圖1所示的結構之8支準分子燈 (「燈1」〜「燈8」）。所獲得之準分子燈的具體的結 構如以下所述。 [準分子燈的結構] 放電容器··外側管之外徑爲40 mm ’外側管之壁厚爲 2 mm，內側管之外徑爲20 mm，內側管之壁厚爲1 mm， 發光長度爲400 mm，氣氣的封入量爲66kPa。 針對如此所獲得之燈1〜燈8，分別進行燈壽命實 驗，並且測定波長190 nm以下的真空紫外光的放射強 度。其結果如下述表1所示。 壽命實驗，使燈在燈電力成爲400W之點燈條件下， 連續點燈，放電容器產生破損爲止的時間作爲壽命時間。 放射強度是以光量計，在與燈分離3 0 mm之位置進行 測定。 -15- 200834647 又，對與構成各燈相同之玻璃管（原材料）的一部 分，以與製作燈時的相同條件下進行熱處理，切出3個各 自爲1 5 m m正方左右大小之樣品，藉由上述方法測定假想 温度Tf。其結果如下述表1所示。 [表1] 燈No. 氟含有量 [wt. ppm] 假想溫度 [°C] 放射強度 [相對値] 燈壽命 [小時] 燈1 0 1260 100 1778 燈2 5000 1045 102.3 2703 燈3 7000 800 104.4 3750 燈4 10000 805 105.1 4011 燈5 10500 800 105.2 3890 燈6 20000 800 105.0 4001 燈7 30000 800 104.6 3859 燈8 36000 800 97.0 2980 由實験例1的結果確認到，爲具備合成石英玻璃的假 想温度爲 8 00 °c左右，以 7000 wt. ppm以上 3 0000 wt. ppm以下的比率含有氟之由合成石英玻璃所構成的放電容 器之作爲本發明之準分子燈的燈3〜燈7，均能以高放射 強度放射真空紫外光，並且長的燈壽命。在此，也確認 到，針對這種雙重管構造的氙準分子燈，被要求例如3 000 小時以上的燈壽命，這些的燈均可達到這樣的要求。 相對於此，確認到，在合成石英玻璃之氟含有量較 7 0 00 wt· ppm少的作爲比較用準分子燈之燈！及燈2，在 即使進行了加熱處理之情況，無法將假想温度作成丨000 -16- 200834647 以下，並且，比起燈3〜7，真空紫外光的放射強度低， 且，無法獲得達到上述要求之燈壽命。 <實験例2 > [準分子燈的製作] 除了使用以10500 wt· ppm含有氟，藉由上述方法所 測定的假想温度Tf爲1 3 5 0 °C之合成石英玻璃（原材料） 以外，製作具有與在上述實験例1所製作者相同結構之燈 前驅體，使用電氣爐，將各自的燈前驅體以相互不同之加 熱温度，進行加熱處理，將加熱處理後的合成石英玻璃的 假想温度Tf依據下述表2進行控制，製作5支的準分子 燈（「燈5」及「燈9」〜「燈12」）。再者，實験例2 之燈5爲與在實験例1所製作者相同。 針對如此所獲得之燈5及燈9〜燈1，與上述實験例1 同樣地進行燈壽命實驗，並且測定波長1 90 nm以下的真 空紫外光的放射強度。其結果如下述表2所示。 又，針對壽命實驗完畢後的各燈，與上述實験例1同 樣地，測定假想温度Tf。其結果如下述表2所示。 -17- 200834647 [表2] 燈No. 氟含有量 [wt. ppm] 假想溫度 [°C] 放射強度 [相對個 燈壽命 [小時] 燈9 10500 750 105.2 4239 燈5 10500 800 105.2 3890 燈10 10500 900 105.1 3822 燈11 10500 1000 105.1 3685 燈12 10500 1150 105.0 2602 由實験例2的結果確認到，在具備由以 1 0500 wt. ppm含有氟之合成石英玻璃所構成的放電容器之準分子 燈，在形成放電容器之合成石英玻璃的假想温度Tf爲750 °C以上 1 00 0 °C以下的本發明之燈 5、燈 9、燈 1 〇及燈 1 1，能以高的放射強度放射真空紫外光，並且可獲得3000 小時以上之長燈壽命。 相對於此，也確認到，不受合成石英玻璃爲以適當範 圍含有氟，而假想温度爲超過1 000 °C之比較用燈12，雖 能以高的放射強度放射真空紫外光，但不具有所需之燈壽 命者。 再者，雖確認到燈9爲可獲得充分高的真空紫外光的 放射強度，並且，具有所需之充分長的燈壽命，但，爲了 製作燈9，而實施200小時以上之長時間的熱處理，在這 一點上，並不實用，但，燈5、燈10及燈1 1，與以往製 作準分子燈所需之時間並無大差異，且容易製作。。 又，採用與氟含有量爲7000 wt. ppm以上30000 wt. ppm以下的範圍內之上述實験例2所使用者不同之氟含有 -18- 200834647 重的合成石英玻璃（原材料），製作準分子燈，進行與實 験例2相同的實験（真空紫外光的放射強度測定、壽命實 驗及假想温度的測定），確認到，與上述實験例2相同傾 向之結果’即’在形成放電容器之合成石英玻璃的假想温 度Tf爲75 0 °C以上l〇〇(TC以下者，能以高的放射強度放 射真空紫外光，並且可獲得3 〇 〇 〇小時以上之長燈壽命。 <實験例3 > [準分子燈的製作] 除了使用以10500 wt· PPm的比率含有氟，藉由上述 方法所測定到的假想温度爲1 3 5 0°C，而依據下述表3，以 相互不同之含有量含有各OH基之6種類的合成石英玻璃 (原材料）以外，製作具有與在上述實験例1所製作者相 同結構之燈前驅體，使用電氣爐，對各自的燈前驅體，以 相互相同的加熱處理條件進行加熱處理，製作本發明之6 支準分子燈（「燈5」及「燈13」〜「燈17」）。 再者，實験例3之燈5爲與實験例1所製作者相同。 針對如此所獲得之燈5及燈1 3〜燈1 7 ’與上述實験 例1同樣地進行燈壽命實驗，並且測定波長1 90 nm以下 的真空紫外光的放射強度。其結果如下述表3所示。 又，針對壽命實驗完畢後的各燈，與上述實験例1同 樣地，測定假想温度Tf。其結果如下述表3所示。 -19- 200834647 [表3] 燈No. 氟含有量 [wt. ppm] 假想溫度 [°C] OH基濃度 [wt. ppm] 放射強度 [相對値] 燈壽命 [小時] 燈5 10500 800 1 105.2 3890 燈13 10500 800 10 104.9 3980 燈14 10500 800 15 104.7 3968 燈15 10500 800 30 104.2 3923 燈16 10500 800 40 103.9 3630 燈17 10500 800 80 102.9 3185 燈5之合成石英玻璃，實際上非爲控制OH基的含有 量者，而是在作爲原材料之合成石英玻璃的製造過程，含 有OH基。因此，以此燈5之燈壽命作爲基準，比較燈1 3 〜燈1 7之各自的燈壽命時，確認到，針對藉由氟含有量 及假想温度被適當化的特定合成石英玻璃，且，使用OH 基的含有量爲30 wt. ppm以下者所形成有之放電容器的燈 13〜燈15，比起具備由實質上不具有OH基的合成石英玻 璃所構成之放電容器的燈5，可獲得更成的燈壽命。 另外，確認到，在OH基的含有量爲超過30 wt. ppm 之燈1 6及燈1 7，雖能以充分高的放射強度放射真空紫外 光，且具有所需的燈壽命（3 000小時以上）者，但，實質 上比起具備有由不具有OH基之合成石英玻璃所構成的放 電容器之燈5，反而造成放射強度降低並且燈壽命變短。 以上，說明了關於本發明的實施形態，但本發明不限 於上述實施形態，可進行各種變更。 例如，本發明不限於雙重管構造的氙準分子燈，亦可 適用於：例如圖2-A及圖2-B所示之所謂「外-外電極型 -20- 200834647 準分子燈」或如圖3所示的短弧型放電燈等，在放電容器 的內部，放射包含波長1 5 0 nm以下的真空紫外光的光之 放電燈。 亦可如圖2-A及圖2-B所示的準分子燈20，其是具 備兩端被氣密地封裝且在內部形成有放電空間S之直管狀 放電容器21，在放電容器21的外周面之相互對向的位 置，一對外部電極22沿著放電容器21的壁面密接而設 置，並且，在放電容器21的內部封裝有藉由準分子放電 形成準分子之放電用氣體來構成，放電容器21藉由上述 特定合成石英玻璃來構成。 又，亦可如圖3所示的短弧型放電燈30，其具備有由 在內部形成有放電空間S的例如橢圓球形狀發光管部3 2 與連續於發光管部32的兩端的桿狀封裝部3 3所構成之放 電容器31，在發光管部32內，陰極34及陽極35被對向 配置，並且封入有例如水銀來構成，放電容器31藉由上 述特定合成石英玻璃所構成。 若根據上述結構的準分子燈20及短弧型放電燈3 〇的 話，任一者均能成爲以高的放射強度放射真空紫外光，並 且可具有充分的長燈壽命者。 又，放電容器全體不需一定要以特定合成石英玻璃來 構成，亦可例如圖4所7K，僅重氫燈之光放射用窗構件即 放電容器的一部分由特定合成石英玻璃構成者。 此重氫燈40是於在側面具有圓筒狀光放射部42的放 電容器41的內部，配設有陰極43、陽極44及電極包圍件 -21 - 200834647 45，並且封入有重氫氣體，設置由上述特定合成石英玻璃 所構成之窗構件5 0，以封住光放射部42的開口部。在圖 4中，46爲陽極供電棒，47爲陰極供電棒，48爲由絶縁 材料所構成之供電棒保持構件，49爲電極包圍件支承構 件。 藉由這樣的重氫燈40，也能夠成以充分高的放射強度 照射真空紫外光，並且具有所需的充分之長燈壽命者。 【圖式簡單說明】 圖1 - A是顯示本發明之氙準分子燈的一例之槪略結構 之説明用斷面圖。 圖1-B是顯示圖1-A所示的氣準分子燈的與放電容器 的管軸垂直之剖面的斷面圖。 圖2-A是顯示本發明之外-外電極型準分子燈的一例 之槪略結構之説明用斷面圖。 圖2 - B是顯示圖2 - A所示的外-外電極型準分子燈的 與放電容器的管軸垂直之剖面的斷面圖° 圖3是在切開放電容器的一部分之狀態下顯示本發明 之短弧型放電燈的一例之槪略結構之説明圖。 圖4是顯示本發明之重氫燈的一例之槪略結構的説明 用斷面圖。 【主要元件符號說明】 1 0 :準分子燈 -22- 200834647 1 1 :放電容器 1 2 :外側管 13 :內側管 1 5 :外部電極 1 6 :內部電極 S :放電空間 2 0 :準分子燈 2 1 :放電容器 22 :外部電極 3 〇 :短弧型放電燈 3 1 :放電容器 3 2 :發光管部 3 3 :封止部 3 4 :陰極 3 5 :陽極 4 0 :重氫燈 4 1 :放電容器 42 :光放射部 4 3 :陰極 44 :陽極 4 5 :電極包圍件 46 :陽極供電棒 4 7 :陰極供電棒 48 :供電棒保持構件 -23 200834647 49 :電極包圍件支承構件 5 〇 :窗構件 -24[Technical Field] The present invention relates to a discharge lamp, and more particularly to a discharge using a specific synthetic quartz glass having improved transmission characteristics on the short-wavelength side of vacuum as a whole container or a window member such as a light-emitting window member. A discharge lamp of a material of the container. [Prior Art] At present, the emitted ultraviolet light particularly includes the light of the vacuum ultraviolet light; the lamp is widely used in various fields, for example, using a glass substrate cleaning device for liquid crystal, or a vacuum field using a heavy hydrogen lamp. A spectroscopic measuring device and the like are well known. These discharge lamps of discharge lamps are formed by synthetic quartz glass having, for example, light transmittance to true light. In recent years, a discharge lamp that emits such a vacuum ultraviolet light is emitted at a higher output to emit, for example, vacuum ultraviolet light. For this requirement, the characteristics of the synthetic quartz glass itself of the discharge vessel are well formed (for example, Patent Document 1 to Patent Document 3) ). For example, JP-A-2005-306650 discloses a wavelength transmittance of 165 nm as 65% or more, and fluorine is added at a concentration of 10000 10000. ppm, and hydrogen is contained at a ratio of less than 5 χ 1 〇 cm 3 . The synthetic quartz glass of the molecule shows the possibility of utilizing quartz glass for a discharge lamp or the like. Further, in the ultraviolet light-emitting ultraviolet light of the ultraviolet light-emitting portion of the Japanese Patent Laid-Open Publication No. 2005-310455 of the patent document 2, the ultraviolet light ultraviolet-ray requirement of the discharge molecular lamp is changed, and it is disclosed in the report No. 20 0 16 / The synthesis bulletin, 200834647 : as a material for forming a light-emitting container of an ultraviolet lamp having an emission spectrum having a wavelength of 20 〇 nm or less, a light transmittance of 65% or more using a wavelength of 165 nm, a fluorine concentration of 200 to 10000 wt. ppm, and an OH group Synthetic quartz glass containing 10 wt·ppm or less. Japanese Patent Laid-Open Publication No. 2001-019450 discloses a synthetic quartz having a fluorine concentration of 100 ppm or more and an OH group content of 100 ppm or less and a pseudo temperature of 110 () ° C or less. glass. Further, in paragraph 003, it is described that when the fluorine concentration exceeds 3 000 ppm, the ultraviolet resistance is lowered. Further, there is shown a possibility of using a material for forming a sealing tube such as a low-pressure mercury lamp, an excimer lamp, a deuterium lamp or the like which emits light from the ultraviolet light region to the vacuum ultraviolet light region. [Patent Document 1] JP-A-2005-306650 (Patent Document 2) JP-A-2005-310455 (Patent Document 3) JP-A-200-092749 In the case of using any of the synthetic quartz glass described in Patent Document 1 to Patent Document 3, the discharge lamp is configured, and sufficient ultraviolet light resistance characteristics cannot be obtained. That is, for example, a bismuth excimer lamp is taken as an example. In the inside of the discharge vessel of the 氙 分子 分子 灯 灯 氙 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 准 氙 氙 氙 氙 氙 氙 145 145 145 145 145 145 The ultraviolet absorption end of the synthetic quartz glass is shifted toward the long wavelength side as a result of the absorption of the light in the vicinity of the ultraviolet light absorption end by the synthetic quartz glass forming the discharge vessel, which is absorbed by the synthetic quartz glass-5-200834647. The excimer radiation that generates gas is more absorbed by the synthetic quartz glass, and the temperature of the discharge vessel is further increased. The vacuum ultraviolet light transmission characteristic of the synthetic quartz glass is lowered (deteriorated). Then, the vacuum ultraviolet light transmission characteristic is lowered (deteriorated), so that the vacuum ultraviolet light emitted inside the discharge vessel is increased by the ratio of the absorption of the synthetic quartz glass forming the discharge vessel, and the accumulation of the ultraviolet light is increased to cause breakage. The problem of shortening the time (light life) is generated. Moreover, the reduction of the transmittance of vacuum ultraviolet light in the short-wavelength region is also a major problem. Such a problem is not only caused by a quasi-molecular lamp but also in a discharge lamp that emits light containing vacuum ultraviolet light. The present invention has been made in order to solve the above problems, and an object of the invention is to provide a discharge lamp having a high radiation intensity of vacuum ultraviolet light and having a sufficiently long lamp life. [Means for Solving the Problem] The discharge lamp of the present invention is a discharge lamp that emits light of ultraviolet light having a wavelength of 1 90 nm or less inside the discharge vessel, characterized in that at least a part of the front discharge capacitor is a fluorine content It is composed of 7,000 wt. ppm or more and 3 0000 wt·ppm or less, and the pseudo-temperature Tf is 75 0 ° C or more and 10 ° C or less. In the discharge lamp of the present invention, as the synthetic -6 - 200834647 quartz glass forming the pre-discharge capacitor, it is preferable to use a fluorine content of 1 0000 Wt. ppm or more and 3 0000 wt. ppm or less, and it is preferable to use an OH group. The content is less than 30 wt. ppm. [Effect of the Invention] According to the discharge lamp of the present invention, the synthetic quartz glass (hereinafter referred to as "specific synthetic quartz glass") in which at least a part of the fluorine content and the fictive temperature of the discharge vessel are appropriately formed is the specific synthetic quartz. The ultraviolet absorption end of the glass is shifted toward the short-wavelength side, and has excellent ultraviolet light transmission characteristics in the vacuum ultraviolet region, so that vacuum ultraviolet light can be emitted with sufficiently high radiation intensity. And 'by the specific synthetic quartz glass, the ultraviolet absorption end is shifted toward the short-wavelength side', the vacuum ultraviolet light having a wavelength of 1 9 〇 nm or less placed inside the capacitor can be reduced by the specific synthetic quartz glass forming the discharge vessel. Since the ratio of absorption is such, it is possible to surely suppress damage to a specific synthetic quartz glass due to the emission of vacuum ultraviolet light, in particular, accumulating ultraviolet light, and as a result, it is possible to constitute ultraviolet light resistance (ultraviolet durability) and extremely long. The life of the lamp. In addition, in addition to the fact that the specific synthetic quartz glass is made to have a fluorine content and a fictive temperature is appropriate, and a 〇H group having a specific concentration is formed, the OH group can further reduce the ultraviolet slanting, so that Achieving high UV resistance characteristics enables a discharge lamp to have a longer lamp life. In the discharge lamp of the present invention, a specific synthetic quartz glass in which the fluorine content (concentration) and the virtual temperature are appropriately used is used as a material for forming a discharge vessel or a part of a discharge vessel such as a window member for light emission. A discharge lamp that improves the transmission characteristics of the short-wavelength side of vacuum ultraviolet light. Hereinafter, the present invention will be described by taking a gas molecule lamp as an example. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1-A is a cross-sectional view showing a schematic structure of an example of a quasi-molecular lamp of the present invention, and Fig. 1-B is a tube showing a discharge cell of the xenon excimer lamp shown in Fig. 1-A. A cross-sectional view of a section perpendicular to the axis. The xenon excimer lamp (hereinafter simply referred to as "excimer lamp") is a discharge vessel 11 having a double tube structure having a cylindrical outer tube 1 2 made of synthetic quartz glass; The inside tube 12 is disposed coaxially with the tube axis, and has an outer diameter smaller than the inner diameter of the outer tube 12, and a cylindrical inner tube 13 composed of synthetic quartz glass, the outer tube 12 The inner tube 13 is fusion-bonded at both end portions, and an annular discharge space S that is hermetically sealed is formed between the outer tube 1 2 and the inner tube 13 . A mesh outer electrode 15 made of a conductive material such as a metal mesh is closely provided on the outer peripheral surface of the outer tube 12, and an inner electrode 16 made of, for example, an aluminum plate is closely attached to the inner circumference of the inner tube 13 surface. Further, in the discharge space S, an exhaust gas which is a discharge gas which forms an excimer by excimer discharge is filled. In the excimer lamp 10, for example, a high-frequency voltage controlled to a proper size is applied between the external electrode 15 and the internal electrode 16 by a high-frequency power source (not shown), so that a quasi-precision occurs in the discharge space s. The molecule -8 - 200834647 is electrically excited to form an excimer generated by helium gas (discharge gas) by the excimer discharge, and emits light of a vacuum ultraviolet light having a wavelength of nm or less inside the discharge vessel 11. In the excimer lamp 10, the synthetic stone forming the discharge vessel 11 has (1) a fluorine content of 7,000 wt. ppm or more and 30,000 wt. or less, and (2) a virtual temperature Tf of 750 ° C or more and 1 000 ° C or less. The specific synthetic stone which meets the above two conditions (1) and (2) is such that the ultraviolet absorption end of the vacuum ultraviolet light field is shifted toward the short wavelength side to have an ultraviolet light transmission characteristic having an excellent vacuum ultraviolet light field. The discharge vessel 11 composed of the specific synthetic quartz glass has a standard deviation of 1 〇, can emit vacuum ultraviolet light with high radiation intensity, and has a lamp life. In the case where the synthetic quartz glass does not satisfy the above conditions (1) and (2), for example, even if the content of the synthetic quartz glass is within the above range, the virtual temperature Tf is shifted from the upper range. In this case, it is not possible to constitute a sub-lamp having sufficiently high vacuum ultraviolet over-charging characteristics and sufficiently high ultraviolet light resistance (ultraviolet durability), that is, it is not possible to constitute an extremely long lamp life. Further, the fluorine content is more than 30,000. In the case of wt.ppm, out of the discharge space, in order to make the excimer lamp work in a predetermined state, a larger lamp voltage and lamp input are required, and as a result, the temperature of the discharge vessel 1 rises, and the ultraviolet absorption end is biased toward the long wavelength side. Move, causing the vacuum intensity of the vacuum purple to decrease, and it is easy to accumulate the ultraviolet light deviation due to the vacuum ultraviolet light, so that the lamp life is shortened. The 190 gram ppm f f ying glass is produced with the length of the sub-light) To the fluorine, the temperature and light are transparent to the fluorine separation, and the external light produced by the -9-200834647 is the imaginary temperature in the case where the fluorine content of the synthetic quartz glass meets the above condition (2). Tf is 75 (TC above 1 000 °C, preferably 10000 wt·ppm or more and 300 00 wt·ppm or less. Such synthetic quartz glass will have higher vacuum ultraviolet light transmission characteristics and higher resistance. In the ultraviolet light characteristic, an excimer lamp 10 having a discharge vessel composed of the specific synthetic quartz glass can emit vacuum ultraviolet light with high radiation intensity, and becomes a person having a longer lamp life. The hypothetical temperature Tf is about The index of the structure (density) of the glass is obtained by the following method. First, for example, the same heat treatment as that of the lamp is performed on one portion of the same glass tube as that at the time of lamp production. For the infrared spectroscopy of the sample, the infrared spectroscopy device "Magna 760" (manufactured by Nicoket Co., Ltd.) is used, and the wave number is 2000 by the transmission method. The range of 40 00 cnT1 is determined by the decomposition energy 2 cnT1, the wave number interval 0.0 62 5 cnT1, 32 times. The wave number of the infrared transmission spectrum data obtained by this is obtained 2260CHT The peak 値 wave number of the absorption band of 1 is the average 値 of the peak 値 wave number of each sample as the peak 値 wave number AfcnT1 of the excimer lamp, and is calculated by the following mathematical formula. [Math 1] ^ 2iy (A-222B, 64) IB-m In the above mathematical formula 1, Tf is the imaginary temperature pc ], A is the peak 値 wave number -10- 200834647 [cnT1] ' 〇: and /5 respectively by the following mathematics The enthalpy obtained in Formula 2, F of Math Figure 2 is the fluorine content (concentration) [ιη〇1%] [Math 2] 4611 ψ}2 +108, 4?37[:F]-27, 3180 0060 Wf lieg [F] +1, 0-4f a Further, in the excimer lamp 10 described above, the specific synthetic quartz glass forming the discharge vessel 11 is modified in addition to the fluorine content and the fictive temperature, and is 30 wt·ppm. The following ratios preferably contain a 0H group. In general, as a 0H-based effect, the growth retardation effect of the ultraviolet light skew and the effect of the ultraviolet light skew are confirmed. However, since the content of the OH group is 30 wt·ppm or less, the growth of the ultraviolet light skew can be effectively found. The mitigating effect allows the excimer lamp to become a more reliable one with the expected lamp life. Further, in the case where the content of the OH group exceeds 30 wt. ppm, the lamp life of the quasi-molecular lamp 1 〇 is shorter than that of the case where the OH group is not substantially contained. The excimer lamp 10 of the above structure can be produced, for example, in the following manner. In other words, first, the both ends of the cylindrical bare tube made of synthetic quartz glass (raw material) having the fluorine content within the above range are formed into a flared shape so as to extend outward in the radial direction. A cylindrical tube for forming a cylindrical inner tube constituting the inner tube is formed of the same synthetic quartz glass as the bare tube for the inner tube, and has an inner diameter larger than the outer diameter of the bare tube for the inner tube. The cylindrical outer tube -11 - 200834647 constituting the outer tube is formed inside the bare tube, inserted into the inner tube to form a bare tube, and disposed on the coaxial side, and then heated by a heater or the like from the outer side in the tube axis direction. The inner peripheral surface of the bare tube and the front end surface of the end portion of the bare tube formed by the inner tube are fused, thereby forming a tubular discharge space between the outer tube 1 2 and the inner tube 13 The lamp precursor of the double tube structure of S. Here, the fictive temperature T F of the synthetic quartz glass as the discharge vessel forming material (raw material) is those which do not satisfy the above condition (2). Next, after the lamp precursor thus obtained is subjected to heat treatment in, for example, an electric furnace, for example, it is taken out and cooled in an electric furnace, and then helium gas as a discharge gas is sealed in the discharge space S of the lamp precursor, and The external electrode 15 and the internal electrode 16 are disposed at predetermined positions, whereby the excimer lamp 10 of the structure shown in Fig. 1 is obtained. The heat treatment conditions for the heat treatment of the lamp precursor can be, for example, the pseudo-temperature of the synthetic quartz glass forming the lamp precursor as the target after the heat treatment and the synthetic quartz glass (raw material) as the material for forming the discharge vessel. The relationship between the imaginary temperatures is set. From the viewpoint of the yield at the time of manufacturing the lamp, the heating temperature (the temperature in the electric furnace) is, for example, 900 to 1150 ° C, and the heating time (the holding time in the electric furnace) is For example, 1 to 10 hours is preferred. Further, the cooling of the lamp precursor after the heat treatment can be carried out by placing it in an electric furnace in this state by stopping heating such as an electric furnace, or by, for example, opening the tubular opening and closing furnace. The time (placement time) required for such a cooling treatment is, for example, about 0.5 to 10 hours. -12-200834647 Therefore, according to the excimer lamp 10 having the above configuration, the capacitor 11 has a fluorine concentration of 7,000 Wt·ppm or more and 300 00 wt. or less, and the virtual temperature Tf is 750 ° C or more and 1000 or less. It is composed of a special quartz glass, and can emit ultraviolet ultraviolet light emitted inside the discharger 1 1 (in the discharge space S) with high radiation intensity and can obtain an extremely long lamp life. This reason is as follows. In other words, as described in the above-mentioned Patent Documents 1 to 3, the synthetic quartz glass contains fluorine, and it is possible to appropriately cut the unstable structure of the quartz glass of Si and yttrium by the action of the combination of Si and F (ξ bonding). (For example, combined with the angle of the three-Si-O-Si^ combination), the potential internal stress in the synthetic quartz glass can be alleviated, and the ultraviolet absorption end of the glass of the British glass is biased toward the short-wavelength side to increase the ultraviolet transmittance. δ stomach "unstable structure mitigation effect". However, in any of the above-mentioned patents 1 to 10, when the synthetic quartz glass contains a large amount of fluorine, there is a problem. For example, in the case of the case where the fluorine concentration is more than 3,000 wt·ppm, there is a possibility that the ultraviolet ray resistance is lowered, and the fluorine content is less than 3,000 wt·ppm. Further, in Patent Document 1 and Patent Document 2, the content of fluorine is actually 500 Å wt. ppm or less. In the case of using a synthetic glass containing a concentration of fluorine which is not present in the synthetic quartz glass, that is, a concentration of wt·ppm or more and 30 〇〇〇wt·ppm or less, according to the present invention, quartz glass is synthesized, and the synthetic quartz glass is heated by heating. The structure is easy to produce, and the density is high. In other words, the imaginary temperature becomes a state of the pre-heating treatment, and the capacitance is set by the ppm, and by the Si-F, the stone is passed through the literature. It is also the same as 7000 yingbo, and it is expected to obtain a higher unstable structure in a state of less than 750 °C and below l〇〇〇 °C (specific synthetic quartz glass) with a temperature of -13 - 200834647 degrees. The mitigating effect allows the ultraviolet absorbing end to be reliably shifted toward the short wavelength side and has a high ultraviolet ray transmittance. Therefore, the excimer lamp 1 〇 becomes a person capable of emitting vacuum ultraviolet light with high radiation intensity. Further, by shifting the ultraviolet absorption end toward the short wavelength side, the ratio of the vacuum ultraviolet light having a wavelength of 1 90 nm or less radiated inside the discharge vessel 11 to the specific synthetic quartz glass forming the discharge vessel 1 is lowered. Therefore, it is possible to surely suppress damage caused by vacuum ultraviolet light to a specific synthetic quartz glass, particularly accumulation of ultraviolet light, and it can constitute a high ultraviolet light resistance (ultraviolet durability) and has an extremely long lamp life. The excimer lamp 10. As described above, in the present invention, the manufacturing process of the excimer lamp 10 is heat-treated, and thus, when manufacturing an object made of synthetic quartz glass, such as a discharge vessel of a lamp or an optical component such as various lenses, It is necessary to remove the processing skew (stress) and impart necessary optical light, and perform heat treatment such as homogenization, molding, annealing, or the like. However, in the excimer lamp 10 of the present invention, the synthetic quartz glass forming the discharge vessel 11 can be obtained by optimizing both the fluorine content and the virtual temperature, and the above-described effects can be obtained, and the processing skew can be obtained (stress). The removal effect. Therefore, according to the present invention, it is possible to make the excimer lamp 10 having the desired performance relatively easy, without being greatly different from the time required for the manufacture of the conventional structure. -14- 200834647 Hereinafter, a practical example for confirming the effects of the present invention will be described. <Example 1> [Production of excimer lamp] Eight kinds of synthetic quartz glass (raw material) containing fluorine in a different content (concentration) according to Table 1 below were used to form eight lamp precursors. Then, each of the lamp precursors is subjected to heat treatment (including cooling treatment) under the same heat treatment conditions using an electric furnace, and then the internal electrode and the external electrode are placed at predetermined positions, and the helium gas is filled in the discharge space. Thus, eight excimer lamps ("light 1" to "light 8") having the structure shown in Fig. 1 were produced. The specific structure of the obtained excimer lamp is as follows. [Structure of excimer lamp] The outer diameter of the outer tube is 40 mm. The outer tube has a wall thickness of 2 mm, the inner tube has an outer diameter of 20 mm, and the inner tube has a wall thickness of 1 mm. 400 mm, the gas entrapment is 66 kPa. With respect to the lamps 1 to 8 thus obtained, lamp life tests were carried out, and the radiation intensity of vacuum ultraviolet light having a wavelength of 190 nm or less was measured. The results are shown in Table 1 below. In the life test, the lamp is continuously lit under the condition that the lamp power is 400W, and the time until the discharge of the discharge vessel is broken is taken as the life time. The radiation intensity was measured by a light meter at a position separated from the lamp by 30 mm. -15- 200834647 In addition, a part of the glass tube (raw material) which is the same as each lamp is heat-treated under the same conditions as in the case of the lamp, and three samples each having a size of about 15 mm square are cut out. The above method measures the fictive temperature Tf. The results are shown in Table 1 below. [Table 1] Lamp No. Fluorine content [wt. ppm] Fake temperature [°C] Radiation intensity [relative 値] Lamp life [hour] Lamp 1 0 1260 100 1778 Lamp 2 5000 1045 102.3 2703 Lamp 3 7000 800 104.4 3750 Lamp 4 10000 805 105.1 4011 Lamp 5 10500 800 105.2 3890 Lamp 6 20000 800 105.0 4001 Lamp 7 30000 800 104.6 3859 Lamp 8 36000 800 97.0 2980 It was confirmed by the results of Example 1 that the hypothetical temperature with synthetic quartz glass was 8 A discharge vessel composed of synthetic quartz glass containing fluorine at a ratio of 7,000 wt. ppm or more and 30,000 wt. ppm or less at a ratio of 00 ° C or more is used as the lamp 3 to lamp 7 of the excimer lamp of the present invention. The radiation intensity emits vacuum ultraviolet light and has a long lamp life. Here, it has also been confirmed that the bismuth excimer lamp for such a double tube structure is required to have a lamp life of, for example, 3,000 hours or more, and these lamps can achieve such a requirement. On the other hand, it was confirmed that the fluorine content of the synthetic quartz glass is less than 70 00 wt·ppm as a lamp for comparison with an excimer lamp! In the case of the lamp 2, even if the heat treatment is performed, the virtual temperature cannot be made 丨000 -16 - 200834647 or less, and the radiation intensity of the vacuum ultraviolet light is lower than that of the lamps 3 to 7, and the above requirements cannot be obtained. Lamp life. <Example 2> [Preparation of excimer lamp] A synthetic quartz glass (raw material) having a finction temperature Tf of 1,350 ° C measured by the above method was used, except that fluorine was contained at 10,500 wt·ppm. A lamp precursor having the same structure as that produced in the above-described Example 1 was produced, and each of the lamp precursors was heated at a heating temperature different from each other by using an electric furnace, and the heat-treated synthetic quartz glass was subjected to heat treatment. The virtual temperature Tf is controlled in accordance with Table 2 below to produce five excimer lamps ("light 5" and "light 9" to "light 12"). Furthermore, the lamp 5 of the second example is the same as that produced in the first example. With respect to the lamp 5 and the lamp 9 to the lamp 1 thus obtained, a lamp life test was carried out in the same manner as in the above-described Example 1, and the radiation intensity of the vacuum ultraviolet light having a wavelength of 1 90 nm or less was measured. The results are shown in Table 2 below. Further, for each of the lamps after the end of the life test, the virtual temperature Tf was measured in the same manner as in the above-described Example 1. The results are shown in Table 2 below. -17- 200834647 [Table 2] Lamp No. Fluorine content [wt. ppm] Fake temperature [°C] Radiation intensity [relative lamp life [hour] Lamp 9 10500 750 105.2 4239 Lamp 5 10500 800 105.2 3890 Lamp 10 10500 900 105.1 3822 Lamp 11 10500 1000 105.1 3685 Lamp 12 10500 1150 105.0 2602 It was confirmed from the results of Example 2 that an excimer lamp having a discharge vessel composed of synthetic quartz glass containing fluorine at 10 500 wt. The lamp 5, the lamp 9, the lamp 1 and the lamp 1 of the present invention having a fictive temperature Tf of a synthetic quartz glass forming a discharge vessel of 750 ° C or more and 100 ° C or less can emit a vacuum ultraviolet ray at a high radiation intensity. Light and get a long lamp life of more than 3,000 hours. On the other hand, it has been confirmed that the comparative lamp 12 which does not contain fluorine in an appropriate range and whose pseudo temperature is more than 1 000 °C can emit vacuum ultraviolet light with high radiation intensity, but does not have The lamp life required. Further, it has been confirmed that the lamp 9 has a sufficiently high radiation intensity of vacuum ultraviolet light and has a sufficiently long lamp life as required, but in order to produce the lamp 9, a heat treatment for a long time of 200 hours or more is performed. At this point, it is not practical, but the lamp 5, the lamp 10, and the lamp 1 1 are not significantly different from the time required to fabricate the excimer lamp in the past, and are easy to manufacture. . Further, a synthetic quartz glass (raw material) having a fluorine content of -18 to 200834647 which is different from a user having the fluorine content of 7,000 wt. ppm or more and 30,000 wt. ppm or less in the range of 7,000 wt. ppm or more is used to prepare an excimer. The lamp was subjected to the same actual conditions as in Example 2 (radiation intensity measurement of vacuum ultraviolet light, life test, and measurement of a virtual temperature), and it was confirmed that the result of the same tendency as in the above-described Example 2 was that the discharge vessel was formed. The facsimile temperature Tf of the synthetic quartz glass is 75 ° C or more and l 〇〇 (TC below, it can emit vacuum ultraviolet light with high radiation intensity, and can obtain a long lamp life of 3 〇〇〇 or more. Example 3 > [Production of excimer lamp] In addition to the use of fluorine at a ratio of 10,500 wt·PPm, the fictive temperature measured by the above method is 1 3 50 ° C, and according to Table 3 below, A lamp precursor having the same structure as that of the one produced in the above-described Example 1 was produced in addition to six types of synthetic quartz glass (raw material) containing different OH groups, and an electric furnace was used for each lamp precursor. With phase The same heat treatment conditions were used to heat the 6-membered molecular light ("light 5" and "light 13" to "light 17") of the present invention. Further, the lamp 5 of the example 3 is a practical example. The lamp life test was carried out in the same manner as in the above-described Example 1, and the radiation intensity of the vacuum ultraviolet light having a wavelength of 1 90 nm or less was measured for the lamp 5 and the lamp 13 to the lamp 1 7' thus obtained. The results are shown in the following Table 3. The respective temperatures after completion of the life test were measured in the same manner as in the above-described Example 1, and the results were as shown in the following Table 3. -19- 200834647 [Table 3 Lamp No. Fluoride content [wt. ppm] Fake temperature [°C] OH group concentration [wt. ppm] Radiation intensity [relative 値] Lamp life [hour] Lamp 5 10500 800 1 105.2 3890 Lamp 13 10500 800 10 104.9 3980 lamp 14 10500 800 15 104.7 3968 lamp 15 10500 800 30 104.2 3923 lamp 16 10500 800 40 103.9 3630 lamp 17 10500 800 80 102.9 3185 lamp 5 synthetic quartz glass, in fact not for controlling the content of OH groups, but OH is contained in the manufacturing process of synthetic quartz glass as a raw material Therefore, when the lamp life of each of the lamps 1 3 to 1 7 is compared with the lamp life of the lamp 5 as a reference, it is confirmed that the specific synthetic quartz glass is appropriately colored by the fluorine content and the virtual temperature, and A lamp 13 to a lamp 15 having a discharge vessel formed by using an OH group having a content of 30 wt. ppm or less is used as a lamp 5 having a discharge vessel composed of synthetic quartz glass having substantially no OH group. A more complete lamp life can be obtained. In addition, it was confirmed that the lamp 16 and the lamp 17 having an OH group content of more than 30 wt. ppm can emit vacuum ultraviolet light with a sufficiently high radiation intensity and have a desired lamp life (3 000 hours). However, in contrast to the lamp 5 including the discharge vessel including the synthetic quartz glass having no OH group, the radiation intensity is lowered and the lamp life is shortened. Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made. For example, the present invention is not limited to a xenon excimer lamp having a double tube structure, and may be applied to, for example, the so-called "outer-outer electrode type -20-200834647 excimer lamp" shown in FIGS. 2-A and 2-B. A short arc type discharge lamp or the like shown in Fig. 3 emits a discharge lamp including light of a vacuum ultraviolet light having a wavelength of 150 nm or less inside the discharge vessel. The excimer lamp 20 shown in FIG. 2A and FIG. 2-B may be a straight tubular discharge vessel 21 having a discharge space S integrally formed at both ends and having a discharge space S formed therein, in the discharge vessel 21 The pair of external electrodes 22 are disposed in close contact with each other along the wall surface of the discharge vessel 21 at a position opposite to each other, and a discharge gas for forming an excimer by excimer discharge is enclosed in the discharge vessel 21, The discharge vessel 21 is constructed by the above-described specific synthetic quartz glass. Further, a short arc type discharge lamp 30 as shown in FIG. 3 may be provided with, for example, an elliptical spherical light-emitting tube portion 3 2 having a discharge space S formed therein, and a rod shape continuous with both ends of the light-emitting tube portion 32. In the discharge vessel 31 including the package portion 33, the cathode 34 and the anode 35 are opposed to each other in the arc tube portion 32, and are sealed with, for example, mercury, and the discharge vessel 31 is composed of the above-described specific synthetic quartz glass. According to the excimer lamp 20 and the short arc type discharge lamp 3 of the above configuration, either of them can emit vacuum ultraviolet light with high radiation intensity and can have a sufficient long lamp life. Further, the entire discharge vessel is not necessarily required to be composed of a specific synthetic quartz glass. For example, as shown in Fig. 4, 7K, only a part of the discharge vessel which is a light-emitting window member of a deuterium lamp is composed of a specific synthetic quartz glass. The deuterium lamp 40 is disposed inside the discharge vessel 41 having the cylindrical light radiating portion 42 on the side surface, and is provided with a cathode 43, an anode 44, and an electrode envelope member-21 - 200834647 45, and is sealed with a heavy hydrogen gas. The window member 50 composed of the specific synthetic quartz glass described above encloses the opening of the light-emitting portion 42. In Fig. 4, 46 is an anode power supply rod, 47 is a cathode power supply rod, 48 is a power supply rod holding member composed of an insulating material, and 49 is an electrode surrounding member supporting member. With such a deuterium lamp 40, it is also possible to irradiate vacuum ultraviolet light with a sufficiently high radiation intensity and to have a sufficient long lamp life required. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 - A is a cross-sectional view for explaining a schematic configuration of an example of a krypton excimer lamp of the present invention. Fig. 1-B is a cross-sectional view showing a cross section of the gas phase molecular lamp shown in Fig. 1-A perpendicular to the tube axis of the discharge vessel. Fig. 2-A is a cross-sectional view for explaining a schematic configuration of an example of an external-external electrode type excimer lamp of the present invention. Figure 2 - B is a cross-sectional view showing a cross section perpendicular to the tube axis of the discharge vessel of the external-external electrode type excimer lamp shown in Figure 2-A. Figure 3 is a view showing the state in which a part of the capacitor is cut open. An explanatory diagram of an outline of an example of a short arc type discharge lamp of the invention. Fig. 4 is a cross-sectional view showing a schematic configuration of an example of a deuterium lamp of the present invention. [Main component symbol description] 1 0 : Excimer lamp-22- 200834647 1 1 : Discharge capacitor 1 2 : Outer tube 13 : Inner tube 1 5 : External electrode 1 6 : Internal electrode S : Discharge space 2 0 : Excimer lamp 2 1 : discharge vessel 22 : external electrode 3 〇 : short arc discharge lamp 3 1 : discharge vessel 3 2 : luminous tube portion 3 3 : sealing portion 3 4 : cathode 3 5 : anode 4 0 : heavy hydrogen lamp 4 1 : discharge vessel 42 : light radiation portion 4 3 : cathode 44 : anode 4 5 : electrode enclosure 46 : anode supply rod 4 7 : cathode supply rod 48 : power supply rod holding member -23 200834647 49 : electrode enclosure support member 5 〇 :Window member-24