1317964 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於準分子燈。 【先前技術】 近年來，對於由金屬、玻璃、其他的材料構成的被處 理體，藉由照射波長2 0 Onm以下的真空紫外線，藉由該 真空紫外線及由其生成臭氧的作用來處理被處理體的技術 ，例如除去附著於被處理體的表面的有機污染物質的洗淨 處理技術、或在被處理體的表面形成氧化膜的氧化膜形成 處理技術，已被開發、實用化。 進行這種紫外線處理用的燈泡，是使用一種在由石英 玻璃構成的放電容器中，充塡了適宜的準分子發光用氣體 的準分子燈。 已知：使用於此準分子燈的準分子發光用氣體是藉由 使用例如氙氣體，就可放出主要是氙準分子光也就是波長 1 7 2nm時最尖峰的真空紫外線，且，準分子發光用氣體是 藉由使用例如氬及氯氣體的混合氣體，就可放出主要是 氣-氯準分子光也就是波長l75nm時最尖峰的真空紫外線 〇 這種準分子放電燈’是揭示於專利文獻1、專利文獻 這種準分子燈，是當放電空間內所發生的真空紫外線 或紫外線是透過形成放電容器的石英玻璃時，石英玻璃會 -5- (2) 1317964 發生變形，而有使玻璃早期破損的問題。 . 近年來，爲了防止高壓放電燈或紫外線燈的放電容器 也就是石英玻璃的紫外線破壞，即，因紫外線變形所產生 的機械地強度的下降或透過率下降，藉由使假想溫度設在 最適合的範圍內，就可改善那些的問題。 具體上，在專利文獻3、專利文獻4中，石英玻璃的 假想溫度爲5 0 0〜1 3 0 0 °C程度的話’紫外線破壞就會減少 ’特別是在專利文獻3中揭示了對於準分子燈用玻璃也有 效果。 [專利文獻1]日本專利第2951139號 [專利文獻2]日本專利第2775695號 [專利文獻3]日本特開平9-241030號 [專利文獻4]日本特開平8-026764號 【發明內容】 (本發明所欲解決的課題） 但是’即使使用這種石英玻璃材製作作爲放電容器的 準分子燈，在到達目標的壽命之前也會破損。 例如，超過1 ηι的長的準分子燈的情況，可使用長玻 璃管材加工成放電容器，但是因爲玻璃管材未必很直而需 要使用噴燈等的加熱加工進行校正。或是連接複數條短的 玻璃管材來製作長的玻璃管材的放電容器的情況時，藉由 部分加熱變形或將短的玻璃管材加熱接合，即使使用預先 加熱成適切的假想溫度的玻璃管材，加工部的假想溫度也 -6- (3) 1317964 變高，而會從其加工部開始破損。 . 且，爲了形成準分子燈的放電容器即使使用預先加熱 成適切的假想溫度的玻璃管材的情況，若更長時間點燈或 是高輸出燈的情況時，會從放電容器的端部開始破損。這 是因爲，雖將玻璃管材的兩端部藉由使用噴燈等的加熱加 工及密封來製作放電容器，但是加熱加工的部分，即使例 如使用預先加熱至適切的假想溫度的玻璃管材也會受到熱 影響高而使假想溫度變高，進而從其部分破損。 進一步，對於準分子燈，黑化物會附著於放電容器的 內面，而使放射照度維持率下降。且，此黑化物是造成： 高輝度的電弧狀的放電發生、光輸出大幅下降、因電弧狀 的放電動作使光量的變動變大等的原因。 由此，無法確實防止放電容器的破損，且，放射照度 維持率會在短時間下降，進一步，藉由電弧狀的不穩定的 放電，而有光輸出的下降或光量變動的問題。 本發明，是依據以上狀況，其目的是提供一種，準分 子燈的放電容器不會因紫外線而破損，且，即使長時間點 燈，放射照度維持率也不會衰減，光輸出也不會下降，光 量穩定的準分子燈。 (用以解決課題的手段） 如本發明的申請專利範圍第1項的準分子燈，是一種 準分子燈，準分子燈的放電容器的至少發光部的玻璃的假 想溫度是9 0 0〜1 2 0 0 °C，其特徵爲：含於前述放電容器的 (4) 1317964 玻璃內的碳（c )的量，是C / S i的比爲〇 . 1 a t m %以下。 _ 如申請專利範圍第2項的準分子燈，是如申請專利範 圍第1項的準分子燈，其中，前述放電容器的兩端的藉由 加熱加工形成的密封壁部的假想溫度是900〜1 200 °C。 如申請專利範圍第3項的準分子燈，是如申請專利範 圍第1或2項的準分子燈，其中，排氣管殘部是形成於前 述放電容器，該排氣管殘部的假想溫度是900〜1 200 °C。 (發明之效果） 依據本發明的準分子燈，即使長時間點燈，構成準分 子燈的放電容器的發光部及密封壁部也不易因紫外線而產 生變形，可以防止放電容器的破損的同時，黑化物不會附 著於放電容器的內面，可以防止放射照度維持率的下降， 且光輸出可大幅下降，就不會進行放電動作而使放電穩定 〇 且，製造放電容器將時，排氣管殘部的玻璃成爲高溫 狀態時被密封切斷，在這樣的狀態下假想溫度雖是1 200 °C以上，是排氣管殘部被密封切斷後，進行加熱處理，藉 由使假想溫度成爲900〜1 200°C，排氣管殘部即使被紫外 線照射也不會發生歪斜，可以防止從排氣管殘部或是其附 近爲起點的放電容器的破損。 且，構成放電容器的外側管及內側管的兩端是分別藉 由加熱加工被熔接而形成密封壁部，但是藉由使此密封壁 部的假想濕度爲90 0〜1 200 °C，密封壁部即使被紫外線照 (5) 1317964 射也不會發生歪斜，可以防止從密封壁部爲起點的放電容 器的破損。 【實施方式】 以下，說明本發明的實施例。 第1圖，是顯示本發明的一實施例的準分子燈的圖。 在同圖，準分子燈1的放電容器13，是具有：由石英玻 璃構成的圓筒狀的外側管11、及藉由在此外側管11內沿 著其筒軸配置的具有比外側管11的內徑小的外徑的石英 玻璃所構成的內側管1 2、及外側管1 1及內側管1 2的兩 端是分別藉由加熱加工被熔接而形成密封壁部1 4且在外 側管1 1及內側管1 2之間形成圓筒狀的放電空間S °在此 放電容器13的放電空間S是封入氙氣體作爲發光氣體。 在放電容器1 3的外側管1 1 ’設有與其外周面1 5密 接，例如由金網等的導電性材料構成的網狀的一方的電極 1 6 ’在內側管1 2的外周面1 7 ’設有可覆蓋其外周面1 7 的如由鋁構成的膜狀的另一方的電極1 8。而且’ 一方的 電極1 6及另一方的電極1 8，是藉由電流供給用的電線1 9 、19分別連接適宜的電源裝置（圖示省略）° 且，在此放電容器13，形成：供將發光氣體封入放 電空間S內用的使排氣管被密封切斷的排氣管殘部a。 構成上述放電容器13的發光部的玻璃’假想溫度是 900〜1200。(：。在此所謂的「發光部」’是指在第1圖中 ，由符號L所示的與外側管1 1的外周面密接形成的電極 (6) 1317964 1 6存在的部分的放電容器1 3的放電領域。發光部，因爲 . 最接近放電空間所發生的放電所以容易發生由紫外線所產 生的變形，此發光部的假想溫度與放電容器的破損有非常 密切的關係。 且，在此所謂，「假想溫度」’是顯示玻璃的構造的 尺度，也可以稱爲構造決定溫度。即，玻璃是依據其熱處 理條件而使構造完全不同。例如，在某高溫T將熱平衡狀 態的玻璃急速冷卻至室溫爲止的話，玻璃的構造是成爲在 保持溫度T的狀態下直接凍結，此情況，此高溫T是稱 爲其玻璃的假想溫度。且相同地在高溫τ不將熱平衡狀態 的玻璃急速冷卻，而是漸漸地冷卻至室溫態爲止的情況時 ，是假想溫度是成爲接近於室溫的溫度。 如此玻璃，是可以藉由熱平衡狀態及從其的冷卻方法 控制成各式各樣的假想溫度，就將玻璃的構造控制成各式 各樣。 假想濕度的算出’可以藉由紅外吸收光譜法或拉曼光 譜的測量求得。 具體上’發光管部分的假想溫度是使用紅外吸收光譜 法。紅外吸收光譜法，是從顯示石英玻璃的s N 0結合的 伸縮振動的尖峰（2260cm·1附近）的移行量算出石英玻璃 的假想溫度的方法，A.Agarwal [參考文獻1]等是發現下述 的數式1可簡便算出假想溫度。 [數式1] -10- (7) 1317964 由 Tf=4 3 8 09_21/ ( v 2-222 8.64 ) 此，T f :假想溫度[°C ]，v 2 :尖峰波數[c m ·1 ]。 一方面’排氣管殘部、密封壁部，因表面形狀複雜， 所以反射或散亂的影響很大，而無法藉由紅外吸收光譜法 測量。顯微拉曼分光器因爲使用後方散亂法，所以不會被 表面形狀左右而可測量。從拉曼光譜算出玻璃的假想溫度 的方法是使用Geissberger[參考文獻2]所提案的方法。利 用石英玻璃中的 Si-0-Si結合的變角振動所起因的ωΐ( 440cm-l附近出現的尖峰）線的移行量的方法，出現於石 英玻璃的拉曼信號的ω 1的尖峰位置及假想溫度：Tf之間 是有下述的數式2的關係。 藉由此拉曼光譜的測量算出排氣管殘部·密封壁部的 假想溫度。 [數式2]1317964 (1) Description of the Invention [Technical Field of the Invention] The present invention relates to an excimer lamp. [Prior Art] In recent years, a target object made of a metal, glass, or other material is treated by a vacuum ultraviolet ray having a wavelength of 20 Å or less, and is treated by the vacuum ultraviolet ray and ozone generated therefrom. The technique of the bulk, for example, a cleaning treatment technique for removing an organic contaminant adhering to the surface of the object to be processed, or an oxide film formation treatment technique for forming an oxide film on the surface of the object to be processed, has been developed and put into practical use. A bulb for performing such ultraviolet treatment is an excimer lamp in which a suitable excimer light-emitting gas is filled in a discharge vessel made of quartz glass. It is known that an excimer light-emitting gas using the excimer lamp can emit a vacuum ultraviolet light which is mainly a quasi-excimer light, that is, a peak at a wavelength of 172 nm by using, for example, a helium gas, and excimer light emission. The use of a gas is a vacuum ultraviolet ray which is mainly a gas-chloride excimer light, that is, a peak ultraviolet ray at a wavelength of l75 nm by using a mixed gas such as argon and chlorine gas. This excimer discharge lamp is disclosed in Patent Document 1 The excimer lamp of the patent document is that when the vacuum ultraviolet light or ultraviolet light generated in the discharge space is transmitted through the quartz glass forming the discharge vessel, the quartz glass will be deformed by -5-(2) 1317964, and the glass may be damaged early. The problem. In recent years, in order to prevent the discharge of a high-pressure discharge lamp or an ultraviolet lamp, that is, ultraviolet light destruction of quartz glass, that is, a decrease in mechanical strength due to ultraviolet deformation or a decrease in transmittance, by setting a hypothetical temperature at an optimum temperature Within the scope of the problem, you can improve those problems. Specifically, in Patent Document 3 and Patent Document 4, when the fictive temperature of the quartz glass is about 50,000 to 1300 °C, the 'ultraviolet destruction is reduced', especially in Patent Document 3, for excimer The glass for the lamp also has an effect. [Patent Document 1] Japanese Patent No. 2951139 [Patent Document 2] Japanese Patent No. 2775695 [Patent Document 3] Japanese Patent Laid-Open No. Hei 9-241030 [Patent Document 4] Japanese Patent Application Laid-Open No. Hei No. 8-026764 Problem to be Solved by the Invention However, even if an excimer lamp as a discharge vessel is produced using such a quartz glass material, it will be damaged before reaching the target life. For example, in the case of a long excimer lamp of more than 1 η, a long glass tube can be used to process a discharge vessel, but since the glass tube is not necessarily straight, it needs to be corrected by a heat treatment such as a torch. Or when a plurality of short glass tubes are connected to produce a long glass tube discharge vessel, by partial heating deformation or by heating a short glass tube, even if a glass tube which is previously heated to a suitable imaginary temperature is used, processing is performed. The hypothetical temperature of the department is also -6- (3) 1317964, and it will break from its processing department. Further, in order to form a discharge vessel of an excimer lamp, even if a glass tube which is previously heated to a desired pseudo temperature is used, if the lamp is turned on for a longer period of time or a high output lamp, the end of the discharge vessel is broken. . This is because the discharge vessel is formed by heating and sealing the both ends of the glass pipe by using a torch or the like, but the portion to be heated is subjected to heat even if, for example, a glass pipe which is previously heated to a suitable virtual temperature is used. The influence is high and the imaginary temperature becomes high, and the part is broken. Further, for the excimer lamp, the black compound adheres to the inner surface of the discharge vessel, and the irradiance maintenance rate is lowered. Further, this blackening causes a high-intensity arc-like discharge to occur, a large decrease in light output, and a large fluctuation in the amount of light due to an arc-shaped discharge operation. Therefore, the damage of the discharge vessel cannot be surely prevented, and the irradiance maintenance rate is lowered in a short period of time. Further, there is a problem that the light output is lowered or the amount of light is changed by the arc-shaped unstable discharge. The present invention has been made in view of the above circumstances, and an object thereof is to provide that a discharge vessel of an excimer lamp is not damaged by ultraviolet rays, and even if lighting is performed for a long period of time, the irradiance maintenance rate is not attenuated, and the light output is not lowered. An accurate amount of excimer lamp. (A means for solving the problem) The excimer lamp according to the first aspect of the invention is an excimer lamp, and the pseudo temperature of the glass of at least the light-emitting portion of the discharge vessel of the excimer lamp is 9 0 0 1 2 0 0 ° C, characterized in that the amount of carbon (c ) contained in the (4) 1317964 glass of the aforementioned discharge vessel is a ratio of C / S i of 〇. 1 atm % or less. _ The excimer lamp of the second aspect of the patent application is the excimer lamp of the first aspect of the patent application, wherein the hypothetical temperature of the sealing wall portion formed by heat processing at both ends of the discharge vessel is 900 to 1 200 °C. An excimer lamp according to claim 3, wherein the exhaust pipe residual portion is formed in the discharge vessel, and an imaginary temperature of the exhaust pipe residual portion is 900. ~1 200 °C. (Effect of the Invention) According to the excimer lamp of the present invention, even when the lamp is turned on for a long period of time, the light-emitting portion and the sealing wall portion of the discharge vessel constituting the excimer lamp are less likely to be deformed by ultraviolet rays, and the discharge vessel can be prevented from being damaged. The black compound does not adhere to the inner surface of the discharge vessel, and the radiation illuminance maintenance rate can be prevented from decreasing, and the light output can be greatly reduced, so that the discharge operation is not performed and the discharge is stabilized. When the discharge vessel is manufactured, the exhaust pipe is used. When the glass of the residual part is in a high temperature state, it is sealed and cut. In this state, the virtual temperature is 1 200 ° C or higher, and the exhaust pipe residual portion is sealed and cut, and then heat treatment is performed to make the virtual temperature 900 to 1 At 200 ° C, the residual portion of the exhaust pipe does not become skewed even when it is irradiated with ultraviolet rays, and it is possible to prevent breakage of the discharge vessel from the residual portion of the exhaust pipe or the vicinity thereof. Further, both ends of the outer tube and the inner tube constituting the discharge vessel are welded by heat processing to form a sealing wall portion, but the sealing wall portion has a virtual humidity of 90 0 to 1 200 ° C, and the sealing wall Even if it is irradiated by ultraviolet rays (5) 1317964, it will not be skewed, and it is possible to prevent breakage of the discharge vessel starting from the sealing wall portion. [Embodiment] Hereinafter, an embodiment of the present invention will be described. Fig. 1 is a view showing an excimer lamp according to an embodiment of the present invention. In the same figure, the discharge vessel 13 of the excimer lamp 1 has a cylindrical outer tube 11 made of quartz glass and a lateral outer tube 11 disposed along the cylindrical axis in the outer tube 11; The inner tube 1 2 made of quartz glass having an outer diameter having a small inner diameter, and the both ends of the outer tube 1 1 and the inner tube 1 2 are respectively welded by heat processing to form a sealing wall portion 14 and on the outer tube. A cylindrical discharge space S is formed between the 1 1 and the inner tube 1 2 . The discharge space S of the discharge vessel 13 is sealed with helium gas as a luminescent gas. The outer tube 1 1 ' of the discharge vessel 13 is provided in close contact with the outer peripheral surface 15 thereof. For example, one of the mesh-shaped electrodes 16' formed of a conductive material such as a gold mesh is on the outer peripheral surface 1 7 of the inner tube 1 2 . The other electrode 18 such as a film made of aluminum covering the outer peripheral surface 17 is provided. Further, the one electrode 16 and the other electrode 18 are connected to an appropriate power supply device (not shown) by the electric current supply wires 19 and 19, respectively, and the discharge vessel 13 is formed therein. The luminescent gas is sealed in the exhaust pipe stub a for closing the exhaust pipe in the discharge space S. The glass 'imaginary temperature constituting the light-emitting portion of the discharge vessel 13 is 900 to 1200. (The term "light-emitting portion" as used herein refers to a portion of the discharge vessel of the portion where the electrode (6) 1317964 16 is formed in close contact with the outer peripheral surface of the outer tube 1 1 as indicated by the symbol L. In the discharge area of 1-3, the light-emitting portion is likely to be deformed by ultraviolet rays when it is closest to the discharge space, and the virtual temperature of the light-emitting portion is closely related to the damage of the discharge vessel. The "imaginary temperature" is a measure of the structure of the glass, and may be referred to as a structure-determined temperature. That is, the glass is completely different in structure depending on the heat treatment conditions. For example, the glass in the heat balance state is rapidly cooled at a certain high temperature T. When the temperature is up to room temperature, the structure of the glass is directly frozen while maintaining the temperature T. In this case, the high temperature T is a fictive temperature called glass. Similarly, the glass in the heat balance state is not rapidly cooled at a high temperature τ. However, when the temperature is gradually cooled to the room temperature state, the pseudo temperature is a temperature close to room temperature. Thus, the glass can be thermally balanced. The state and the cooling method from which it is controlled to various kinds of imaginary temperatures control the structure of the glass into various types. The calculation of the imaginary humidity can be obtained by measurement of infrared absorption spectroscopy or Raman spectroscopy. Specifically, the hypothetical temperature of the "light-emitting tube portion" is an infrared absorption spectroscopy method. The infrared absorption spectroscopy method is to calculate the imaginary quartz glass from the shift amount of the stretching vibration (near 2260 cm·1) which shows the s N 0 combination of the quartz glass. The method of temperature, A. Agarwal [Reference 1], etc., finds the following formula 1 to easily calculate the fictive temperature. [Equation 1] -10- (7) 1317964 by Tf=4 3 8 09_21/ ( v 2 -222 8.64 ) Therefore, T f : hypothetical temperature [°C ], v 2 : peak wave number [cm · 1 ]. On the one hand, the exhaust pipe residual portion and the sealing wall portion are reflected or scattered due to the complicated surface shape. The influence is very large, and cannot be measured by infrared absorption spectroscopy. The micro Raman spectrometer can be measured without being affected by the surface shape because of the use of the rear scattering method. The method of calculating the hypothetical temperature of the glass from the Raman spectrum Is using Geissberger [reference text 2] The proposed method. The Raman signal of quartz glass appears by the method of shifting the amount of ω ΐ (the peak appearing near 440 cm -1 ) caused by the variable angular vibration of Si-0-Si in quartz glass. The peak position of ω 1 and the virtual temperature: Tf has the relationship of Equation 2 below. The virtual temperature of the exhaust pipe residual portion and the sealing wall portion is calculated by the measurement of the Raman spectrum. [Expression 2]
Tf= ( ω 1 -4 1 8 ) /1 8χ 1 Ο'3 參考文獻1 : A.Agarwal,E.M.Davis,M.Tomozawa,J.Non-Cryst.Solids 18 5 (1 995 )。Tf = ( ω 1 -4 1 8 ) /1 8χ 1 Ο'3 Reference 1: A. Agarwal, E.M. Davis, M. Tomozawa, J. Non-Cryst. Solids 18 5 (1 995).
Rev.B,2 8 6 ( 1 983 ) 3 266. 顯示放電容器的發光部的玻璃的假想溫度是成爲900 -11 - (8) 1317964 〜1 2 Ο 0 °C用的條件的—例。 預先製造由外側管及內側管及密封壁部構成的放電容 器本體。在此狀態下’是形成於放電容器的密封管是未被 密封切斷的狀態，在放電容器的放電空間內未封入發光氣 體的狀態。 將此放電容器本體配置於電氣爐內，在1120 °C加熱1 小時後，藉由以1 〇 °c /分的速度直到9 0 0 °c爲止急速冷卻 ，就可製造由假想溫度「1100 °c」的玻璃所構成的放電容 器本體。 其他的方法，是將上述放電容器本體配置於電氣爐內 ，在9 5 0 °C加熱1 2 0小時後，藉由以〇 · 1 °c /分的速度直到 700 °C爲止漸漸地冷卻，就可製造由假想溫度「900°C」的 玻璃構成的放電容器本體。 即，藉由這種熱處理，放電容器的發光部的假想溫度 可以控制於9 0 0〜1 2 0 0 °C。 且，藉由這種熱處理，必然地，放電容器的發光部以 外的密封壁部也同時可將假想溫度控制於9 G 0〜1 2 0 0°C。 這些’是其中一例，藉由其他的各式各樣的條件，可 使放電容器的發光部及密封壁部的玻璃的假想溫度被控制 於 900 〜1200。。° 如此’藉由控制放電容器的發光部及密封壁部的玻璃 的假想溫度在900〜120(TC內，即使長時間點燈，放電容 器也不易因紫外線而變形就可以防止放電容器的破損。 接著說明含於放電容器13的玻璃的碳（C)。 -12- (9) 1317964 以下，含於放電容器的玻璃的碳（C )，是指由發光 部密封的壁部、及後述的排氣管殘部組成的放電容器本體 整體的玻璃所含有的碳（C )的意思。 碳進入放電容器的玻璃中的原因，不只是因爲成爲材 料的坡璃製造過程中的熱處理或使用碳冶具的（對於管或 披）成型，也因爲燈泡製造過程中的熱處理或使用碳冶具 的加工等。 進一步，隨著熱處理放電容器的時間愈長，進入放電 鲁 $器的玻璃內的碳的量會增加。 碳是在C0或co2的狀態下從玻璃內部放出至放電空 間的話，會藉由放電空間的等離子被分解，使碳附著於玻 璃表面而使透過率下降，而會產生放射照度維持率下降的 問題。 進一步，是附著於玻璃表面的碳會產生導電性，使高 輝度的電弧狀的放電發生，使光輸出大幅下降，而會有因 電弧狀的放電動作而使光量的變動變大的問題產生。 Φ 藉由使構成放電容器的玻璃實質上不包含碳（C)， 就可以防止放射照度維持率的下降、光輸出的下降、光量 變動。 此時，構成放電容器的玻璃’其碳（C)的量，是 C/Si的比爲0.1 atm %以下的話，放出至放電空間內的碳（ C )的量會減少，附著於玻璃面的碳會顯著減少’可以確 實防止玻璃的透過率的下降並防止放射照度維持率的下降 。且，高輝度的電弧狀的放電也不會發生，光輸出不會下 -13- (10) 1317964 降，光量的變動也可縮小。 顯示碳含量的具體的測量方法。對於碳含量的定量是 使用螢光X線分析裝置。放電容器的玻璃的內部的測量 ，是爲了防止因附著於燈泡表面的碳的影響、及浮遊於大 氣中的碳的附著所導致的玻璃內部的碳的檢測靈敏度減損 ，而在真空室中切斷玻璃試料’不曝露於大氣的狀態下測 量其切斷面。 因爲碳含量的分布是在板厚方向’所以對於從內外表 面0 . 1 mm的點、及板厚的中心部分的計3點進行測量， 並將其平均値作爲實際的測量値。檢測下限是0 . 1 at m%， 檢測限度値以下的資料是爲〇而求得平均値。 接著，複數製作構成放電容器的玻璃的假想溫度、及 改變碳（C )的量的準分子燈’調查：隨著點燈時間的經 過的放電容器的破損率、及初期點燈時的紫外線放射照度 爲1 0 0 %的情況時的點燈後1 〇 〇 〇小時經過後的紫外線放射 照度維持率，來進行實驗。準分子燈，是如第1圖所示的 準分子燈，放電容器的玻璃是石英玻璃，外側管是外徑 25mm，板厚1mm，內側管是外徑12mm，板厚1mm，全 長（兩端的密封壁部間的距離）800mm，定格500W。而 且’在放電容益內封入Xe氣體30kPa作爲放電氣體。 第2圖，是顯示實驗結果及實驗條件，構成放電容器 的玻璃是以具有相同假想溫度及相同碳含有量的準分子燈 5個爲1組，調查：在各組間，改變假想的溫度或者是碳 含有比率的7組的A〜G組的準分子燈的放電容器的破損 -14- (11) 1317964 率（1組5個燈之中有幾個燈破損的比率）、及放射照度 維持率（在1組5個燈的平均放射照度維持率），來進行 實驗。 第2圖中，A組的準分子燈，其放電容器的發光部及 密封壁部的玻璃的假想溫度是8 00 °C，碳含有比率（C/Si )是 0.2 a t m 0/〇 〇 在此A組中，全部的燈泡點燈後經過2 0 0 0小時也未 破損。但是，放射照度維持率是59%。 即’假想溫度因爲是8 0 0 °C較低，不易因紫外線變形 所以放電容器不會破損。但是，因爲控制假想溫度在800 °C，需要將放電容器長時間配置於電氣爐內進行熱處理， 或者是，成爲高溫狀態的放電容器需要長時間漸漸地冷卻 ，此熱處理過程因爲長時間所以碳會多量進入構成放電容 器的玻璃內，而成爲碳含有比率（C/Si )是〇. 1 atm%以上 的〇·2 atm%’放電容器內玻璃含有多量碳的結果，黑化物 會快速附著於放電容器的內面，而產生放射照度推持率下 降的問題。 且，燈泡雖未破損’ 5個之中的1個燈泡在經過丨8 〇 〇 小時時點發生了高輝度的電弧狀的放電，且，其他的1個 的燈泡’是在經過1 9 0 0小時的時點發生了高輝度的電弧 狀的放電’其高輝度的電弧狀的放電動作，使在相同位置 的光量時間變化大幅變動。具體上光輸出會衰減至穩定的 情況時的約3 /4〜1 /4的範圍。 F組的準分子燈，其放電容器的發光部及密封壁部的 -15- (12) 1317964 玻璃的假想溫度是1 3 0 0。(3 ，碳含有比率（C /S1 )是 0.1 atm %以下。 在此F組中，在點燈後i 〇 0 〇小時有4 〇 %的準分子燈 的放電容器破損，隨著點燈時間的經過破損率上昇’且在 2 0 0 0小時的破損率爲1 〇 〇 %，即全部的準分子燈的放電容 器皆破損。一方面，放射照度維持率是顯示5 0 %很低。這 是因爲，放電容器的玻璃的碳含有量是由減少而無黑化物 的影響，但因紫外線著色等使放電容器的玻璃本身的透過 率下降，結果使放射照度維持率下降。 在G組中，放電容器的發光部及密封壁部的玻璃的 假想溫度是1 3 0 0 °c，由點燈後1 0 0 0小時，全部的準分子 燈的放電容器是因紫外線的變形而破損，是實際上無法使 用的燈泡。 一方面，屬於本發明的B〜E組的準分子燈，是點燈 後經過2 000小時的破損率是0%，即使長時間點燈，放電 容器也不會破損的準分子燈。且，因爲碳含有比率（C/Si )是O.latm%以下，黑化物不會附著於放電容器的內面， 紫外線放射照度不會下降，即使長時間點燈，放射照度維 持率也不會下降。 從此結果，準分子燈的放電容器的發光部及密封壁部 的玻璃的假想溫度是900〜1 200 °C ’含於放電容器的玻璃 的碳（C)的量，是C/Si的比爲O.latm%以下的話，即使 長時間點燈，放電容器也不會因紫外線變形而破損，且， 成爲放射照度維持率不易下降的準分子燈。 -16- (13) 1317964 且’商輝度的電弧狀的放電也不會發生，2000小時 點燈後’光輸出或光量也不會變動可穩定地放電。 接著，使用：放電容器的發光部及密封壁部的玻璃的 假想溫度是本發明的條件範圍內也就是1 1 〇 〇 °c，碳含有 量不同的準分子燈4個，調查：1 〇 〇 〇小時點燈後的放射 照度維持率的變化，來進行實驗。 使假想溫度相同，碳含有量相異的方法，是有依存於 例如放電容器本體的加熱處理方法。這次的實驗的情況， 藉由採用將放電容器本體在1100 °c長時間配置於電氣爐 內進行熱處理的方法，從設置爐壁或固定用的冶具或爐的 環境等’來改變進入放電容器的玻璃的碳含量。藉由改變 熱處理時間使碳含有比率（C / S i )相異，使由碳所產生的 影響可明顯了解地進行實驗。 結果如第3圖所示。 如第3圖所示，燈泡1、燈泡2的含於放電容器的玻 璃的碳（C)的量，因爲C/Si的比爲0.1 atm%以下所以放 射照度維持率成爲70%以上，保持高紫外線放射維持率， 成爲即使長時間點燈，放射照度也不易下降的準分子燈。 但是，在燈3、燈4中，含於放電容器的玻璃的碳（ C )的量，因爲C/Si的比爲0.1 atm%以上所以放射照度維 持率是低於70%，放射維持率低且長時間點燈的話，會引 起紫外線的放射照度的下降，是實際上無法使用的燈泡。 然而，任一的燈皆點燈2000小時，但是因假想溫度 適切所以無破損的燈泡。且，燈泡3點燈1 9 0 0小時後， (14) 1317964 發生高輝度的電弧狀放電，燈泡4點燈後1 600小時，發 生高輝度的電弧狀的放電而使放電不穩定。 接著，說明放電容器的排氣管殘部。 如上述，放電容器的玻璃的假想溫度控制處理方法， 是在放電容器本體形成未被密封切斷的狀態的排氣管的狀 態進行熱處理。 這是，將發光氣體封入放電容器本體，將排氣管密封 切斷並形成排氣管殘部的狀態下將放電容器本體放入電氣 爐加熱的話，內部的發光氣體會膨脹，放電容器本體可能 破裂，預先將氣體封入放電容器內，放電容器完全完成狀 態下控制包含排氣管殘部的放電容器整體的假想溫度是成 爲 9 0 0〜1 2 0 0 °C的範圍。且，藉由封入氣體的壓力從玻璃 朝放電的容器內部放出大量的氧、氫、水、碳等，而對於 放電造成不良影響。 此結果，必然地，密封管的密封切斷作業是在假想溫 度控制處理過程之後發生，此密封管的密封切斷作業因爲 是藉由高溫燒斷排氣管，所以只有排氣管殘部的假想溫度 是成爲1200 °C以上。 如此只有排氣管殘部的假想濕度是成爲1 2 0 0 °C以上 的情況時，此排氣管殘部被紫外線照射的話，在排氣管殘 部會發生因紫外線所產生的變形，而可能從排氣管殘部或 其附近使放電容器破損。 爲了防止這種事，只有形成於放電容器本體的排氣管 殘部，另外藉由噴燈進行加熱處理，只有排氣管殘部附近 -18- (15) 1317964 藉由電氣爐等進行加熱處理，使排氣管殘部的假想溫度成 爲900〜1 200 °C地進行加熱處理。此結果，包含排氣管殘 部的放電容器整體的玻璃的假想溫度是成爲900〜1200 °C ，而確實可防止因紫外線所導致的放電容器的破損。且， 加熱範圍因爲小所以朝放電容器內部放出的不純氣體（氧 、氫、水、碳等），因量少所以不影響放電，或因爲量少 所以可藉由放電容器的非加熱部的吸氣材吸著，就可以穩 定地發生放電。 第4圖，是其他的準分子燈的說明圖。 在第4圖中，放電容器20是由石英玻璃構成的管型 的兩端密封型構造，在放電容器2 0的內部配置內部電極 2 1，在放電容器2 0的外面配置線圏狀的外部電極2 2，藉 由通過玻璃製的放電容器20的壁在內部電極21及外部電 極22之間引起放電就會在放電空間S內發生準分子放電 〇 此放電容器是外徑15mm，板厚1mm，在放電容器內 ，封入Xe氣體40kPa作爲放電氣體。 在這種準分子燈中，包含兩端的密封部2a的放電容 器 2〇整體被熱處理成玻璃的假想溫度爲 900〜1 200 °C也 可以，但是第4圖中，即使只有由符號L所顯示的外部電 極22存在的位置的放電容器的發光部是被熱處理成假想 溫度爲900〜120(TC，也可以充分地抑制因紫外線所產生 的變形的發生。然而，因爲排氣管殘部2b安裝於發光部 ，所以排氣管殘部2b及其附近是在封入放電氣體後使假 -19- (16) 1317964 想溫度成爲9 Ο 0〜1 2 Ο 0 °C地部分地進行熱處理。 這是因爲，藉由抑制：最接近在放電空間所發生的放 電且發生容易因紫外線所產生的變形的發光部的變形’就 可以延長準分子燈的壽命至實用上無問題的程度。 然而，構成放電容器20的玻璃所含有的碳（C)的量 ，是C / S i的比爲0 . 1 a t m %以下。 第5圖，是其他的準分子燈的說明圖。 在第5圖中，放電容器30是由石英玻璃構成的管型 的一端密封型構造，內部電極31是配置在放電容器30的 內部，金網狀的外部電極3 2是配置在放電容器3 0的外面 ，藉由通過玻璃製的放電容器30的壁在內部電極31及外 部電極3 2之間引起放電，就可在放電空間S內使準分子 放電發生。 此放電容器是外徑40mm，板厚1mm，在放電容器內 ，封入Xe氣體25kPa作爲放電氣體。 在這種準分子燈中，使包含密封部3a的放電容器30 整體被熱處理成玻璃的假想溫度爲900〜1200 °C，排氣管 殘部3b附近也熱處理成假想溫度爲900〜1200 °C也可以 ’是第5圖中，即使只有由符號L所顯示的外部電極32 存在的位置的放電容器的發光部被熱處理成假想溫度爲 9 0 0〜1 2 0 0 °C ’也可以充分地抑制因紫外線所產生的變形 的發生。 這是因爲’藉由抑制：最接近在放電空間所發生的放 電且發生容易因紫外線所產生的變形的發光部的變形，就 -20- (17) 1317964 可以延長準分子燈的壽命至實用上無問題的程度。 然而，構成放電容器20的玻璃所含有的碳（C)的里 ，是C/Si的比爲0. 1 atm%以下。 第6圖，是其他的準分子燈的說明圖。 在第6圖中，放電容器40是由石央玻璃藉構成的管 型的兩端密封型構造，成爲略「」的字’內部電極41 是配置在放電容器40的內部，使覆蓋圚周的一半且兼具 反射鏡的外部電極42是配置在放電容器4〇的直管部的外 面，藉由通過玻璃製的放電容器40的壁在內部電極41及 外部電極4 2之間引起放電，就可在放電空間S內使準分 子放電發生。 此放電容器是外徑20mm，板厚1mm，在放電容器內 ，封入Xe氣體20kPa作爲放電氣體。 在這種準分子燈中，將包含密封部4a的放電容器40 整體被熱處理成玻璃的假想溫度爲900〜1 200°C，排氣管 殘部4d附近也被熱處理成假想溫度爲900〜1200 °C也可 以’是第6圖中，即使只有形成由符號L所顯示的外部電 極42存在的位置的放電容器的直管部4b的發光部被熱處 理成假想溫度爲9 0 0〜1 2 0 0 °C，也可以充分地抑制因紫外 線所產生的變形的發生。 然而’這種略「」的字狀的放電容器，是在放電氣 體封入將前曲管部4。及直管部4b作爲整體配置於電氣爐 內’曲管部4c的假想溫度也必然成爲9〇〇〜1200 °C。 即，藉由抑制：最接近在放電空間所發生的放電且發 -21 - (18) 1317964 生容易因紫外線所產生的變形的發光部的變形，就可以延 長準分子燈的壽命至實用上無問題的程度。 然而，構成放電容器40的玻璃所含有的碳（C)的量 ，是C/Si的比爲0· 1 atm%以下。 第7圖，是其他的準分子燈的說明圖。 在第7圖中，放電容器50是由石英玻璃構成的管型 的一端密封型構造，成爲渦捲狀，內部電極51是配置在 放電容器5 0的內部，金網狀的外部電極5 2是配置在放電 容器5 0的外面，藉由通過玻璃製的放電容器5 0的壁在內 部電極5 1及外部電極5 2之間引起放電，就可在放電空間 S內使準分子放電發生。 此放電容器是外徑15mm，板厚lmm，在放電容器內 ，封入Xe氣體40kPa作爲放電氣體。 在這種準分子燈中，使包含密封部5a的放電容器50 整體被熱處理成玻璃的假想溫度爲900〜1200 °C也可以， 是第7圖中，即使只有形成外部電極52存在的位置的放 電容器的渦捲部5b的發光部被熱處理成假想溫度爲900 〜1 2 0 0 °C，也可以充分地抑制因紫外線所產生的變形的發 生。然而，因爲排氣管殘部5e是安裝於發光部，排氣管 殘部5 c及其附近是在封入放電氣體後使假想溫度成爲 9 0 0〜1 2 0 0 °C地部分地進行熱處理。 然而，構成放電容器50的玻璃所含有的碳（C)的量 ，是C / S i的比爲0 · 1 a t m %以下。 第8圖，是其他的準分子燈7的說明圖。 -22 - (19) 1317964 在第8圖中，放電容器60是玻璃製也就是兩端密封 型構造，放電容器60的外部及內部配置一對的外部電極 61，藉由通過玻璃製的放電容器60的壁在外部電極61間 引起放電就會在放電空間S內發生準分子放電。 在這種準分子燈中，使放電容器60整體被熱處理成 玻璃的假想溫度爲9 0 0〜1 2 0 0 °C也可以，即使只有外部電 極61存在的位置的放電容器的發光部被熱處理成假想溫 度爲9 0 0〜1 2 0 0 °C，也可以充分地抑制因紫外線所產生的 變形的發生。 這是因爲，藉由抑制：最接近在放電空間所發生的放 電且發生容易因紫外線所產生的變形的發光部的變形，就 可以延長準分子燈的壽命至實用上無問題的程度。 然而，構成放電容器6 0的玻璃所含有的碳（C )的量 ，是C/Si的比爲0. 1 atm%以下。 接著，將第4圖所示的準分子燈的密封部2a在電氣 爐內加熱成假想溫度成爲9 0 0〜1 2 0 0 °C時，不使從密封部 2 a突出的外部導棒氧化的方法的一例是如第9圖所示。 如第9圖（甲）的放電容器2 0的內部，在從端部的 稍靠中央，位置有金屬箔Η及外部導棒G，預先在此位置 e封合好金屬箔Η及外部導棒G，進一步，密封放電容器 2〇的端部f，使空間Α成爲真空或是不活性氣體環境。Rev. B, 2 8 6 ( 1 983 ) 3 266. The hypothetical temperature of the glass showing the light-emitting portion of the discharge vessel is a condition for 900 -11 - (8) 1317964 to 1 2 Ο 0 °C. A discharge capacitor body composed of an outer tube, an inner tube, and a sealing wall portion is manufactured in advance. In this state, the sealing tube formed in the discharge vessel is not sealed, and the luminescent gas is not sealed in the discharge space of the discharge vessel. The discharge vessel body is placed in an electric furnace, and after heating at 1120 ° C for 1 hour, it is rapidly cooled by a speed of 1 〇 ° c / min until 900 ° C, and a hypothetical temperature "1100 ° can be manufactured. The body of the discharge vessel formed by the glass of c". In another method, the discharge vessel body is placed in an electric furnace, and after heating at 950 ° C for 120 hours, it is gradually cooled by a speed of 〇 1 ° c /min to 700 ° C. A discharge vessel body made of glass having a virtual temperature of "900 ° C" can be produced. Namely, by such heat treatment, the fictive temperature of the light-emitting portion of the discharge vessel can be controlled to be 900 to 1 200 °C. Further, by such heat treatment, it is inevitable that the sealing wall portion other than the light-emitting portion of the discharge vessel can simultaneously control the fictive temperature to 9 G 0 to 1 200 °C. These are examples, and the virtual temperature of the light-emitting portion of the discharge vessel and the glass of the sealing wall portion can be controlled to 900 to 1200 by various other conditions. . ° By controlling the facsimile temperature of the glass in the light-emitting portion and the sealing wall portion of the discharge vessel in the range of 900 to 120 (TC), even if the capacitor is not easily deformed by ultraviolet rays for a long time, the discharge vessel can be prevented from being damaged. Next, the carbon (C) of the glass contained in the discharge vessel 13 will be described. -12- (9) 1317964 Hereinafter, the carbon (C) of the glass contained in the discharge vessel refers to a wall portion sealed by the light-emitting portion, and a row to be described later. The meaning of carbon (C) contained in the glass of the entire discharge vessel body composed of the tracheal residuals. The reason why carbon enters the glass of the discharge vessel is not only because of the heat treatment in the glass manufacturing process of the material or the use of carbon tools ( For tube or blister molding, it is also because of heat treatment in the manufacture of the bulb or processing using a carbon tool. Further, as the heat treatment time is longer, the amount of carbon entering the glass of the discharge device increases. When carbon is released from the inside of the glass to the discharge space in the state of C0 or co2, the plasma is decomposed by the plasma in the discharge space, and the carbon adheres to the surface of the glass to make the transmittance. Further, there is a problem that the illuminance maintenance rate is lowered. Further, carbon adhering to the surface of the glass generates electrical conductivity, causing an arc-like discharge of high luminance to occur, and the light output is greatly reduced, and there is an arc-like discharge. In the discharge operation, the fluctuation of the amount of light is increased. Φ By making the glass constituting the discharge vessel substantially free of carbon (C), it is possible to prevent a decrease in the irradiance maintenance rate, a decrease in the light output, and a change in the amount of light. When the amount of carbon (C) of the glass constituting the discharge vessel is such that the ratio of C/Si is 0.1 atm% or less, the amount of carbon (C) released into the discharge space is reduced, and carbon adhering to the glass surface is reduced. It will significantly reduce 'can effectively prevent the decrease of the transmittance of the glass and prevent the decrease of the irradiance maintenance rate. Moreover, the high-intensity arc-like discharge will not occur, and the light output will not fall below -13 - (10) 1317964. The change in the amount of light can also be reduced. The specific measurement method for the carbon content is shown. For the quantification of the carbon content, a fluorescent X-ray analysis device is used. The internal measurement of the glass of the discharge vessel is for the purpose of prevention. The detection sensitivity of carbon inside the glass is degraded by the influence of carbon attached to the surface of the bulb and the adhesion of carbon floating in the atmosphere, and the glass sample is cut in a vacuum chamber to be measured without being exposed to the atmosphere. The cut surface. Because the distribution of carbon content is in the direction of the plate thickness, it is measured at the point of 0. 1 mm from the inner and outer surfaces and the center of the plate thickness, and the average 値 is taken as the actual measurement.检测 The lower limit of detection is 0.1 at m%, and the detection limit 値 is obtained by averaging 〇 for the 〇. Next, the hypothetical temperature of the glass constituting the discharge vessel and the amount of carbon (C) are changed. Molecular lamp 'investigation: UV radiation after one hour after lighting after the breakage rate of the discharge vessel with the lighting time and the ultraviolet illuminance at the initial lighting is 100% The illuminance maintenance rate was used to conduct experiments. The excimer lamp is an excimer lamp as shown in Fig. 1. The glass of the discharge vessel is quartz glass, the outer tube has an outer diameter of 25 mm and a plate thickness of 1 mm, and the inner tube has an outer diameter of 12 mm and a plate thickness of 1 mm. The distance between the sealing walls is 800 mm, and the frame is fixed at 500 W. Moreover, 30 kPa of Xe gas was sealed as a discharge gas in the discharge capacity. Fig. 2 shows the experimental results and experimental conditions. The glass constituting the discharge vessel is composed of five excimer lamps having the same fictive temperature and the same carbon content. The investigation is to change the imaginary temperature between groups. It is the damage of the discharge vessel of the excimer lamp of the group A to group G of the seven groups of the carbon content ratio -14 (11) 1317964 rate (the ratio of the number of lamps broken by one of the five lamps in one group), and the maintenance of the illuminance The rate (average irradiance maintenance rate of 5 lamps in 1 group) was used for the experiment. In Fig. 2, in the excimer lamp of group A, the pseudo temperature of the light-emitting portion of the discharge vessel and the glass of the sealing wall portion is 800 ° C, and the carbon content ratio (C/Si) is 0.2 atm 0 / 〇〇 In group A, all the bulbs were not damaged after 2000 hours of lighting. However, the irradiance maintenance rate was 59%. That is, the imaginary temperature is low at 80 ° C, and it is not easy to be deformed by ultraviolet rays, so the discharge vessel is not damaged. However, since the control fictive temperature is 800 °C, it is necessary to arrange the discharge vessel for a long time in the electric furnace for heat treatment, or the discharge vessel to be in a high temperature state needs to be gradually cooled for a long time, and the heat treatment process is carbonized for a long time. A large amount enters the glass constituting the discharge vessel, and the carbon content ratio (C/Si) is 〇. 1 atm% or more 〇·2 atm%'. The glass in the discharge vessel contains a large amount of carbon, and the black compound quickly adheres to the discharge. The inner surface of the container causes a problem that the illuminance push rate is lowered. Moreover, although the bulb is not broken, one of the five bulbs has a high-intensity arc-like discharge at the point of 丨8 〇〇, and the other one bulb is after 1950 hours. At the time of the occurrence of a high-intensity arc-like discharge, the high-intensity arc-like discharge operation greatly changes the amount of light at the same position. The specific light output will decay to a stable range of about 3 / 4 ~ 1 / 4 when it is stable. In the group F excimer lamp, the imaginary temperature of the -15-(12) 1317964 glass of the discharge portion and the sealing wall portion of the discharge vessel is 1 300. (3, the carbon content ratio (C / S1) is 0.1 atm % or less. In this F group, the discharge capacitor of the excimer lamp with 4 〇% after i 〇 0 〇 hours is broken, with the lighting time The breakage rate increases 'and the breakage rate is 10,000% in 2000 hours, that is, the discharge capacitors of all the excimer lamps are damaged. On the one hand, the irradiance maintenance rate is shown to be very low at 50%. This is because the carbon content of the glass of the discharge vessel is reduced by the effect of no blackening, but the transmittance of the glass itself of the discharge vessel is lowered by ultraviolet coloring or the like, and as a result, the irradiance maintenance rate is lowered. The virtual temperature of the glass in the light-emitting portion and the sealing wall portion of the discharge vessel is 1 300 ° C. After 1000 hours after lighting, the discharge vessels of all the excimer lamps are damaged by the deformation of ultraviolet rays, which is actual. The bulb that cannot be used on the one hand. On the one hand, the excimer lamp belonging to the group B to E of the present invention has a breakage rate of 0% after 2 hours of lighting, and the discharge vessel is not damaged even if it is lit for a long time. Excimer lamp. And, because of the carbon content ratio (C/ Si) is O.latm% or less, and the black compound does not adhere to the inner surface of the discharge vessel, and the ultraviolet irradiance does not decrease. Even if the lamp is turned on for a long time, the irradiance maintenance rate does not decrease. From this result, the excimer lamp When the ratio of the carbon (C) of the glass contained in the discharge vessel is 900 to 1 200 ° C, the ratio of the C/Si ratio is less than O.latm%, Even if the lamp is turned on for a long time, the discharge vessel will not be damaged by the ultraviolet ray deformation, and the illuminance will be difficult to reduce the illuminance maintenance rate. -16- (13) 1317964 and the arc-like discharge of the merging degree will not be When the lamp is turned on for 2000 hours, the light output or the amount of light does not change and can be stably discharged. Next, the hypothetical temperature of the glass of the light-emitting portion of the discharge vessel and the sealing wall portion is within the condition range of the present invention, that is, 1 1 〇〇°c, four excimer lamps with different carbon contents, and the experiment: The experiment was carried out by changing the irradiance maintenance rate after 1 hour of lighting. The method of making the same temperature and the carbon content different ,there is For example, in the case of the heat treatment method of the discharge vessel main body, the method of heat treatment by disposing the discharge vessel main body in an electric furnace for a long time at 1100 ° C, from the setting of the furnace wall or the fixing tool or The environment of the furnace, etc., is used to change the carbon content of the glass entering the discharge vessel. By varying the heat treatment time, the carbon content ratio (C / S i ) is different, so that the effect produced by carbon can be clearly understood. As shown in Fig. 3, as shown in Fig. 3, the amount of carbon (C) in the bulb of the bulb 1 and the bulb 2 is 0.1 atm% or less, so the irradiance maintenance ratio becomes 70% or more, maintaining a high ultraviolet radiation maintenance rate, and becoming an excimer lamp that does not easily decrease in irradiance even when lighting is performed for a long time. However, in the lamp 3 and the lamp 4, the amount of carbon (C) contained in the glass of the discharge vessel is such that the ratio of C/Si is 0.1 atm% or more, so that the irradiance maintenance ratio is lower than 70%, and the radiation retention rate is low. When the lamp is turned on for a long time, the illuminance of the ultraviolet ray is lowered, and it is a bulb that is practically unusable. However, any of the lamps are lit for 2,000 hours, but there is no broken bulb due to the imaginary temperature being appropriate. Further, after the bulb 3 was turned on for 190 hours, (14) 1317964, a high-intensity arc-like discharge occurred, and after the bulb 4 was turned on for 1,600 hours, a high-intensity arc-like discharge occurred to destabilize the discharge. Next, the exhaust pipe residual portion of the discharge vessel will be described. As described above, the virtual temperature control processing method of the glass of the discharge vessel is heat-treated in a state in which the discharge vessel body is formed in an exhaust pipe which is not sealed and cut. When the luminescent gas is sealed in the discharge vessel body and the exhaust pipe is sealed and the residual portion of the exhaust pipe is formed, and the discharge vessel body is placed in the electric furnace, the internal luminescent gas expands and the discharge vessel body may rupture. The gas is sealed in the discharge vessel in advance, and the fictive temperature of the entire discharge vessel including the exhaust pipe residual portion is controlled to be in the range of 9000 to 1 2 0 0 °C. Further, a large amount of oxygen, hydrogen, water, carbon, or the like is released from the glass toward the inside of the discharge vessel by the pressure of the enclosed gas, which adversely affects the discharge. As a result, inevitably, the sealing and cutting operation of the sealed pipe occurs after the virtual temperature control process, and the sealing and cutting operation of the sealed pipe is because the exhaust pipe is blown at a high temperature, so only the imaginary of the exhaust pipe residual portion The temperature is 1200 °C or more. In this case, when the virtual humidity of the residual part of the exhaust pipe is 1 to 200 °C or more, if the exhaust pipe is irradiated with ultraviolet rays, the exhaust pipe may be deformed by ultraviolet rays, and may be discharged from the exhaust pipe. The discharge tube is damaged at or near the tracheal residue. In order to prevent such a problem, only the residual portion of the exhaust pipe formed in the discharge vessel body is heated by the torch, and only the vicinity of the residual portion of the exhaust pipe -18-(15) 1317964 is heat-treated by an electric furnace or the like to cause the discharge. The fictive temperature of the tracheal residue is heat-treated at 900 to 1 200 °C. As a result, the fictive temperature of the glass including the entire discharge vessel of the exhaust pipe residual portion is 900 to 1200 ° C, and it is possible to prevent breakage of the discharge vessel due to ultraviolet rays. In addition, since the heating range is small, the impure gas (oxygen, hydrogen, water, carbon, etc.) discharged into the inside of the discharge vessel does not affect the discharge due to the small amount, or the amount of the non-heated portion of the discharge vessel can be absorbed by the discharge vessel. When the gas is sucked, the discharge can be stably generated. Fig. 4 is an explanatory view of other excimer lamps. In Fig. 4, the discharge vessel 20 is a tubular type both end seal type structure made of quartz glass, and the internal electrode 2 is disposed inside the discharge vessel 20, and a wire-like outer portion is disposed outside the discharge vessel 20. The electrode 2 2 generates an excimer discharge in the discharge space S by causing a discharge between the internal electrode 21 and the external electrode 22 through the wall of the discharge vessel 20 made of glass. The discharge vessel has an outer diameter of 15 mm and a plate thickness of 1 mm. In the discharge vessel, 40 kPa of Xe gas was sealed as a discharge gas. In such an excimer lamp, the facsimile temperature of the entire discharge vessel 2 including the sealing portion 2a at both ends is heat-treated to glass of 900 to 1 200 ° C, but in FIG. 4, even if only the symbol L is displayed The light-emitting portion of the discharge vessel at the position where the external electrode 22 is present is heat-treated to a fictive temperature of 900 to 120 (TC, and the occurrence of deformation due to ultraviolet rays can be sufficiently suppressed. However, since the exhaust pipe residual portion 2b is attached to In the light-emitting portion, the exhaust pipe residual portion 2b and its vicinity are heat-treated partially after the discharge of the discharge gas so that the temperature of the false-19-(16) 1317964 is 9 Ο 0 to 1 2 Ο 0 °C. By suppressing the deformation of the light-emitting portion which is closest to the discharge occurring in the discharge space and causing deformation due to ultraviolet rays, the life of the excimer lamp can be extended to a practically problem-free degree. However, the discharge capacitor 20 is constructed. The amount of carbon (C) contained in the glass is such that the ratio of C / S i is 0.1 atm % or less. Fig. 5 is an explanatory view of another excimer lamp. In Fig. 5, the discharge vessel 30 is Quartz glass The tubular end of the tubular type has a one-end sealed structure, the internal electrode 31 is disposed inside the discharge vessel 30, and the gold mesh-shaped external electrode 32 is disposed outside the discharge vessel 30, and is passed through a discharge vessel 30 made of glass. The wall causes discharge between the internal electrode 31 and the external electrode 32, so that excimer discharge can occur in the discharge space S. The discharge vessel has an outer diameter of 40 mm and a plate thickness of 1 mm, and a Xe gas of 25 kPa is enclosed in the discharge vessel. In this excimer lamp, the facsimile temperature of heat-treating the entire discharge vessel 30 including the sealing portion 3a to glass is 900 to 1200 ° C, and the vicinity of the exhaust pipe residual portion 3b is also heat-treated to a pseudo temperature of 900 to 1200. °C can also be 'in Fig. 5, even if only the light-emitting portion of the discharge vessel at the position where the external electrode 32 is indicated by the symbol L is heat-treated to a fictive temperature of 9000 to 1 2 0 0 ° C ' The occurrence of deformation due to ultraviolet rays is sufficiently suppressed. This is because by suppressing the change of the light-emitting portion which is closest to the discharge generated in the discharge space and which is easily deformed by ultraviolet rays. Shape, -20- (17) 1317964 can extend the life of the excimer lamp to a practically no problem. However, the carbon (C) contained in the glass constituting the discharge vessel 20 is the C/Si ratio. 0. 1 atm% or less. Fig. 6 is an explanatory view of another excimer lamp. In Fig. 6, the discharge vessel 40 is a tubular type end seal type structure composed of Shiyang glass. The word 'internal electrode 41' is disposed inside the discharge vessel 40 so that the outer electrode 42 covering the half of the circumference and having the mirror is disposed outside the straight tube portion of the discharge vessel 4, and is made of glass. The wall of the discharge vessel 40 causes a discharge between the internal electrode 41 and the external electrode 42 to cause excimer discharge to occur in the discharge space S. This discharge vessel has an outer diameter of 20 mm and a plate thickness of 1 mm. In the discharge vessel, Xe gas of 20 kPa was sealed as a discharge gas. In such an excimer lamp, the facsimile temperature at which the entire discharge vessel 40 including the sealing portion 4a is heat-treated into glass is 900 to 1 200 ° C, and the vicinity of the exhaust pipe residual portion 4d is also heat-treated to a fictive temperature of 900 to 1200 °. C can also be 'in Fig. 6, even if only the light-emitting portion of the straight tube portion 4b of the discharge vessel where the external electrode 42 shown by the symbol L exists is heat-treated to a fictive temperature of 9000 to 1 2 0 0 At °C, it is also possible to sufficiently suppress the occurrence of deformation due to ultraviolet rays. However, the "slightly" shaped discharge vessel is sealed in the front portion of the tube portion 4 in the discharge gas. The straight pipe portion 4b is disposed in the electric furnace as a whole. The fictive temperature of the curved pipe portion 4c is also inevitably 9 〇〇 to 1200 °C. That is, by suppressing the discharge which is closest to the discharge space and the deformation of the light-emitting portion which is easily deformed by the ultraviolet rays, the life of the excimer lamp can be extended to practical use. The extent of the problem. However, the amount of carbon (C) contained in the glass constituting the discharge vessel 40 is such that the ratio of C/Si is 0·1 atm% or less. Fig. 7 is an explanatory view of other excimer lamps. In Fig. 7, the discharge vessel 50 has a tubular end-sealed structure made of quartz glass and has a spiral shape. The internal electrode 51 is disposed inside the discharge vessel 50, and the gold mesh external electrode 52 is disposed. On the outside of the discharge vessel 50, discharge is caused between the internal electrode 5 1 and the external electrode 5 2 by the wall of the discharge vessel 50 made of glass, so that excimer discharge can occur in the discharge space S. The discharge vessel has an outer diameter of 15 mm and a plate thickness of 1 mm. In the discharge vessel, Xe gas of 40 kPa is sealed as a discharge gas. In such an excimer lamp, the facsimile temperature at which the entire discharge vessel 50 including the sealing portion 5a is heat-treated to glass may be 900 to 1200 ° C, which is in Fig. 7, even if only the position where the external electrode 52 is present is formed. The light-emitting portion of the scroll portion 5b of the discharge vessel is heat-treated to a fictive temperature of 900 to 1 200 ° C, and the occurrence of deformation due to ultraviolet rays can be sufficiently suppressed. However, since the exhaust pipe residual portion 5e is attached to the light-emitting portion, the exhaust pipe residual portion 5c and its vicinity are partially heat-treated after the discharge gas is sealed and the virtual temperature is set to 9000 to 1200 °C. However, the amount of carbon (C) contained in the glass constituting the discharge vessel 50 is such that the ratio of C / S i is 0 · 1 a t m % or less. Fig. 8 is an explanatory view of another excimer lamp 7. -22 - (19) 1317964 In Fig. 8, the discharge vessel 60 is made of glass, that is, a two-end sealed structure, and a pair of external electrodes 61 are disposed outside and inside the discharge vessel 60, and a discharge vessel made of glass is used. When the wall of 60 causes a discharge between the external electrodes 61, an excimer discharge occurs in the discharge space S. In such an excimer lamp, the pseudo temperature at which the entire discharge vessel 60 is heat-treated into glass may be 90 to 1 200 ° C, and even if only the portion where the external electrode 61 exists, the light-emitting portion of the discharge vessel is heat-treated. When the imaginary temperature is 190 to 1 2 0 0 °C, the occurrence of deformation due to ultraviolet rays can be sufficiently suppressed. This is because it is possible to prolong the life of the excimer lamp to a practically no problem by suppressing the deformation of the light-emitting portion which is closest to the discharge occurring in the discharge space and which is easily deformed by the ultraviolet rays.至以上的以下。 The amount of carbon (C), the ratio of C / Si is 0. 1 atm% or less. Next, when the sealing portion 2a of the excimer lamp shown in Fig. 4 is heated in the electric furnace to have a fictive temperature of 9000 to 1200 °C, the outer guide bar protruding from the sealing portion 2a is not oxidized. An example of the method is as shown in Fig. 9. As shown in Fig. 9 (a), the inside of the discharge vessel 20 is provided with a metal foil crucible and an outer guide rod G at a position slightly from the center of the end portion, and the metal foil crucible and the outer guide rod are sealed in advance at this position e. G, further, the end f of the discharge vessel 2 is sealed to make the space Α a vacuum or an inert gas atmosphere.
而且，在此狀態下，將包含密封部2a的放電容器20 整體，放入電氣爐內，加熱使假想溫度成爲9 0 0〜1 2 0 0 °C -23- (20) 1317964 此結果’可以防止外部導棒G因存在於電氣爐內的 氧而被氧化。 之後’藉由切斷如第9圖（甲）中的χ_χ所示的部 分’如第9 (乙）圖所不’使外部導棒〇露出外部，而形 成供電部。 然而，第5圖、第6圖、第7圖的密封部3a、4a、 5 a藉由也同樣形成’就可以防止外部導棒的氧化。 當然’使電氣爐內部成爲真空或是不活性環境，即使 插入外部導棒露出的燈，也可以防止氧化。 然而’玻璃的歪斜雖是因紫外線或真空紫外線而發生 ’但是波長較短的真空紫外線的話較容易發生。本發明的 實施例主要是有關封入了發光172nm的真空紫外光的xe 氣體的Xe準分子燈。氬-氯準分子光也就是波長175nm 等也具有同樣的效果。且，對於氙-氯或氪-氟等的混合氣 體雖主要發生3 08nm或248nm的紫外線，但是因爲也發 生氙的172nm或気的147nm的真空紫外光，所以容易產 生歪斜。特別是長時間點燈的話，會引起鹵素氣體的枯渴 現象’在壽命末期會提高真空紫外光的比率。 【圖式簡單說明】 [第1圖]本發明的準分子燈的說明圖。 [第2圖]調查了 ：構成準分子燈的放電容器的玻璃的 假想溫度 '及改變了碳（C )的量的情況的放電容器的破 ί員率及紫外線放射照度維持率的實驗結果資料說明圖。 -24- (21) 1317964 [第3圖]調查了 ：放電容器的假想溫度爲一定的情況 時的改變了碳含有量時的放射照度維持率的變化的實驗結 果資料說明圖。 [第4圖]本發明的準分子燈的其他的實施例的說明圖 〇 [第5圖]本發明的準分子燈的其他的實施例的說明圖 〇 [第6圖]本發明的準分子燈的其他的實施例的說明圖 φ 〇 [第7圖]本發明的準分子燈的其他的實施例的說明圖 〇 [第8圖]本發明的準分子燈的其他的實施例的說明圖 〇 [第9圖]本發明的準分子燈的外部導棒的氧化防止方 法的說明圖。 【主要元件符號說明】 a排氣管殘部 S放電空間 1準分子燈 2燈泡 2 a密封部 2b排氣管殘部 3燈泡 -25- (22) 1317964 3 a密封部 3 b排氣管殘部 4燈泡 4 a 密 封 部 4b 直 管 部 4 c 曲 管 部 4d 排 氣 管 殘 部 5 準分子燈 5 a 密 封 部 5b 渦 捲 取 部 5 c 排 氣 管 殘 部 5e 排 氣 管 殘 部 7 準分子燈 11 外 側 管 12 內 側 管 13 放 電 容 器 14 密 封 壁 部 15 外 周 面 16 電 極 17 外 周 面 18 電 極 19 電 線 20 放 電 容 器 2 1 內 部 電 極Further, in this state, the entire discharge vessel 20 including the sealing portion 2a is placed in an electric furnace, and the heating is performed so that the fictive temperature becomes 9 0 0 to 1 2 0 0 ° C -23 - (20) 1317964 The outer guide bar G is prevented from being oxidized by the oxygen present in the electric furnace. Then, by cutting off the portion indicated by χ_χ in Fig. 9(a), the outer guide bar is exposed to the outside as shown in Fig. 9(b), and the power supply portion is formed. However, the sealing portions 3a, 4a, and 5a of Figs. 5, 6, and 7 can also be prevented from being oxidized by the formation of the same. Of course, the inside of the electric furnace is made into a vacuum or an inactive environment, and oxidation can be prevented even if a lamp exposed by an external guide bar is inserted. However, although the skew of the glass occurs due to ultraviolet rays or vacuum ultraviolet rays, the vacuum ultraviolet rays having a short wavelength are more likely to occur. The embodiment of the present invention is mainly directed to a Xe excimer lamp in which xe gas emitting 172 nm of vacuum ultraviolet light is enclosed. The argon-chloride excimer light, that is, the wavelength of 175 nm, has the same effect. Further, although a mixed gas of ruthenium-chloride or ruthenium-fluorine mainly generates ultraviolet rays of 280 nm or 248 nm, since 172 nm of ruthenium or 147 nm of vacuum ultraviolet light of ruthenium is also generated, skew is liable to occur. In particular, if the lamp is turned on for a long time, it will cause a thirst phenomenon of the halogen gas, which will increase the ratio of vacuum ultraviolet light at the end of life. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] An explanatory view of an excimer lamp of the present invention. [Fig. 2] The results of the experimental results of the discharge temperature of the discharge vessel and the ultraviolet irradiance retention rate of the case where the amount of carbon (C) is changed in the hypothetical temperature of the glass of the discharge vessel of the excimer lamp Illustrating. -24- (21) 1317964 [Fig. 3] The data of the experimental results of the change in the illuminance maintenance rate when the carbon content is changed when the imaginary temperature of the discharge vessel is constant is investigated. [Fig. 4] Description of other embodiments of the excimer lamp of the present invention [Fig. 5] Description of other embodiments of the excimer lamp of the present invention [Fig. 6] Excimer of the present invention Description of other embodiments of the lamp φ 〇 [Fig. 7] Description of other embodiments of the excimer lamp of the present invention [Fig. 8] An explanatory view of another embodiment of the excimer lamp of the present invention第 [Fig. 9] An explanatory diagram of a method for preventing oxidation of an outer guide bar of the excimer lamp of the present invention. [Main component symbol description] a exhaust pipe residual S discharge space 1 excimer lamp 2 bulb 2 a seal 2b exhaust pipe residual 3 bulb - 25 - (22) 1317964 3 a seal 3 b exhaust pipe residual 4 bulb 4 a Sealing part 4b Straight pipe part 4 c Curved pipe part 4d Exhaust pipe residual part 5 Excimer lamp 5 a Sealing part 5b Scrolling part 5 c Exhaust pipe residual part 5e Exhaust pipe residual part 7 Excimer lamp 11 Outer tube 12 Inner tube 13 Discharge capacitor 14 Sealing wall 15 Outer peripheral surface 16 Electrode 17 Outer peripheral surface 18 Electrode 19 Wire 20 Capacitor 2 1 Internal electrode
-26- (23) (23)1317964 2 2外部電極 3 0放電容器 3 1內部電極 3 2外部電極 4 0放電容器 4 1內部電極 4 2外部電極 5 0放電容器 φ 5 1內部電極 5 2外部電極 6 0放電容器 6 1 外部電極-26- (23) (23) 1317964 2 2 external electrode 3 0 discharge vessel 3 1 internal electrode 3 2 external electrode 40 discharge capacitor 4 1 internal electrode 4 2 external electrode 5 0 discharge vessel φ 5 1 internal electrode 5 2 external Electrode 60 discharge capacitor 6 1 external electrode
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