TWI388501B - 供鋰蒸發用之混合物及鋰分配器 - Google Patents
供鋰蒸發用之混合物及鋰分配器 Download PDFInfo
- Publication number
- TWI388501B TWI388501B TW094130153A TW94130153A TWI388501B TW I388501 B TWI388501 B TW I388501B TW 094130153 A TW094130153 A TW 094130153A TW 94130153 A TW94130153 A TW 94130153A TW I388501 B TWI388501 B TW I388501B
- Authority
- TW
- Taiwan
- Prior art keywords
- lithium
- mixture
- dispenser
- evaporation
- alloy
- Prior art date
Links
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims description 54
- 229910052744 lithium Inorganic materials 0.000 title claims description 54
- 239000000203 mixture Substances 0.000 title claims description 54
- 238000001704 evaporation Methods 0.000 title claims description 28
- 230000008020 evaporation Effects 0.000 title claims description 27
- 239000000843 powder Substances 0.000 claims description 23
- 229910045601 alloy Inorganic materials 0.000 claims description 19
- 239000000956 alloy Substances 0.000 claims description 19
- 239000003638 chemical reducing agent Substances 0.000 claims description 17
- 239000008188 pellet Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 229910003002 lithium salt Inorganic materials 0.000 claims description 12
- 159000000002 lithium salts Chemical class 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 150000002739 metals Chemical class 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 8
- 150000003839 salts Chemical class 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910000851 Alloy steel Inorganic materials 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 claims description 2
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 2
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 2
- 229910001080 W alloy Inorganic materials 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- BIJOYKCOMBZXAE-UHFFFAOYSA-N chromium iron nickel Chemical compound [Cr].[Fe].[Ni] BIJOYKCOMBZXAE-UHFFFAOYSA-N 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 claims description 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims 3
- 229910001257 Nb alloy Inorganic materials 0.000 claims 1
- 229910001069 Ti alloy Inorganic materials 0.000 claims 1
- 229910001093 Zr alloy Inorganic materials 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- 238000012360 testing method Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 8
- 229910052783 alkali metal Inorganic materials 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 150000001340 alkali metals Chemical class 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- -1 alkali metal chromates Chemical class 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 2
- 150000001844 chromium Chemical class 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- JOPOVCBBYLSVDA-UHFFFAOYSA-N chromium(6+) Chemical compound [Cr+6] JOPOVCBBYLSVDA-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000733 Li alloy Inorganic materials 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910001417 caesium ion Inorganic materials 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000037406 food intake Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000007794 irritation Effects 0.000 description 1
- 239000001989 lithium alloy Substances 0.000 description 1
- 150000002642 lithium compounds Chemical class 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- PAZHGORSDKKUPI-UHFFFAOYSA-N lithium metasilicate Chemical compound [Li+].[Li+].[O-][Si]([O-])=O PAZHGORSDKKUPI-UHFFFAOYSA-N 0.000 description 1
- 229910052912 lithium silicate Inorganic materials 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- LSGOVYNHVSXFFJ-UHFFFAOYSA-N vanadate(3-) Chemical class [O-][V]([O-])([O-])=O LSGOVYNHVSXFFJ-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/30—Doping active layers, e.g. electron transporting layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12063—Nonparticulate metal component
- Y10T428/12104—Particles discontinuous
- Y10T428/12111—Separated by nonmetal matrix or binder [e.g., welding electrode, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT001736A ITMI20041736A1 (it) | 2004-09-10 | 2004-09-10 | Miscele per l'evaporazione del litio e dispensatori di litio |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200621638A TW200621638A (en) | 2006-07-01 |
| TWI388501B true TWI388501B (zh) | 2013-03-11 |
Family
ID=35448266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094130153A TWI388501B (zh) | 2004-09-10 | 2005-09-02 | 供鋰蒸發用之混合物及鋰分配器 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7625505B2 (enExample) |
| EP (1) | EP1786946B1 (enExample) |
| JP (1) | JP4804469B2 (enExample) |
| KR (1) | KR101195634B1 (enExample) |
| CN (1) | CN100575536C (enExample) |
| IT (1) | ITMI20041736A1 (enExample) |
| TW (1) | TWI388501B (enExample) |
| WO (1) | WO2006027814A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10109446B2 (en) | 2007-02-16 | 2018-10-23 | Saes Getters S.P.A. | Air-stable alkali or alkaline-earth metal dispensers |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITMI20042279A1 (it) | 2004-11-24 | 2005-02-24 | Getters Spa | Sistema dispensatore di metalli alcalini in grado di dispensare quantita' elevate di metalli |
| AU2008310584A1 (en) * | 2007-10-12 | 2009-04-16 | University Of Delaware | Thermal evaporation sources for wide-area deposition |
| US9339869B2 (en) | 2011-10-26 | 2016-05-17 | Konstantin Chuntonov | Apparatus and method for droplet casting of reactive alloys and applications |
| ITMI20112051A1 (it) * | 2011-11-11 | 2013-05-12 | Getters Spa | Composizione organico-inorganica per il rilascio in fase vapore di metalli alcalini ed alcalino-terrosi |
| ITMI20131171A1 (it) * | 2013-07-11 | 2015-01-11 | Getters Spa | Erogatore migliorato di vapori metallici |
| KR102094142B1 (ko) * | 2013-08-30 | 2020-03-27 | 엘지디스플레이 주식회사 | 유기전계 발광소자 제조방법 |
| US9876188B2 (en) | 2013-12-27 | 2018-01-23 | Pioneer Corporation | Light emitting element and method of manufacturing light emitting element |
| WO2015133275A1 (ja) | 2014-03-06 | 2015-09-11 | シャープ株式会社 | 混合材料、その製造方法、及びそれを用いた有機素子 |
| KR102231490B1 (ko) * | 2014-09-02 | 2021-03-25 | 삼성디스플레이 주식회사 | 유기 전계 발광 소자 |
| US10886095B2 (en) * | 2016-01-08 | 2021-01-05 | Photonis Netherlands B.V. | Image intensifier for night vision device |
| JP7037493B2 (ja) | 2016-03-08 | 2022-03-16 | テラパワー， エルエルシー | ゲッター素子およびゲッター素子の製造方法 |
| CN207038182U (zh) | 2017-03-29 | 2018-02-23 | 泰拉能源有限责任公司 | 铯收集器 |
| CN107523793B (zh) * | 2017-08-23 | 2019-06-07 | 京东方科技集团股份有限公司 | 一种金属锂蒸发装置、蒸镀设备及金属锂蒸发方法 |
| US11626213B2 (en) * | 2019-08-23 | 2023-04-11 | Terrapower, Llc | Sodium vaporizer and methods |
| US11185915B2 (en) | 2019-08-30 | 2021-11-30 | Applied Materials, Inc. | Deposition of reactive metals with protection layer for high volume manufacturing |
| CN115125491A (zh) * | 2022-06-15 | 2022-09-30 | 北方夜视技术股份有限公司 | 一种多碱光电阴极制备用碱源的蒸发特性测量的方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2117735A (en) * | 1936-10-01 | 1938-05-17 | Rca Corp | Getter |
| US2424512A (en) * | 1944-08-08 | 1947-07-22 | Nat Res Corp | Production of alkali metals and their oxides |
| US2948635A (en) * | 1959-01-12 | 1960-08-09 | Gen Electric | Phosphor evaporation method and apparatus |
| US3096211A (en) * | 1959-03-31 | 1963-07-02 | Emi Ltd | Alkali metal generators |
| US3579459A (en) | 1966-12-13 | 1971-05-18 | Getters Spa | Metal vapor generating compositions |
| NL6913693A (enExample) | 1968-09-13 | 1970-03-17 | ||
| US3658713A (en) * | 1968-11-12 | 1972-04-25 | Tokyo Shibaura Electric Co | Alkali metal generating agents |
| US3663121A (en) | 1969-05-24 | 1972-05-16 | Getters Spa | Generation of metal vapors |
| GB1384890A (en) * | 1970-09-04 | 1975-02-26 | Rockwell International Corp | Protective coatings for ferrous metals |
| US3742185A (en) * | 1971-05-07 | 1973-06-26 | Lincoln Electric Co | Lithium containing welding electrode |
| NL7802116A (nl) * | 1977-03-14 | 1978-09-18 | Getters Spa | Alkalimetaaldampgenerator. |
| IT1115156B (it) * | 1979-04-06 | 1986-02-03 | Getters Spa | Leghe zr-fe per l'assorbimento di idrogeno a basse temperature |
| US4233936A (en) | 1979-05-08 | 1980-11-18 | Rca Corporation | Alkali metal dispenser |
| CA1306614C (en) * | 1987-06-08 | 1992-08-25 | Ralph Harris | Producing volatile metals |
| US5543021A (en) * | 1994-09-01 | 1996-08-06 | Le Carbone Lorraine | Negative electrode based on pre-lithiated carbonaceous material for a rechargeable electrochemical lithium generator |
| JPH0978058A (ja) | 1995-09-08 | 1997-03-25 | Pioneer Electron Corp | 有機エレクトロルミネッセンス素子 |
| US5636302A (en) | 1995-10-18 | 1997-06-03 | General Electric Company | Injection chamber for high power optical fiber transmission |
| US6255774B1 (en) | 1996-09-04 | 2001-07-03 | Cambridge Display Technology, Ltd. | Multilayer cathode for organic light-emitting device |
| DE69723538T2 (de) | 1996-11-29 | 2004-06-09 | Idemitsu Kosan Co. Ltd. | Organisches elektrolumineszentes Bauteil |
| JPH10270171A (ja) | 1997-01-27 | 1998-10-09 | Junji Kido | 有機エレクトロルミネッセント素子 |
| JP3266573B2 (ja) | 1998-04-08 | 2002-03-18 | 出光興産株式会社 | 有機エレクトロルミネッセンス素子 |
| US6312565B1 (en) * | 2000-03-23 | 2001-11-06 | Agere Systems Guardian Corp. | Thin film deposition of mixed metal oxides |
| EP1167566B1 (en) * | 2000-06-22 | 2011-01-26 | Panasonic Electric Works Co., Ltd. | Apparatus for and method of vacuum vapor deposition |
| ITMI20010995A1 (it) | 2001-05-15 | 2002-11-15 | Getters Spa | Dispensatori di cesio e processo per il loro uso |
| US6787122B2 (en) * | 2001-06-18 | 2004-09-07 | The University Of North Carolina At Chapel Hill | Method of making nanotube-based material with enhanced electron field emission properties |
| US6706445B2 (en) * | 2001-10-02 | 2004-03-16 | Valence Technology, Inc. | Synthesis of lithiated transition metal titanates for lithium cells |
| JP2004164992A (ja) | 2002-11-13 | 2004-06-10 | Canon Inc | 電子注入性電極の製造方法、及び有機エレクトロルミネッセンス素子の製造方法 |
| CN1265446C (zh) * | 2003-01-09 | 2006-07-19 | 友达光电股份有限公司 | 一种薄膜晶体管的制作方法 |
| EP1521286A4 (en) * | 2003-01-17 | 2006-12-13 | Hamamatsu Photonics Kk | ALKALI METAL GENERATING AGENT, ALKALI METAL GENERATOR, PHOTOELECTRIC SURFACE, SECONDARY ELECTRON EMITTING SURFACE, ELECTRONIC TUBE, PHOTOELECTRIC SURFACE MANUFACTURING METHOD, SECONDARY ELECTRON EMISSION SURFACE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING THE SAME |
| US20060152154A1 (en) | 2003-01-17 | 2006-07-13 | Hiroyuki Sugiyama | Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube |
| WO2004066339A1 (ja) | 2003-01-17 | 2004-08-05 | Hamamatsu Photonics K.K. | アルカリ金属発生剤、アルカリ金属発生器、光電面、二次電子放出面、電子管、光電面の製造方法、二次電子放出面の製造方法及び電子管の製造方法 |
| JP3938147B2 (ja) * | 2003-04-08 | 2007-06-27 | 住友金属鉱山株式会社 | タンタル酸リチウム基板およびその製造方法 |
| US20060032558A1 (en) * | 2004-08-12 | 2006-02-16 | Scott Holloway | Titanium aluminide intermetallic composites |
| ITMI20042279A1 (it) | 2004-11-24 | 2005-02-24 | Getters Spa | Sistema dispensatore di metalli alcalini in grado di dispensare quantita' elevate di metalli |
-
2004
- 2004-09-10 IT IT001736A patent/ITMI20041736A1/it unknown
-
2005
- 2005-09-02 TW TW094130153A patent/TWI388501B/zh active
- 2005-09-06 JP JP2007530857A patent/JP4804469B2/ja not_active Expired - Lifetime
- 2005-09-06 EP EP05778885.3A patent/EP1786946B1/en not_active Expired - Lifetime
- 2005-09-06 CN CN200580021281A patent/CN100575536C/zh not_active Expired - Lifetime
- 2005-09-06 WO PCT/IT2005/000509 patent/WO2006027814A2/en not_active Ceased
- 2005-09-06 KR KR1020077003072A patent/KR101195634B1/ko not_active Expired - Lifetime
- 2005-09-06 US US11/570,816 patent/US7625505B2/en active Active
-
2009
- 2009-10-02 US US12/572,640 patent/US7794630B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10109446B2 (en) | 2007-02-16 | 2018-10-23 | Saes Getters S.P.A. | Air-stable alkali or alkaline-earth metal dispensers |
Also Published As
| Publication number | Publication date |
|---|---|
| US7625505B2 (en) | 2009-12-01 |
| EP1786946B1 (en) | 2014-02-26 |
| HK1105538A1 (zh) | 2008-02-15 |
| TW200621638A (en) | 2006-07-01 |
| JP4804469B2 (ja) | 2011-11-02 |
| KR101195634B1 (ko) | 2012-10-30 |
| US20100021623A1 (en) | 2010-01-28 |
| EP1786946A2 (en) | 2007-05-23 |
| ITMI20041736A1 (it) | 2004-12-10 |
| JP2008512570A (ja) | 2008-04-24 |
| CN100575536C (zh) | 2009-12-30 |
| US20080042102A1 (en) | 2008-02-21 |
| CN1981066A (zh) | 2007-06-13 |
| KR20070050920A (ko) | 2007-05-16 |
| US7794630B2 (en) | 2010-09-14 |
| WO2006027814A2 (en) | 2006-03-16 |
| WO2006027814A3 (en) | 2006-05-18 |
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