gA23〇26 A7 B7 _ 五、發明説明（彳） 發明背景及槪述 本發明係關於使用於鹵素燈之吸氣裝置及其製造方法 0 鹵素燈，爲熟知的技藝，包含一做爲燈源的金屬燈絲 (通常爲鎢），乃藉由使電流通過此燈絲而加熱，至白熾 化時而發光。環繞著燈絲的密封石英燈泡中，則以已預定 好量的鹵素氣體或鹵素氣體混合物充塡（通常爲溴、碘、 較不常用的氯或此些之混合物），以幫助確保燈泡有長的 工作壽命。 利用鹵素來延長燈絲壽命的詳細機構相當複雜，但可 槪述如下： 一由於燈絲的高工作溫度，使得鎢原子會從燈絲表面 蒸發；若缺乏鹵素則此燈絲會局部地變細最後斷掉； -燈泡中的鹵素原子會與蒸發的鎢原子反應而形成鹵 化鎢，此物除了在高溫的燈絲表面外，在燈泡內的其它部 分都呈化性穩定態而不分解； 經濟部中央標準局貝工消費合作社印裝 (請先閲讀背面之注意事項再填寫本頁) 一在鹵化鎢分子分解後，鎢再度回到燈絲表面，而鹵 素原子則重回到燈泡內之大氣中，準備再做另一鹵化物的 形成-分解循環。 某些氣體的存在，特別是含氧的物種像〇2、H2〇、 CO、0〇2等，對上述的機構乃是有害的，其在與燈絲接 觸後會形成氧化鎢；比起金屬鎢，氧化鎢具有更高的蒸氣 壓，因而會加快燈絲變細的速率。 本纸張尺度適用中國國家標準（CNS ) A4規格（2丨OX297公釐） -4 - ^4 2302 6 A7 ______ B7 五、發明説明（2 ) 有害的氣體在燈泡的壽命期間，會因燈泡與燈絲接近 而溫度升高，進而滲入石英燈泡中；燈泡內部大氣中的另 —個有害氣體污染來源，乃是在高度自動化大量製造時期 ’並未完全地將有害氣體從燈泡中排出。 不管污染源爲何，有害的氣體可在石英燈泡的製造時 期及在燈泡的運作時期從石英燈泡中移除；此乃藉由在此 石英燈泡內部放置一含有吸氣材料的裝置。此吸氣材料會 與那些低量的有害氣體進行化學鍵結或反應而吸取淸除。 最熟知的吸氣材料在鹵素燈中之運作並不好，此乃由 於在石英燈泡內部含有高化學活性的大氣，換句話說爲高 溫的鹵素氣體《如鉅（Ta) '钍（Th)、給（Hf) 、鈾（Pt)、鈮（Nb)及鉻（Zr)等金屬乃用於此 申請案中，因爲它們對熱的鹵素氣體來說比較惰性，但其 對含氧氣體（如氧、水及碳的氧化物）乃具反應性。由這 些金屬或它們的混合物製造而使用在燈泡中之吸氣系統， 乃於德國專利DE 2 0 4 0 1 2 2中、在日本專利申請案 J P — 5205 5856中及前蘇聯專利 經濟部中夬標準局員工消費合作杜印製 (請先閲讀背面之注意事項再填寫本頁) SU1003199中皆有描述。 雖然已熟知這些金屬或它們的合金之使用，但是要利 用這些金屬當做吸氣材料而製造鹵素燈，還要兼顧到且這 些金屬的機械穩定度及保有它們的性質，如氣體之吸收等 乃是有困難的。爲達到好的吸收作用通常需曝露出相當高 程度的金屬表面，因此通常以使用粉末來達到要求。但是 本紙張尺度適用中國國家標準{ CNS ) A4規格（210X297公楚） -5- 經濟部中失標準局員工消費合作社印製 一’3〇2 1 鼷423026 A7 _ —_ B7 五、發明説明（3 ) 粉末化的金屬需被保存在某些型式的保存器內，因爲它無 法以鬆散的形式簡單地注入石英燈泡中。已知可製備粉末 的糊狀物，而將其塗佈在支撐燈絲的金屬線表面上。但是 此方法不容易於高度自動化的大量製造上實行，因爲它需 要將金屬粉末製成糊狀，且藉由塗刷法將糊狀物塗敷在單 獨而小的金屬零件上。 從P CT公告的專利申請案W 0 9 8/0 3 9 8 7中 ，以與本申請案相同受託人爲名，已知可利用絹網印刷法 製造受支撐的吸氣材料層。 本發明的目標在提供用於鹵素燈之石英燈泡內部的吸 氣裝置，及提供該吸氣裝置之製造方法。 前述目標之達成可利用絹網印刷法在金屬薄片上塗上 一糊狀物來製備此吸氣裝置：而此糊狀物包含鉅、钍、給 、鉑、鈮或錆，較佳地爲銷及鉬的混合物；而金屬薄片通 常由鈦或鉬組成；然後將此金屬薄片切割成小片狀或長條 狀。此薄片可完全地以吸氣材料沉積物覆蓋1但此薄片較 佳地乃部分地覆蓋。特別地，一較佳的體係乃由覆蓋著吸 氣材料沉積物的平行線路之金屬薄片組成：然後將此薄片 以垂直線路的方向切割成條狀。此些條狀物可再切割成小 片狀（在線路軸之間及沿著線路軸，平行地切割線路）’ 如此每個小片僅具有一個覆蓋吸氣物質的區域。這些小片 狀物具一無吸氣材料的薄片區域，其可用來將此吸氣裝置 鑲嵌在石英燈泡內。 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇χ297公釐） . ： Γ ^ I II. 訂 ~1 ---- — I— — —Γ (請先閱讀背面之注意事項再填寫本頁) -6 - 4 2302 6 at B7 五、發明説明（4 ) 本發明之吸氣裝置適合用有於任何處素燈中。但是根 據本發明之小型的吸氣裝置特別地重要’特別是它們的粗 細，這使得本發明特別地適合用於小型的石英燈泡中。 前述的本發明所有的目標、特色、優點及更多的事情 ，皆以下列的圖式說明及模範體係當輔助來做解釋。 圖式簡述 圖1顯示出在石英燈泡內部含金屬燈絲的鹵素燈； 圖2顯示出覆蓋上吸氣材料的金屬薄片之細部圖； 圖3顯示出如何切割如圖2所示之吸氣物質受覆蓋的 金屬薄片； ----；--^----^-- (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印策 圖4顯示出切割如圖3所示之薄片後所獲得的結果薄 片：及 圖5顯示出由圖4中所示之條狀物製成，而合適鑲嵌 在鹵素燈中的吸氣裝置。 符號說明 1 鹵素燈 3 燈絲 4 支撐物 6 成形區 2 石英燈泡 4 支撐物 5 空間 7 吸氣裝置 本紙張賴t S目家標準（CNS )八4聽 ( 210X297公石 經濟部中央標準局貝工消費合作社印製 _B7 五、發明説明（5 ) 8 吸氣裝置 2 0 吸氣材料 2 1 未塗佈薄片 2 2 線條 2 2 線條 2 3 線條 2 3 - 線條 5 0 吸氣裝置 詳細說明 圖1顯示出一含石英燈泡2的鹵素燈，通常指爲1。 石英燈泡2包含了鑲嵌在支撐物4，4 —上的燈絲3。在 石英燈泡內的空間5通常以鹵素氣體或鹵素氣體混合物， 典型地爲溴、碘及較少用的氯之混合物，充塡至已預定之 壓力。所描述的石英燈泡2乃被封在成形區域6中而圍住 鑲嵌燈絲3的支撐物4，4 /。石英燈泡2乃由開口的融 合二氧化矽管製得，其性質已被熟知的數種技藝中之任何 一種調整至符合當鹵素燈使用時所需。金屬導線4，4 — ，已附加上鎢燈絲3，則插進此管子的開口端中。然後將 此管子環繞著導線4，4 z ，藉由熱壓法擠壓。對大型及 中型管而言，此導線可爲正常的金屬線（圓截面）。對小 型管來說，因融合二氧化矽的厚度減少，故較佳地乃在二 氧化矽要熔融的環繞區域使用扁平的導線。此導線乃以隨 溫度變化的熱膨脹係數與石英相似之金屬製造，通常爲鉬 。與支撐物4，4 /相對的管子末端可以熟知的方法減少 。然後將石英管抽真空再塡回所想要的鹵素氣體，最常爲 溴及碘的混合物。最後將石英管加熱成形以製成石英燈泡 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 -8 - 經濟部中央標準局員工消費合作社印掣 ^423026五、發明説明（6 ) 2。 根據本發明之圖1 ，其顯示出兩個可鑲嵌吸氣裝置的 位置。要在小型鹵素燈中插入吸氣裝置是困難的。大型或 中型燈中因空間足夠大，故可在數個位置中的任一個插入 吸氣裝置。但是小型鹵素燈泡的空間僅可提供兩個基本鑲 嵌位置中的一個，來鑲嵌吸氣裝置。例如吸氣裝置7，可 藉由焊接法固定在支撐物4上，所以它無法自由的移動或 繞著石英管內部轉動而損壞燈絲3。此外，·吸氣裝置8可 插在石英燈泡2的成形區6中而與支撐物4 (或4 < )無 關。吸氣裝置可以獨立的插在成形區上而起作用。任一個 鑲嵌結構或二者一起，皆可施用於石英燈泡上。但是，仔 細考慮後僅有一個吸氣裝置結構可附加在任何特別的燈泡 上，其目的乃減少在石英燈泡2中被吸氣裝置佔據的空間 量。 圖2 - 5爲圖1之吸氣裝置7或8的細部圖。吸氣材 料2 0的條狀物可利用絹網印刷法將吸氣材料粉末塗在金 屬基材上而形成。此技術包括了於分散介質中製備一非揮 發性吸氣（N E G )金屬懸浮劑。N E G金屬包括如Z r 、Ti 、Ta、Nb及V等金屬。 在所使用的懸浮劑中，可使用顆粒大小不大於約 1 5 0微米的N E G金屬粉末；較佳的顆粒大小範圍在約 5微米及約7 0微米之間。此NE G金屬顆粒可分散在水 ，醇類或氫醇基溶液中，在其中含有不大於約1 w t %的gA23〇26 A7 B7 _ V. Description of the invention (彳) Background and description of the invention The present invention relates to a suction device for a halogen lamp and a method for manufacturing the same. The halogen lamp is a well-known technique and includes a lamp source. A metal filament (usually tungsten) is heated by passing an electric current through the filament, and emits light when incandescent. The sealed quartz bulb surrounding the filament is filled with a predetermined amount of halogen gas or halogen gas mixture (usually bromine, iodine, less commonly used chlorine, or a mixture of these) to help ensure that the bulb has a long life span. The detailed mechanism of using halogen to extend the life of the filament is quite complicated, but it can be described as follows: First, due to the high operating temperature of the filament, tungsten atoms will evaporate from the surface of the filament; if halogen is lacking, the filament will be locally thinned and finally broken; -The halogen atom in the bulb will react with the evaporated tungsten atom to form tungsten halide, except for the high-temperature filament surface, the other parts in the bulb are chemically stable and do not decompose; Printed by Industrial and Consumer Cooperatives (please read the precautions on the back before filling out this page)-After the tungsten halide molecules are decomposed, tungsten returns to the surface of the filament, and halogen atoms return to the atmosphere inside the bulb, ready to do another Monohalide formation-decomposition cycle. The presence of certain gases, especially oxygen-containing species such as 〇2, H2〇, CO, 〇2, etc., is harmful to the above-mentioned institutions, which will form tungsten oxide after contact with the filament; compared to metal tungsten , Tungsten oxide has a higher vapor pressure, which will accelerate the rate of filament thinning. This paper size applies to China National Standard (CNS) A4 specification (2 丨 OX297 mm) -4-^ 4 2302 6 A7 ______ B7 V. Description of the invention (2) During the life of the light bulb, harmful gas will The filament approaches and the temperature rises, and then penetrates into the quartz bulb; another source of harmful gas pollution in the atmosphere inside the bulb was during the period of highly automated mass manufacturing 'that the harmful gas was not completely exhausted from the bulb. Regardless of the source of the pollution, harmful gases can be removed from the quartz bulb during the manufacture of the quartz bulb and during operation of the bulb; this is achieved by placing a device containing a getter material inside the quartz bulb. This getter material will chemically bond or react with those low amounts of harmful gases to get rid of it. The most well-known getter materials do not work well in halogen lamps. This is because the inside of the quartz bulb contains a highly chemically active atmosphere. In other words, the high-temperature halogen gas "such as giant (Ta) '钍 (Th), Metals such as (Hf), uranium (Pt), niobium (Nb), and chromium (Zr) are used in this application because they are relatively inert to hot halogen gases, but they are inert to oxygen-containing gases such as oxygen , Water, and carbon oxides) are reactive. Suction systems made of these metals or their mixtures and used in light bulbs are described in German patent DE 2 0 4 0 1 2 2, in Japanese patent application JP 5205 5856 and in the former Soviet Patent Ministry of Economy. Printed by the Bureau of Consumer Affairs of the Bureau of Standards (Please read the notes on the back before filling out this page) SU1003199. Although the use of these metals or their alloys is well known, to use these metals as getter materials to make halogen lamps, we must also take into account the mechanical stability of these metals and their properties, such as gas absorption. There are difficulties. In order to achieve good absorption, a relatively high degree of metal surface is usually exposed, so powders are usually used to meet the requirements. However, this paper size applies the Chinese National Standard {CNS) A4 specification (210X297). -5- Printed by the Consumers 'Cooperatives of the China Bureau of Standards and Loss Standards, Ministry of Economic Affairs, a' 3〇2 1 鼷 423026 A7 _ —_ B7 5. Description of the invention 3) The powdered metal needs to be stored in some types of holders, because it cannot be simply poured into a quartz bulb in a loose form. It is known to prepare a powdery paste and coat it on the surface of a wire supporting a filament. However, this method is not easy to implement in highly automated mass production, because it requires the metal powder to be made into a paste, and the paste is applied to individual small metal parts by a brushing method. From PCT published patent application W 0 9 8/0 3 9 8 7, under the name of the same trustee as this application, it is known that a supported getter material layer can be manufactured by the silk screen printing method. It is an object of the present invention to provide a getter device inside a quartz bulb for a halogen lamp, and to provide a manufacturing method of the getter device. The aforesaid goal can be achieved by applying a paste on the metal foil by silk screen printing to prepare the getter device: and the paste contains giant, rhenium, platinum, niobium or rhenium, preferably a pin and A mixture of molybdenum; and metal flakes are usually composed of titanium or molybdenum; this metal flake is then cut into small pieces or strips. The sheet may be completely covered with a deposit of getter material1 but the sheet is preferably partially covered. In particular, a preferred system consists of a metal sheet of parallel lines covered with a deposit of getter material: this sheet is then cut into strips in the direction of the vertical lines. These strips can then be cut into small pieces (cutting the lines between and along the line axes in parallel) 'so that each piece has only one area covering the getter material. These small pieces have a thin area of getter-free material that can be used to embed this getter in a quartz bulb. This paper size applies the Chinese National Standard (CNS) A4 specification (21〇χ297 mm).: Γ ^ I II. Order ~ 1 ---- — I— — —Γ (Please read the notes on the back before filling in this (Page) -6-4 2302 6 at B7 V. Description of the invention (4) The suction device of the present invention is suitable for use in any kind of plain lamp. But the small getter devices according to the present invention are particularly important ', especially their thickness, which makes the present invention particularly suitable for use in small quartz bulbs. All the aforementioned objects, features, advantages and more of the present invention are explained with the following illustrations and exemplary systems as an aid. Brief Description of the Drawings Figure 1 shows a halogen lamp containing a metal filament inside a quartz bulb; Figure 2 shows a detailed view of a metal sheet covered with a getter material; Figure 3 shows how to cut the getter material shown in Figure 2 Covered metal sheet; ----;-^ ---- ^-(Please read the notes on the back before filling out this page) Figure 4 of the printed plan of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs The result sheet obtained after the sheet shown in FIG. 3: and FIG. 5 shows a suction device made of a strip as shown in FIG. 4 and suitably embedded in a halogen lamp. DESCRIPTION OF SYMBOLS 1 Halogen lamp 3 Filament 4 Support 6 Forming area 2 Quartz light bulb 4 Support 5 Space 7 Suction device This paper is based on Standards (CNS) 8 and 4 (210X297) Printed by a consumer cooperative_B7 V. Description of the invention (5) 8 Suction device 2 0 Suction material 2 1 Uncoated sheet 2 2 Line 2 2 Line 2 3 Line 2 3-Line 5 0 Detailed description of the suction device Figure 1 Shown is a halogen lamp containing a quartz bulb 2, usually referred to as 1. The quartz bulb 2 contains a filament 3 embedded on a support 4, 4—the space 5 inside the quartz bulb is usually a halogen gas or a halogen gas mixture, It is typically a mixture of bromine, iodine and less-used chlorine, filled to a predetermined pressure. The described quartz bulb 2 is enclosed in a forming area 6 and surrounds the support 4, 4 / inlaid filament 3 Quartz light bulb 2 is controlled by an open fusion silicon dioxide, and its properties have been adjusted to meet the needs when halogen lamps are used by any of several well-known techniques. Metal wires 4, 4 — have been attached Tungsten filament 3, inserted into this tube The open end. Then the tube is surrounded by the wire 4, 4 z and extruded by hot pressing. For large and medium pipes, the wire can be a normal metal wire (round cross section). For small pipes Because the thickness of the fused silica is reduced, it is better to use a flat wire in the surrounding area where the silicon dioxide is to be melted. This wire is made of a metal with a thermal expansion coefficient similar to quartz that varies with temperature, usually molybdenum. The end of the tube opposite to the support 4, 4 / can be reduced in a well-known way. Then the quartz tube is evacuated and then the desired halogen gas, most often a mixture of bromine and iodine, is heated. Finally, the quartz tube is heated to shape to make Quartz bulbs This paper is sized for the Chinese National Standard (CNS) A4 (210X297 mm) (please read the precautions on the back before filling out this page) Order-8-Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs ^ 423026 Explanation of the invention (6) 2. According to the present invention, FIG. 1 shows two positions where the getter device can be embedded. It is difficult to insert the getter device in a small halogen lamp. Large or medium size The space in the lamp is large enough to allow the suction device to be inserted in any of several positions. However, the space for small halogen bulbs can only provide one of the two basic setting positions for the installation of the suction device. For example, the suction device 7. It can be fixed on the support 4 by welding, so it cannot move freely or rotate around the inside of the quartz tube to damage the filament 3. In addition, the suction device 8 can be inserted in the forming area 6 of the quartz bulb 2 It has nothing to do with the support 4 (or 4 <). The suction device can be inserted into the forming area and function independently. Either one of the mosaic structures or both can be applied to the quartz bulb. However, after careful consideration, there is only one suction device structure that can be attached to any particular light bulb. The purpose is to reduce the amount of space occupied by the suction device in the quartz bulb 2. 2-5 are detailed views of the suction device 7 or 8 of Fig. 1. The strips of getter material 20 can be formed by coating the getter material powder on a metal substrate by a silk screen printing method. This technique involves preparing a non-volatile getter (N E G) metal suspension in a dispersion medium. N E G metals include metals such as Zr, Ti, Ta, Nb, and V. In the suspending agent used, N E G metal powder having a particle size of not more than about 150 micrometers can be used; the preferred particle size range is between about 5 micrometers and about 70 micrometers. The NE G metal particles can be dispersed in water, alcohols or hydroalcohol-based solutions, containing no more than about 1 wt%
(請先閱讀背面之注意事項再填寫本頁J 本纸張尺度適用中國國家標率（CNS ) A4規格（210X297公釐） -9- 42302 6 A7 B7 經濟部中央標準局貝工消費合作社印製 五、發明説明（7 ) 高沸點有機化合物，此些化合物之沸騰溫度至少約 2 5 0 °C。一合適的水性基溶劑實施例爲蒸餾水。合適的 醇類基溶劑包括，但非爲限制，低分子量的醇類如乙醇、 丙醇及丁醇（類）。合適的氫醇基溶劑爲水與如先前所述 之醇類的混合物。高沸點的有機化合物之量較佳地不多於 約0 . 8w t % »使用在絹印上的分散介質通常具有高含 量用來當黏著劑的有機成分。 在乾燥後遺留在沉積物中的有機成分|會在隨後進行 的燒結相期間，在約2 0 0 °C至4 0 0 °C下，分解形成如 CO、C〇2或氧化氮類的氣體。在此溫度下，NEG金屬 顆粒至少已經部分地活化，因此可吸收這些氣體，而此結 果會造成吸氣裝置的吸收容量減低。 使用包含大於1 w t %的高沸點有機化合物的分散介 質來做絹印沉積的N E G金屬薄層，其氣體吸收性質較差 。換句話說，分散介質較佳地包含至少約0 . 2w t %的 高沸點有機化合物。此類的化合物在較低的濃度時，會造 成懸浮劑的黏度太低。在這些條件下，可藉由溶劑的表面 張力，及藉由金屬基材及絹印網的網狀組織之溶劑潤溼性 來決定沉積物的最後形式。當溶劑對基材的潤溼性低時， 則溶劑的表面張力趨向於基材上形成較大比率的懸浮液滴 。此外，當絹印網以具高溶劑潤溼性的材料製成時，在要 將絹網從沉積物上剝離時’懸浮液會趨向於較大程度的黏 在絹網線上，此會在懸浮劑和絹網間形成液體的凹凸面區 {請先閱讀背面之注^^項再填寫本頁} 、-° 本紙悵尺度適用中國國家摞準（CNS ) A4規格（210X297公釐） -10- ^423026 A7 經濟部中央標準局員工消費合作杜印製 B7五、發明説明（8 ) 域，而造成過量的N E G金屬累積。這些效應的結果都無 法預知，且會改變用在基材上及絹印網上材料的功能，同 時形成不平坦的沉積物。 因此已製備好的懸浮劑乃利用絹印技術將之沉積在基 材上。此技術已在其它應用中熟知，如在合適的表面上複 製圖形或在印刷電路上之導電線路之沉積。合適用來製成 基材的材料包括，但非爲限制，如鈦及鉬等金屬，其可抵 擋住含熱鹵素氣體之大氣之激烈的化學反應性，而此熱氣 體則由在石英燈泡中操作鎢燈絲而產生。此基材的厚度可 介於約2 0微米和5 0 0微米之間。沉積物可以連續層的 形式覆蓋在整個基材表面上，或者有必要的話，可在基材 的邊緣留下未覆蓋的部分，以利於薄板的最後處理。這些 熟悉的技藝將確定絹印技術亦可在基材表面上形成部分沉 積，而獲得許多不同幾何圖形的NE G金屬沉積物。 爲了形成某種形狀的沉積物，可利用凝膠將絹印網口 選擇性地圍出想要的圖案，而此凝膠不會被要沉積的懸浮 劑侵蝕。所得到之沉積物將具有凝膠的負幾何形狀，也就 是說，相當於沒被以凝膠圍住的絹網幾何形狀=以此方法 ’可獲得具複雜形狀的連續沉積物如螺旋狀，及不連續的 沉積物，也就是說在相同基材上形成多數不連續沉積的沉 積物，如圓形、方形或線形。 然後將所獲得的沉積物乾燥以儘可能地消除更多的分 散介質。可在溫度介於約5 0°C及約2 0 0 °C間，於氣體 (請先閲讀背面之注意事項再填寫本頁) 表紙浪尺度逋用中國國家標隼（CNS ) A4说格（2丨〇X297公釐） -11 - 經濟部中央樣準局員工消費合作社印製 42302 6 A? _____ _B7_ 五、發明説明（9 ) 流中或在靜止的大氣中，在烘箱裏完成乾燥。在乾燥期間 ’分散介質中的揮發性成分會蒸發掉。 然後將乾燥的沉積物置於真空中，視N E G金屬的型 式而定’在溫度介於約8 0 0°C及1 0 0 0 t間燒結。較 佳地’燒結可在剩餘壓力小於〇 . 1毫巴的真空烘箱中進 行。視最後到達的溫度而定，燒結時間可從約5分鐘至約 2小時。在燒結處理的最後，沉積物可在真空下冷卻或在 一惰性氣體流中加速冷卻的速率。冷卻亦可使用此二種情 形的結合來達成》 若有必要，乾燥和燒結處理可在單一的熱處理中依順 序步驟進行。例如可將樣品放在真空烘箱中，在烘箱抽氣 至壓力小於0 · 1毫巴後，加熱溫度至約5 0 °C及 2 0 0 °C之間。樣品可保持在此溫度下一預定的時間，約 1 0分鐘至約1小時之間。此外，亦可監視烘箱中的壓力 値之變異。在此實例中，當壓力增加時乾燥步驟可視爲完 成，此爲分散介質中的揮發性物質蒸發的結果。在完全乾 燥後，樣品可在真空下加熱至燒結溫度。視分散介質及 N E G金屬成分的化學本質而定，可使用更複雜的熱循環 。在實施例中’介於乾燥溫度及燒結溫度之間的處理時期 ，其溫度可使用定溫°這些處理在消除最後殘餘的有機成 分乃特別有用，其乃藉由讓它們在N E G金屬尙未活化的 溫度下分解。 在燒結期間’乾燥的沉積物表面覆蓋了耐火物質以防 ----r--.----^ —— (請先閲讀背面之注意事項再填寫本頁〕 ,-'β 本紙乐尺度適用中國國家標準（CNS >Α4規格（210X297公釐） -12- 蒙423 02 6 A7 經濟部中央橾準局員工消費合作.社印製 B7 五、發明説明（1〇 ) 止表面的剝落。當用在與本發明的描述連結時，專門術語 "耐火材料〃意指任何物性及化性爲惰性的材料.也就是 說，在真空下在燒結循環的溫度範圍內不會有任何物理或 化學上的改變。若乾燥的沉積物表面在燒結期間曝露，則 會發生表面的剝落。雖然此剝落的理由尙未完全的了解， 但是已經發現若乾燥的沉積物表面以一耐火材料平面表面 覆蓋表面的話，也就是說如上所定義的物理及化學的惰性 材料’則會防止此現象的發生。任何合適的材料可用來覆 蓋及保護沉積物，所提供的材料在真空下及在整個燒結循 環的溫度範圍內，並不會熔化或受任何物理或化學的改變 或變更。在實施例中，鉬及石墨可用來覆蓋沉積物的表面 以防止因此之剝落。這些已熟知的技藝將確定可在相同的 熱循環中燒結數個受支撐的沉積物，其乃藉由重疊數個受 支撐的沉積物薄片，在此些薄板中或平坦的表面中插入耐 火材料，及在最上層的薄板表面覆蓋上耐火材料而達成。 進一步有關利用絹網印刷製造吸氣裝置的詳細參考資料， 可在P CT公告的專利申請案wo 9 8/0 3 9 8 7中獲 得。 絹網印刷可用來製成含锆及鉅的糊狀物。在鉬金屬薄 片上沉積這些金屬產生了如於圖2中所描述的結構。薄片 2 1可完全地以吸氣材料2 〇覆蓋。但是如圖2所示，若 吸氣材料2 〇僅部分地覆蓋薄片2 1的話會較好。 如圖2中所顯示之方法，在金屬薄片2 1上以平行的 線路沉積上吸氣材料2 0有一優點。金屬薄片2 1可沿著 —--- 參紙張尺度逍用中國國家標準（CNS ) A4g ( 210X297公羞 _ .----.裝------訂------1I ί _(請先閲讀背面之注^^項再填寫本筲) _ -13 經濟部中央標隼局員工消費合作社印袈 ^ 4-23026 a7 ___B7五、發明説明（n ) 虛線2 2，2 2 / ’ .........之線路，如圖3所顯示（所顯 示的爲圖2中的薄片部分）而垂直地切割。可利用任何合 適的切割工具沿者22，22 ..........垂齊地切割。{日 是，機械式切割工具會污染吸氣材料2 0。此污染可藉由 使用雷射切割工具而完全地避免。機械式切割通常使用剪 式切割法。此剪式切割法會將吸氣材料2 0從金屬薄片 2 1上移除。雷射切割工具則不會產生此剪力，且在切割 期間較不會移除吸氣材料2 0。合適的機械式切割工具及 雷射切割工具皆爲已熟知的技藝。 圖4則顯示出從圖3之薄板中切割下來之眾多小片中 之一片的一部分。此小片可進一步地沿著線2 3 ，2 3 > ..........切割，如圖4所示，以製造如圖5所顯示之單獨 的吸氣裝置5 0。此乃在次個NE G金屬粉末線路之間及 沿著相同線路的軸（較佳地爲折中線），沿著線2 3， 2 3 >切割而製得》在上面所討論的事情可與圖1做一連 結，裝置5 0之未塗佈的薄片2 1之小片可被用來將裝置 鑲嵌在支撐物4，4 >或成形區6上。較佳地，二維的裝 置5 0之尺寸最大不超過3毫米。因此，本發明之吸氣裝 置可在任何應用上顯示出特別緊密的吸氣結構。 本發明之原理、較佳地體係及運作模式已在前述的說 明中宣告。於此公告之體係應視爲對本發明之闡釋而非爲 它的限制。前述的公告非對熟於此技藝之人士以任何方式 獲得的相等的結構做一限制範圍，而是非如先前所想的方 ^ϋ' Hal ^m· ^^^1 ^11 an— n^i 一?J (_先M讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） A2302。 五、發明説明（12 ) 式而擴大此相等的結構範圍。不同的變異及改變會在前述 的說明體係中產生，而沒有離開如在附加之申請專利範圍 神 精 及 圍 範 的 明 發 本 之 告 宣 所 中 ----^_| ^----声-- (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印裝 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ2.97公釐）(Please read the notes on the back before filling in this page. J This paper size is applicable to China National Standards (CNS) A4 specifications (210X297 mm) -9- 42302 6 A7 B7 Printed by the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Description of the invention (7) High-boiling organic compounds whose boiling temperature is at least about 250 ° C. A suitable example of an aqueous-based solvent is distilled water. Suitable alcohol-based solvents include, but are not limited to, Low molecular weight alcohols such as ethanol, propanol, and butanols. Suitable hydroalcohol-based solvents are mixtures of water and alcohols as previously described. The amount of high-boiling organic compounds is preferably no more than about 0.8 w t% »The dispersion medium used on silkscreens usually has a high content of organic components used as adhesives. Organic components left in the sediment after drying | will occur during the subsequent sintering phase, in about At temperatures between 200 ° C and 400 ° C, gases such as CO, CO2 or nitrogen oxides are decomposed. At this temperature, the NEG metal particles are at least partially activated, so these gases can be absorbed, and this As a result, The absorption capacity is reduced. The use of a dispersion medium containing more than 1 wt% of a high boiling point organic compound to make a thin layer of NEG metal for silk screen deposition has poor gas absorption properties. In other words, the dispersion medium preferably contains at least about 0. 2w t% high-boiling organic compounds. At lower concentrations of such compounds, the viscosity of the suspending agent is too low. Under these conditions, the surface tension of the solvent can be used, and the metal substrate and silk can be used. The solvent wettability of the network of the printing screen determines the final form of the deposit. When the wettability of the solvent to the substrate is low, the surface tension of the solvent tends to form a larger proportion of suspension droplets on the substrate. In addition, when the silk screen is made of a material with high solvent wetting, when the silk screen is to be peeled from the sediment, the 'suspension will tend to stick to the silk screen to a large extent, which will suspend in the suspension. The liquid concave-convex surface area between the agent and the tulle {please read the note ^^ on the back before filling this page},-° This paper's standard is applicable to China National Standard (CNS) A4 specification (210X297 mm) -10- ^ 423026 A7 Central Ministry of Economic Affairs Standards Bureau ’s consumer cooperation Du printed B7 V. Invention Description (8) domain, resulting in excessive accumulation of NEG metal. The results of these effects are unpredictable, and will change the function of the material used on the substrate and on the silk screen. At the same time, uneven deposits are formed. Therefore, the prepared suspending agent is deposited on the substrate by using silk printing technology. This technology is well known in other applications, such as copying graphics on suitable surfaces or printing circuits. Deposition of conductive circuits on top. Suitable materials for the substrate include, but are not limited to, metals such as titanium and molybdenum, which can withstand the intense chemical reactivity of the atmosphere containing hot halogen gases, and this heat The gas is generated by operating a tungsten filament in a quartz bulb. The thickness of this substrate can be between about 20 microns and 500 microns. The deposits can be applied as a continuous layer over the entire surface of the substrate, or if necessary, uncovered parts can be left on the edges of the substrate to facilitate the final processing of the sheet. These familiar techniques will determine that silk screen printing techniques can also form partial deposits on the surface of substrates, resulting in NE G metal deposits of many different geometries. In order to form a deposit of a certain shape, a gel can be used to selectively surround the silk screen opening with a desired pattern, and the gel is not attacked by the suspending agent to be deposited. The resulting deposits will have a negative geometry of the gel, that is, equivalent to the geometry of a silk net that is not surrounded by gels = in this way, continuous deposits with complex shapes such as spirals can be obtained, And discontinuous deposits, that is to say, most discontinuous deposits are formed on the same substrate, such as round, square or linear. The obtained sediment is then dried to eliminate as much dispersing medium as possible. Can be used at temperatures between about 50 ° C and about 200 ° C. (Please read the precautions on the back before filling out this page.) The paper wave scale is in accordance with Chinese National Standard (CNS) A4. ( 2 丨 〇X297mm) -11-Printed by the Consumer Cooperatives of the Central Bureau of Procurement, Ministry of Economic Affairs, 42302 6 A? _____ _B7_ V. Description of the invention (9) Dry in the oven in a stream or in a still atmosphere. During the drying period, the volatile components in the dispersion medium will evaporate. The dried deposit is then placed in a vacuum, depending on the type of N E G metal, sintered at a temperature between about 800 ° C and 100 t. Preferably, the sintering can be performed in a vacuum oven with a residual pressure of less than 0.1 mbar. Depending on the temperature finally reached, the sintering time can be from about 5 minutes to about 2 hours. At the end of the sintering process, the deposits can be cooled under vacuum or accelerated in a stream of inert gas. Cooling can also be achieved using a combination of these two situations. "If necessary, drying and sintering can be performed in a single step in a single heat treatment. For example, the sample can be placed in a vacuum oven, and after the oven is evacuated to a pressure of less than 0.1 mbar, the heating temperature is between about 50 ° C and 200 ° C. The sample can be held at this temperature for a predetermined time, between about 10 minutes and about 1 hour. In addition, the variation of pressure in the oven can be monitored. In this example, the drying step can be regarded as completed when the pressure is increased, which is a result of evaporation of volatile substances in the dispersion medium. After completely drying, the sample can be heated to the sintering temperature under vacuum. Depending on the chemical nature of the dispersion medium and N E G metal composition, more complex thermal cycles can be used. In the examples, the treatment period between the drying temperature and the sintering temperature can be used at a fixed temperature. These treatments are particularly useful in eliminating the last remaining organic components by leaving them unactivated in the NEG metal. Decompose at the temperature. During the sintering 'the surface of the dried deposits was covered with refractory to prevent ---- r --.---- ^ —— (Please read the precautions on the back before filling this page],-' β Applicable to Chinese National Standards (CNS > A4 specifications (210X297 mm) -12-Meng 423 02 6 A7 Consumer Co-operation of the Central Government Bureau of the Ministry of Economic Affairs. Printed by the agency B7 V. Description of the invention (10) Stopping of the surface. When used in conjunction with the description of the present invention, the term " refractory material " means any material that is inert in physical and chemical properties. That is, there will be no physical or chemical properties within the temperature range of the sintering cycle under vacuum. Chemical changes. If the surface of a dry deposit is exposed during sintering, surface spalling will occur. Although the reason for this spallation is not fully understood, it has been found that if the surface of the dry deposit is covered with a flat refractory surface Surface, that is, physical and chemical inert materials as defined above 'will prevent this from happening. Any suitable material can be used to cover and protect the deposits, the materials provided under vacuum and Within the temperature range of the entire sintering cycle, it will not melt or be subject to any physical or chemical changes or alterations. In embodiments, molybdenum and graphite can be used to cover the surface of the deposit to prevent it from flaking. These well-known techniques will It is determined that several supported deposits can be sintered in the same thermal cycle by overlapping several supported deposit flakes, inserting refractory materials in these thin plates or flat surfaces, and in the uppermost layer This is achieved by covering the surface of the sheet with a refractory material. Further detailed information on the use of screen printing for the manufacture of getter devices can be found in the patent application WO 9 8/0 3 9 8 7 published by the CT. Silk screen printing can be used to Made of zirconium-containing and giant pastes. Depositing these metals on a molybdenum metal foil resulted in a structure as described in Figure 2. The foil 21 can be completely covered with a getter material 20. But as shown in Figure 2 It shows that it is better if the getter material 20 covers the sheet 21 only partially. As shown in FIG. 2, it is advantageous to deposit the getter material 20 on the metal sheet 21 in parallel lines. Metal foil 2 1 can be used along with the paper size—Chinese National Standard (CNS) A4g (210X297) _ .----. Installed -------- ordered ----- 1I ί _ (Please read the note ^^ on the back before filling in this note) _ -13 Seal of the Employee Consumer Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs ^ 4-23026 a7 ___B7 V. Description of the invention (n) Dotted line 2 2, 2 2 / '......... The line is cut vertically as shown in Figure 3 (shown as the sheet portion in Figure 2). Any suitable cutting tool can be used along 22, 22 ... ....... cut straight. {Day Yes, mechanical cutting tools will pollute the getter material 20. This contamination can be completely avoided by using laser cutting tools. Mechanical cutting usually uses shear cutting. This scissor cutting method removes the getter material 20 from the metal sheet 21. Laser cutting tools do not generate this shear force and are less likely to remove the getter material 20 during cutting. Suitable mechanical cutting tools and laser cutting tools are well known techniques. Fig. 4 shows a part of one of the plurality of small pieces cut from the sheet of Fig. 3. This small piece can be further cut along the lines 2 3, 2 3 > ..... as shown in Fig. 4 to manufacture a separate getter device 50 as shown in Fig. 5. This is made between the next NE G metal powder lines and along the axis of the same line (preferably a compromise line), cut along lines 2 3, 2 3 > It can be linked with FIG. 1, and a small piece of the uncoated sheet 21 of the device 50 can be used to mount the device on the support 4, 4 > or the forming area 6. Preferably, the size of the two-dimensional device 50 does not exceed 3 mm at the maximum. Therefore, the getter device of the present invention can show a particularly compact getter structure in any application. The principle, preferred system and operation mode of the present invention have been announced in the foregoing description. The system disclosed herein is to be considered as an explanation of the present invention and not as a limitation thereof. The foregoing announcement does not limit the scope of equivalent structures obtained in any way by those skilled in the art, but rather does not mean as previously thought ^ ϋ 'Hal ^ m · ^^^ 1 ^ 11 an— n ^ i JJ (_Please read the precautions on the back of the page before filling out this page) This paper size applies to China National Standard (CNS) A4 (210X297 mm) A2302. Fifth, the invention explains (12) and expands the scope of this equivalent structure. Different mutations and changes will be generated in the aforementioned description system, without leaving, as in the attached publication of the patent application of the spirit and scope of the Mingfa Announcement ---- ^ _ | ^ ---- Voice-(Please read the precautions on the back before filling this page) Order the paper printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. The paper size is applicable to the Chinese National Standard (CNS) Α4 specification (210 × 2.97 mm)