TWI376540B - - Google Patents

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Publication number
TWI376540B
TWI376540B TW094134826A TW94134826A TWI376540B TW I376540 B TWI376540 B TW I376540B TW 094134826 A TW094134826 A TW 094134826A TW 94134826 A TW94134826 A TW 94134826A TW I376540 B TWI376540 B TW I376540B
Authority
TW
Taiwan
Prior art keywords
substrate
adhesive
rigid body
body portion
movable film
Prior art date
Application number
TW094134826A
Other languages
English (en)
Chinese (zh)
Other versions
TW200628880A (en
Inventor
Michiya Yokota
Yoshikazu Ohtani
Mitsukuni Sakashita
Original Assignee
Shinetsu Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=36227625&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI376540(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Shinetsu Eng Co Ltd filed Critical Shinetsu Eng Co Ltd
Publication of TW200628880A publication Critical patent/TW200628880A/zh
Application granted granted Critical
Publication of TWI376540B publication Critical patent/TWI376540B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Screen Printers (AREA)
TW094134826A 2004-10-28 2005-10-05 Adhesive chuck device TW200628880A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004313999 2004-10-28

Publications (2)

Publication Number Publication Date
TW200628880A TW200628880A (en) 2006-08-16
TWI376540B true TWI376540B (de) 2012-11-11

Family

ID=36227625

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094134826A TW200628880A (en) 2004-10-28 2005-10-05 Adhesive chuck device

Country Status (5)

Country Link
JP (1) JP3917651B2 (de)
KR (1) KR100895468B1 (de)
CN (1) CN100447622C (de)
TW (1) TW200628880A (de)
WO (1) WO2006046379A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4746003B2 (ja) * 2007-05-07 2011-08-10 リンテック株式会社 移載装置及び移載方法
KR100918614B1 (ko) * 2007-10-19 2009-09-25 (주)아폴로테크 기판척
US8245751B2 (en) * 2007-11-07 2012-08-21 Advanced Display Process Engineering Co., Ltd. Substrate bonding apparatus
KR100942304B1 (ko) * 2008-06-02 2010-02-16 주식회사 에이디피엔지니어링 기판척, 기판합착장치
KR100988897B1 (ko) * 2008-08-18 2010-10-20 주식회사 탑 엔지니어링 어레이 테스터용 옵틱척
KR100983605B1 (ko) * 2008-09-24 2010-09-24 에이피시스템 주식회사 기판 안착 유닛 및 이를 구비하는 기판 접합 장치
JP5507074B2 (ja) * 2008-11-18 2014-05-28 株式会社アルバック 基板の貼合わせ方法及び基板貼合わせ装置
JP4954968B2 (ja) * 2008-12-01 2012-06-20 アドヴァンスド・ディスプレイ・プロセス・エンジニアリング・コーポレーション・リミテッド 粘着チャック及びこれを有する基板合着装置
TWI398687B (zh) * 2009-10-23 2013-06-11 Au Optronics Corp 基板組合系統及基板組合方法
KR101152232B1 (ko) * 2010-07-15 2012-06-08 에이피시스템 주식회사 기판 접합 장치 및 이를 이용한 기판 처리 방법
KR101221034B1 (ko) * 2010-10-06 2013-01-21 엘아이지에이디피 주식회사 기판척 및 이를 이용한 기판처리장치
KR20140035308A (ko) 2010-10-21 2014-03-21 유니버시티 오브 매사추세츠 고성능의 분리가 쉽고, 장기간 사용의 접착제 장치
JP4785995B1 (ja) * 2011-02-28 2011-10-05 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
JP4903906B1 (ja) * 2011-04-07 2012-03-28 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
JP2015510530A (ja) 2012-01-19 2015-04-09 ユニバーシテイ・オブ・マサチユセツツ 二面および多面接着装置
JP5395313B1 (ja) * 2012-12-25 2014-01-22 信越エンジニアリング株式会社 アクチュエータ及び粘着チャック装置
US9440416B2 (en) 2013-02-06 2016-09-13 University Of Massachusetts Weight-bearing adhesives with adjustable angles
EP2970722A4 (de) 2013-03-14 2016-12-07 Univ Massachusetts Vorrichtungen zur anwendung und zum belastungstragen sowie verfahren zur verwendung davon
US9603419B2 (en) 2013-03-15 2017-03-28 University Of Massachusetts High capacity easy release extended use adhesive closure devices
JP5811513B2 (ja) * 2014-03-27 2015-11-11 Toto株式会社 静電チャック
JP6419635B2 (ja) * 2014-04-23 2018-11-07 株式会社アルバック 保持装置、真空処理装置
KR101838681B1 (ko) * 2014-07-07 2018-03-14 에이피시스템 주식회사 지지척 및 기판 처리 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197335U (de) * 1987-06-05 1988-12-19
JPH05305592A (ja) * 1992-04-28 1993-11-19 Sony Corp 真空チャック
JPH09181156A (ja) * 1995-12-25 1997-07-11 Sony Corp 真空チャック
KR19990048958A (ko) * 1997-12-11 1999-07-05 김영환 식각 챔버용 유리기판 흡착 장치
JPH11333774A (ja) * 1998-05-22 1999-12-07 Ricoh Co Ltd シート状ワーク吸着・移載ハンド
JP2000199911A (ja) * 1999-01-06 2000-07-18 Matsushita Electric Ind Co Ltd 液晶表示装置の製造方法および製造装置
JP3862065B2 (ja) * 2001-11-29 2006-12-27 信越半導体株式会社 ウェーハ研磨ヘッド
TWI266104B (en) * 2002-03-14 2006-11-11 Sharp Kk Manufacturing method of liquid crystal display apparatus and substrate assembling apparatus
KR100685923B1 (ko) * 2002-03-25 2007-02-23 엘지.필립스 엘시디 주식회사 합착 장치 및 이를 이용한 액정표시장치의 제조 방법
JP2004268155A (ja) * 2003-03-05 2004-09-30 Tamagawa Machinery Co Ltd ガラス基板研磨ヘッド及びこれを用いた研磨装置、ガラス基板研磨方法、ガラス基板

Also Published As

Publication number Publication date
KR100895468B1 (ko) 2009-05-06
KR20070069132A (ko) 2007-07-02
JP3917651B2 (ja) 2007-05-23
JPWO2006046379A1 (ja) 2008-08-07
TW200628880A (en) 2006-08-16
WO2006046379A1 (ja) 2006-05-04
CN100447622C (zh) 2008-12-31
CN1985288A (zh) 2007-06-20

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