TWI373098B - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
TWI373098B
TWI373098B TW094105193A TW94105193A TWI373098B TW I373098 B TWI373098 B TW I373098B TW 094105193 A TW094105193 A TW 094105193A TW 94105193 A TW94105193 A TW 94105193A TW I373098 B TWI373098 B TW I373098B
Authority
TW
Taiwan
Prior art keywords
semiconductor device
semiconductor
Prior art date
Application number
TW094105193A
Other languages
English (en)
Other versions
TW200609972A (en
Inventor
Noboru Egawa
Yasuhiro Fukuda
Original Assignee
Oki Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Ind Co Ltd filed Critical Oki Electric Ind Co Ltd
Publication of TW200609972A publication Critical patent/TW200609972A/zh
Application granted granted Critical
Publication of TWI373098B publication Critical patent/TWI373098B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H01L23/5256Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
    • H01L23/5258Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive the change of state resulting from the use of an external beam, e.g. laser beam or ion beam
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203Particular design considerations for integrated circuits
    • H01L27/0248Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H01L27/0251Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
TW094105193A 2004-09-06 2005-02-22 Semiconductor device TWI373098B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004258404A JP4685388B2 (ja) 2004-09-06 2004-09-06 半導体装置

Publications (2)

Publication Number Publication Date
TW200609972A TW200609972A (en) 2006-03-16
TWI373098B true TWI373098B (en) 2012-09-21

Family

ID=35995341

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094105193A TWI373098B (en) 2004-09-06 2005-02-22 Semiconductor device

Country Status (5)

Country Link
US (2) US7816761B2 (zh)
JP (1) JP4685388B2 (zh)
KR (1) KR101123091B1 (zh)
CN (1) CN1747099B (zh)
TW (1) TWI373098B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105116628A (zh) * 2015-09-01 2015-12-02 昆山龙腾光电有限公司 液晶面板及液晶显示装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4600824B2 (ja) * 2005-09-16 2010-12-22 エルピーダメモリ株式会社 半導体集積回路装置
KR100948520B1 (ko) 2006-08-30 2010-03-23 삼성전자주식회사 정전기 특성을 개선한 증폭기
JP5006604B2 (ja) 2006-09-08 2012-08-22 ルネサスエレクトロニクス株式会社 半導体装置
JP5054370B2 (ja) 2006-12-19 2012-10-24 ルネサスエレクトロニクス株式会社 半導体チップ
JP2009021282A (ja) * 2007-07-10 2009-01-29 Elpida Memory Inc 半導体装置
US10600902B2 (en) * 2008-02-13 2020-03-24 Vishay SIliconix, LLC Self-repairing field effect transisitor
US8076751B2 (en) * 2008-04-21 2011-12-13 Littelfuse, Inc. Circuit protection device including resistor and fuse element
US8598679B2 (en) * 2010-11-30 2013-12-03 Taiwan Semiconductor Manufacturing Company, Ltd. Stacked and tunable power fuse
US8598633B2 (en) * 2012-01-16 2013-12-03 GlobalFoundries, Inc. Semiconductor device having contact layer providing electrical connections
KR102059527B1 (ko) 2013-05-10 2019-12-26 삼성전자주식회사 점퍼 패턴 및 블로킹 패턴을 가진 반도체 소자
KR102148236B1 (ko) * 2013-12-02 2020-08-26 에스케이하이닉스 주식회사 반도체 장치
CN106449601B (zh) * 2015-08-04 2019-04-16 无锡华润华晶微电子有限公司 一种半导体器件的制造方法和测试电路
US9940986B2 (en) 2015-12-16 2018-04-10 Globalfoundries Inc. Electrostatic discharge protection structures for eFuses
US9455222B1 (en) * 2015-12-18 2016-09-27 Texas Instruments Incorporated IC having failsafe fuse on field dielectric
CN205452280U (zh) * 2016-03-30 2016-08-10 京东方科技集团股份有限公司 静电防护结构、阵列基板及显示装置
US11756882B2 (en) 2020-12-31 2023-09-12 Texas Instruments Incorporated Semiconductor die with blast shielding
US11935844B2 (en) 2020-12-31 2024-03-19 Texas Instruments Incorporated Semiconductor device and method of the same

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE755039A (fr) * 1969-09-15 1971-02-01 Ibm Memoire semi-conductrice permanente
US4238839A (en) * 1979-04-19 1980-12-09 National Semiconductor Corporation Laser programmable read only memory
DE3276981D1 (en) * 1981-10-09 1987-09-17 Toshiba Kk Semiconductor device having a fuse element
JPS60121599A (ja) * 1983-12-06 1985-06-29 Fujitsu Ltd 集積回路装置
JP2002033393A (ja) * 1991-06-27 2002-01-31 Hitachi Ltd 半導体集積回路装置およびその製造方法
US5360988A (en) * 1991-06-27 1994-11-01 Hitachi, Ltd. Semiconductor integrated circuit device and methods for production thereof
US5675174A (en) * 1993-01-06 1997-10-07 Rohm Co., Ltd. Method for using fuse structure in semiconductor device
US5444650A (en) * 1994-01-25 1995-08-22 Nippondenso Co., Ltd. Semiconductor programmable read only memory device
KR0165384B1 (ko) * 1995-04-24 1998-12-15 윤종용 반도체 장치의 정전기 보호구조
US5701024A (en) * 1995-10-05 1997-12-23 Cypress Semiconductor Corp. Electrostatic discharge (ESD) protection structure for high voltage pins
KR100198623B1 (ko) * 1995-12-20 1999-06-15 구본준 정전기 보호회로
JP3907279B2 (ja) 1997-08-26 2007-04-18 宮城沖電気株式会社 半導体装置の製造方法および検査方法
JP3049001B2 (ja) * 1998-02-12 2000-06-05 日本電気アイシーマイコンシステム株式会社 ヒューズ装置およびその製造方法
US5949323A (en) * 1998-06-30 1999-09-07 Clear Logic, Inc. Non-uniform width configurable fuse structure
DE19843608C1 (de) * 1998-09-23 2000-03-16 Claas Selbstfahr Erntemasch Metallortungsvorrichtung in einem Erntegutförderer
US6285062B1 (en) * 1999-05-12 2001-09-04 Micron Technology, Inc. Adjustable high-trigger-voltage electrostatic discharge protection device
US6525397B1 (en) * 1999-08-17 2003-02-25 National Semiconductor Corporation Extended drain MOSFET for programming an integrated fuse element to high resistance in low voltage process technology
KR100331857B1 (ko) * 2000-03-15 2002-04-09 박종섭 정전기 보호회로
JP3636965B2 (ja) * 2000-05-10 2005-04-06 エルピーダメモリ株式会社 半導体装置
US6509236B1 (en) * 2000-06-06 2003-01-21 International Business Machines Corporation Laser fuseblow protection method for silicon on insulator (SOI) transistors
JP2002015569A (ja) * 2000-06-27 2002-01-18 Mitsubishi Electric Corp 半導体装置
JP2002110799A (ja) * 2000-09-27 2002-04-12 Toshiba Corp 半導体装置及びその製造方法
JP3526853B2 (ja) 2002-06-19 2004-05-17 沖電気工業株式会社 半導体装置の静電気破壊防止回路
US6667534B1 (en) * 2002-07-19 2003-12-23 United Microelectronics Corp. Copper fuse structure and method for manufacturing the same
JP2004247578A (ja) * 2003-02-14 2004-09-02 Kawasaki Microelectronics Kk 半導体装置および半導体装置の製造方法
US7098491B2 (en) * 2003-12-30 2006-08-29 Taiwan Semiconductor Manufacturing Company, Ltd. Protection circuit located under fuse window

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105116628A (zh) * 2015-09-01 2015-12-02 昆山龙腾光电有限公司 液晶面板及液晶显示装置

Also Published As

Publication number Publication date
JP4685388B2 (ja) 2011-05-18
CN1747099B (zh) 2012-03-28
US20060049466A1 (en) 2006-03-09
KR101123091B1 (ko) 2012-03-16
US20110089494A1 (en) 2011-04-21
TW200609972A (en) 2006-03-16
CN1747099A (zh) 2006-03-15
KR20060047944A (ko) 2006-05-18
US7816761B2 (en) 2010-10-19
JP2006073937A (ja) 2006-03-16

Similar Documents

Publication Publication Date Title
TWI366860B (en) Semiconductor device
EP1829102A4 (en) SEMICONDUCTOR DEVICE
EP1760790A4 (en) SEMICONDUCTOR COMPONENT
EP1710831A4 (en) SEMICONDUCTOR DEVICE
EP1709688A4 (en) SEMICONDUCTOR COMPONENT
EP1755165A4 (en) SEMICONDUCTOR DEVICE
TWI350964B (en) Semiconductor device
TWI373098B (en) Semiconductor device
EP1801871A4 (en) SEMICONDUCTOR COMPONENT
TWI320596B (en) Semiconductor device
EP1927138A4 (en) SEMICONDUCTOR DEVICE
EP1953824A4 (en) SEMICONDUCTOR DEVICE
TWI371867B (en) Semiconductor light-emitting device
EP1709573A4 (en) SEMICONDUCTOR APPARATUS
EP1708284A4 (en) SEMICONDUCTOR ELECTROLUMINESCENT DEVICE
EP1605523A4 (en) SEMICONDUCTOR COMPONENT
TWI370522B (en) Semiconductor memory device
EP1617475A4 (en) SEMICONDUCTOR COMPONENT
EP1787242A4 (en) SEMICONDUCTOR DEVICE
EP1938376A4 (en) SEMICONDUCTOR DEVICE
EP1886377A4 (en) SEMICONDUCTOR COMPONENT
EP1624358A4 (en) SEMICONDUCTOR COMPONENT
EP1906440A4 (en) SEMICONDUCTOR DEVICE
EP1976017A4 (en) SEMICONDUCTOR COMPONENT
EP1959492A4 (en) SEMICONDUCTOR COMPONENT

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees