TWI370243B - Holer for the support of a solid immersible lens - Google Patents

Holer for the support of a solid immersible lens

Info

Publication number
TWI370243B
TWI370243B TW093132877A TW93132877A TWI370243B TW I370243 B TWI370243 B TW I370243B TW 093132877 A TW093132877 A TW 093132877A TW 93132877 A TW93132877 A TW 93132877A TW I370243 B TWI370243 B TW I370243B
Authority
TW
Taiwan
Prior art keywords
holer
immersible
lens
solid
support
Prior art date
Application number
TW093132877A
Other languages
English (en)
Other versions
TW200519368A (en
Inventor
Hiroshi Tanabe
Ikuo Arata
Hirotoshi Terada
Original Assignee
Hamamatsu Photonics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics Kk filed Critical Hamamatsu Photonics Kk
Publication of TW200519368A publication Critical patent/TW200519368A/zh
Application granted granted Critical
Publication of TWI370243B publication Critical patent/TWI370243B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/14—Mountings, adjusting means, or light-tight connections, for optical elements for lenses adapted to interchange lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids
TW093132877A 2003-10-31 2004-10-29 Holer for the support of a solid immersible lens TWI370243B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003372845 2003-10-31

Publications (2)

Publication Number Publication Date
TW200519368A TW200519368A (en) 2005-06-16
TWI370243B true TWI370243B (en) 2012-08-11

Family

ID=34544054

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093132877A TWI370243B (en) 2003-10-31 2004-10-29 Holer for the support of a solid immersible lens

Country Status (7)

Country Link
US (1) US7576928B2 (zh)
EP (1) EP1679535A4 (zh)
JP (1) JP4495086B2 (zh)
KR (1) KR101117831B1 (zh)
CN (1) CN100380153C (zh)
TW (1) TWI370243B (zh)
WO (1) WO2005043210A1 (zh)

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US7123035B2 (en) 2002-04-10 2006-10-17 Credence Systems Corporation Optics landing system and method therefor
CN100529831C (zh) * 2003-03-20 2009-08-19 浜松光子学株式会社 固浸透镜和显微镜
US7312921B2 (en) 2004-02-27 2007-12-25 Hamamatsu Photonics K.K. Microscope and sample observation method
JP4643994B2 (ja) * 2005-01-19 2011-03-02 浜松ホトニクス株式会社 固浸レンズホルダ
US7110172B2 (en) * 2004-02-27 2006-09-19 Hamamatsu Photonics K.K. Microscope and sample observation method
JP4772394B2 (ja) * 2005-01-19 2011-09-14 浜松ホトニクス株式会社 対物レンズソケット
DE102005036252A1 (de) * 2005-08-02 2007-02-08 Carl Zeiss Jena Gmbh Haltemodul, das eine Festkörperimmersionslinse trägt
CN101548240B (zh) * 2006-12-01 2014-09-17 卡尔蔡司Smt有限责任公司 具有用于减小像差的可替换、可操纵的校正布置的光学系统
JP5001075B2 (ja) * 2007-06-20 2012-08-15 浜松ホトニクス株式会社 観察装置及び方法
JP5189321B2 (ja) * 2007-06-20 2013-04-24 浜松ホトニクス株式会社 固浸レンズホルダ
JP5364452B2 (ja) * 2009-06-03 2013-12-11 浜松ホトニクス株式会社 イマージョンレンズ支持装置
US8767199B2 (en) 2010-10-15 2014-07-01 Infrared Laboratories, Inc. Inspection system utilizing solid immersion lenses
CN106471412B (zh) * 2014-03-11 2020-04-21 Dcg系统有限公司 自校准的悬浮固体浸没透镜端部
SG11201701098WA (en) * 2014-09-26 2017-04-27 Hamamatsu Photonics Kk Solid immersion lens holder and image acquisition device
DE102015200927A1 (de) * 2015-01-21 2016-07-21 Carl Zeiss Microscopy Gmbh Vorrichtung und Verfahren zur Ausbildung eines Immersionsmittelfilms
JP6340150B1 (ja) 2016-12-14 2018-06-06 浜松ホトニクス株式会社 固浸レンズユニット及び半導体検査装置
WO2018110221A1 (ja) * 2016-12-14 2018-06-21 浜松ホトニクス株式会社 固浸レンズユニット及び半導体検査装置
CN107247328B (zh) * 2017-07-31 2020-03-27 山东建筑大学 一种用于液体分离的透明介质球固定显微装置及其方法
CN109696403B (zh) * 2017-10-23 2021-08-13 中国科学院重庆绿色智能技术研究院 一种用于浸没式显微成像的样品室
JP7025280B2 (ja) * 2018-05-08 2022-02-24 浜松ホトニクス株式会社 メタレンズユニット、半導体故障解析装置、及び半導体故障解析方法
JP2021527828A (ja) * 2018-06-18 2021-10-14 フリューダイム カナダ インコーポレイテッド 高解像度イメージング装置および方法
US20210231940A1 (en) * 2018-06-27 2021-07-29 Carnegie Mellon University Immersion front-end lens system
GB2579163A (en) * 2018-09-10 2020-06-17 Res & Innovation Uk Lens assembly for super-resolution microscopy
DE102018126527A1 (de) * 2018-10-24 2020-04-30 Carl Zeiss Microscopy Gmbh Vorrichtung und Verfahren zum Aufbringen eines flüssigen Immersionsmittels in einen Spalt zwischen einem Mikroskopobjektiv und einer zu mikroskopierenden Probe
DE102018126526A1 (de) * 2018-10-24 2020-04-30 Carl Zeiss Microscopy Gmbh Immersionsmittelaufbringung mittels einer Strahldüse
DE102020111717A1 (de) * 2020-04-29 2021-11-04 Carl Zeiss Microscopy Gmbh Schutzvorrichtung und verfahren zum schützen von mikroskopkomponenten vor flüssigkeitskontakt
US11754782B2 (en) * 2021-05-06 2023-09-12 Stmicroelectronics (Research & Development) Limited Mechanically held polymer lenses for photonics device maintaining placement reference to die

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US6594204B1 (en) * 1999-03-31 2003-07-15 Sony Corporation Lens holder, method for manufacturing lens holder, metal die for producing lens holder and objective lens device
US6687058B1 (en) * 1999-06-21 2004-02-03 The Trustees Of Boston University Numerical aperature increasing lens (nail) techniques for high-resolution sub-surface imaging
JP3906607B2 (ja) * 1999-07-08 2007-04-18 ソニー株式会社 記録及び／又は再生装置、及び記録及び／又は再生方法
JP2001023230A (ja) 1999-07-12 2001-01-26 Nikon Corp 光ヘッド及び光記録再生装置
JP2001034998A (ja) 1999-07-26 2001-02-09 Minolta Co Ltd 光ヘッド及びその製造方法
JP2001189359A (ja) 2000-01-04 2001-07-10 Toshiba Corp パターン検査装置
JP3602465B2 (ja) 2000-10-10 2004-12-15 Ｎｅｃエレクトロニクス株式会社 半導体装置、半導体装置の評価解析方法及び半導体装置の加工装置
US20020089758A1 (en) * 2001-01-05 2002-07-11 Nikon Corporation Optical component thickness adjustment method, optical component, and position adjustment method for optical component
JP2002236087A (ja) 2001-02-08 2002-08-23 Minolta Co Ltd 光学系調整方法、並びにその光学系調整方法を利用した光記録再生装置、顕微鏡装置及び加工装置
JP2003181672A (ja) * 2001-10-09 2003-07-02 Fujikura Ltd レーザ加工方法
US6621275B2 (en) * 2001-11-28 2003-09-16 Optonics Inc. Time resolved non-invasive diagnostics system
US6594086B1 (en) * 2002-01-16 2003-07-15 Optonics, Inc. (A Credence Company) Bi-convex solid immersion lens
JP2003260581A (ja) 2002-03-08 2003-09-16 Fujikura Ltd レーザ加工方法およびレーザ加工装置
JP2003298888A (ja) * 2002-04-02 2003-10-17 Konica Corp 撮像装置の製造方法

Also Published As

Publication number Publication date
EP1679535A1 (en) 2006-07-12
CN1875306A (zh) 2006-12-06
US20050094293A1 (en) 2005-05-05
KR20060095569A (ko) 2006-08-31
JP4495086B2 (ja) 2010-06-30
US7576928B2 (en) 2009-08-18
WO2005043210A1 (ja) 2005-05-12
TW200519368A (en) 2005-06-16
KR101117831B1 (ko) 2012-03-19
JPWO2005043210A1 (ja) 2007-11-29
EP1679535A4 (en) 2010-01-06
CN100380153C (zh) 2008-04-09

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees