TWI366881B - Test tray and handler using the test tray - Google Patents

Test tray and handler using the test tray

Info

Publication number
TWI366881B
TWI366881B TW097101117A TW97101117A TWI366881B TW I366881 B TWI366881 B TW I366881B TW 097101117 A TW097101117 A TW 097101117A TW 97101117 A TW97101117 A TW 97101117A TW I366881 B TWI366881 B TW I366881B
Authority
TW
Taiwan
Prior art keywords
test tray
handler
tray
test
Prior art date
Application number
TW097101117A
Other languages
English (en)
Other versions
TW200901355A (en
Inventor
Yong Sun Kim
Hyo Chul Yun
Dae Gon Yun
Original Assignee
Mirae Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mirae Corp filed Critical Mirae Corp
Publication of TW200901355A publication Critical patent/TW200901355A/zh
Application granted granted Critical
Publication of TWI366881B publication Critical patent/TWI366881B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW097101117A 2007-01-23 2008-01-11 Test tray and handler using the test tray TWI366881B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070007178A KR100855203B1 (ko) 2007-01-23 2007-01-23 테스트 트레이 및 그를 이용한 테스트 핸들러 장비

Publications (2)

Publication Number Publication Date
TW200901355A TW200901355A (en) 2009-01-01
TWI366881B true TWI366881B (en) 2012-06-21

Family

ID=39640607

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097101117A TWI366881B (en) 2007-01-23 2008-01-11 Test tray and handler using the test tray

Country Status (4)

Country Link
US (1) US7583076B2 (zh)
KR (1) KR100855203B1 (zh)
CN (1) CN101231324B (zh)
TW (1) TWI366881B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101039858B1 (ko) * 2009-05-29 2011-06-09 미래산업 주식회사 반도체 소자 수납장치, 테스트 트레이, 및 테스트 핸들러
KR20110099556A (ko) * 2010-03-02 2011-09-08 삼성전자주식회사 반도체 패키지 테스트장치
KR102021819B1 (ko) * 2012-12-14 2019-09-17 삼성전자주식회사 반도체 모듈 검사 시스템
KR102138794B1 (ko) * 2013-03-18 2020-07-28 삼성전자주식회사 반도체 패키지 위치정렬트레이, 그를 이용하는 테스트 핸들러, 반도체 패키지 위치 정렬 방법, 그리고 그를 이용하는 반도체 패키지 테스트 방법
CN104101425A (zh) * 2013-04-15 2014-10-15 镇江逸致仪器有限公司 具有常温检测与高温检测双夹具的巴条测试系统
DE102014114147B4 (de) * 2014-09-29 2023-03-23 Michael Keil Prüfscheibensystem
KR102390564B1 (ko) * 2015-08-04 2022-04-27 (주)테크윙 테스트핸들러용 자세변환장치 및 테스트핸들러
TWI614840B (zh) * 2016-10-14 2018-02-11 電子元件之移載裝置及其應用之測試設備
CN110146727B (zh) * 2019-06-13 2021-05-11 浙江优众新材料科技有限公司 一种芯片测试装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0716178U (ja) * 1993-08-25 1995-03-17 株式会社アドバンテスト Ｉｃハンドラにおけるスペーシングフレーム
SG90713A1 (en) * 1995-07-28 2002-08-20 Advantest Corp Semiconductor device testing apparatus and semiconductor device testing system having a plurality of semiconductor device testing apparatus
TW379285B (en) * 1997-07-02 2000-01-11 Advantest Corp Testing device for semiconductor components and the testing trays used in the testing apparatus
KR100262269B1 (ko) * 1998-04-25 2000-07-15 정문술 수평식 핸들러의 히팅챔버내에서의 테스트 트레이 이송장치
TW432221B (en) * 1998-05-29 2001-05-01 Advantest Corp Tray for electronic device, the transporting apparatus of tray for electronic device and testing apparatus for electronic device
JP3567803B2 (ja) * 1999-07-08 2004-09-22 日立ハイテク電子エンジニアリング株式会社 Ｉｃデバイスの試験装置
KR100376773B1 (ko) * 2000-10-10 2003-03-19 미래산업 주식회사 핸들러용 인덱스장치
KR100380965B1 (ko) * 2000-11-10 2003-04-26 미래산업 주식회사 모듈램 테스트 핸들러의 캐리어 이송장치

Also Published As

Publication number Publication date
CN101231324B (zh) 2012-01-25
KR100855203B1 (ko) 2008-09-01
CN101231324A (zh) 2008-07-30
KR20080069446A (ko) 2008-07-28
TW200901355A (en) 2009-01-01
US7583076B2 (en) 2009-09-01
US20080174299A1 (en) 2008-07-24

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees