TWI356908B - - Google Patents

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Publication number
TWI356908B
TWI356908B TW096134691A TW96134691A TWI356908B TW I356908 B TWI356908 B TW I356908B TW 096134691 A TW096134691 A TW 096134691A TW 96134691 A TW96134691 A TW 96134691A TW I356908 B TWI356908 B TW I356908B
Authority
TW
Taiwan
Prior art keywords
tray
holding
head
test
electronic component
Prior art date
Application number
TW096134691A
Other languages
English (en)
Chinese (zh)
Other versions
TW200834097A (en
Inventor
Kaneko Yuji
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of TW200834097A publication Critical patent/TW200834097A/zh
Application granted granted Critical
Publication of TWI356908B publication Critical patent/TWI356908B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW096134691A 2006-10-12 2007-09-17 Tray transfer apparatus and electronic component testing apparatus provided with the same TW200834097A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/320401 WO2008044305A1 (fr) 2006-10-12 2006-10-12 Appareil de transfert de plateau et appareil de test de composant électronique doté de cet appareil de transfert de plateau

Publications (2)

Publication Number Publication Date
TW200834097A TW200834097A (en) 2008-08-16
TWI356908B true TWI356908B (ja) 2012-01-21

Family

ID=39282516

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096134691A TW200834097A (en) 2006-10-12 2007-09-17 Tray transfer apparatus and electronic component testing apparatus provided with the same

Country Status (4)

Country Link
JP (1) JP5022375B2 (ja)
KR (1) KR101104291B1 (ja)
TW (1) TW200834097A (ja)
WO (1) WO2008044305A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101040308B1 (ko) 2008-10-24 2011-06-10 세크론 주식회사 트레이 이송 장치
KR101334765B1 (ko) * 2012-04-18 2013-11-29 미래산업 주식회사 반도체 소자 핸들링 시스템
KR102231407B1 (ko) * 2014-11-07 2021-03-25 (주)테크윙 전자부품 분류 장비
KR102631908B1 (ko) * 2018-08-21 2024-01-31 (주)테크윙 핸들러 및 이를 포함하는 오토메이션 시스템
JP3227434U (ja) 2020-03-12 2020-08-27 株式会社アドバンテスト 電子部品ハンドリング装置及び電子部品試験装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100206644B1 (ko) * 1994-09-22 1999-07-01 오우라 히로시 반도체 디바이스의 자동검사장치 및 방법
JPH11297791A (ja) * 1998-04-14 1999-10-29 Advantest Corp トレイ移送アーム及びこれを用いたトレイの移載装置、ｉｃ試験装置並びにトレイの取り廻し方法
JP4041594B2 (ja) * 1998-09-02 2008-01-30 株式会社アドバンテスト 部品試験装置およびチャンバ入り口の開閉方法
JP2005062090A (ja) 2003-08-19 2005-03-10 Renesas Technology Corp 半導体検査装置

Also Published As

Publication number Publication date
TW200834097A (en) 2008-08-16
JPWO2008044305A1 (ja) 2010-02-04
WO2008044305A1 (fr) 2008-04-17
JP5022375B2 (ja) 2012-09-12
KR101104291B1 (ko) 2012-01-12
KR20090086956A (ko) 2009-08-14

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