TWI342985B - Exposure apparatus and device manufacturing method - Google Patents

Exposure apparatus and device manufacturing method Download PDF

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Publication number
TWI342985B
TWI342985B TW095101065A TW95101065A TWI342985B TW I342985 B TWI342985 B TW I342985B TW 095101065 A TW095101065 A TW 095101065A TW 95101065 A TW95101065 A TW 95101065A TW I342985 B TWI342985 B TW I342985B
Authority
TW
Taiwan
Prior art keywords
exposure
light source
substrate
led
image
Prior art date
Application number
TW095101065A
Other languages
English (en)
Chinese (zh)
Other versions
TW200636393A (en
Inventor
Mitsuro Sugita
Kazuaki Ohmi
Takao Yonehara
Toshihiko Tsuji
Takaaki Terashi
Tohru Kohda
Shinji Tsutsui
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of TW200636393A publication Critical patent/TW200636393A/zh
Application granted granted Critical
Publication of TWI342985B publication Critical patent/TWI342985B/zh

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Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K1/00—Housing animals; Equipment therefor
    • A01K1/0047—Air-conditioning, e.g. ventilation, of animal housings
    • A01K1/0052—Arrangement of fans or blowers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental Sciences (AREA)
  • Zoology (AREA)
  • Animal Husbandry (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW095101065A 2005-01-20 2006-01-11 Exposure apparatus and device manufacturing method TWI342985B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005013033A JP4587170B2 (ja) 2005-01-20 2005-01-20 露光装置及びデバイスの製造方法

Publications (2)

Publication Number Publication Date
TW200636393A TW200636393A (en) 2006-10-16
TWI342985B true TWI342985B (en) 2011-06-01

Family

ID=36683423

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095101065A TWI342985B (en) 2005-01-20 2006-01-11 Exposure apparatus and device manufacturing method

Country Status (5)

Country Link
US (1) US8035668B2 (enExample)
JP (1) JP4587170B2 (enExample)
KR (1) KR100724637B1 (enExample)
CN (1) CN1808282B (enExample)
TW (1) TWI342985B (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7802910B2 (en) * 2008-01-29 2010-09-28 Dymax Corporation Light guide exposure device
JP5131129B2 (ja) * 2008-09-30 2013-01-30 ウシオ電機株式会社 光源ユニット及び該光源ユニットを具備した露光装置
JP5345443B2 (ja) * 2009-04-21 2013-11-20 株式会社日立ハイテクノロジーズ 露光装置、露光光照射方法、及び表示用パネル基板の製造方法
KR20120056094A (ko) * 2010-11-24 2012-06-01 삼성전기주식회사 노광 파장 조절 장치 및 그를 이용한 노광기
KR20120060018A (ko) * 2010-12-01 2012-06-11 삼성전자주식회사 마스크리스 노광 장치
JP2012174810A (ja) * 2011-02-18 2012-09-10 Fuji Xerox Co Ltd 発光部品、プリントヘッドおよび画像形成装置
KR101532352B1 (ko) * 2013-10-30 2015-06-29 주식회사 인피테크 노광용 led 광원 장치 및 노광용 led 광원장치 관리시스템
US20160327433A1 (en) * 2014-09-08 2016-11-10 Empire Technology Development Llc Title: integrated packaging for multi-component sensors
KR101689836B1 (ko) * 2015-09-25 2016-12-27 주식회사 리텍 고출력 uv led 광원의 펄스제어를 이용한 dmd 과열 저감 시스템
JP6406201B2 (ja) * 2015-10-02 2018-10-17 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体
CN106502059A (zh) * 2016-12-30 2017-03-15 俞庆平 一种适用于曲面手机玻璃的直写曝光系统及方法
CN106647185A (zh) * 2016-12-31 2017-05-10 江苏九迪激光装备科技有限公司 一种丝网印刷直接制版系统及制版方法
KR102688206B1 (ko) * 2017-11-16 2024-07-24 고쿠리츠다이가쿠호진 나가오카기쥬츠가가쿠다이가쿠 광 발생 장치, 광 발생 장치를 구비하는 노광 장치, 노광 시스템, 광 발생 방법, 및 노광 포토 레지스트 제조 방법
CN108646521A (zh) * 2018-06-19 2018-10-12 上海频微电子科技有限公司 一种光源直接成像聚焦光刻装置及光刻方法
US10901253B2 (en) * 2018-10-02 2021-01-26 Aristocrat Technologies Australia Pty Limited Button deck assembly for an electronic gaming machine and method for making the same
US11288912B2 (en) 2020-03-04 2022-03-29 Aristocrat Technologies, Inc. Electronic gaming machine including hybrid virtual and physical button area
CN112051711A (zh) * 2020-08-20 2020-12-08 江苏迪盛智能科技有限公司 一种曝光设备
KR20250036881A (ko) 2022-08-18 2025-03-14 가부시키가이샤 니콘 광원 유닛, 조명 유닛, 노광 장치, 및 노광 방법
CN119948408A (zh) 2022-10-24 2025-05-06 株式会社尼康 合成光学元件、照明单元、曝光装置、以及曝光方法
WO2024209586A1 (ja) 2023-04-05 2024-10-10 株式会社ニコン 光源ユニット、照明ユニット、露光装置、及び露光方法
JP2025037489A (ja) * 2023-09-06 2025-03-18 株式会社Ｓｃｒｅｅｎホールディングス 露光装置
WO2025094252A1 (ja) * 2023-10-31 2025-05-08 株式会社ニコン 露光装置

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US5561365A (en) * 1986-07-07 1996-10-01 Karel Havel Digital color display system
JP2585083Y2 (ja) * 1993-08-27 1998-11-11 大日本スクリーン製造株式会社 画像出力装置
JP2001500628A (ja) * 1996-02-28 2001-01-16 ケニス シー ジョンソン マイクロリトグラフィ用マイクロレンズスキャナ及び広フィールド共焦顕微鏡
JP2942230B2 (ja) * 1998-01-12 1999-08-30 キヤノン株式会社 画像形成装置及び発光装置
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JP4892128B2 (ja) * 2000-09-25 2012-03-07 ジーエルサイエンス株式会社 液体クロマトグラフィーの試料導入方法及び装置
JP4310056B2 (ja) * 2001-09-25 2009-08-05 株式会社オーク製作所 露光装置
US6927018B2 (en) * 2001-10-29 2005-08-09 Hewlett-Packard Development Company, L.P. Three dimensional printing using photo-activated building materials
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IL164483A0 (en) * 2002-04-10 2005-12-18 Fujinon Corp Exposure head, exposure apparatus, and applicationthereof
JP4546019B2 (ja) 2002-07-03 2010-09-15 株式会社日立製作所 露光装置
JP2004109658A (ja) * 2002-09-19 2004-04-08 Ricoh Co Ltd 光走査装置及び光路調整方法並びに画像形成装置
JP2004274011A (ja) * 2003-01-16 2004-09-30 Nikon Corp 照明光源装置、照明装置、露光装置、及び露光方法
JP2004327660A (ja) * 2003-04-24 2004-11-18 Nikon Corp 走査型投影露光装置、露光方法及びデバイス製造方法
EP1482373A1 (en) * 2003-05-30 2004-12-01 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
CN1637589A (zh) * 2003-12-26 2005-07-13 富士胶片株式会社 图像曝光方法和装置
JP2005309380A (ja) * 2004-03-26 2005-11-04 Fuji Photo Film Co Ltd 画像露光装置

Also Published As

Publication number Publication date
CN1808282B (zh) 2011-11-16
CN1808282A (zh) 2006-07-26
KR100724637B1 (ko) 2007-06-04
JP2006201476A (ja) 2006-08-03
JP4587170B2 (ja) 2010-11-24
US20060158504A1 (en) 2006-07-20
US8035668B2 (en) 2011-10-11
TW200636393A (en) 2006-10-16
KR20060084800A (ko) 2006-07-25

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