TWI342572B - - Google Patents

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TWI342572B
TWI342572B TW096134402A TW96134402A TWI342572B TW I342572 B TWI342572 B TW I342572B TW 096134402 A TW096134402 A TW 096134402A TW 96134402 A TW96134402 A TW 96134402A TW I342572 B TWI342572 B TW I342572B
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wire
composite metal
metal wire
gold
layer
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TW096134402A
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TW200912962A (en
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Lee Jun Der
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
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    • H01L2224/438Post-treatment of the connector
    • H01L2224/43848Thermal treatments, e.g. annealing, controlled cooling
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554Coating
    • H01L2224/45565Single coating layer
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554Coating
    • H01L2224/4557Plural coating layers
    • H01L2224/45572Two-layer stack coating
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554Coating
    • H01L2224/45599Material
    • H01L2224/456Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45638Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45644Gold (Au) as principal constituent
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    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H01L2924/01029Copper [Cu]
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    • H01L2924/01047Silver [Ag]
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    • H01L2924/01082Lead [Pb]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Metal Extraction Processes (AREA)
  • Electroplating Methods And Accessories (AREA)

Description

1342572 九、發明說明: 【發明所屬之技術領域】 本發明係有關一種金屬線材’尤指一種複合金屬線的 製造方法及其製成品。 【先前技術】 在半導體封裝技術中如1C、LED及SAW,都是將晶片 固晶在電路基板後,再透過打金線加工作業,使晶片與該 基板表面上的電路呈電性連結’以作為晶片與電路之間的 鲁訊號及電流傳遞。因此,金線及打金線的技術,在半導體 封裝上扮演著極重要的角色。 依半導體封裝型態不同’金線的規格、線徑與搭配的 焊線機台製作參數亦有所不同,而金線材料的主要特性參 數如強度(Breaking Load)、延展性(El〇ngati〇n)、彎曲度 (loop)及熔點等之物理特性,與使用的材料有直接關係。 因為製造金線所使用的材料好壞,將影響到打金線技術及 • 封裝完成後半導體的使用壽命及半導體使用上的穩定性。 因此在選用材料時,大都採用延展性佳及穩定性佳的材料 來製作半導體封裝時所需的金線。 目前在半導體封裝的打金線技術上最常使用的金線包 有一種 種疋純金的金線及另一種為紹石夕混合的石夕 線。由於純金製造成的金線具有較佳的物理性質如延展性 及導電性,因此廣泛被運用在半導體封裝,做為晶片與基 t上電路f性連結之導線。但是,利用純金打線製成的半 V體封裝易&成封裝後的半導體成本增加。因此,如何 5 1342572 調配及製造一種與純金線功效相同,且又能大幅度降低封 裝成本,乃是本發明所要解決之課題。 【發明内容】 因此,本發明主要目的,提出一種將金線所使用的原 料重新調配製作成,與純金製成的金線具有同等功效,且 可大幅度降低製作成本之複合金屬線材。 為達到上述之目的,本發明之複合金線製造方法及其 製成品,首先,先備有金、銀、銅原料’將該金、銀、鋼 鲁的原料置入於真空熔爐進行熔煉製造,並在真空熔爐中加 入不同成份比例微量金屬元素之鈹(Be)及鋁(A1)混合調 配。由真空熔爐煉製造出複合金屬合金,將該複合金屬合 金經由抽製為複合金屬線材。將複合金屬線材由第一粗; 線機拉伸後,再經第二粗伸線機及第一細伸線機拉伸形成 一預定線徑之母線材。 將母線材進行電鍍處理,在電鍍時,將母線材進行表 參面處理,依客戶需求若要鍍鎳時,於該母線材表面上鍍上 一層鎳層,再鍍鎳完成後,清洗鎳層的表面,再於該^層 的表面上鍍上一層金層,清洗金層表面,將金層表面烘 乾。若母線材表面不需鍍鎳層,直接於該母線材表面I電 鍍一層金層後,清洗金層表面,再烘乾金層表面。 在電鐘處理後’將已電鑛完成的母線材經第一細伸線 2、一極細伸線機、一超極細伸線機將母線材拉伸至一預 定線徑之複合金屬線材。再將母線材表面清洗及教處理, 使複合金屬線之物理性質如斷裂荷重(BreakingL〇ad)及斷 6 ^42572 裂應變(Elongation)為預定之所需範圍。 【實施方式】 茲有關本發明之技術内容及詳細說明,現配合圖式說 明如下: 請參閱第一、二圖,係本發明之複合金線材製造流程 及第一圖之細部流程示意圖。如圖所示:本發明之複合金 線製造方法,首先,如步驟100 ,先備有一原料,該原料 的組成物包括:90.⑼〜99. 99 %的銀(Ag)、0. 〇〇〇卜10. 〇〇%的 •金(Au)、〇.〇〇〇卜 1〇.00%的銅((:11)組成。 步驟102 ’進行熔煉製造,將該金、銀、銅的原料置 入於真空熔爐(如步驟1 〇2a)進行熔煉製造,並在真空炼 爐中加入不同成份比例微量金屬元素鈹(Be)及鋁(AI)混合 調配(如步驟l〇2b),如〇. 0001〜3. 00 %的鈹(Be)元素及 0.0001〜1,00的鋁(AI)元素。再由真空熔爐煉製造出複合金 屬合金(Aut、Ag»、Cux 、Bey 、AIz),如步驟 l〇2c 。 % 再將該複合金屬合金經由連續鑄造(抽拉)出一預定線徑 為4〜8咖的複合金屬線材(如步驟1〇2(1)。再透過捲收機 將複合金屬線材進行捲取(如步驟1〇2幻,再進行複合金 屬線材的成份分析,是否為所要之成份(如步驟l〇2f)。 步驟104,在複合金屬線材鑄造完成後’進行該線徑 的第一次拉伸,使線徑為4〜8mm的複合金屬線材經第一粗 伸線機拉伸至一預定線徑為3mm或3mm以下的複合金屬線 材(如步驟l〇4a),將線徑為3ram或3mm以下的複合金屬 線材經第二粗伸線機拉伸至一預定線徑為丨.QQ刪或丨.〇〇咖 7 1342572 以下的複合金屬線材(如步驟1 〇4b),最後將線經丨〇〇_ 或1. 00mm以下的複合金屬線材經第一細伸線機拉伸至〜 定線徑為0.50麵或0.50咖1以下的複合金屬線材(如= 驟l〇4c),並以0.50麵或0.50mm以下的複合金屬線材做為 母線材。 步驟106,在母線材進行電鍍處理,在電鍍時(如第 三圖所示),將母線材進行表面處理(如步驟1〇6a),在 進入步驟106b中判斷是否要鍍鎳(依客戶需求),若判 鲁要鑛鎳時,即於該母線材表面上錢上一層鎳層(如步驟 l〇6c),再鍍鎳完成後,將進行鎳層的表面清洗(如步驟 l〇6e),於該鎳層的表面上鍍上一層〇1〇〜3〇〇#m金層,用 •以防止母線材表面氧化及耐腐蝕之用途(如步驟1〇6\)。 在電鍍後將金層表面進行清洗(如步驟1〇6幻,再將金層 表面烘乾(如步驟106h)。若在步驟106b中判斷不要鍍^ 材時,直接進入步驟膽中直接於該母線材表面上電鑛;; 參層0.10〜3,卿的金層,在電鍍後將金層表面進行清洗(X如 步驟106g),再將金層表面供乾(如步驟⑽匕)。 步驟108,在電鍍處理後,進行第二次拉伸,將已電 鍍完成的母線材經第-細伸線機(步驟論)、一極細伸 線機(步驟l〇8b)、一超極細伸線機(步驟1〇8c)將母線 材拉伸至一預定線徑(如〇.〇508mm(2.0〇mii)或 0.0254111111(1.00!^〗)的複合金屬線。 步驟109,表面清洗’將複合金屬線表面清洗。 步驟110,再母線材在第二次拉伸完成後,將進行熱 1342572 處理,使複合金屬線之物理性質如斷裂荷重(Breaking Load)及斷裂應變(Elongation)為預定之所需範圍。 請參閱第四圖,係本發明之複合金屬線材的斷面剖視 示意圖。如圖所示:依據上的所製造完成的複合金屬線 材,包括:一母線材1及一金層2組成。其中, 該母線材1係由90. 00〜99. 99 %的銀(Ag)、0. OOOMO. 00 %的金(Au)、0. 000M0. 00%的銅(Cu)等之主要組成物所組 成。在該主要之組成物中加入〇· 〇〇〇1~3. 00 %的鈹(Be)元素 • 及0.0001〜1.00 %的鋁(AI)元素之微量金屬。 該金層2,係透過電鍍處理使鎳材坡覆在該母線材1 的表面上,以成形一金層2。 藉上母線材1與金層2所形成的複合金屬線,該可應 用於做為1C、LED及SAW封裝導線之用。 4參閱第五圖,係本發明之另一複合金屬線材的斷面 剖視示意圖。如圖所示:本圖式與第四圖不同之處,在於 參母線材1與金層2之間電鍍一層鎳層3。使母線材}表面 上披覆一層鎳層3,再於鎳層3表面上披覆一層金層2。 藉由該母線1、鎳層3及金層2所組成的複合金屬線,可 應用於做為1C、LED及SAW封裝導線之用。 上述僅為本發明之杈佳實施例而已,並非用來限定本 發明實施之範圍。即凡依本發明申請專利範圍所做的均等 變化與修飾,皆為本發明專利範圍所涵蓋。 【圖式簡單說明】 第一圖,係本發明之複合金線材製造流程示意圖。 9 1342572 第二圖,係第一圖之細部流程示意圖。 第三圖,係本發明之電鍍處理流程示意圖。 第四圖,係本發明之複合金屬線材的斷面剖視示意圖。 第五圖,係本發明之另一複合金屬線材的斷面剖視示意 圖。 【主要元件符號說明】 步驟100〜110 步驟102a〜102f • 步驟104a〜104c 步驟106a〜106h 步驟108a〜108c ’ 母線材1 金層2

Claims (1)

1342572 100.3.31 修正 十、申請專利範圍: 1、 一種封裝導線用的複合金屬線的製造方法,包 括: 3)、先備有一0.〇〇〇1〜1〇.〇〇%的金、9〇〇〇〜99 99 %的 銀、0. 0001〜10. 00%的銅原料; b) 、將該原料置入於真空熔爐進行熔煉,並在真空熔 爐中加入0. 0001〜3. 00 %的鈹(Be)及〇. 00(^4 〇〇 %的鋁的微 量金屬元素,以製成複合金屬合金,並經複合金屬合金抽 拉成複合金屬線材; c) 、將複合金屬線材進行該線徑的第一次拉伸至一預 定線徑; d) 、於該複合金屬線材表面上至少電鍍一層金屬層; e) 、在電鍍後’將進行複合金屬線材的線徑之第二次 拉伸至一預定線徑。 2、 如申請專利範圍第1項所述之封裝導線用的複合 金,線的製造方法’其中,步驟b中的複合金屬合金經由 連績鱗造出一預定線徑為4〜8刪的複合金屬線材,再透過 捲收機將複合金屬線材進行捲取,再進行複合金屬線材的 成份分析’是否為所要之成份。 3、 如申請專利範圍第1項所述之封裝導線用的複合 2屬線的製造方法’其中,步驟c中的將該複合金屬線材 材 粗伸線機拉伸為線徑3麵或3_以下的複合金屬線 再將線授為3咖或3mm以下的複合金屬線材經第二粗 幾拉伸為線彳泛1· 00mm或1· 00麵以下的複合金屬線材, 丄342572 100.3.31 修正 最後將線徑1.00麵或U0刪以下的複合金屬線材經第一細 伸線機拉伸為線径〇. 50 mm《0. 50 mm以下的複合金屬線 材。 4、 如申請專利範圍第1項所述之封裝導線用的複合 金屬線的製造方法,其中,步驟4在複合金屬線材進行電 鍍之步驟包括: 將複合金屬線材進行表面處理, 於该複合金屬線材表面上鑛上一層鎳層; 進行鎳層的表面清洗;及 於該鎳層的表面上鍍上一層金層。 5、 如申請專利範圍第4項所述之封裝導線用的複合 金屬線的製造方法,其中,該金層厚度為〇1〇〜3〇〇#m。 」 6、如申請專利範圍第丨項所述之封裝導線用的複合 金屬線的製造方法,其中,步驟4在複合金屬線材進行電 ' 鍍之步驟包括: 將複合金屬線材進行表面處理, 於該複合金屬線材表面上鍍上一層金層; 進行金層的表面清洗;及 將金層表面烘乾。 7、 如申請專利範圍第6項所述之封裝導線用的複合 金屬線的製造方法,其中,該金層厚度為〇. 1〇〜3 〇〇#m。 8、 如申請專利範圍第1項所述之封裝導線用的複合 金屬線的製造方法,其中,步驟e中進行第二次拉伸,將 複合金屬線材依序經第一細伸線機、一極細伸線機、一超 12 1342572 100.3. 31 修正 極細伸線機拉伸至預定之線徑如至 17.78mm(0.07mil)之任—種線徑的複合金屬線材。 9、如申請專利範圍第丨項所述之封裝導線用的複合 金屬線的製造方法’其中’步驟e後將進行表面清洗及熱 處理。 W、一種封裝導線用的複合金屬線製成品,包括: 一 90. 〇〇〜99. 99 % 的銀(Ag)、0· 〇〇〇1 〜1〇. 〇〇% 的金(Au)、 〇. 0001 〜10. 00% 的銅(Cu)及一 0. 000卜3 〇〇 % 的鈹(Be)及 〇‘0001〜1.00 %的鋁(AI)的微量金屬元素組成的母線材; 一金層’係以彼覆於該母線材的表面上。 U、如申請專利範圍第10項所述之封裝導線用的複合 金屬線製成品,其中,該金層厚度為0.10〜3.00。 12、 一種封裝導線用的複合金屬線製成品,包括j_ 一 90. 〇〇〜99. 99 % 的銀(Ag)、0. 000卜 10. 〇〇% 的金(Au)、 〇· 0001 〜^ 〇〇% 的銅(Cu)及一 0. 0001 〜3. 00 % 的鈹(Be)及 0♦ 0001〜1. 〇〇 %的銘(Ai)的微量金屬元素組成的母線材; 一鎳層,係以彼覆於該母線材表面上;及 一金層,係以彼覆於該鎳層的表面上。 13、 如申請專利範圍第12項所述之封裝導線用的複合 金屬線製成品,其中,該金層厚度為〇.1〇〜3. 00"m。 1342572 100.3. 31 修正 十一、圖式:
100 102 104 106 108 109 110
第14頁 1342572 100.3. 31 修正 108 MMli
102 第15頁 1342572 100.3.31 修正
第三圖 第16頁 1342572 100.3.31 修正
第四圖 2
第五圖 第17頁
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