TWI335304B - Spatial light modulator using an integrated circuit actuator and mehtod of making and using same - Google Patents
Spatial light modulator using an integrated circuit actuator and mehtod of making and using same Download PDFInfo
- Publication number
- TWI335304B TWI335304B TW093125585A TW93125585A TWI335304B TW I335304 B TWI335304 B TW I335304B TW 093125585 A TW093125585 A TW 093125585A TW 93125585 A TW93125585 A TW 93125585A TW I335304 B TWI335304 B TW I335304B
- Authority
- TW
- Taiwan
- Prior art keywords
- mehtod
- making
- integrated circuit
- same
- light modulator
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
1335304 柳年/月必日岸(更〕正替換頁 而移動該鏡,而使得該入射波前被調變以產生一輸出波 前。 18. —種方法,其包含: 於二維陣列之鏡上接收一入射波前;及 通過一連續固態而實質上堅硬的基底之表面上所形成 且橫向地彼此分離之多數獨立致動器的相應者之相應致 動器元件區段中的相應致動器元件之相反端上所形成的 電極對之加能以移動個別的鏡,藉此形成該獨立致動器 之二維陣列,每一該致動器元件區段被耦合至一相應的 該鏡, 其中該等電極對之每一者中之一電極被形成於該獨立 致動器與該基底之間並包含多數隔離的電極部分,及 當選定的該電極對被加能時個別的該獨立致動器係相 對於該基底之該表面而移動個別的該鏡,而使得該入射 波前被調變以產生一輸出波前。 123954-I000617.doc
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/651,048 US7385750B2 (en) | 2003-08-29 | 2003-08-29 | Spatial light modulator using an integrated circuit actuator |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200508142A TW200508142A (en) | 2005-03-01 |
TWI335304B true TWI335304B (en) | 2011-01-01 |
Family
ID=34104722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093125585A TWI335304B (en) | 2003-08-29 | 2004-08-26 | Spatial light modulator using an integrated circuit actuator and mehtod of making and using same |
Country Status (8)
Country | Link |
---|---|
US (2) | US7385750B2 (zh) |
EP (1) | EP1510848B8 (zh) |
JP (2) | JP2005078079A (zh) |
KR (1) | KR100642178B1 (zh) |
CN (1) | CN100570428C (zh) |
DE (1) | DE602004026254D1 (zh) |
SG (1) | SG130940A1 (zh) |
TW (1) | TWI335304B (zh) |
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US7385750B2 (en) * | 2003-08-29 | 2008-06-10 | Asml Holding N.V. | Spatial light modulator using an integrated circuit actuator |
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US7414701B2 (en) * | 2003-10-03 | 2008-08-19 | Asml Holding N.V. | Method and systems for total focus deviation adjustments on maskless lithography systems |
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DE102005050515A1 (de) | 2005-10-21 | 2007-04-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Flächensubstrat mit elektrisch leitender Struktur |
KR100818194B1 (ko) * | 2005-12-14 | 2008-03-31 | 삼성전기주식회사 | 리본의 정확한 임계치수 구현이 가능한 광변조기 소자의제조 방법 |
KR100861055B1 (ko) * | 2005-12-14 | 2008-09-30 | 삼성전기주식회사 | 복수의 구동 소자를 가진 광변조기 소자 |
KR100782003B1 (ko) * | 2005-12-26 | 2007-12-06 | 삼성전기주식회사 | 접합층을 가지는 광변조기 소자 |
KR100809329B1 (ko) * | 2006-09-08 | 2008-03-07 | 삼성전자주식회사 | 광학계의 수차를 보정하기 위한 미러를 포함하는포토리소그래피 장치 및 수차 보정부를 포함하는 미러 |
KR100827619B1 (ko) * | 2006-10-11 | 2008-05-07 | 삼성전기주식회사 | 영상 왜곡 보정 방법 및 그 장치 |
WO2009011975A2 (en) * | 2007-05-23 | 2009-01-22 | California Institute Of Technology | Method for fabricating monolithic two-dimensional nanostructures |
KR100906799B1 (ko) * | 2007-06-01 | 2009-07-09 | 삼성전기주식회사 | 압전 소자 구동 방법 및 압전 소자를 포함하는 광변조기구동 방법 및 이를 실행하기 위한 프로그램을 기록한 기록매체 |
US7755061B2 (en) | 2007-11-07 | 2010-07-13 | Kla-Tencor Technologies Corporation | Dynamic pattern generator with cup-shaped structure |
US8905610B2 (en) | 2009-01-26 | 2014-12-09 | Flex Lighting Ii, Llc | Light emitting device comprising a lightguide film |
US8253119B1 (en) | 2009-07-27 | 2012-08-28 | Kla-Tencor Corporation | Well-based dynamic pattern generator |
US8089051B2 (en) | 2010-02-24 | 2012-01-03 | Kla-Tencor Corporation | Electron reflector with multiple reflective modes |
US9651729B2 (en) | 2010-04-16 | 2017-05-16 | Flex Lighting Ii, Llc | Reflective display comprising a frontlight with extraction features and a light redirecting optical element |
US8373144B1 (en) | 2010-08-31 | 2013-02-12 | Kla-Tencor Corporation | Quasi-annular reflective electron patterning device |
US8913241B2 (en) * | 2012-07-23 | 2014-12-16 | Corning Incorporated | Hyperspectral imaging system and method for imaging a remote object |
IL224301A0 (en) | 2013-01-17 | 2013-06-27 | Rafael Advanced Defense Sys | New mode division multiplexing for an optical communication system |
US11009646B2 (en) | 2013-03-12 | 2021-05-18 | Azumo, Inc. | Film-based lightguide with interior light directing edges in a light mixing region |
KR102399830B1 (ko) * | 2015-03-16 | 2022-05-20 | 삼성디스플레이 주식회사 | 전기활성 폴리머 액츄에이터의 제조 방법 |
CN110235060B (zh) * | 2017-01-20 | 2021-12-07 | 应用材料公司 | 具有防闪耀dmd的分辨率增强的数字光刻 |
CN107728312A (zh) * | 2017-10-24 | 2018-02-23 | 上海天马微电子有限公司 | 一种空间光调制器及显示装置 |
US11994698B2 (en) | 2018-08-30 | 2024-05-28 | Azumo, Inc. | Film-based frontlight with angularly varying diffusion film |
WO2020142731A1 (en) | 2019-01-03 | 2020-07-09 | Flex Lighting Ii, Llc | Reflective display comprising a lightguide and light turning film creating multiple illumination peaks |
CN113678036B (zh) * | 2019-01-09 | 2024-02-02 | 阿祖莫公司 | 包括以不同的折叠角折叠的耦合光导的反射型显示器 |
WO2021022307A1 (en) | 2019-08-01 | 2021-02-04 | Flex Lighting Ii, Llc | Lightguide with a light input edge between lateral edges of a folded strip |
US11899198B2 (en) | 2022-05-23 | 2024-02-13 | Applied Materials, Inc. | Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems |
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US7385750B2 (en) * | 2003-08-29 | 2008-06-10 | Asml Holding N.V. | Spatial light modulator using an integrated circuit actuator |
-
2003
- 2003-08-29 US US10/651,048 patent/US7385750B2/en not_active Expired - Fee Related
-
2004
- 2004-08-20 EP EP04019841A patent/EP1510848B8/en not_active Expired - Fee Related
- 2004-08-20 DE DE602004026254T patent/DE602004026254D1/de active Active
- 2004-08-25 JP JP2004245786A patent/JP2005078079A/ja active Pending
- 2004-08-26 TW TW093125585A patent/TWI335304B/zh not_active IP Right Cessation
- 2004-08-26 SG SG200404822-9A patent/SG130940A1/en unknown
- 2004-08-27 CN CNB2004100579701A patent/CN100570428C/zh not_active Expired - Fee Related
- 2004-08-27 KR KR1020040068013A patent/KR100642178B1/ko not_active IP Right Cessation
-
2007
- 2007-10-19 JP JP2007272463A patent/JP4694548B2/ja not_active Expired - Fee Related
-
2008
- 2008-06-03 US US12/132,341 patent/US7525718B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20050021920A (ko) | 2005-03-07 |
EP1510848A1 (en) | 2005-03-02 |
EP1510848B1 (en) | 2010-03-31 |
JP4694548B2 (ja) | 2011-06-08 |
US7385750B2 (en) | 2008-06-10 |
SG130940A1 (en) | 2007-04-26 |
DE602004026254D1 (de) | 2010-05-12 |
US7525718B2 (en) | 2009-04-28 |
CN1651968A (zh) | 2005-08-10 |
US20050046921A1 (en) | 2005-03-03 |
TW200508142A (en) | 2005-03-01 |
JP2008052296A (ja) | 2008-03-06 |
US20080231937A1 (en) | 2008-09-25 |
EP1510848B8 (en) | 2010-05-19 |
CN100570428C (zh) | 2009-12-16 |
KR100642178B1 (ko) | 2006-11-10 |
JP2005078079A (ja) | 2005-03-24 |
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MM4A | Annulment or lapse of patent due to non-payment of fees |