TWI323291B - - Google Patents

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Publication number
TWI323291B
TWI323291B TW095105913A TW95105913A TWI323291B TW I323291 B TWI323291 B TW I323291B TW 095105913 A TW095105913 A TW 095105913A TW 95105913 A TW95105913 A TW 95105913A TW I323291 B TWI323291 B TW I323291B
Authority
TW
Taiwan
Prior art keywords
chuck
substrate
magnet
disposed
reticle
Prior art date
Application number
TW095105913A
Other languages
English (en)
Chinese (zh)
Other versions
TW200639592A (en
Inventor
Tatsuya Kataoka
Kenji Nagao
Kenichi Saito
Original Assignee
Mitsui Shipbuilding Eng
Choshu Industry Company Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Shipbuilding Eng, Choshu Industry Company Ltd filed Critical Mitsui Shipbuilding Eng
Publication of TW200639592A publication Critical patent/TW200639592A/zh
Application granted granted Critical
Publication of TWI323291B publication Critical patent/TWI323291B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
TW095105913A 2005-02-23 2006-02-22 Mask holding mechanism, and film deposition apparatus TW200639592A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005047813A JP4609755B2 (ja) 2005-02-23 2005-02-23 マスク保持機構および成膜装置

Publications (2)

Publication Number Publication Date
TW200639592A TW200639592A (en) 2006-11-16
TWI323291B true TWI323291B (enExample) 2010-04-11

Family

ID=36927385

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095105913A TW200639592A (en) 2005-02-23 2006-02-22 Mask holding mechanism, and film deposition apparatus

Country Status (5)

Country Link
JP (1) JP4609755B2 (enExample)
KR (1) KR100884029B1 (enExample)
CN (1) CN101090994B (enExample)
TW (1) TW200639592A (enExample)
WO (1) WO2006090747A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5297046B2 (ja) * 2008-01-16 2013-09-25 キヤノントッキ株式会社 成膜装置
WO2009118888A1 (ja) * 2008-03-28 2009-10-01 キヤノンアネルバ株式会社 真空処理装置、当該真空処理装置を用いた画像表示装置の製造方法及び当該真空処理装置により製造される電子装置
CN101932749B (zh) * 2008-04-09 2012-07-18 株式会社爱发科 气化源及成膜装置
KR101049804B1 (ko) * 2009-02-19 2011-07-15 삼성모바일디스플레이주식회사 증착 장치용 마스크 밀착 수단 및 이를 이용한 증착 장치
JP2011195907A (ja) * 2010-03-19 2011-10-06 Tokyo Electron Ltd マスク保持装置及び薄膜形成装置
JP2011233510A (ja) * 2010-04-05 2011-11-17 Canon Inc 蒸着装置
WO2012117509A1 (ja) * 2011-02-28 2012-09-07 信越エンジニアリング株式会社 薄板状ワークの粘着保持方法及び薄板状ワークの粘着保持装置並びに製造システム
KR101347546B1 (ko) * 2011-03-14 2014-01-03 엘아이지에이디피 주식회사 기판 척킹장치 및 이를 가지는 박막증착장비
KR102373326B1 (ko) * 2014-12-26 2022-03-11 삼성디스플레이 주식회사 증착 장치 및 증착 장치 내 기판 정렬 방법
KR102311586B1 (ko) * 2014-12-26 2021-10-12 삼성디스플레이 주식회사 증착 장치 및 증착 장치 내 기판 정렬 방법
JP6298110B2 (ja) * 2016-07-08 2018-03-20 キヤノントッキ株式会社 マスク支持体、成膜装置及び成膜方法
CN106399936B (zh) * 2016-12-09 2018-12-21 京东方科技集团股份有限公司 一种蒸镀设备及蒸镀方法
JP6448067B2 (ja) * 2017-05-22 2019-01-09 キヤノントッキ株式会社 基板載置方法、基板載置機構、成膜方法、成膜装置及び電子デバイスの製造方法
JP7202168B2 (ja) * 2018-12-13 2023-01-11 キヤノントッキ株式会社 成膜装置、有機ｅｌパネルの製造システム、及び成膜方法
KR102257008B1 (ko) * 2019-01-11 2021-05-26 캐논 톡키 가부시키가이샤 성막 장치, 성막 방법 및 전자 디바이스 제조방법
KR102829388B1 (ko) * 2020-01-14 2025-07-03 한국알박(주) 트레이용 마그넷 클램프

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3516346B2 (ja) * 1992-09-08 2004-04-05 大日本印刷株式会社 スパッタ用治具
JP3539125B2 (ja) * 1996-04-18 2004-07-07 東レ株式会社 有機電界発光素子の製造方法
JP3891805B2 (ja) * 2001-08-29 2007-03-14 株式会社Ｈｉｔｚハイテクノロジー 真空蒸着装置
KR100422487B1 (ko) * 2001-12-10 2004-03-11 에이엔 에스 주식회사 전자석을 이용한 유기전계발광소자 제작용 증착장치 및그를 이용한 증착방법
JP2004183044A (ja) * 2002-12-03 2004-07-02 Seiko Epson Corp マスク蒸着方法及び装置、マスク及びマスクの製造方法、表示パネル製造装置、表示パネル並びに電子機器

Also Published As

Publication number Publication date
KR20070089856A (ko) 2007-09-03
CN101090994B (zh) 2010-05-19
WO2006090747A1 (ja) 2006-08-31
CN101090994A (zh) 2007-12-19
KR100884029B1 (ko) 2009-02-17
TW200639592A (en) 2006-11-16
JP4609755B2 (ja) 2011-01-12
JP2006233257A (ja) 2006-09-07

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Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees