JP5084112B2 - 蒸着膜の形成方法 - Google Patents
蒸着膜の形成方法 Download PDFInfo
- Publication number
- JP5084112B2 JP5084112B2 JP2005109473A JP2005109473A JP5084112B2 JP 5084112 B2 JP5084112 B2 JP 5084112B2 JP 2005109473 A JP2005109473 A JP 2005109473A JP 2005109473 A JP2005109473 A JP 2005109473A JP 5084112 B2 JP5084112 B2 JP 5084112B2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition mask
- support
- mask
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000007740 vapor deposition Methods 0.000 title claims description 188
- 238000000034 method Methods 0.000 title claims description 32
- 230000015572 biosynthetic process Effects 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims description 54
- 230000008021 deposition Effects 0.000 claims description 26
- 229910001111 Fine metal Inorganic materials 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 description 27
- 239000010410 layer Substances 0.000 description 11
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 238000005452 bending Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 4
- 229910000990 Ni alloy Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000012864 cross contamination Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Images
Landscapes
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Description
5:支持体
6:枠体
7:金属細線
8:穴部
10:マグネット
12:(ディスプレイ)基体
14:蒸着層
16:マスクホルダ
18:CCDカメラ
20:アラインメントマーク
22:昇降機構
24:支持ロッド
50:開口
52:内部領域
54:外部領域
200、300:蒸着マスク
210:セル
Claims (3)
- 基体と、外部領域及び内部領域を有し、該内部領域に多数の開口を配置した蒸着マスクと、該蒸着マスクを載置する、互いに交差するように配置された複数の金属細線により構成された載置面を有する支持体と、を準備する工程と、
前記蒸着マスクを前記支持体に載置させ、該支持体で該蒸着マスクを前記内部領域における前記開口の非形成領域で支持する工程と、
前記支持体に載置した前記蒸着マスクを垂直方向に移動させて前記基体に近接もしくは密着させる工程と、
前記近接もしくは密着させる工程の後に、前記蒸着マスクをマグネットで上方に引き付けて前記支持体より離間させる工程と、
前記蒸着マスクの開口を介して前記基体上に蒸発物を蒸着させて膜形成を行なう工程と、
を備えた蒸着膜の形成方法。 - 前記蒸着マスクは多数の前記開口からなる複数のセルを、前記支持体は前記セルよりも面積が大きい穴部をそれぞれ有しており、前記蒸着マスクは平面視で前記セルが前記穴部内に位置するように前記支持体に載置することを特徴とする請求項1に記載の蒸着膜の形成方法。
- 前記セルと前記穴部とがN対1(Nは1以上の整数)に対応していることを特徴とする請求項2に記載の蒸着膜の形成方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005109473A JP5084112B2 (ja) | 2005-04-06 | 2005-04-06 | 蒸着膜の形成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005109473A JP5084112B2 (ja) | 2005-04-06 | 2005-04-06 | 蒸着膜の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006294280A JP2006294280A (ja) | 2006-10-26 |
JP5084112B2 true JP5084112B2 (ja) | 2012-11-28 |
Family
ID=37414640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005109473A Active JP5084112B2 (ja) | 2005-04-06 | 2005-04-06 | 蒸着膜の形成方法 |
Country Status (1)
Country | Link |
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JP (1) | JP5084112B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101117645B1 (ko) | 2009-02-05 | 2012-03-05 | 삼성모바일디스플레이주식회사 | 마스크 조립체 및 이를 이용한 평판표시장치용 증착 장치 |
WO2014010284A1 (ja) * | 2012-07-09 | 2014-01-16 | シャープ株式会社 | マスクユニットおよび蒸着装置 |
CN115747715A (zh) * | 2022-11-30 | 2023-03-07 | 中国科学院上海技术物理研究所 | 支撑板、吸引体、掩膜块和掩膜版组件 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3770074B2 (ja) * | 2000-11-10 | 2006-04-26 | 三菱電機株式会社 | メタルマスクアライメント装置 |
US20030221620A1 (en) * | 2002-06-03 | 2003-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Vapor deposition device |
JP4373235B2 (ja) * | 2003-02-14 | 2009-11-25 | 株式会社半導体エネルギー研究所 | 成膜装置及び成膜方法 |
JP4463492B2 (ja) * | 2003-04-10 | 2010-05-19 | 株式会社半導体エネルギー研究所 | 製造装置 |
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2005
- 2005-04-06 JP JP2005109473A patent/JP5084112B2/ja active Active
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Publication number | Publication date |
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JP2006294280A (ja) | 2006-10-26 |
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