TWI321191B - Improvements in seal assemblies - Google Patents
Improvements in seal assemblies Download PDFInfo
- Publication number
- TWI321191B TWI321191B TW093112921A TW93112921A TWI321191B TW I321191 B TWI321191 B TW I321191B TW 093112921 A TW093112921 A TW 093112921A TW 93112921 A TW93112921 A TW 93112921A TW I321191 B TWI321191 B TW I321191B
- Authority
- TW
- Taiwan
- Prior art keywords
- passage
- seal
- gas
- fluid
- members
- Prior art date
Links
- 230000000712 assembly Effects 0.000 title 1
- 238000000429 assembly Methods 0.000 title 1
- 238000000034 method Methods 0.000 claims abstract description 34
- 230000008569 process Effects 0.000 claims abstract description 34
- 239000012530 fluid Substances 0.000 claims abstract description 24
- 230000004888 barrier function Effects 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 claims description 11
- 238000005086 pumping Methods 0.000 claims description 3
- 239000013536 elastomeric material Substances 0.000 claims description 2
- 238000004891 communication Methods 0.000 abstract description 2
- 230000003068 static effect Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 45
- 238000010926 purge Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 241000208140 Acer Species 0.000 description 1
- 241001070941 Castanea Species 0.000 description 1
- 235000014036 Castanea Nutrition 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000016571 aggressive behavior Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 231100000611 venom Toxicity 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Gasket Seals (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Sealing Material Composition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0310615.0A GB0310615D0 (en) | 2003-05-08 | 2003-05-08 | Improvements in seal assemblies |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200506218A TW200506218A (en) | 2005-02-16 |
| TWI321191B true TWI321191B (en) | 2010-03-01 |
Family
ID=9957695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093112921A TWI321191B (en) | 2003-05-08 | 2004-05-07 | Improvements in seal assemblies |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US7214041B2 (enExample) |
| EP (1) | EP1620649B1 (enExample) |
| JP (1) | JP4637092B2 (enExample) |
| KR (1) | KR101099829B1 (enExample) |
| CN (1) | CN100363621C (enExample) |
| AT (1) | ATE337490T1 (enExample) |
| DE (1) | DE602004002112T2 (enExample) |
| GB (1) | GB0310615D0 (enExample) |
| TW (1) | TWI321191B (enExample) |
| WO (1) | WO2004099620A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2408801A (en) * | 2003-12-03 | 2005-06-08 | Boc Group Plc | Detection of seal leak using differential pressure measurement |
| GB0603318D0 (en) * | 2006-02-20 | 2006-03-29 | Boc Group Plc | Seal |
| GB2442738B (en) * | 2006-10-09 | 2011-08-03 | Boc Group Plc | A sealing system |
| GB0620144D0 (en) * | 2006-10-11 | 2006-11-22 | Boc Group Plc | Vacuum pump |
| KR100873104B1 (ko) | 2007-03-16 | 2008-12-09 | 삼성전자주식회사 | 회전체 크리닝 유니트 및 이를 갖는 진공펌프 |
| GB0712779D0 (en) * | 2007-07-02 | 2007-08-08 | Edwards Ltd | Seal |
| GB0719394D0 (en) | 2007-10-04 | 2007-11-14 | Edwards Ltd | A multi stage clam shell vacuum pump |
| DE102008063133A1 (de) | 2008-12-24 | 2010-07-01 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
| KR20100091063A (ko) * | 2009-02-09 | 2010-08-18 | 삼성전자주식회사 | 회전체 크리닝 장치 및 이를 갖는 진공 펌프 |
| JP5263558B2 (ja) * | 2011-10-05 | 2013-08-14 | 株式会社四葉機械製作所 | 耐腐食性多段式真空ポンプ |
| GB2500603A (en) * | 2012-03-26 | 2013-10-02 | Edwards Ltd | Vacuum pump stators and vacuum pumps |
| GB2584005B (en) * | 2019-03-22 | 2022-11-23 | Cummins Inc | Vacuum pump exhaust reed valve with pressure bleed |
| CN114593059A (zh) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | 一种干式真空泵的定子部件 |
| GB2614285B (en) | 2021-12-23 | 2024-03-06 | Edwards Ltd | Vacuum pump with reduced seal requirements |
| KR102856868B1 (ko) | 2023-07-25 | 2025-09-08 | 프로인주식회사 | 진공 펌프 |
| US20250163909A1 (en) * | 2023-11-22 | 2025-05-22 | GM Global Technology Operations LLC | Pump housing with drain for vehicle |
| CN118654113B (zh) * | 2024-08-16 | 2024-11-05 | 宁波拓克传动有限公司 | 一种行星架自紧固型行星齿轮减速机 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB356168A (en) * | 1930-03-01 | 1931-09-01 | Brown David & Sons Ltd | An improvement in or relating to rotary pumps |
| JPH0733834B2 (ja) * | 1986-12-18 | 1995-04-12 | 株式会社宇野澤組鐵工所 | ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ |
| FR2638788B1 (fr) | 1988-11-07 | 1994-01-28 | Alcatel Cit | Pompe a vide du type roots multietage |
| JPH0747958B2 (ja) * | 1990-06-18 | 1995-05-24 | 株式会社アンレツト | 内部洗浄可能なまゆ型２軸多段真空ポンプ |
| JP2537696B2 (ja) * | 1990-09-21 | 1996-09-25 | 株式会社荏原製作所 | 多段真空ポンプ |
| JPH07133793A (ja) * | 1993-11-09 | 1995-05-23 | Hitachi Ltd | 真空ポンプ |
| DE69610352T2 (de) * | 1995-04-19 | 2001-05-17 | Ebara Corp., Tokio/Tokyo | Mehrstufige Verdrängungsvakuumpumpe |
| US5567140A (en) * | 1995-04-24 | 1996-10-22 | Itt Corporation | Keyed insert plate for curved rotary lobe pump chamber walls |
| JP3162647B2 (ja) * | 1997-03-24 | 2001-05-08 | 株式会社荏原製作所 | トラップ装置 |
| US6123526A (en) | 1998-09-18 | 2000-09-26 | Industrial Technology Research Institute | Multistage pump and method for assembling the pump |
| FR2813104B1 (fr) * | 2000-08-21 | 2002-11-29 | Cit Alcatel | Joint etancheite pour pompe a vide |
-
2003
- 2003-05-08 GB GBGB0310615.0A patent/GB0310615D0/en not_active Ceased
-
2004
- 2004-05-06 KR KR1020057021122A patent/KR101099829B1/ko not_active Expired - Lifetime
- 2004-05-06 US US10/555,972 patent/US7214041B2/en not_active Expired - Lifetime
- 2004-05-06 EP EP04731392A patent/EP1620649B1/en not_active Expired - Lifetime
- 2004-05-06 WO PCT/GB2004/001955 patent/WO2004099620A1/en not_active Ceased
- 2004-05-06 AT AT04731392T patent/ATE337490T1/de not_active IP Right Cessation
- 2004-05-06 DE DE602004002112T patent/DE602004002112T2/de not_active Expired - Lifetime
- 2004-05-06 CN CNB2004800125228A patent/CN100363621C/zh not_active Ceased
- 2004-05-06 JP JP2006506225A patent/JP4637092B2/ja not_active Expired - Lifetime
- 2004-05-07 TW TW093112921A patent/TWI321191B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP4637092B2 (ja) | 2011-02-23 |
| EP1620649B1 (en) | 2006-08-23 |
| CN1784546A (zh) | 2006-06-07 |
| GB0310615D0 (en) | 2003-06-11 |
| EP1620649A1 (en) | 2006-02-01 |
| TW200506218A (en) | 2005-02-16 |
| US7214041B2 (en) | 2007-05-08 |
| DE602004002112D1 (de) | 2006-10-05 |
| DE602004002112T2 (de) | 2007-03-01 |
| JP2006525467A (ja) | 2006-11-09 |
| ATE337490T1 (de) | 2006-09-15 |
| US20060216186A1 (en) | 2006-09-28 |
| KR20060009907A (ko) | 2006-02-01 |
| CN100363621C (zh) | 2008-01-23 |
| WO2004099620A1 (en) | 2004-11-18 |
| KR101099829B1 (ko) | 2011-12-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |