JP4637092B2 - シール組立体の改良 - Google Patents

シール組立体の改良 Download PDF

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Publication number
JP4637092B2
JP4637092B2 JP2006506225A JP2006506225A JP4637092B2 JP 4637092 B2 JP4637092 B2 JP 4637092B2 JP 2006506225 A JP2006506225 A JP 2006506225A JP 2006506225 A JP2006506225 A JP 2006506225A JP 4637092 B2 JP4637092 B2 JP 4637092B2
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JP
Japan
Prior art keywords
cavity
seal
stator
stator parts
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2006506225A
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English (en)
Japanese (ja)
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JP2006525467A5 (enExample
JP2006525467A (ja
Inventor
ピーター ヒュー バーチ
ディヴィッド アラン ターレル
マルコム ウィリアム グレイ
ニール ターナー
Original Assignee
エドワーズ リミテッド
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Publication of JP2006525467A5 publication Critical patent/JP2006525467A5/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Gasket Seals (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Sealing Material Composition (AREA)
JP2006506225A 2003-05-08 2004-05-06 シール組立体の改良 Expired - Lifetime JP4637092B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0310615.0A GB0310615D0 (en) 2003-05-08 2003-05-08 Improvements in seal assemblies
PCT/GB2004/001955 WO2004099620A1 (en) 2003-05-08 2004-05-06 Improvements in seal assemblies

Publications (3)

Publication Number Publication Date
JP2006525467A JP2006525467A (ja) 2006-11-09
JP2006525467A5 JP2006525467A5 (enExample) 2010-05-27
JP4637092B2 true JP4637092B2 (ja) 2011-02-23

Family

ID=9957695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006506225A Expired - Lifetime JP4637092B2 (ja) 2003-05-08 2004-05-06 シール組立体の改良

Country Status (10)

Country Link
US (1) US7214041B2 (enExample)
EP (1) EP1620649B1 (enExample)
JP (1) JP4637092B2 (enExample)
KR (1) KR101099829B1 (enExample)
CN (1) CN100363621C (enExample)
AT (1) ATE337490T1 (enExample)
DE (1) DE602004002112T2 (enExample)
GB (1) GB0310615D0 (enExample)
TW (1) TWI321191B (enExample)
WO (1) WO2004099620A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2408801A (en) * 2003-12-03 2005-06-08 Boc Group Plc Detection of seal leak using differential pressure measurement
GB0603318D0 (en) * 2006-02-20 2006-03-29 Boc Group Plc Seal
GB2442738B (en) * 2006-10-09 2011-08-03 Boc Group Plc A sealing system
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump
KR100873104B1 (ko) 2007-03-16 2008-12-09 삼성전자주식회사 회전체 크리닝 유니트 및 이를 갖는 진공펌프
GB0712779D0 (en) * 2007-07-02 2007-08-08 Edwards Ltd Seal
GB0719394D0 (en) 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
DE102008063133A1 (de) 2008-12-24 2010-07-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
KR20100091063A (ko) * 2009-02-09 2010-08-18 삼성전자주식회사 회전체 크리닝 장치 및 이를 갖는 진공 펌프
JP5263558B2 (ja) * 2011-10-05 2013-08-14 株式会社四葉機械製作所 耐腐食性多段式真空ポンプ
GB2500603A (en) * 2012-03-26 2013-10-02 Edwards Ltd Vacuum pump stators and vacuum pumps
GB2584005B (en) * 2019-03-22 2022-11-23 Cummins Inc Vacuum pump exhaust reed valve with pressure bleed
CN114593059A (zh) * 2020-12-07 2022-06-07 中国科学院沈阳科学仪器股份有限公司 一种干式真空泵的定子部件
GB2614285B (en) 2021-12-23 2024-03-06 Edwards Ltd Vacuum pump with reduced seal requirements
KR102856868B1 (ko) 2023-07-25 2025-09-08 프로인주식회사 진공 펌프
US20250163909A1 (en) * 2023-11-22 2025-05-22 GM Global Technology Operations LLC Pump housing with drain for vehicle
CN118654113B (zh) * 2024-08-16 2024-11-05 宁波拓克传动有限公司 一种行星架自紧固型行星齿轮减速机

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB356168A (en) * 1930-03-01 1931-09-01 Brown David & Sons Ltd An improvement in or relating to rotary pumps
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
FR2638788B1 (fr) 1988-11-07 1994-01-28 Alcatel Cit Pompe a vide du type roots multietage
JPH0747958B2 (ja) * 1990-06-18 1995-05-24 株式会社アンレツト 内部洗浄可能なまゆ型２軸多段真空ポンプ
JP2537696B2 (ja) * 1990-09-21 1996-09-25 株式会社荏原製作所 多段真空ポンプ
JPH07133793A (ja) * 1993-11-09 1995-05-23 Hitachi Ltd 真空ポンプ
DE69610352T2 (de) * 1995-04-19 2001-05-17 Ebara Corp., Tokio/Tokyo Mehrstufige Verdrängungsvakuumpumpe
US5567140A (en) * 1995-04-24 1996-10-22 Itt Corporation Keyed insert plate for curved rotary lobe pump chamber walls
JP3162647B2 (ja) * 1997-03-24 2001-05-08 株式会社荏原製作所 トラップ装置
US6123526A (en) 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide

Also Published As

Publication number Publication date
EP1620649B1 (en) 2006-08-23
CN1784546A (zh) 2006-06-07
GB0310615D0 (en) 2003-06-11
EP1620649A1 (en) 2006-02-01
TW200506218A (en) 2005-02-16
US7214041B2 (en) 2007-05-08
DE602004002112D1 (de) 2006-10-05
DE602004002112T2 (de) 2007-03-01
JP2006525467A (ja) 2006-11-09
ATE337490T1 (de) 2006-09-15
US20060216186A1 (en) 2006-09-28
KR20060009907A (ko) 2006-02-01
CN100363621C (zh) 2008-01-23
WO2004099620A1 (en) 2004-11-18
TWI321191B (en) 2010-03-01
KR101099829B1 (ko) 2011-12-28

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