ATE337490T1 - Verbesserung in dichtungsanordnung - Google Patents

Verbesserung in dichtungsanordnung

Info

Publication number
ATE337490T1
ATE337490T1 AT04731392T AT04731392T ATE337490T1 AT E337490 T1 ATE337490 T1 AT E337490T1 AT 04731392 T AT04731392 T AT 04731392T AT 04731392 T AT04731392 T AT 04731392T AT E337490 T1 ATE337490 T1 AT E337490T1
Authority
AT
Austria
Prior art keywords
fluid
components
seal
pump
ring
Prior art date
Application number
AT04731392T
Other languages
English (en)
Inventor
Peter Hugh Birch
David Alan Turrell
Malcolm William Gray
Neil Turner
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Application granted granted Critical
Publication of ATE337490T1 publication Critical patent/ATE337490T1/de

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02Liquid sealing for high-vacuum pumps or for compressors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/086Carter
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/10Vacuum
    • F04C2220/12Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Gasket Seals (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Sealing Material Composition (AREA)
AT04731392T 2003-05-08 2004-05-06 Verbesserung in dichtungsanordnung ATE337490T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0310615.0A GB0310615D0 (en) 2003-05-08 2003-05-08 Improvements in seal assemblies

Publications (1)

Publication Number Publication Date
ATE337490T1 true ATE337490T1 (de) 2006-09-15

Family

ID=9957695

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04731392T ATE337490T1 (de) 2003-05-08 2004-05-06 Verbesserung in dichtungsanordnung

Country Status (10)

Country Link
US (1) US7214041B2 (de)
EP (1) EP1620649B1 (de)
JP (1) JP4637092B2 (de)
KR (1) KR101099829B1 (de)
CN (1) CN100363621C (de)
AT (1) ATE337490T1 (de)
DE (1) DE602004002112T2 (de)
GB (1) GB0310615D0 (de)
TW (1) TWI321191B (de)
WO (1) WO2004099620A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2408801A (en) * 2003-12-03 2005-06-08 Boc Group Plc Detection of seal leak using differential pressure measurement
GB0603318D0 (en) * 2006-02-20 2006-03-29 Boc Group Plc Seal
GB2442738B (en) * 2006-10-09 2011-08-03 Boc Group Plc A sealing system
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump
KR100873104B1 (ko) * 2007-03-16 2008-12-09 삼성전자주식회사 회전체 크리닝 유니트 및 이를 갖는 진공펌프
GB0712779D0 (en) * 2007-07-02 2007-08-08 Edwards Ltd Seal
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
DE102008063133A1 (de) 2008-12-24 2010-07-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
KR20100091063A (ko) 2009-02-09 2010-08-18 삼성전자주식회사 회전체 크리닝 장치 및 이를 갖는 진공 펌프
JP5263558B2 (ja) * 2011-10-05 2013-08-14 株式会社四葉機械製作所 耐腐食性多段式真空ポンプ
GB2500603A (en) * 2012-03-26 2013-10-02 Edwards Ltd Vacuum pump stators and vacuum pumps
GB2584005B (en) * 2019-03-22 2022-11-23 Cummins Inc Vacuum pump exhaust reed valve with pressure bleed
CN114593059A (zh) * 2020-12-07 2022-06-07 中国科学院沈阳科学仪器股份有限公司 一种干式真空泵的定子部件
GB2614285B (en) * 2021-12-23 2024-03-06 Edwards Ltd Vacuum pump with reduced seal requirements

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB356168A (en) * 1930-03-01 1931-09-01 Brown David & Sons Ltd An improvement in or relating to rotary pumps
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
FR2638788B1 (fr) * 1988-11-07 1994-01-28 Alcatel Cit Pompe a vide du type roots multietage
JPH0747958B2 (ja) * 1990-06-18 1995-05-24 株式会社アンレツト 内部洗浄可能なまゆ型2軸多段真空ポンプ
JP2537696B2 (ja) * 1990-09-21 1996-09-25 株式会社荏原製作所 多段真空ポンプ
JPH07133793A (ja) * 1993-11-09 1995-05-23 Hitachi Ltd 真空ポンプ
DE69610352T2 (de) * 1995-04-19 2001-05-17 Ebara Corp., Tokio/Tokyo Mehrstufige Verdrängungsvakuumpumpe
US5567140A (en) * 1995-04-24 1996-10-22 Itt Corporation Keyed insert plate for curved rotary lobe pump chamber walls
JP3162647B2 (ja) * 1997-03-24 2001-05-08 株式会社荏原製作所 トラップ装置
US6123526A (en) * 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide

Also Published As

Publication number Publication date
CN1784546A (zh) 2006-06-07
KR20060009907A (ko) 2006-02-01
US20060216186A1 (en) 2006-09-28
TWI321191B (en) 2010-03-01
TW200506218A (en) 2005-02-16
WO2004099620A1 (en) 2004-11-18
EP1620649B1 (de) 2006-08-23
JP4637092B2 (ja) 2011-02-23
JP2006525467A (ja) 2006-11-09
KR101099829B1 (ko) 2011-12-28
US7214041B2 (en) 2007-05-08
DE602004002112D1 (de) 2006-10-05
GB0310615D0 (en) 2003-06-11
CN100363621C (zh) 2008-01-23
DE602004002112T2 (de) 2007-03-01
EP1620649A1 (de) 2006-02-01

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Legal Events

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