CN1784546A - 密封组件的改进 - Google Patents
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Abstract
一种用于保护在真空泵中使用的静止密封装置的密封组件,该密封组件包括:至少两个密封地连接在一起的部件;O形圈密封件,其接合在所述两个部件之间,以便防止流体在这两个部件之间传递到该泵中和从该泵传递出来;和在O形圈的平面中的流体通道,其位于该O形圈密封件和过程气体流动路径之间,其中该通道在该设备的工作中提供用于引导屏蔽流体的路径,并且该通道与屏蔽流体的外界源连接并具有与该泵的工作容积流体连通的出口。
Description
技术领域
本发明总体上涉及密封组件,尤其涉及用于真空泵的密封组件,特别是用于多级式无油(干式)真空泵。
背景技术
已知的真空泵在其真空腔内没有油,因此该真空泵可用于清洁环境,例如在半导体工业中的应用场合。在这种制造环境中,如果在真空腔内存在润滑剂,这些润滑剂材料可能返回移动到处理腔中,并且由此导致制造过程中的产品被污染。这种干式真空泵是常规的多级的容积式泵,其中使用了在每一真空腔内的啮合转子。在每一腔中转子可具有相同的型面类型,或者该型面可随腔的不同而改变。
在罗茨泵或罗氏(Northey)(“爪式”)类型的装置中,每一腔通常由两个分开加工的定子部件以及位于形成在其间的空腔内的转子部件形成。必要的是,在两个定子部件之间设置密封装置,以便防止过程气体从泵中泄漏出去,并且防止任何周围的空气进入该泵。通常设置O形圈来实现这种密封功能。然而,由于过程气体的高腐蚀性,O形圈容易被侵蚀并且需要经常更好,这样对于整个过程而言的停机维护时间的非常昂贵的。另外,定子的接触表面承受腐蚀作用,这导致在这些表面上的变形,可能导致泵壳体的变形。这种变形导致旋转部件和静止部件之间的间隙的减小,这影响该泵的机械可靠性。
已知的是,常规系统使用了机械屏蔽件,通过防止危险/腐蚀性气态物质触及到O形部件,从而保护该静止密封机构。然而,必须在选择形成该机械屏蔽件的材料与过程气体之间实现相容性。另外,由于存在这种机械屏蔽件,因此增加了该系统的复杂性,而且该机械屏蔽件通常不能保护定子的接触端面。
发明内容
本发明的目的在于,通过提供一种起替代作用的用于保护密封机构和接触的定子端面的简单装置以便克服上述的问题。
依据本发明,提供了一种用于保护在真空泵中使用的静止密封装置的密封组件,该密封组件包括:
至少两个密封地连接在一起的部件;
O形圈密封件,其接合在所述两个部件之间,以便防止流体在这两个部件之间传递到该泵中和从该泵传递出来;和
在O形圈的平面中的流体通道,其位于该O形圈密封件和过程气体流动路径之间,其中该通道具有这样的结构,即,便于在工作中提供用于引导屏蔽流体的路径,并且该通道具有可与屏蔽流体的外界源连接的入口以及与该泵的工作容积流体连通的出口。
该流体通道可设置在一个或两个定子部件中,并且可包括侧向通道以便增加朝向空腔的径向泄漏。O形圈密封件由弹性材料制成,并且可位于流体通道内。本发明提供了一种包括多个定子部件的真空泵,其中每一对定子部件彼此相对地定位以便提供在其间的空腔。在工作中过程气体流经该空腔。其中包括本发明的密封组件,以便在相邻的定子部件之间提供不漏流体的密封。
附图说明
以下参照附图来描述本发明的示例,在附图中:
图1是定子部件的正视图,其中示出了本发明的示例;
图2是本发明的不同示例的侧视示意图;和
图3示出了本发明的另一示例。
具体实施方式
图1示出了干式泵的一个级的定子部件1的表面。(未示出的)第二定子部件的表面与第一定子部件1的相应表面3接触,并且在这些部件之间形成有空腔2。该空腔2设置成当泵组装之后便于容纳(未示出的)转子部件。这种泵通常包括多个这样的级,每一级的空腔2借助级间孔口9与相邻级的空腔连通。
如同这种类型的常规泵,O形圈密封件4设置在该空腔的外围部分周围。该密封件4提供了相邻定子部件之间的不漏流体的密封,由此当该泵工作时防止过程气体从空腔2中逃逸并且防止周围空气进入空腔2。然而,这些过程气体具有非常大的腐蚀性并且容易导致O形密封件4和定子部件的接触表面3的损坏。
在本发明的该示例中,O形圈密封件4由弹性材料制成并且位于凹槽5内。在定子部件的该表面3中加工成该凹槽。额外的通道6形成在定子部件1的接触表面3中。该通道6位于O形凹槽5与空腔2之间,在使用中过程气体流经该空腔。
通常向泵供应冲洗气体,该气体选择成在给定条件下是不起化学反应的,例如氮气。这种冲洗气体用于稀释在泵中的过程气体,以便使得过程气体的分压力保持低于冷凝开始出现时的饱和值。所希望的是,防止这种冷凝出现,因为气可能导致泵部件的腐蚀或者以其它方式导致在转子部件和定子部件之间的间隙中形成沉积物。由于这不利地影响公差容许限度,这种影响导致泵的可靠性下降,并且在极端情况下特别是在停机之后的再启动过程中可能出现卡缸。在一些泵中,这种冲洗气体经冲洗流体入口7直接引入到空腔2中,经由级间孔口9(参见图1)与过程气体混合。这种冲洗气体通常以较高的压力进入过程气体,因此不会以不适当的阻力流入空腔2。
在本发明中,该常规的冲洗流体入口7使用塞子10来封闭(参见图1),并且设置有另一冲洗流体入口7a。在使用中,高压的冲洗气体流经孔口8以便流入流体通道6,从而作为屏蔽气体。该屏蔽气体围绕流体通道6沿两个方向移动,并且经由孔口8a离开该通道从而进入级间孔口9,以便在泵送机构中实现常规的冲洗功能。在使用中,该屏蔽气体围绕该通道6移动并且提供一屏蔽作用,使得触及到O形圈密封件4的过程气体的量减至最小。该屏蔽气体的较高压力确保了较小程度的且处于预期程度的泄漏,这种由屏蔽气体通道6产生的泄漏往往从该通道流向空腔2。由于屏蔽气体和冲洗气体是来自同一源的相同物质,因此,这种泄漏对于泵的性能的影响是可忽略的。
在屏蔽气体和过程气体之间的压力梯度可进一步阻止过程气体与O形圈密封件4接触。然而,如果在某一瞬时状态下,可能没有保持该有利的压力梯度。在这种情况下,一些过程气体与O形圈密封件4接触。在这种状态下,屏蔽气体可用于稀释可能出现的腐蚀性过程流体,以便显著地减小对O形圈密封件4的有害影响。另外,如果出现这种情况使得被保护区域被污染,则一旦消除该瞬时状态屏蔽气体可将该区域冲洗干净。
图2a示出了依据本发明的泵的截面。该视图示出了多级定子部件1如何彼此临近地定位以便形成一系列的空腔2。弹性密封件4位于凹槽5内,以便提供不漏流体的密封。通道6位于该密封件4的径向内侧,以便在空腔2和密封件4之间提供保护层并且使得冲洗气体在工作过程中冲洗接触表面3之间的区域。
在本发明的替代示例中,通道6和凹槽5可组合成单个部件,这样该通道容纳屏蔽气体和O形圈密封件4,如图2b所示。
对于用于制造常规密封装置的机械屏蔽件的材料具有以下要求,该材料应适于很可能在泵中存在的侵蚀性非常大的过程气体。通过使用由本发明提供的不起化学反应的屏蔽气体,可实现于不同过程气体的较大范围的相容性,从而简化该(材料)选择功能。另外,尽管泵需要拆卸以便将机械屏蔽件更换成不同组分中的一种组分,但是如果需要进行不同的处理过程,直接了当的是替换成另一种相容的冲洗/屏蔽气体。实际上,在不同的处理过程中这种灵活性具有更大的优点,其中在一定范围内需要使用可能不相容的多种材料,这时需要转换为另一冲洗气体。由于冲洗气体还作为屏蔽气体,因此对于材料的选择已经完成,并且因此认为材料的选择是具有相容性的。
因为常规的机械屏蔽件受到侵蚀性的过程气体的腐蚀,所以常规的屏蔽件具有有限的寿命。这些屏蔽件和密封件的更换所导致的制造过程的中断是成本昂贵的。然而,本发明的屏蔽气体可恒定地进行补充,由此不会导致该泵送设备由于维护而停机。
本发明的另一优点在于,保护了相邻定子部件的接触表面。当这些通常为金属的表面与侵蚀性的过程气体接触时,将发生腐蚀。由于腐蚀的产物比原有的金属占据了更大的容积,因此金属表面被腐蚀时会膨胀。这种体积的增加迫使相邻的定子部件彼此间隔开。当从侧向观察时(参见图2),假设外定子部件中的一个相对于泵壳体固定。如果发生这种腐蚀,相邻的定子部件将沿垂直接触表面的轴线移动离开该第一定子部件。如果该腐蚀在所有的这种接触表面上发生,则由每一依次的定子部件产生的位移将叠加。因此,由于这种腐蚀效果,远离该第一固定的定子部件的定子的移动大于靠近其的定子。由于定子部件位移,在这些部件之间形成的空腔2也移动离开第一个固定的定子部件。然而,转子部件不会相对于该首个固定的定子部件而移动。这具有使得任一个单个的转子部件相对于相应的空腔的一侧移动的作用,由此使得转子部件与其相邻的定子部件之间的轴向间隙不均衡。在极端情况下,转子部件与其相关的定子部件之间的间隙减小到零,从而使得两个部件接触。在停机一段时间之后重新启动泵时,出现这种情况的可能性将增加。
常规的机械屏蔽件定位成便于保护弹性密封件并且对于相邻的定子部件的接触表面没有任何的保护。在本发明中用于保护弹性密封件的屏蔽气体的部分泄漏出现在这些接触表面两侧,实际上如图3所示,通道6可进一步变型,以便设置例如侧向凹槽或通道11,从而增大这种泄漏,在该区域中即接触表面之间存在的泄漏有效地减小了侵蚀性的过程气体在该区域中的浓度,由此降低了这些接触表面的腐蚀程度,并且由此增加的泵可靠性/寿命。
在过程气体具有非常高的侵蚀性的特别恶劣的环境中,本发明可串联地与常规机械屏蔽件装置或其它气体屏蔽装置组合,以便进一步地改善O形圈密封件的保护效果。
Claims (6)
1.一种用于保护在真空泵中使用的静止密封装置的密封组件,该密封组件包括:
至少两个密封地连接在一起的部件;
O形圈密封件,其接合在所述两个部件之间,以便防止流体在这两个部件之间传递到该泵中和从该泵传递出来;和
在O形圈的平面中的流体通道,其位于该O形圈密封件和过程气体流动路径之间,其中该通道具有这样的结构,即,便于在工作中提供用于引导屏蔽流体的路径,并且该通道具有可与屏蔽流体的外界源连接的入口以及与该泵的工作容积流体连通的出口。
2.如权利要求1所述的密封组件,其特征在于,该流体通道设置在至少一个定子部件中。
3.如权利要求1或2所述的密封组件,其特征在于,该O形圈密封件由弹性材料制成。
4.如上述权利要求中的任一项所述的密封组件,其特征在于,该O形圈密封件位于该流体通道内。
5.如上述权利要求中的任一项所述的密封组件,其特征在于,该流体通道还包括侧向通道,以便在工作中增加屏蔽气体朝向空腔的泄漏。
6.一种真空泵,其包括多个定子部件,每一对定子部件彼此相对地定位以便提供在其间的空腔,在工作中过程气体流经该空腔,还包括如上述权利要求中的任一项所述的密封组件,以便在相邻的定子部件之间提供不漏流体的密封。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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GBGB0310615.0A GB0310615D0 (en) | 2003-05-08 | 2003-05-08 | Improvements in seal assemblies |
GB0310615.0 | 2003-05-08 |
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CN1784546A true CN1784546A (zh) | 2006-06-07 |
CN100363621C CN100363621C (zh) | 2008-01-23 |
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CNB2004800125228A Expired - Lifetime CN100363621C (zh) | 2003-05-08 | 2004-05-06 | 密封组件的改进 |
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US (1) | US7214041B2 (zh) |
EP (1) | EP1620649B1 (zh) |
JP (1) | JP4637092B2 (zh) |
KR (1) | KR101099829B1 (zh) |
CN (1) | CN100363621C (zh) |
AT (1) | ATE337490T1 (zh) |
DE (1) | DE602004002112T2 (zh) |
GB (1) | GB0310615D0 (zh) |
TW (1) | TWI321191B (zh) |
WO (1) | WO2004099620A1 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101815873B (zh) * | 2007-10-04 | 2013-05-29 | 爱德华兹有限公司 | 多级蚌壳式真空泵 |
CN111720581A (zh) * | 2019-03-22 | 2020-09-29 | 康明斯公司 | 具有压力泄放的真空泵排放簧片阀 |
CN114593059A (zh) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | 一种干式真空泵的定子部件 |
CN118654113A (zh) * | 2024-08-16 | 2024-09-17 | 宁波拓克传动有限公司 | 一种行星架自紧固型行星齿轮减速机 |
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GB2408801A (en) * | 2003-12-03 | 2005-06-08 | Boc Group Plc | Detection of seal leak using differential pressure measurement |
GB0603318D0 (en) * | 2006-02-20 | 2006-03-29 | Boc Group Plc | Seal |
GB2442738B (en) * | 2006-10-09 | 2011-08-03 | Boc Group Plc | A sealing system |
GB0620144D0 (en) * | 2006-10-11 | 2006-11-22 | Boc Group Plc | Vacuum pump |
KR100873104B1 (ko) | 2007-03-16 | 2008-12-09 | 삼성전자주식회사 | 회전체 크리닝 유니트 및 이를 갖는 진공펌프 |
GB0712779D0 (en) * | 2007-07-02 | 2007-08-08 | Edwards Ltd | Seal |
DE102008063133A1 (de) * | 2008-12-24 | 2010-07-01 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
KR20100091063A (ko) | 2009-02-09 | 2010-08-18 | 삼성전자주식회사 | 회전체 크리닝 장치 및 이를 갖는 진공 펌프 |
JP5263558B2 (ja) * | 2011-10-05 | 2013-08-14 | 株式会社四葉機械製作所 | 耐腐食性多段式真空ポンプ |
GB2500603A (en) * | 2012-03-26 | 2013-10-02 | Edwards Ltd | Vacuum pump stators and vacuum pumps |
GB2614285B (en) * | 2021-12-23 | 2024-03-06 | Edwards Ltd | Vacuum pump with reduced seal requirements |
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GB356168A (en) * | 1930-03-01 | 1931-09-01 | Brown David & Sons Ltd | An improvement in or relating to rotary pumps |
JPH0733834B2 (ja) * | 1986-12-18 | 1995-04-12 | 株式会社宇野澤組鐵工所 | ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ |
FR2638788B1 (fr) * | 1988-11-07 | 1994-01-28 | Alcatel Cit | Pompe a vide du type roots multietage |
JPH0747958B2 (ja) * | 1990-06-18 | 1995-05-24 | 株式会社アンレツト | 内部洗浄可能なまゆ型2軸多段真空ポンプ |
JP2537696B2 (ja) * | 1990-09-21 | 1996-09-25 | 株式会社荏原製作所 | 多段真空ポンプ |
JPH07133793A (ja) * | 1993-11-09 | 1995-05-23 | Hitachi Ltd | 真空ポンプ |
EP0738833B1 (en) * | 1995-04-19 | 2000-09-20 | Ebara Corporation | Multistage positive-displacement vacuum pump |
US5567140A (en) * | 1995-04-24 | 1996-10-22 | Itt Corporation | Keyed insert plate for curved rotary lobe pump chamber walls |
JP3162647B2 (ja) * | 1997-03-24 | 2001-05-08 | 株式会社荏原製作所 | トラップ装置 |
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FR2813104B1 (fr) * | 2000-08-21 | 2002-11-29 | Cit Alcatel | Joint etancheite pour pompe a vide |
-
2003
- 2003-05-08 GB GBGB0310615.0A patent/GB0310615D0/en not_active Ceased
-
2004
- 2004-05-06 EP EP04731392A patent/EP1620649B1/en not_active Expired - Lifetime
- 2004-05-06 KR KR1020057021122A patent/KR101099829B1/ko active IP Right Grant
- 2004-05-06 AT AT04731392T patent/ATE337490T1/de not_active IP Right Cessation
- 2004-05-06 DE DE602004002112T patent/DE602004002112T2/de not_active Expired - Lifetime
- 2004-05-06 JP JP2006506225A patent/JP4637092B2/ja not_active Expired - Lifetime
- 2004-05-06 WO PCT/GB2004/001955 patent/WO2004099620A1/en active IP Right Grant
- 2004-05-06 US US10/555,972 patent/US7214041B2/en not_active Expired - Lifetime
- 2004-05-06 CN CNB2004800125228A patent/CN100363621C/zh not_active Expired - Lifetime
- 2004-05-07 TW TW093112921A patent/TWI321191B/zh not_active IP Right Cessation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101815873B (zh) * | 2007-10-04 | 2013-05-29 | 爱德华兹有限公司 | 多级蚌壳式真空泵 |
CN111720581A (zh) * | 2019-03-22 | 2020-09-29 | 康明斯公司 | 具有压力泄放的真空泵排放簧片阀 |
CN114593059A (zh) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | 一种干式真空泵的定子部件 |
CN118654113A (zh) * | 2024-08-16 | 2024-09-17 | 宁波拓克传动有限公司 | 一种行星架自紧固型行星齿轮减速机 |
Also Published As
Publication number | Publication date |
---|---|
DE602004002112D1 (de) | 2006-10-05 |
KR101099829B1 (ko) | 2011-12-28 |
TWI321191B (en) | 2010-03-01 |
GB0310615D0 (en) | 2003-06-11 |
US20060216186A1 (en) | 2006-09-28 |
US7214041B2 (en) | 2007-05-08 |
JP4637092B2 (ja) | 2011-02-23 |
EP1620649A1 (en) | 2006-02-01 |
DE602004002112T2 (de) | 2007-03-01 |
JP2006525467A (ja) | 2006-11-09 |
CN100363621C (zh) | 2008-01-23 |
KR20060009907A (ko) | 2006-02-01 |
TW200506218A (en) | 2005-02-16 |
EP1620649B1 (en) | 2006-08-23 |
ATE337490T1 (de) | 2006-09-15 |
WO2004099620A1 (en) | 2004-11-18 |
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