JP4637092B2 - シール組立体の改良 - Google Patents
シール組立体の改良 Download PDFInfo
- Publication number
- JP4637092B2 JP4637092B2 JP2006506225A JP2006506225A JP4637092B2 JP 4637092 B2 JP4637092 B2 JP 4637092B2 JP 2006506225 A JP2006506225 A JP 2006506225A JP 2006506225 A JP2006506225 A JP 2006506225A JP 4637092 B2 JP4637092 B2 JP 4637092B2
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- seal
- fluid
- stator
- stator parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000004888 barrier function Effects 0.000 claims abstract description 36
- 239000012530 fluid Substances 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 32
- 230000008569 process Effects 0.000 claims abstract description 32
- 230000003068 static effect Effects 0.000 claims abstract description 5
- 238000004891 communication Methods 0.000 claims abstract description 3
- 239000012080 ambient air Substances 0.000 claims description 3
- 239000013536 elastomeric material Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 48
- 238000010926 purge Methods 0.000 description 14
- 230000007797 corrosion Effects 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005494 condensation Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Gasket Seals (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Sealing Material Composition (AREA)
Description
図1は、乾式ポンプの1つの段から取り出したステータ部品1の表面を示している。第2のステータ部品(図示せず)の表面は、第1のステータ部品1の対応の表面3に接触し、キャビティ2がこれら部品相互間に形成されている。このキャビティ2は、ポンプを組み立てたときにロータ部品(図示せず)を収容するために形成される。かかるポンプは代表的には、数個のかかる段を有し、各段のキャビティ2は、段間(インターステージ)孔9を介して次の段と連通している。
Claims (5)
- 互いに密封的に連結され且つ間にロータ部品を収容するキャビティを形成する、少なくとも2つのステータ部品を有する真空ポンプ内で使用される静的シール装置の保護のためのシール組立体であって、
これら2つのステータ部品間において前記キャビティへの外気の流れ及び前記キャビティからのプロセスガスの流れを阻止するように、前記2つのステータ部品間に係合されたOリングシールと、
前記Oリングシールの平面内で前記ステータ部品のうちの少なくとも1つに設けられ、前記Oリングシールと使用中プロセスガスが通るキャビティとの間に配置された凹状の流体チャネルと、を有し、
該流体チャネルは、使用中、回送すべきバリヤ流体の経路を形成するとともに、前記バリヤ流体の外部源に連結可能な入口と、前記キャビティと流体連通している出口とを有する、
シール組立体。 - 前記Oリングシールがエラストマー材料で作られている、請求項1記載のシール組立体。
- 前記Oリングシールは、流体チャネル内に設けられている、請求項1又は2に記載のシール組立体。
- 前記流体チャネルは、使用中、キャビティに向かうバリヤ流体の漏れを促進するように流体チャネルとキャビティとを連通する側方チャネルを更に含む、請求項1〜3のいずれか一項に記載のシール組立体。
- 真空ポンプであって、
複数のステータ部品を有し、各対の前記ステータ部品が、これらのステータ部品間にキャビティを形成するように互いに対して位置決めされ、前記キャビティを、使用中、プロセスガスが通る、複数のステータ部品と、
隣接した前記ステータ部品間に設けられた請求項1〜4のいずれか一項に記載のシール組立体と、を有する、
真空ポンプ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0310615.0A GB0310615D0 (en) | 2003-05-08 | 2003-05-08 | Improvements in seal assemblies |
PCT/GB2004/001955 WO2004099620A1 (en) | 2003-05-08 | 2004-05-06 | Improvements in seal assemblies |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006525467A JP2006525467A (ja) | 2006-11-09 |
JP2006525467A5 JP2006525467A5 (ja) | 2010-05-27 |
JP4637092B2 true JP4637092B2 (ja) | 2011-02-23 |
Family
ID=9957695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006506225A Expired - Lifetime JP4637092B2 (ja) | 2003-05-08 | 2004-05-06 | シール組立体の改良 |
Country Status (10)
Country | Link |
---|---|
US (1) | US7214041B2 (ja) |
EP (1) | EP1620649B1 (ja) |
JP (1) | JP4637092B2 (ja) |
KR (1) | KR101099829B1 (ja) |
CN (1) | CN100363621C (ja) |
AT (1) | ATE337490T1 (ja) |
DE (1) | DE602004002112T2 (ja) |
GB (1) | GB0310615D0 (ja) |
TW (1) | TWI321191B (ja) |
WO (1) | WO2004099620A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2408801A (en) * | 2003-12-03 | 2005-06-08 | Boc Group Plc | Detection of seal leak using differential pressure measurement |
GB0603318D0 (en) * | 2006-02-20 | 2006-03-29 | Boc Group Plc | Seal |
GB2442738B (en) * | 2006-10-09 | 2011-08-03 | Boc Group Plc | A sealing system |
GB0620144D0 (en) * | 2006-10-11 | 2006-11-22 | Boc Group Plc | Vacuum pump |
KR100873104B1 (ko) * | 2007-03-16 | 2008-12-09 | 삼성전자주식회사 | 회전체 크리닝 유니트 및 이를 갖는 진공펌프 |
GB0712779D0 (en) * | 2007-07-02 | 2007-08-08 | Edwards Ltd | Seal |
GB0719394D0 (en) | 2007-10-04 | 2007-11-14 | Edwards Ltd | A multi stage clam shell vacuum pump |
DE102008063133A1 (de) * | 2008-12-24 | 2010-07-01 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
KR20100091063A (ko) | 2009-02-09 | 2010-08-18 | 삼성전자주식회사 | 회전체 크리닝 장치 및 이를 갖는 진공 펌프 |
JP5263558B2 (ja) * | 2011-10-05 | 2013-08-14 | 株式会社四葉機械製作所 | 耐腐食性多段式真空ポンプ |
GB2500603A (en) * | 2012-03-26 | 2013-10-02 | Edwards Ltd | Vacuum pump stators and vacuum pumps |
GB2584005B (en) * | 2019-03-22 | 2022-11-23 | Cummins Inc | Vacuum pump exhaust reed valve with pressure bleed |
CN114593059A (zh) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | 一种干式真空泵的定子部件 |
GB2614285B (en) * | 2021-12-23 | 2024-03-06 | Edwards Ltd | Vacuum pump with reduced seal requirements |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07133793A (ja) * | 1993-11-09 | 1995-05-23 | Hitachi Ltd | 真空ポンプ |
JPH10266956A (ja) * | 1997-03-24 | 1998-10-06 | Ebara Corp | トラップ装置 |
US20020155014A1 (en) * | 2000-08-21 | 2002-10-24 | Pascal Durand | Pressure seal for a vacuum pump |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB356168A (en) * | 1930-03-01 | 1931-09-01 | Brown David & Sons Ltd | An improvement in or relating to rotary pumps |
JPH0733834B2 (ja) * | 1986-12-18 | 1995-04-12 | 株式会社宇野澤組鐵工所 | ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ |
FR2638788B1 (fr) | 1988-11-07 | 1994-01-28 | Alcatel Cit | Pompe a vide du type roots multietage |
JPH0747958B2 (ja) * | 1990-06-18 | 1995-05-24 | 株式会社アンレツト | 内部洗浄可能なまゆ型2軸多段真空ポンプ |
JP2537696B2 (ja) * | 1990-09-21 | 1996-09-25 | 株式会社荏原製作所 | 多段真空ポンプ |
EP0738833B1 (en) * | 1995-04-19 | 2000-09-20 | Ebara Corporation | Multistage positive-displacement vacuum pump |
US5567140A (en) * | 1995-04-24 | 1996-10-22 | Itt Corporation | Keyed insert plate for curved rotary lobe pump chamber walls |
US6123526A (en) | 1998-09-18 | 2000-09-26 | Industrial Technology Research Institute | Multistage pump and method for assembling the pump |
-
2003
- 2003-05-08 GB GBGB0310615.0A patent/GB0310615D0/en not_active Ceased
-
2004
- 2004-05-06 KR KR1020057021122A patent/KR101099829B1/ko active IP Right Grant
- 2004-05-06 WO PCT/GB2004/001955 patent/WO2004099620A1/en active IP Right Grant
- 2004-05-06 CN CNB2004800125228A patent/CN100363621C/zh not_active Expired - Lifetime
- 2004-05-06 JP JP2006506225A patent/JP4637092B2/ja not_active Expired - Lifetime
- 2004-05-06 AT AT04731392T patent/ATE337490T1/de not_active IP Right Cessation
- 2004-05-06 US US10/555,972 patent/US7214041B2/en active Active
- 2004-05-06 EP EP04731392A patent/EP1620649B1/en not_active Expired - Lifetime
- 2004-05-06 DE DE602004002112T patent/DE602004002112T2/de not_active Expired - Lifetime
- 2004-05-07 TW TW093112921A patent/TWI321191B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07133793A (ja) * | 1993-11-09 | 1995-05-23 | Hitachi Ltd | 真空ポンプ |
JPH10266956A (ja) * | 1997-03-24 | 1998-10-06 | Ebara Corp | トラップ装置 |
JP3162647B2 (ja) * | 1997-03-24 | 2001-05-08 | 株式会社荏原製作所 | トラップ装置 |
US20020155014A1 (en) * | 2000-08-21 | 2002-10-24 | Pascal Durand | Pressure seal for a vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
TWI321191B (en) | 2010-03-01 |
JP2006525467A (ja) | 2006-11-09 |
US7214041B2 (en) | 2007-05-08 |
GB0310615D0 (en) | 2003-06-11 |
DE602004002112T2 (de) | 2007-03-01 |
US20060216186A1 (en) | 2006-09-28 |
CN1784546A (zh) | 2006-06-07 |
CN100363621C (zh) | 2008-01-23 |
EP1620649B1 (en) | 2006-08-23 |
ATE337490T1 (de) | 2006-09-15 |
EP1620649A1 (en) | 2006-02-01 |
KR101099829B1 (ko) | 2011-12-28 |
WO2004099620A1 (en) | 2004-11-18 |
DE602004002112D1 (de) | 2006-10-05 |
TW200506218A (en) | 2005-02-16 |
KR20060009907A (ko) | 2006-02-01 |
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