KR101099829B1 - 밀봉 조립체 및 진공 펌프 - Google Patents

밀봉 조립체 및 진공 펌프 Download PDF

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Publication number
KR101099829B1
KR101099829B1 KR1020057021122A KR20057021122A KR101099829B1 KR 101099829 B1 KR101099829 B1 KR 101099829B1 KR 1020057021122 A KR1020057021122 A KR 1020057021122A KR 20057021122 A KR20057021122 A KR 20057021122A KR 101099829 B1 KR101099829 B1 KR 101099829B1
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KR
South Korea
Prior art keywords
fluid
sealing assembly
pump
barrier
stator components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1020057021122A
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English (en)
Korean (ko)
Other versions
KR20060009907A (ko
Inventor
피터 휴 벌치
데이빗 알랜 튜렐
말콤 윌리암 그래이
네일 터너
Original Assignee
에드워즈 리미티드
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Publication of KR20060009907A publication Critical patent/KR20060009907A/ko
Application granted granted Critical
Publication of KR101099829B1 publication Critical patent/KR101099829B1/ko
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Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Gasket Seals (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Sealing Material Composition (AREA)
KR1020057021122A 2003-05-08 2004-05-06 밀봉 조립체 및 진공 펌프 Expired - Lifetime KR101099829B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0310615.0 2003-05-08
GBGB0310615.0A GB0310615D0 (en) 2003-05-08 2003-05-08 Improvements in seal assemblies
PCT/GB2004/001955 WO2004099620A1 (en) 2003-05-08 2004-05-06 Improvements in seal assemblies

Publications (2)

Publication Number Publication Date
KR20060009907A KR20060009907A (ko) 2006-02-01
KR101099829B1 true KR101099829B1 (ko) 2011-12-28

Family

ID=9957695

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057021122A Expired - Lifetime KR101099829B1 (ko) 2003-05-08 2004-05-06 밀봉 조립체 및 진공 펌프

Country Status (10)

Country Link
US (1) US7214041B2 (enExample)
EP (1) EP1620649B1 (enExample)
JP (1) JP4637092B2 (enExample)
KR (1) KR101099829B1 (enExample)
CN (1) CN100363621C (enExample)
AT (1) ATE337490T1 (enExample)
DE (1) DE602004002112T2 (enExample)
GB (1) GB0310615D0 (enExample)
TW (1) TWI321191B (enExample)
WO (1) WO2004099620A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250015486A (ko) 2023-07-25 2025-02-03 프로인주식회사 진공 펌프

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2408801A (en) * 2003-12-03 2005-06-08 Boc Group Plc Detection of seal leak using differential pressure measurement
GB0603318D0 (en) * 2006-02-20 2006-03-29 Boc Group Plc Seal
GB2442738B (en) * 2006-10-09 2011-08-03 Boc Group Plc A sealing system
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump
KR100873104B1 (ko) 2007-03-16 2008-12-09 삼성전자주식회사 회전체 크리닝 유니트 및 이를 갖는 진공펌프
GB0712779D0 (en) * 2007-07-02 2007-08-08 Edwards Ltd Seal
GB0719394D0 (en) 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
DE102008063133A1 (de) 2008-12-24 2010-07-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
KR20100091063A (ko) * 2009-02-09 2010-08-18 삼성전자주식회사 회전체 크리닝 장치 및 이를 갖는 진공 펌프
JP5263558B2 (ja) * 2011-10-05 2013-08-14 株式会社四葉機械製作所 耐腐食性多段式真空ポンプ
GB2500603A (en) * 2012-03-26 2013-10-02 Edwards Ltd Vacuum pump stators and vacuum pumps
GB2584005B (en) * 2019-03-22 2022-11-23 Cummins Inc Vacuum pump exhaust reed valve with pressure bleed
CN114593059A (zh) * 2020-12-07 2022-06-07 中国科学院沈阳科学仪器股份有限公司 一种干式真空泵的定子部件
GB2614285B (en) 2021-12-23 2024-03-06 Edwards Ltd Vacuum pump with reduced seal requirements
US20250163909A1 (en) * 2023-11-22 2025-05-22 GM Global Technology Operations LLC Pump housing with drain for vehicle
CN118654113B (zh) * 2024-08-16 2024-11-05 宁波拓克传动有限公司 一种行星架自紧固型行星齿轮减速机

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4990069A (en) 1988-11-07 1991-02-05 Societe Anonyme Dite: Alcatel Cit Multi-stage roots vacuum pump with sealing module
US6123526A (en) 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB356168A (en) * 1930-03-01 1931-09-01 Brown David & Sons Ltd An improvement in or relating to rotary pumps
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
JPH0747958B2 (ja) * 1990-06-18 1995-05-24 株式会社アンレツト 内部洗浄可能なまゆ型２軸多段真空ポンプ
JP2537696B2 (ja) * 1990-09-21 1996-09-25 株式会社荏原製作所 多段真空ポンプ
JPH07133793A (ja) * 1993-11-09 1995-05-23 Hitachi Ltd 真空ポンプ
DE69610352T2 (de) * 1995-04-19 2001-05-17 Ebara Corp., Tokio/Tokyo Mehrstufige Verdrängungsvakuumpumpe
US5567140A (en) * 1995-04-24 1996-10-22 Itt Corporation Keyed insert plate for curved rotary lobe pump chamber walls
JP3162647B2 (ja) * 1997-03-24 2001-05-08 株式会社荏原製作所 トラップ装置
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4990069A (en) 1988-11-07 1991-02-05 Societe Anonyme Dite: Alcatel Cit Multi-stage roots vacuum pump with sealing module
US6123526A (en) 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250015486A (ko) 2023-07-25 2025-02-03 프로인주식회사 진공 펌프

Also Published As

Publication number Publication date
JP4637092B2 (ja) 2011-02-23
EP1620649B1 (en) 2006-08-23
CN1784546A (zh) 2006-06-07
GB0310615D0 (en) 2003-06-11
EP1620649A1 (en) 2006-02-01
TW200506218A (en) 2005-02-16
US7214041B2 (en) 2007-05-08
DE602004002112D1 (de) 2006-10-05
DE602004002112T2 (de) 2007-03-01
JP2006525467A (ja) 2006-11-09
ATE337490T1 (de) 2006-09-15
US20060216186A1 (en) 2006-09-28
KR20060009907A (ko) 2006-02-01
CN100363621C (zh) 2008-01-23
WO2004099620A1 (en) 2004-11-18
TWI321191B (en) 2010-03-01

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