TWI320035B - Process for producing perfluorocarbons and use thereof - Google Patents
Process for producing perfluorocarbons and use thereof Download PDFInfo
- Publication number
- TWI320035B TWI320035B TW91103190A TW91103190A TWI320035B TW I320035 B TWI320035 B TW I320035B TW 91103190 A TW91103190 A TW 91103190A TW 91103190 A TW91103190 A TW 91103190A TW I320035 B TWI320035 B TW I320035B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- perfluorocarbon
- producing
- oxygen
- fluorine gas
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 48
- 239000007789 gas Substances 0.000 claims description 178
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 84
- 229910052731 fluorine Inorganic materials 0.000 claims description 84
- 239000011737 fluorine Substances 0.000 claims description 84
- 238000006243 chemical reaction Methods 0.000 claims description 76
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 claims description 71
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 62
- 229910052760 oxygen Inorganic materials 0.000 claims description 62
- 239000001301 oxygen Substances 0.000 claims description 62
- 238000004519 manufacturing process Methods 0.000 claims description 49
- 150000002894 organic compounds Chemical class 0.000 claims description 45
- 150000001875 compounds Chemical class 0.000 claims description 44
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 35
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 34
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 34
- 239000012535 impurity Substances 0.000 claims description 27
- 239000003085 diluting agent Substances 0.000 claims description 26
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 20
- 239000002994 raw material Substances 0.000 claims description 19
- LVGUZGTVOIAKKC-UHFFFAOYSA-N 1,1,1,2-tetrafluoroethane Chemical compound FCC(F)(F)F LVGUZGTVOIAKKC-UHFFFAOYSA-N 0.000 claims description 18
- 125000004432 carbon atom Chemical group C* 0.000 claims description 14
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 claims description 12
- WMIYKQLTONQJES-UHFFFAOYSA-N hexafluoroethane Chemical compound FC(F)(F)C(F)(F)F WMIYKQLTONQJES-UHFFFAOYSA-N 0.000 claims description 12
- 125000001931 aliphatic group Chemical group 0.000 claims description 10
- QYSGYZVSCZSLHT-UHFFFAOYSA-N octafluoropropane Chemical compound FC(F)(F)C(F)(F)C(F)(F)F QYSGYZVSCZSLHT-UHFFFAOYSA-N 0.000 claims description 10
- 229960004065 perflutren Drugs 0.000 claims description 8
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 6
- UKACHOXRXFQJFN-UHFFFAOYSA-N heptafluoropropane Chemical compound FC(F)C(F)(F)C(F)(F)F UKACHOXRXFQJFN-UHFFFAOYSA-N 0.000 claims description 6
- GTLACDSXYULKMZ-UHFFFAOYSA-N pentafluoroethane Chemical compound FC(F)C(F)(F)F GTLACDSXYULKMZ-UHFFFAOYSA-N 0.000 claims description 6
- 229920006395 saturated elastomer Polymers 0.000 claims description 6
- NSGXIBWMJZWTPY-UHFFFAOYSA-N 1,1,1,3,3,3-hexafluoropropane Chemical compound FC(F)(F)CC(F)(F)F NSGXIBWMJZWTPY-UHFFFAOYSA-N 0.000 claims description 5
- UJPMYEOUBPIPHQ-UHFFFAOYSA-N 1,1,1-trifluoroethane Chemical compound CC(F)(F)F UJPMYEOUBPIPHQ-UHFFFAOYSA-N 0.000 claims description 5
- 230000002079 cooperative effect Effects 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- MSSNHSVIGIHOJA-UHFFFAOYSA-N pentafluoropropane Chemical compound FC(F)CC(F)(F)F MSSNHSVIGIHOJA-UHFFFAOYSA-N 0.000 claims description 3
- JRHNUZCXXOTJCA-UHFFFAOYSA-N 1-fluoropropane Chemical compound CCCF JRHNUZCXXOTJCA-UHFFFAOYSA-N 0.000 claims 1
- 150000001335 aliphatic alkanes Chemical class 0.000 claims 1
- 230000003197 catalytic effect Effects 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 35
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 21
- 238000002360 preparation method Methods 0.000 description 21
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 17
- 229910052757 nitrogen Inorganic materials 0.000 description 17
- 238000004817 gas chromatography Methods 0.000 description 14
- 239000000203 mixture Substances 0.000 description 14
- 238000004140 cleaning Methods 0.000 description 13
- 238000004821 distillation Methods 0.000 description 13
- 239000007864 aqueous solution Substances 0.000 description 12
- 238000003682 fluorination reaction Methods 0.000 description 12
- 238000004458 analytical method Methods 0.000 description 11
- 238000005530 etching Methods 0.000 description 10
- 238000000746 purification Methods 0.000 description 9
- 229910052799 carbon Inorganic materials 0.000 description 8
- 239000012071 phase Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000004880 explosion Methods 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 229910052770 Uranium Inorganic materials 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- YUCFVHQCAFKDQG-UHFFFAOYSA-N fluoromethane Chemical compound F[CH] YUCFVHQCAFKDQG-UHFFFAOYSA-N 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 3
- 150000002927 oxygen compounds Chemical class 0.000 description 3
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000012024 dehydrating agents Substances 0.000 description 2
- 238000007865 diluting Methods 0.000 description 2
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- -1 C F3〇C F3 Chemical class 0.000 description 1
- 101100274581 Caenorhabditis elegans chc-1 gene Proteins 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 235000013162 Cocos nucifera Nutrition 0.000 description 1
- 244000060011 Cocos nucifera Species 0.000 description 1
- 239000004338 Dichlorodifluoromethane Substances 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical class COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- 229910000604 Ferrochrome Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XOBKSJJDNFUZPF-UHFFFAOYSA-N Methoxyethane Chemical class CCOC XOBKSJJDNFUZPF-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical compound ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- OLBVUFHMDRJKTK-UHFFFAOYSA-N [N].[O] Chemical compound [N].[O] OLBVUFHMDRJKTK-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 238000005576 amination reaction Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- LFYJSSARVMHQJB-QIXNEVBVSA-N bakuchiol Chemical compound CC(C)=CCC[C@@](C)(C=C)\C=C\C1=CC=C(O)C=C1 LFYJSSARVMHQJB-QIXNEVBVSA-N 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- AFYPFACVUDMOHA-UHFFFAOYSA-N chlorotrifluoromethane Chemical compound FC(F)(F)Cl AFYPFACVUDMOHA-UHFFFAOYSA-N 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 1
- 235000019404 dichlorodifluoromethane Nutrition 0.000 description 1
- SRXOCFMDUSFFAK-UHFFFAOYSA-N dimethyl peroxide Chemical class COOC SRXOCFMDUSFFAK-UHFFFAOYSA-N 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910001512 metal fluoride Inorganic materials 0.000 description 1
- QLOAVXSYZAJECW-UHFFFAOYSA-N methane;molecular fluorine Chemical compound C.FF QLOAVXSYZAJECW-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229960002415 trichloroethylene Drugs 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001048985A JP4703865B2 (ja) | 2001-02-23 | 2001-02-23 | パーフルオロカーボン類の製造方法およびその用途 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWI320035B true TWI320035B (en) | 2010-02-01 |
Family
ID=18910157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW91103190A TWI320035B (en) | 2001-02-23 | 2002-02-22 | Process for producing perfluorocarbons and use thereof |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4703865B2 (enrdf_load_stackoverflow) |
| TW (1) | TWI320035B (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111386254A (zh) * | 2017-12-12 | 2020-07-07 | 昭和电工株式会社 | 含氟有机化合物的制造方法和制造装置 |
| CN112778077A (zh) * | 2021-01-18 | 2021-05-11 | 福建德尔科技有限公司 | 基于微反应器的电子级c2f6制备方法 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4828208B2 (ja) * | 2005-11-09 | 2011-11-30 | 昭和電工株式会社 | ペンタフルオロエタンの分離回収方法および該方法を含むペンタフルオロエタンの製造方法 |
| JP2007176842A (ja) * | 2005-12-27 | 2007-07-12 | Showa Denko Kk | オクタフルオロプロパンの製造方法 |
| CN104995158B (zh) * | 2013-02-21 | 2018-11-02 | 日本瑞翁株式会社 | 高纯度1h-七氟环戊烯 |
| CN115197044B (zh) * | 2022-08-09 | 2023-07-04 | 浙江诺亚氟化工有限公司 | 一种全氟异己烷的绿色合成工艺 |
| CN116283479B (zh) * | 2023-03-27 | 2024-01-26 | 福建德尔科技股份有限公司 | 一种制备电子级八氟丙烷的方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2712732C2 (de) * | 1977-03-23 | 1986-03-13 | Hoechst Ag, 6230 Frankfurt | Verfahren zur Herstellung von Oktafluorpropan |
| US4377715A (en) * | 1979-12-26 | 1983-03-22 | Allied Corporation | Production of perfluoropropane |
| WO1993017988A1 (en) * | 1992-03-10 | 1993-09-16 | E.I. Du Pont De Nemours And Company | Purification of hexafluoroethane products |
| JP2924660B2 (ja) * | 1994-09-08 | 1999-07-26 | 昭和電工株式会社 | テトラフルオロメタンの精製方法 |
| US5718807A (en) * | 1994-09-20 | 1998-02-17 | E. I. Du Pont De Nemours And Company | Purification process for hexafluoroethane products |
| JP2947158B2 (ja) * | 1996-03-07 | 1999-09-13 | 昭和電工株式会社 | ヘキサフルオロエタンの製造方法 |
| JP3067633B2 (ja) * | 1996-03-26 | 2000-07-17 | 昭和電工株式会社 | パーフルオロカーボンの製造方法 |
-
2001
- 2001-02-23 JP JP2001048985A patent/JP4703865B2/ja not_active Expired - Lifetime
-
2002
- 2002-02-22 TW TW91103190A patent/TWI320035B/zh not_active IP Right Cessation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111386254A (zh) * | 2017-12-12 | 2020-07-07 | 昭和电工株式会社 | 含氟有机化合物的制造方法和制造装置 |
| CN111386254B (zh) * | 2017-12-12 | 2023-08-22 | 株式会社力森诺科 | 含氟有机化合物的制造方法和制造装置 |
| CN112778077A (zh) * | 2021-01-18 | 2021-05-11 | 福建德尔科技有限公司 | 基于微反应器的电子级c2f6制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002255868A (ja) | 2002-09-11 |
| JP4703865B2 (ja) | 2011-06-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |