TWI317964B - - Google Patents

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Publication number
TWI317964B
TWI317964B TW093134485A TW93134485A TWI317964B TW I317964 B TWI317964 B TW I317964B TW 093134485 A TW093134485 A TW 093134485A TW 93134485 A TW93134485 A TW 93134485A TW I317964 B TWI317964 B TW I317964B
Authority
TW
Taiwan
Prior art keywords
discharge vessel
discharge
glass
temperature
excimer lamp
Prior art date
Application number
TW093134485A
Other languages
English (en)
Chinese (zh)
Other versions
TW200532741A (en
Inventor
Kenichi Hirose
Kazuaki Yano
Yukihiro Morimoto
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35176071&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI317964(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200532741A publication Critical patent/TW200532741A/zh
Application granted granted Critical
Publication of TWI317964B publication Critical patent/TWI317964B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
    • H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H01J9/265—Sealing together parts of vessels specially adapted for gas-discharge tubes or lamps
    • H01J9/266—Sealing together parts of vessels specially adapted for gas-discharge tubes or lamps specially adapted for gas-discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H01J9/385—Exhausting vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Glass Compositions (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Glass Melting And Manufacturing (AREA)
TW093134485A 2004-03-25 2004-11-11 Excimer lamp TW200532741A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004088655A JP4134927B2 (ja) 2004-03-25 2004-03-25 エキシマランプ

Publications (2)

Publication Number Publication Date
TW200532741A TW200532741A (en) 2005-10-01
TWI317964B true TWI317964B (ja) 2009-12-01

Family

ID=35176071

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093134485A TW200532741A (en) 2004-03-25 2004-11-11 Excimer lamp

Country Status (3)

Country Link
JP (1) JP4134927B2 (ja)
KR (1) KR100811391B1 (ja)
TW (1) TW200532741A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4998832B2 (ja) * 2008-03-19 2012-08-15 ウシオ電機株式会社 エキシマランプ
JP4748208B2 (ja) 2008-11-18 2011-08-17 ウシオ電機株式会社 エキシマ放電ランプおよびエキシマ放電ランプの製造方法
JP5741603B2 (ja) * 2013-01-30 2015-07-01 ウシオ電機株式会社 エキシマランプ
US11377385B2 (en) 2016-04-28 2022-07-05 Nippon Electric Glass Co., Ltd. Glass tube for metal sealing and glass for metal sealing

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0165695B1 (ko) * 1991-06-29 1998-12-15 아이하라 테루히코 엑시머레이저용 합성석영유리 광학부재 및 그의 제조방법
JP2775695B2 (ja) * 1993-05-27 1998-07-16 ウシオ電機株式会社 誘電体バリヤ放電ランプ
JP2951139B2 (ja) * 1993-01-20 1999-09-20 ウシオ電機株式会社 誘電体バリヤ放電ランプ
JP3189481B2 (ja) * 1993-03-19 2001-07-16 ウシオ電機株式会社 誘電体バリヤ放電ランプ
JP3025403B2 (ja) * 1993-11-15 2000-03-27 ウシオ電機株式会社 誘電体バリヤ放電ランプ
JP2980510B2 (ja) * 1994-01-28 1999-11-22 信越石英株式会社 紫外線ランプ用高純度シリカガラスおよびその製造方法
JP3171004B2 (ja) * 1994-04-15 2001-05-28 ウシオ電機株式会社 誘電体バリヤ放電ランプ
JP2000100389A (ja) * 1998-09-18 2000-04-07 Ushio Inc 放電ランプ
JP3069562B1 (ja) * 1999-10-19 2000-07-24 信越石英株式会社 エキシマレ―ザ及びエキシマランプ用のシリカガラス光学材料及びその製造方法
JP2002151013A (ja) * 2000-11-13 2002-05-24 Ushio Inc フッ素レーザ装置用基準光源。
JP2002289150A (ja) * 2001-03-26 2002-10-04 Harison Toshiba Lighting Corp 誘電体バリヤ放電ランプおよび紫外線照射装置
JP3582500B2 (ja) * 2001-05-23 2004-10-27 ウシオ電機株式会社 超高圧水銀ランプ

Also Published As

Publication number Publication date
JP2005276640A (ja) 2005-10-06
KR100811391B1 (ko) 2008-03-07
TW200532741A (en) 2005-10-01
JP4134927B2 (ja) 2008-08-20
KR20050095540A (ko) 2005-09-29

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