TWI317964B - - Google Patents
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- Publication number
- TWI317964B TWI317964B TW093134485A TW93134485A TWI317964B TW I317964 B TWI317964 B TW I317964B TW 093134485 A TW093134485 A TW 093134485A TW 93134485 A TW93134485 A TW 93134485A TW I317964 B TWI317964 B TW I317964B
- Authority
- TW
- Taiwan
- Prior art keywords
- discharge vessel
- discharge
- glass
- temperature
- excimer lamp
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/302—Vessels; Containers characterised by the material of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
- H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
- H01J9/265—Sealing together parts of vessels specially adapted for gas-discharge tubes or lamps
- H01J9/266—Sealing together parts of vessels specially adapted for gas-discharge tubes or lamps specially adapted for gas-discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/385—Exhausting vessels
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Glass Compositions (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004088655A JP4134927B2 (ja) | 2004-03-25 | 2004-03-25 | エキシマランプ |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200532741A TW200532741A (en) | 2005-10-01 |
TWI317964B true TWI317964B (de) | 2009-12-01 |
Family
ID=35176071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093134485A TW200532741A (en) | 2004-03-25 | 2004-11-11 | Excimer lamp |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4134927B2 (de) |
KR (1) | KR100811391B1 (de) |
TW (1) | TW200532741A (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4998832B2 (ja) * | 2008-03-19 | 2012-08-15 | ウシオ電機株式会社 | エキシマランプ |
JP4748208B2 (ja) * | 2008-11-18 | 2011-08-17 | ウシオ電機株式会社 | エキシマ放電ランプおよびエキシマ放電ランプの製造方法 |
JP5741603B2 (ja) * | 2013-01-30 | 2015-07-01 | ウシオ電機株式会社 | エキシマランプ |
EP3450410A4 (de) * | 2016-04-28 | 2019-11-27 | Nippon Electric Glass Co., Ltd. | Glasrohr für metalldichtung und glas für metalldichtung |
JP2021125437A (ja) * | 2020-02-10 | 2021-08-30 | 東芝ライテック株式会社 | バリア放電ランプモジュール、バリア放電ランプ、および紫外線照射装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0546196B1 (de) * | 1991-06-29 | 1997-05-02 | Shin-Etsu Quartz Products Co., Ltd. | Synthetisches optisches element aus quarzglas für excimer-laser und seine herstellung |
JP2951139B2 (ja) * | 1993-01-20 | 1999-09-20 | ウシオ電機株式会社 | 誘電体バリヤ放電ランプ |
JP2775695B2 (ja) * | 1993-05-27 | 1998-07-16 | ウシオ電機株式会社 | 誘電体バリヤ放電ランプ |
JP3189481B2 (ja) * | 1993-03-19 | 2001-07-16 | ウシオ電機株式会社 | 誘電体バリヤ放電ランプ |
JP3025403B2 (ja) * | 1993-11-15 | 2000-03-27 | ウシオ電機株式会社 | 誘電体バリヤ放電ランプ |
JP2980510B2 (ja) * | 1994-01-28 | 1999-11-22 | 信越石英株式会社 | 紫外線ランプ用高純度シリカガラスおよびその製造方法 |
JP3171004B2 (ja) * | 1994-04-15 | 2001-05-28 | ウシオ電機株式会社 | 誘電体バリヤ放電ランプ |
JP2000100389A (ja) * | 1998-09-18 | 2000-04-07 | Ushio Inc | 放電ランプ |
JP3069562B1 (ja) * | 1999-10-19 | 2000-07-24 | 信越石英株式会社 | エキシマレ―ザ及びエキシマランプ用のシリカガラス光学材料及びその製造方法 |
JP2002151013A (ja) * | 2000-11-13 | 2002-05-24 | Ushio Inc | フッ素レーザ装置用基準光源。 |
JP2002289150A (ja) * | 2001-03-26 | 2002-10-04 | Harison Toshiba Lighting Corp | 誘電体バリヤ放電ランプおよび紫外線照射装置 |
JP3582500B2 (ja) * | 2001-05-23 | 2004-10-27 | ウシオ電機株式会社 | 超高圧水銀ランプ |
-
2004
- 2004-03-25 JP JP2004088655A patent/JP4134927B2/ja not_active Expired - Lifetime
- 2004-11-11 TW TW093134485A patent/TW200532741A/zh unknown
- 2004-12-22 KR KR1020040110322A patent/KR100811391B1/ko active IP Right Review Request
Also Published As
Publication number | Publication date |
---|---|
KR100811391B1 (ko) | 2008-03-07 |
JP4134927B2 (ja) | 2008-08-20 |
JP2005276640A (ja) | 2005-10-06 |
KR20050095540A (ko) | 2005-09-29 |
TW200532741A (en) | 2005-10-01 |
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