TWI312543B - Process for fabricating a mim capacitor - Google Patents

Process for fabricating a mim capacitor Download PDF

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Publication number
TWI312543B
TWI312543B TW092113777A TW92113777A TWI312543B TW I312543 B TWI312543 B TW I312543B TW 092113777 A TW092113777 A TW 092113777A TW 92113777 A TW92113777 A TW 92113777A TW I312543 B TWI312543 B TW I312543B
Authority
TW
Taiwan
Prior art keywords
flow rate
layer
nitrogen
ratio
decane
Prior art date
Application number
TW092113777A
Other languages
English (en)
Chinese (zh)
Other versions
TW200403762A (en
Inventor
Vogt Mirko
Original Assignee
Infineon Technologies A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies A filed Critical Infineon Technologies A
Publication of TW200403762A publication Critical patent/TW200403762A/zh
Application granted granted Critical
Publication of TWI312543B publication Critical patent/TWI312543B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69—Inorganic materials
    • H10P14/694—Inorganic materials composed of nitrides
    • H10P14/6943—Inorganic materials composed of nitrides containing silicon
    • H10P14/69433—Inorganic materials composed of nitrides containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/308—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H10P14/6336—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/66—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials
    • H10P14/668—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials
    • H10P14/6681—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials the precursor containing a compound comprising Si
    • H10P14/6682—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69—Inorganic materials
    • H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
    • H10P14/6921—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon
    • H10P14/6922—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H10P14/6927—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being a silicon oxynitride, e.g. SiON or SiON:H

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
TW092113777A 2002-05-29 2003-05-21 Process for fabricating a mim capacitor TWI312543B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10223954A DE10223954A1 (de) 2002-05-29 2002-05-29 Plasmaangeregtes chemisches Gasphasenabscheide-Verfahren zum Abscheiden von Siliziumnitrid oder Siliziumoxinitrid, Verfahren zum Herstellen einer Schicht-Anordnung und Schicht-Anordnung

Publications (2)

Publication Number Publication Date
TW200403762A TW200403762A (en) 2004-03-01
TWI312543B true TWI312543B (en) 2009-07-21

Family

ID=29432440

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092113777A TWI312543B (en) 2002-05-29 2003-05-21 Process for fabricating a mim capacitor

Country Status (6)

Country Link
US (1) US7294553B2 (https=)
EP (1) EP1507888B1 (https=)
JP (1) JP4825418B2 (https=)
DE (2) DE10223954A1 (https=)
TW (1) TWI312543B (https=)
WO (1) WO2003102264A2 (https=)

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* Cited by examiner, † Cited by third party
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US20050073678A1 (en) * 2003-09-26 2005-04-07 Jamil Tahir-Kheli Detection and reduction of dielectric breakdown in semiconductor devices
DE102004003337A1 (de) * 2004-01-22 2005-08-18 Infineon Technologies Ag Plasmaangeregtes chemisches Gasphasenabscheide-Verfahren, Silizium-Sauerstoff-Stickstoff-haltiges Material und Schicht-Anordnung
US7097779B2 (en) * 2004-07-06 2006-08-29 Tokyo Electron Limited Processing system and method for chemically treating a TERA layer
DE102004050391B4 (de) * 2004-10-15 2007-02-08 Infineon Technologies Ag Verfahren zum Herstellen einer Schicht-Anordnung und Schicht-Anordnung
US7268038B2 (en) * 2004-11-23 2007-09-11 Newport Fab, Llc Method for fabricating a MIM capacitor having increased capacitance density and related structure
JP5186776B2 (ja) 2007-02-22 2013-04-24 富士通株式会社 半導体装置及びその製造方法
US7606021B2 (en) * 2007-02-26 2009-10-20 United Microelectronics Corp. Metal-insulator-metal capacitor and method for fabricating the same
US20090071371A1 (en) * 2007-09-18 2009-03-19 College Of William And Mary Silicon Oxynitride Coating Compositions
US7678715B2 (en) * 2007-12-21 2010-03-16 Applied Materials, Inc. Low wet etch rate silicon nitride film
US7943527B2 (en) * 2008-05-30 2011-05-17 The Board Of Trustees Of The University Of Illinois Surface preparation for thin film growth by enhanced nucleation
KR101017763B1 (ko) * 2008-10-16 2011-02-28 주식회사 동부하이텍 Ｍｉｍ 커패시터 및 그 제조 방법
US8563095B2 (en) * 2010-03-15 2013-10-22 Applied Materials, Inc. Silicon nitride passivation layer for covering high aspect ratio features
JP5922352B2 (ja) * 2011-08-11 2016-05-24 Ｓｐｐテクノロジーズ株式会社 窒化膜の製造装置及びその製造方法、並びにその製造プログラム
CN103094076B (zh) * 2011-11-02 2015-12-16 无锡华润上华半导体有限公司 用于提高0.18μm工艺MIM电容性能的方法
CN103060778B (zh) * 2013-01-23 2015-03-11 深圳市劲拓自动化设备股份有限公司 平板式pecvd装置
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
JP2015149404A (ja) * 2014-02-06 2015-08-20 富士フイルム株式会社 シリコンオキシナイトライド膜およびその製造方法、トランジスタ
US10693062B2 (en) * 2015-12-08 2020-06-23 Crossbar, Inc. Regulating interface layer formation for two-terminal memory
GB201813467D0 (en) * 2018-08-17 2018-10-03 Spts Technologies Ltd Method of depositing silicon nitride
US11710631B2 (en) * 2020-10-23 2023-07-25 Applied Materials, Inc. Tensile nitride deposition systems and methods
WO2023017780A1 (ja) * 2021-08-11 2023-02-16 株式会社村田製作所 弾性波装置
KR102438504B1 (ko) * 2021-11-24 2022-08-31 주식회사 아이에스티이 SiCN 박막 형성 방법
CN115955913A (zh) * 2023-02-13 2023-04-11 广州粤芯半导体技术有限公司 电容结构及其制备方法、半导体结构
CN119486379A (zh) * 2023-08-04 2025-02-18 北京北方华创微电子装备有限公司 一种电流阻挡层的制备方法及led芯片

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US4618541A (en) * 1984-12-21 1986-10-21 Advanced Micro Devices, Inc. Method of forming a silicon nitride film transparent to ultraviolet radiation and resulting article
US4786612A (en) * 1986-02-03 1988-11-22 Intel Corporation Plasma enhanced chemical vapor deposited vertical silicon nitride resistor
GB2186116B (en) * 1986-02-03 1989-11-22 Intel Corp Plasma enhanced chemical vapor deposited vertical resistor
US5164339A (en) * 1988-09-30 1992-11-17 Siemens-Bendix Automotive Electronics L.P. Fabrication of oxynitride frontside microstructures
GB2231200A (en) * 1989-04-28 1990-11-07 Philips Electronic Associated Mim devices, their method of fabrication and display devices incorporating such devices
US5284789A (en) * 1990-04-25 1994-02-08 Casio Computer Co., Ltd. Method of forming silicon-based thin film and method of manufacturing thin film transistor using silicon-based thin film
GB9206086D0 (en) * 1992-03-20 1992-05-06 Philips Electronics Uk Ltd Manufacturing electronic devices comprising,e.g.tfts and mims
US6083852A (en) * 1997-05-07 2000-07-04 Applied Materials, Inc. Method for applying films using reduced deposition rates
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US6383874B1 (en) * 2001-03-07 2002-05-07 Advanced Micro Devices, Inc. In-situ stack for high volume production of isolation regions

Also Published As

Publication number Publication date
JP2005530924A (ja) 2005-10-13
US20060084236A1 (en) 2006-04-20
DE50313348D1 (de) 2011-02-03
WO2003102264A3 (de) 2004-04-08
DE10223954A1 (de) 2003-12-11
TW200403762A (en) 2004-03-01
JP4825418B2 (ja) 2011-11-30
WO2003102264A2 (de) 2003-12-11
US7294553B2 (en) 2007-11-13
EP1507888A2 (de) 2005-02-23
EP1507888B1 (de) 2010-12-22

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