TWI306600B - Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium, and optical information recording medium - Google Patents

Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium, and optical information recording medium Download PDF

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Publication number
TWI306600B
TWI306600B TW093126209A TW93126209A TWI306600B TW I306600 B TWI306600 B TW I306600B TW 093126209 A TW093126209 A TW 093126209A TW 93126209 A TW93126209 A TW 93126209A TW I306600 B TWI306600 B TW I306600B
Authority
TW
Taiwan
Prior art keywords
recording medium
information recording
optical information
stamper
layer
Prior art date
Application number
TW093126209A
Other languages
English (en)
Other versions
TW200518087A (en
Inventor
Morio Tomiyama
Eiichi Ito
Yuuko Kawaguchi
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Publication of TW200518087A publication Critical patent/TW200518087A/zh
Application granted granted Critical
Publication of TWI306600B publication Critical patent/TWI306600B/zh

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Description

1306600 形成第INi薄膜的步驟；以02或Ar氣體之電漿來處理前 述第INi薄膜的步驟；及於前述處理後之前述第INi薄膜 上以濺鍍Ni材料而形成第2Ni薄膜的步驟； 且，從前述導電膜剝離前述#刻層與前述#刻阻止 5 層的步驟係一將已形成前述第INi薄膜之層與已形成前 述第2Ni薄膜之層剝離的步驟。 13.如申請專利範圍第1項之光資訊記錄媒體用壓模之製造 方法.，其中對於前述光阻層之前述蚀刻層的選擇比為 1.0以上。 10 14. 一種光資訊記錄媒體用壓模，其係以如申請專利範圍第 1項之光資訊記錄媒體用壓模之製造方法所製造者。 15. 如申請專利範圍第14項之光資訊記錄媒體用壓模，其係 一於資訊記錄面上形成信號凹點之高密度光資訊記錄 媒體用壓模；且分別對應前述信號凹點之深度與凹點寬 15 之凸部的高度與寬之比實質上為1.0以上。 16. 如申請專利範圍第15項之光資訊記錄媒體用壓模，其中 前述信號凹點寬之大小為0.18//m以下。 17. —種光資訊記錄媒體用壓模之母盤，係於基板上具有蝕 刻層及形成在前述姓刻層上之可姓刻的光阻層者； 20 前述光阻層之特定部分的結晶狀態係藉曝光而改 變，且前述特定部分或前述特定部分以外的部分係藉蝕 刻而選擇性地被去除； 而前述Ί虫刻層中因去除前述光阻層而產生之露出 於外部之一部份前述蝕刻層係藉蝕刻來選擇性地被去 30 1306600 除而形成凹部； 且該蝕刻層係以具有耐酸性之材料為主成分，該光 阻層係以與前述具有耐酸性之材料在材料或組成上相 異的無機氧化物作為主成分者。 5 18.如申請專利範圍第17項之光資訊記錄媒體用壓模之母 盤，其中該光資訊記錄媒體為高密度光資訊記錄媒體； 且分別對應於形成在前述高密度光資訊記錄媒體之 資訊記錄面上之信號凹點之深度與凹點寬的前述凹部 之深度與寬之比實質上為1.0以上。 10 19.如申請專利範圍第18項之光資訊記錄媒體用壓模之母 盤，其中前述凹部之寬為0.18//m以下。 20. —種光資訊記錄媒體，其係使用以如申請專利範圍第1 項之光資訊記錄媒體用壓模之製造方法所製作之光資 訊記錄媒體用壓模，並藉射出壓縮成形而製作者。 15 21.如申請專利範圍第20項之光資訊記錄媒體，其中該光資 訊記錄媒體為高密度光資訊記錄媒體，且於資訊記錄面 上形成信號凹點之深度與凹點寬之比為1.0以上。 22.如申請專利範圍第21項之光資訊記錄媒體，其中前述信 號凹點寬之大小為0.18 μ m以下。 20 31
TW093126209A 2003-09-01 2004-08-31 Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium, and optical information recording medium TWI306600B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003308416 2003-09-01

Publications (2)

Publication Number Publication Date
TW200518087A TW200518087A (en) 2005-06-01
TWI306600B true TWI306600B (en) 2009-02-21

Family

ID=34101276

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093126209A TWI306600B (en) 2003-09-01 2004-08-31 Fabrication method of stamper for optical information recording medium, master disk of stamper for optical information recording medium, and optical information recording medium

Country Status (7)

Country Link
US (1) US20050063289A1 (zh)
EP (1) EP1511027B1 (zh)
KR (1) KR20050024195A (zh)
CN (1) CN100390886C (zh)
AT (1) ATE435487T1 (zh)
DE (1) DE602004021755D1 (zh)
TW (1) TWI306600B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1738359A1 (en) 2004-04-15 2007-01-03 Koninklijke Philips Electronics N.V. Optical master substrate with mask layer and method to manufacture high-density relief structure
EP1732071A1 (en) * 2005-06-09 2006-12-13 Sony Corporation Lens positioning method, cutting method, positioning method and cutting apparatus
FR2909797B1 (fr) * 2006-12-08 2009-02-13 Commissariat Energie Atomique Formation de zones en creux profondes et son utilisation lors de la fabrication d'un support d'enregistrement optique
JP2008269720A (ja) * 2007-04-23 2008-11-06 Canon Inc 透光性スタンパ、透光性スタンパの製造方法及び多層光記録媒体の製造方法
KR101363681B1 (ko) 2008-10-14 2014-02-14 아사히 가세이 이-매터리얼즈 가부시키가이샤 열반응형 레지스트 재료, 이를 이용한 열리소그래피용 적층체, 이들을 이용한 몰드의 제조방법 및 몰드
JP4768848B2 (ja) * 2009-12-07 2011-09-07 株式会社東芝 電鋳用原盤及びその製造方法
KR101065707B1 (ko) * 2010-09-16 2011-09-19 엘지전자 주식회사 사출금형용 스탬퍼 제작방법
US9856319B2 (en) 2012-12-28 2018-01-02 Abbvie Inc. Monovalent binding proteins
CN108249390A (zh) * 2018-01-17 2018-07-06 高世雄 一种在聚酰亚胺薄膜表面制作微纳结构的方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724043A (en) * 1984-09-04 1988-02-09 International Business Machines Corporation Process for forming a master mold for optical storage disks
JPS6168296A (ja) * 1984-09-13 1986-04-08 Matsushita Electric Ind Co Ltd 光学情報記緑部材
US5051340A (en) * 1989-06-23 1991-09-24 Eastman Kodak Company Master for optical element replication
US5043251A (en) * 1989-11-29 1991-08-27 The United States Of America As Represented By The Secretary Of The Navy Process of three dimensional lithography in amorphous polymers
FR2716563B1 (fr) * 1994-02-21 1996-06-07 Digipress Sa Substrat préformaté, substrat préformaté comportant des informations à dupliquer, leurs procédés de fabrication et procédé de fabrication d'un disque maître et/ou d'un disque optique.
JP3058062B2 (ja) * 1995-10-13 2000-07-04 日本電気株式会社 光ディスク用記録原盤の製造方
TW525159B (en) * 1998-05-14 2003-03-21 Matsushita Electric Ind Co Ltd Formation method for metallic stamper and metallic stamper and, manufacture method for optical disk substrate with the use of the stamper and optical disk fabricated by the manufacture method
TWI237256B (en) * 1998-07-28 2005-08-01 Matsushita Electric Ind Co Ltd Optical disk and apparatus for driving optical disc
US6872511B2 (en) * 2001-02-16 2005-03-29 Sharp Kabushiki Kaisha Method for forming micropatterns
JP4610770B2 (ja) * 2001-03-30 2011-01-12 キヤノン株式会社 光ディスク原盤の製造方法
TWI292910B (zh) * 2001-06-11 2008-01-21 Sony Corp
JP3592285B2 (ja) * 2001-06-28 2004-11-24 住友電気工業株式会社 ポリイミド層を含む積層体のエッチング方法
US20030064293A1 (en) * 2001-09-07 2003-04-03 Polight Technologies Ltd. Holographic recording medium
US7887711B2 (en) * 2002-06-13 2011-02-15 International Business Machines Corporation Method for etching chemically inert metal oxides
EP1482494A3 (en) * 2003-05-28 2007-08-29 Matsushita Electric Industrial Co., Ltd. Method for producing master for optical information recording media

Also Published As

Publication number Publication date
EP1511027B1 (en) 2009-07-01
EP1511027A2 (en) 2005-03-02
CN100390886C (zh) 2008-05-28
CN1591633A (zh) 2005-03-09
DE602004021755D1 (de) 2009-08-13
ATE435487T1 (de) 2009-07-15
EP1511027A3 (en) 2007-03-21
TW200518087A (en) 2005-06-01
KR20050024195A (ko) 2005-03-10
US20050063289A1 (en) 2005-03-24

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MM4A Annulment or lapse of patent due to non-payment of fees