TWI306157B - - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor substrate for inspecting a substrate to be inspected having a plurality of lines for inspecting a glass substrate for a liquid crystal display panel, and an inspection method using the same And equipment. [Prior Art] If the substrate to be inspected, which has a plurality of lines (i.e., circuits) extending in the vertical and horizontal directions, such as a glass substrate for a liquid crystal display panel, it is checked whether or not the lines are broken or short-circuited. Further, as one of the sensor substrate used for the above inspection and the inspection method and apparatus therefor, there is a technique described in Patent Document 1. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei No. Hei 2 No. Hei. No. Hei. A pair of power supply electrodes and power receiving electrodes. The inspection of the sensor substrate is performed such that the power supply electrode and the reception electrode of the sensor substrate face the one end portion and the other end portion of the inspection region of the line, respectively, while the power supply electrode is routed to the line. The communication signal is supplied, and the inspection signal is received by the power receiving electrode through the line, and the sensor substrate is traversed through a plurality of lines to be inspected. The abnormality of the line is determined to be disconnected even if the power supply electrode and the power receiving electrode are opposed to the line and the inspection signal cannot be received by the power receiving electrode through the line. However, the above conventional technique is to move the sensor substrate in a direction crossing the line in a state where the electrodes are cut away in the longitudinal direction 5 1306157 of the line. Because this type of inspection can detect the presence or absence of a broken line, it cannot detect the position of the broken line in the long side of the line. Therefore, in the above-mentioned prior art, in order to specify the disconnection position, the following operations are performed according to the broken line, and even if the two electrodes return to the disconnection position, the inspection signal is transmitted and received again, and the two electrodes are simultaneously made. It is close to the other to detect the position where the power receiving electrode cannot receive the check signal. This prior art technique is not only required to additionally perform the step of specifying the disconnection position in the longitudinal direction of the line with or without the inspection step of the disconnection, and must be performed for each line of the disconnection. SUMMARY OF THE INVENTION An object of the present invention is to specify whether or not there is a disconnection or a disconnection position by moving a sensor substrate and a substrate to be inspected relatively once. The sensor substrate of the present invention and an inspection method and apparatus therefor are used for inspecting an inspected substrate (such as a glass substrate for a display panel) having a plurality of circuits extending in the first direction and extending in the second direction. . The sensor substrate of the present invention comprises: at least one power supply electrode, wherein the inspection signal is supplied to the circuit in a non-contact manner; and the plurality of power receiving electrodes are spaced apart from each other at least in the second direction, and from the power supply electrode The second direction is spaced apart to receive the inspection signal supplied to the circuit in a non-contact manner; and the plurality of sensor circuits are outputting an electrical signal indicating whether the receiving electrode has a receiving signal at the receiving electrode. The present invention may be configured to: have at least two 1306157 power supply electrodes spaced apart from each other in the first direction; and the plurality of |w and 罨 electrodes are separated into at least two gates respectively spaced apart from each other in the first direction A group of power receiving electrodes spaced apart from each other and having a one-to-one shape corresponding to the power supply electrode, and including a plurality of power receiving electrodes that can receive the inspection signals from the respective power supply electrodes. The plurality of directions are spaced apart from each other, and the present invention may be provided in the first power supply electrode; and the plurality of power receiving electrode power supply electrodes.

The connection::::::: the plurality of sensor circuit systems"-forms may be: the substrate to be inspected further includes a plurality of intervals spaced apart from the second direction and extending in the second direction The second circuit; and the sensor substrate further includes at least one second power supply electrode for supplying the second inspection signal to the second circuit. In the present invention, the second power supply electrode may be disposed at a position deviated from the arrangement region of the power supply electrode and the power receiving electrode in the ith direction. The inspection method of the present month includes a moving step of moving the sensor substrate and the substrate to be inspected relative to each other while the power supply electrode and the power receiving electrode are opposed to each other in the second direction. The second direction power supply step is to supply a check signal to the power supply electrode in the moving step; and a determining step is to determine a good condition of the circuit according to the rounding signal of the sensor circuit in the power supply step. In the present invention, the power supply step is to supply the check signal to the plurality of power electrodes at different timings; and the determining step determines the circuit to be synchronized with the power supply timing of the power supply electrode. 7 1306157 The present invention may also be: the determining step is based on an output signal of a sensor circuit connected to the circuit electrode of the circuit, and a sensor connected to the power receiving electrode opposite to the circuit. The output signal of the circuit is good for this circuit. The power supply step or the check signal generating circuit, the word 2 check signal is supplied to the second power supply electrode; the determination power: ; = is the power supply that is opposite to the electrode receiving the second check signal. Lennon is a bad father. The system may also be: when the determining step determines that the circuit is defective, the position of the sensor substrate and the substrate to be inspected in the position = (four) 2 direction is particularly good for the defective position of the circuit. The inspection device of the present invention comprises: an inspection signal generating circuit for generating an inspection signal supplied to the power supply electrode; and a moving device 2 = opposite to the power receiving electrode at the distance between the two directions (4) the sensor described above The direction of the substrate and the substrate 2 to be inspected; the determination circuit determines the goodness of the circuit based on the sensor substrate and the output signal of the H circuit that is moved by the mobile device and the test device The invention may also be: the determination circuit is based on an output signal connected to the sensor circuit connected to the circuit and the power receiving electrode, and a sense of the opposite electrode of the circuit; Raise. The output signal of the circuit, the invention may also be: the check signal generating circuit further supplies the 8th, j3, 6157, the second check signal to the second power supply electrode; the decision circuit is further The circuit that faces the electrode that receives the second inspection signal is determined to be defective. In the present invention, when the determination circuit determines that the circuit is defective, the step further determines a defective position of the circuit from a relative position of the sensor substrate and the substrate to be inspected in the second direction. In the present invention, the at least one power supply electrode and the (four) power receiving electrodes spaced apart from each other in the ith direction are separated from each other in the longitudinal direction of the circuit, and the sensor substrate and the substrate to be inspected are opposed to each other and relatively moved to the circuit. In the period in the longitudinal direction, the inspection signal is supplied from the power supply electrode to the circuit and the power receiving electrode receives the inspection signal flowing through the circuit. When the circuit is disconnected, the inspection signal will not reach the opposite side of the circuit, and the electric electrode will output an abnormal signal indicating that the circuit has been disconnected from the sensor circuit. The circuit has been disconnected." ...where the disconnection position in the long-side direction of the circuit can be selected from the group (including when the receiving electrode receives no signal, the inspection signal received by the receiving electrode should be delayed from the time of failure) and the receiving electrode The relative position (ie, the coordinate value) of the sensor substrate and the substrate to be inspected in the second direction of at least one time point of the received signal is changed from at least one time point. As described above, according to the present invention, the presence or absence of the disconnection and the disconnection position can be specified by relatively moving the sensor substrate and the inspected substrate once. The sensor substrate includes at least two power supply electrodes 1 spaced apart from each other in the second direction, and the plurality of power receiving electrodes are divided into at least two intervals corresponding to the first direction and corresponding to the f electrodes in a one-to-one manner. 9 1306157 pole group, and includes inspection signals that can receive power electrodes from their respective

The power supply timing synchronization determination circuit of the electric pen pole is well-funded. Similarly, when the sensor substrate is provided with a plurality of power supply electrodes spaced apart from each other in the first direction, and the plurality of power receiving electrodes are corresponding to the power supply electrodes by a pair of one-dimensional L, Φ supplies the plurality of power supply electrodes with different timings. Ring, and the power supply timing of the power supply electrode is synchronized to determine the circuit's good. In the above manner, even if the timing of the signal is not supplied to the specific circuit, the power receiving electrode opposed to the specific circuit may receive the inspection signal. At this time, since the specific circuit is short-circuited with other circuits, it is possible to easily specify the short-circuit and short-circuit positions of the circuits. "When the substrate to be inspected has a plurality of second circuits that are connected to the circuit as described above and the sensor substrate includes at least one second power supply electrode for supplying the 帛2 inspection signal to the second circuit, sometimes That is, the second inspection signal is received by the power receiving electrode. At this time, since the circuit facing the power receiving electrode that receives the second inspection signal is short-circuited with the second circuit, it is possible to easily specify that the circuit system is short-circuited and short-circuited. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. [Example of substrate to be inspected] Referring to Fig. 1 and Fig. 2, the J plate 12 is inspected. The unfinished substrate 12, 4 is incompletely completed. The substrate is inspected, and the inspection device 10 is used to inspect the substrate to be inspected, such as a glass substrate plate for a liquid crystal display panel, and has a plurality of (in the illustrated example, six 10 * 1306157 panels of the substrate are not damaged) In the circuit area, after the element is formed, the liquid crystal field 0 can be used to be inspected, and the substrate 12 is placed on each of the line regions of the rectangular glass plate 14 having flexibility, and has a plurality of first circuits 16 and a side by side. Side by side: multiple The 2 circuit is electrically insulated by a transparent insulating layer (not shown) provided between the ... and the second circuit. The circuit 16' is spaced apart from the glass plate 14 in the second direction. Extended over the flute

In other words, the second circuit 18 extends in the second direction and is parallel to the second direction of the first direction and extends in the first direction. The edge layer of one of the circuit patterns is such that the second circuit 18 is closer to the first and second circuits 16 and the sub-circuits (that is, the lines), and passes through the insulating circuit 16 on the side of the glass plate 14. [Sensor substrate EMBODIMENT OF THE INVENTION The inspection device 10 includes a sensor substrate 2A. As shown in Fig. 3, the sensor substrate 2 is formed by a rectangular glass plate 36 having sensing electrodes (9) having a plurality of sensor circuits (9) to be described later. The circuit group 22, the at least two power supply electrodes 24 and 26m are connected to the plurality of terminals % of the terminals of the sensor circuit 38, and the at least two power supply electrodes 2 of the form-connected power supply ports 24 and 26... 6' is formed in a long strip shape in the longitudinal direction of the glass plate 36 (the first direction in the drawing: the middle direction), and is formed in the width direction of the glass plate 36 at intervals in the second direction (in the illustrated example, No. 11 1306157 End. In the example shown, the power supply electrode 24 is oriented (in Figure 3, the A sergeant knife has the first pattern) In the left-right direction, the continuous central region is spaced from the width direction of the center 26a, and the - domains 24a and 26a and protrudes from the 篦7, +m π1 direction and 26b. The second direction (in FIG. 3) Convex for the up and down direction - electric electrode

|小Μ Yangzhou 1 ECG 28 is spaced apart from the 2nd direction in the first direction, in the glass plate 丄, the first 忐 忐 万 万 万 万 万 万 万 万 万 万Divided into two electrode groups corresponding to the supply electrode 24 or 26 in a one-to-one relationship. The y system corresponds to the position in which the respective receiving electrodes 24b or 26b for the direction are in the position of the respective power receiving electrodes 28 in the first direction, and the electric electrodes 24 or % are in the ith direction. The position is the same, = the power supply electrode 2 "go 26 check signal. The figure improves the accuracy of the check signal transmission, at the position of the second pole 28, is set to the convex portion in the same direction. Terminal 30, The ends are formed at the other end portions in the width direction of the glass plate at intervals in the second direction. The terminals 32 and 34 are formed in the outer regions of the one end portion and the other end portion of the terminal 30 arrangement region in the first direction. 24 and 26 are connected to terminals 32 and 34 by lines 39 and 4, respectively, and each power receiving electrode 28 is connected to corresponding sensor circuit 38 by line 41. Each terminal 30 will be described later with reference to Fig. 4 . Connected to any of the terminals of the sense H circuit 38 by means of a line 44. Terminals 3A, 32 and 34, and 12 1306157 are connected to any of a plurality of flexible flat cables 42. 4 /,, each sensor circuit of the sensor circuit group 22 3 8, eight field calibration 4 The transistor 46, the load resistor 48 whose terminal is connected to the source electrode of the transistor 46, and the _ terminal are connected to the transistor Μ "the output diode 50 between the source electrode and the load resistor 48.", the sensor circuit The output signal of 38 is read by the control device 78, which will be described later, when the inspection signal is supplied to the corresponding power supply electrode 24 or 26, and is used for the good judgment of the circuit 16 by the control device 78. The gate electrode of the transistor 46 is connected to the corresponding supply electrode 28 via the line 41, and the other end of the load resistor 48 is connected to the terminal 3〇 via the line 44, and the output of the other 50 is terminated by In addition, the line 44 is connected to the terminal 3A. For this purpose, the tantalum electrode of the transistor 46 is commonly connected to the ground electrode by the internal electrode W and the electrode of the capacitor 46.

At least one terminal 3 is used as a grounding terminal, and is connected to the ground electrode by any line 52. Z sensor circuit group 22, which can be λ8*** „ by the well-known thin film semiconductor integrated circuit fabrication technology and power supply electrodes 24, 26, detection electrode 28, terminal 34, line 39, 40, 41 44 is fabricated under the glass plate 36. The substrate 12 to be inspected and the sensor substrate 2 are electrically connected to the substrate 12 to be inspected by the sensor to form an electric group 22 Λ < face side, and for Φ The electrodes 24, 26 and the power receiving electrode 28 oppose each other in the longitudinal direction of the circuit 16, and are opposite to the inspected base by 12 to maintain the #m). \"丨承承G (for example, 5〇13 1306157, the substrate to be inspected in the above state) 12 and the sensor substrate 20 are relatively moved in the longitudinal direction of the circuit 16. The relative movement of the substrate 12 to be inspected and the sensor substrate 20 may be performed continuously or intermittently. [Example of Inspection Method] FIG. As shown in FIG. 8, the arrangement pitch of the power receiving electrodes 28 in the + direction is twice or more than the arrangement pitch of the circuit 16 in the same direction (12 times in the illustrated example). Therefore, the substrate 12 to be inspected is During the relative movement of the sensor substrate 20, at least one power receiving electrode 28 is connected to a circuit 16 The opposite-at least one power receiving electrode 28 is not opposed to any one of the circuits 16. During the period in which the substrate 12 to be inspected and the sensor substrate 20 are relatively moved as described above, the 'interrogation signal of the alternating current is alternately supplied to The power supply electrodes 24 and 26, by means of the 'AC test signal, are induced in each circuit 16, and are repeatedly disconnected, shorted to each other, cross-shorted, and inspected to identify such defective positions. _ All sensor circuits The output signal of 3 8 is used for the determination of the circuit 16 by the control device 78 described later in sequence during the period when the inspection signal is supplied to the power supply electrode 24, and is supplied to the power supply electrode 26 at the inspection signal. During this period, the controlled device 78 sequentially reads at least once to determine the good II of the circuit 16. Fig. 5(A) shows an example of the waveform of the inspection signal supplied to the power supply electrode 24, and Fig. 5(B) shows the supply to the power supply. Example of the inspection signal waveform of the electrode %. Fig. 5(C) to Fig. 5(G) ' show the signal after the waveform is shaped by the integral signal of the sensor circuit 38. However, in the following description, 14 l3〇6l 57 ... In the case of Gu Yi, the signal is “processing signal”. The signal shown in Figure 5(G) is simply called the inspection signal supplied to Lei Zengquan* λ... Check signal and supply to power supply electrode 26 Phase);:;: The rate is the same 'but the supply timing is the power supply timing (the power supply should be connected to the power supply 26, the inspection signal supplied to the power supply electrode 24 and the inspection of the supply electrode 24) ^ 铽 铽 谠 谠 谠 谠 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 ' ^ ^ . The corresponding sensor circuit 2 of the reference 28 is the timing, that is, the power receiving timing (the signal received). Since the check signal is not received and received, the circuit 16 is opposite to the power receiving electrode 28, and the sensing corresponding to the battery electrode 28 is based on the timing of the output signal ( That is, the signal received. In the order of the output table, there is no "signal". The two conditions can be judged by the above two conditions. The position of the electric tower 16 is shown in FIG. 5(C), which shows that the power receiving electrode 24 is used to process the oblique electrode of the power receiving electrode 24, and it is the power receiving electrode 28 of the electrode group corresponding to the power supply to μ. The sensor circuit 3 of the receiving signal of the electric electrode). FIG. 5(D) of the output signal shows the sensor power for processing the receiving signal of the power receiving electrode 2 (which belongs to the power receiving electrode of the power supply) for the electrode group corresponding to the power receiving electrode 26: circuit 16 To the RX. The output signal of δ is 15 1306157. However, as shown in Figure 6, the position of the broken line shown by symbol 54 is used as the circuit. When the line is broken, the check signal does not reach the power receiving electrode 28& which is opposite to the circuit 16a. As a result, the sensor power corresponding to the power receiving electrode 28a does not output a signal indicating "signal" at the timing of the output signal (ie, the power supply timing) (as shown by the dotted line in FIG. 5(E). The processing signal shown in the figure is β signal indicating no signal. Thereby, it can be determined that "the circuit 16 is disconnected". "Fig. 5 (Ε)' shows the reception signal for processing the power receiving electrode 28a (which is the electric electrode opposite to the circuit that is disconnected from the electrode group 28 corresponding to the electrode group corresponding to the power supply electrode 24). The processing signal of the signal that is rotated by the sensor circuit 38. As shown by the short-circuit pattern shown by the symbol 56 in FIG. 7, when at least two circuits 16b, 16b are short-circuited due to the short-circuit pattern %, they are not associated with either circuit. The power receiving electrode 28b that is opposite and opposite to the short-circuit pattern 56 receives the inspection signal. As a result, the sensor circuit 38 corresponding to the power receiving electrode 28b outputs a signal indicating "signal" (the processing signal shown in Fig. 5(F)). Accordingly, it can be determined that "at least two circuits 16b are short-circuited with each other". When the circuit i6c is short-circuited with at least one of the circuits 18c as shown by the short-circuit position shown by the symbol 58 in FIG. 8, the power receiving electrode 28c opposite to the circuit 16c is at a timing at which the signal should not be received (that is, the timing of the non-power receiving timing) Receiving a check signal via circuit 18c. As a result, the sensor circuit 38 corresponding to the power receiving electrode 28c outputs a signal indicating "signal" (the processing signal shown in Fig. 5(g)). Thereby, it can be determined that "the circuit 16 and the 18^ are connected and short-circuited J ° 16 1306157 for processing the received signal of the power receiving electrode 28 (the electrode group corresponding to the power supply electrode 26), only the sensor circuit 38 The timing of outputting the signal with "signal" or "no signal" (that is, the timing of receiving power) is outputted, and the sensing signal for processing the receiving electrode 28 (the electrode group corresponding to the power supply electrode 24) is sensed. The circuit 38 is different, and the other actions are the same. As described above, the determination that the circuit 16 is disconnected, shorted or shorted to each other can be selected from the group (including the corresponding power receiving electrode without receiving the signal)

At the time of the number, at the time when the receiving signal of the corresponding receiving electrode changes from at least one point, at the time when the receiving signal of the corresponding receiving electrode is changed from no change point, and the time of the combination get on. The circuit 16a for disconnection, the circuits 16b and i6b which are short-circuited to each other, and the circuit 16c & 18c which are short-circuited, etc., can be used as the sensor substrate from the first direction when it is determined that the wire is broken, shorted to each other, or the parent fork The position relative to the substrate 12 to be inspected, that is, the coordinate value (for example, the position of the circuit 16 or the power receiving electrode 28 in the first direction, that is, the number of the circuit 16 and the electrode 28) is used. The defective position of the circuit 16 is specified in the sensor substrate in the second direction as the power receiving electrode coordinate value in the second direction. 'The relative position of 0 to the substrate 12 to be inspected when the circuit is judged to be "good" (the eighth direction when the defective circuit is defective as described above in Example 8 and the substrate 12 to be inspected or the circuit 16) Specifically, the relative position of the middle sense is specified. Specifically, the circuit can be determined from the position of the disconnection of the circuit board 20 and the substrate 12 to be inspected from the defective position of the long side, and can be selected from the group selected from group 17 1306157. (included at least one of the time when the inspection signal received by the power receiving electrode 28 is changed from no change to the time when the fork electrode 28 is not received, and when the receiving signal of the electric electrode is changed from no change to the time) In the second direction of the time point, the relative position (ie, the coordinate value) of the sensing substrate 20 and the substrate 12 to be inspected is specified. [Another embodiment of the sensor substrate] Referring to FIG. 9 and FIG. 10, the sensor The substrate 60 replaces the power supply electrodes 24 and 26 of the sensor substrate 20 shown in FIG. 3, and the plurality of power supply electrodes 62 corresponding to the power receiving electrodes 28 in a one-to-one manner in the second direction and the second direction. The direction of the spacing is set to the width of the glass plate 14 In the example of the drawing, the arrangement pitch of the power receiving electrode 62 in the first direction is twice or more than the arrangement pitch of the circuit 16 in the same direction (four times in the illustrated example). Therefore, the power supply electrode 62 is divided into four electrode groups. Hereinafter, when the power supply electrodes 62 of the respective electrode groups are shown, they are referred to as "first power supply electrode 62", "second power supply electrode 62", and "third supply power". The electrode 62" or the "fourth power supply electrode 62". The sensor substrate 60 is replaced by the terminals 32 and 34 of the sensor substrate 2 shown in FIG. 3, each having the first, second, third, and third Two sets of terminals 64 and 64 of the four terminals. One set and the other set of terminals 64 and 64 are respectively formed at one end portion and the other end of the arrangement region of the terminal 3〇 in the first direction.

The second, third, and fourth terminals of each group of the outer region Q correspond to the third, third, and fourth power supply electrodes, respectively, and are commonly connected to the third, the first 18th 1816157 3 and The fourth power supply electrode 62. Further, the power supply electrode 62 is further divided into a large electrode group corresponding to one set of terminals 64 and a large electrode group corresponding to the other set of terminals 64. The largest electrode group! The second, third, and fourth power supply electrodes 62 are commonly connected to the corresponding group i, second, third, and third by the & group 丨 '2nd, third, and fourth lines 66, respectively. 4 terminals 64. Further, the first, m 3 and fourth power supply electrodes 62 of the large electrode group are commonly connected to the other set of terminals 64 by another set of the first, second, third and fourth lines 66, respectively. However, instead of dividing the power supply electrode 62 into a large electrode group and connecting it to the two sets of terminals 64 as described above, a set of the third, second, and fourth terminals ", and then the second, the second, The third and fourth power supply electrodes are commonly connected to the first, third, third, and fourth terminals of the group. When the inspection of the H substrate 6 is performed, the inspection substrate Η and the sensor substrate 60 are relatively moved in the longitudinal direction of the circuit 16 j. The predetermined time is sequentially supplied to the first, second, third, and fourth power supply electrodes 62. The order in which the inspection signal is supplied to the power supply electrode 62 may be arbitrary, but for example, it may be located at the first! The order from the electrode on one end side to the other end side. Thereby, the poles can be repeatedly reversed. Repeatedly, it will check the disconnection of the pepper to each power supply circuit 16, the Thunder, the short circuit of the circuit 16 of the circuit, the father and the circuit of the circuit 16, 18, and the bad position, ^ coordinates by means of sensing The same hand (four) of the components in the substrate 20 are scattered or specified. 19 .1306157 [Another embodiment of the sensor substrate] As shown in FIG. 9 and FIG. 1A, the sensor substrate 6A may include at least one power supply electrode 68 for supplying an AC check signal to the circuit 18, and connected to Terminal 70 of power supply electrode 68. Hereinafter, the power supply electrodes 62 and 68 will be referred to as the first and second power supply: the poles will be supplied to the first! The inspection signals of the second power supply electrodes are referred to as first and second inspection signals, respectively. The second inspection sfl for supplying to the second power supply electrode 68 is a continuous signal of the alternating current. The first! And the second check signal can be the same frequency or different frequencies. When the sensor substrate 6 having the second power supply electrode 68 is inspected, the first inspection signal is always constant during the period in which the inspection substrate 12 and the sensor substrate 6 are relatively moved in the longitudinal direction of the circuit 16. The time is sequentially repeated 'to the first power supply electrode' while the second inspection signal is continuously supplied to the second power supply electrode 68. The disconnection of the circuit 16 and the short circuit of the circuit 16 and the defective cup can be short-circuited to each other by the same method as the components in the sensor substrate 20, which can be determined by the following means . In the figure, as shown by the short-circuit position indicated by the symbol 72, when the circuit bd is. to the small circuit 184 is short-circuited, the lightning-receiving electrode 2 R opposite to the circuit 16d will not receive the signal. (ie, the non-powered timing) receives the second check signal. As a result of the above, when the short-circuit position 72 is located between the power supply electrode 62 and the power supply electrode 62 and the power receiving electrode 28d, the sensor circuit 38 corresponding to the party electrode 28d continues to output the table 20 1306157. There is a signal" signal. Thereby, it can be determined that "the circuits 16d and 18d are the path I. The short-circuit position 72 can be from the relative position of the sensor substrate 60 and the substrate 12 to be inspected when the signal indicating the "signal" is output from the sensor circuit 38. To be specific. [Circuit Embodiment of Inspection Apparatus] Referring to Fig. 11, the inspection apparatus 1 uses the sensor substrate 20 shown in Fig. 3.

The inspection device 10 further includes an inspection signal generator circuit 74 for generating an AC inspection signal, a switching circuit 76 for switching the power supply electrodes 24, 26 to be connected to the inspection signal generator circuit 74, and for controlling various circuits and The control device 78 for mechanically processing the signal, and the control device 控制 control the various materials to be displayed as a visual display device 8A, a driving device 82 for driving a transfer device to be described later, and a memory for storing various materials. 84. A switching circuit 86 for switching the sensor circuit 38 (refer to FIG. 3) to be connected to the control device 78. The check signal is a high frequency signal having a frequency shorter than the switching frequency of the switching circuit 76 and %. The inspection signal is supplied to the power supply electrodes 24, 26 alternately by the switching circuit % while the substrate under inspection Η and the sensor substrate 20 are relatively moved. The switching circuit 76 sequentially switches the sensor circuit 38 connected to the power receiving electrode 28 (the group corresponding to the power supply electrode 佶) 佶1# ' during the period in which the inspection signal is supplied to the power supply electrode ^. 8 is connected to the control device 78, and sequentially switches the sensor circuit 38 (which belongs to the group corresponding to the power supply electrode 24) for the 21/1306157 electric electrode 28 during the period when the inspection signal is supplied to the power supply electrode 26. It is connected to the control device 78. The switching frequency of a switching circuit 86 is lower than the switching frequency of the switching circuit 76. The switching of switching circuits 76 and 86 is controlled by a rectangular wave switching signal provided by control device 78. The switching frequency of the switching circuits 76 and 86 is, for example, the value of the output signal of all the sensor powers 4 38 that can be read by the control device 78 during the period when the inspection signal is supplied to the power supply electrode 24, and is tied to During the period when the check signal is supplied to the power supply electrodes 26 >& M - r and 1 , the output signal of all the sensor circuits 38 can be read by the control device 78 at least once. The control device 78 controls the switching circuit % to supply the inspection signal to the power supply electrode 24 or 26, and controls the switching circuit % to sequentially operate the output signal (ie, the reception signal) of the sensor circuit 38. The received signal and the substrate and the opposite coordinates of the substrate to be inspected are temporarily stored in the memory 84. The received signal stored in the memory 84 is used by the control device 78 for the disconnection of the circuit 16 and the presence or absence of a short circuit. (that is, the circuit is good), and it is used for the special defective position 'These materials are stored in the memory 84 according to the respective circuits and the defective position, and are displayed on the display device. The drive device 82 drives a transfer device to be described later. In the transfer device, the sensor circuit group 22 is placed on the surface of the substrate 12 to be inspected on which the circuits 16 and 18 are formed, and the power supply electrode 24, % and the power receiving electrode 28 are cut away in the longitudinal direction of the circuit. The inspected substrate 12 and the sensor substrate 2 are opposed to each other, and the inspected substrate 12 and the sensor substrate 2 are inspected relative to each other. 22 * 1306157 The substrate 12 is maintained at a predetermined gap G, so that the inspected substrate η and The sensor substrate 20 is relatively moved in the longitudinal direction of the circuit board 6. The circuit determination method of the above-described inspection circuit will be described with reference to Fig. 12. Fig. 2 shows the flow of the determination method based on the output signal of the sensor circuit 38. The decision of the output signal according to the other-sensor circuit 38 is also performed in the same order. The inspection is performed in such a manner that the substrate under inspection 12 and the end of the region to be inspected of the sensor substrate 2〇k circuit 16 are opposite. Continuously moving to the other end, the same day, the inspection signal is alternately supplied to the power supply electrodes 24 and 26. Before the substrate 12 to be inspected and the sensor substrate 20 are relatively moved, the receiving electrode 28 corresponding to the circuit 16 is specified. ,and The processing of the receiving electrode 28 opposite to the normal circuit is performed. The above operation is performed by alternately supplying the inspection signal to the power supply electrode 24 while the sensor substrate 2 is placed at one end of the inspection region of the circuit 16. 26, and confirming the power receiving electrode 28 that receives the inspection signal at this time. The coordinate value of the power receiving electrode 28 at least in the ! direction is stored in the memory 84 as a coordinate position of the regular circuit. Next, the control device 78 takes one The output number of the sensor circuit 38 is 'and the relative position (i.e., the coordinate value) of the sensor substrate 2〇 and the substrate 12 to be inspected in the first direction is confirmed, and the opposite of the signal that has been confirmed is confirmed. The positions are stored together in the memory (step i〇〇). The relative position of the sensor substrate 20 and the substrate 12 to be inspected in the first direction can be, for example, the position of the circuit 16 or the power receiving electrode 28 in the first direction (ie, the circuit) Or the number of the power receiving electrode), and the relative position (ie, the coordinate value) of the power receiving electrode 28 and the substrate 12 to be inspected in the second direction (ie, the coordinate value). Next, the control device 78 determines whether or not the power supply is met. The power timing is A, or the power supply timing is B and the power receiving timing is under-form (step 1 〇1). The timing series A and B' respectively supply the timing of the inspection signal to the power supply electrodes 24 and 26. Because the check signal is interactively powered by 24%. Therefore, the relationship between the power supply and the timing of the original time can be determined by step 101. /, and the result of the determination in step HH is "Yes" (power supply and power receiving timing) - (c), (4) Install f 78, that is, whether the circuit is a regular circuit (step 1〇2). By this step 102, it is determined whether or not the original time point is the timing at which the sensor circuit 38 signal connected to the power receiving electrode 28 (opposite the normal circuit) should be determined. Don't judge the gentleman's smear in the step 102. "β & 疋 疋. If yes" (the output of the sensor thief circuit 38 connected to the power receiving electrode 28 (opposite the regular circuit) The timing of the signal determination, that is, the timing of the determination of the normal circuit), the control device 78 determines whether the signal "with signal" has been input. "The cow is now 1λλ, now (step 1〇3). By this step 1〇3 to confirm the circuit 1 is disconnected. When the result of the determination in step 103 is “Η禾为疋” (the signal with “signal” has been input), the control device 78, g卩~τ ia is the judge]目前 The current position of the regular circuit is normal, and return to step i 00, and the processing is performed by the operation of Jiang to the human-signal and the confirmation of the coordinate value. When it is determined in step 103 that "the fishing rod, ", " is "No" (the signal with no signal is input), the control device 78, that is, "" determines that the "regular circuit has been disconnected" , 24 * 1306157 After writing the gist of the disconnection and the temple of the disconnection position to the memory 84 together with the value of the cliff, return to step ι〇〇 (step 1〇4). When the decision result in the step 1〇2 is "NO" (not the position of the regular circuit), the control means 78 determines whether or not the "signal" signal has been input (step 105). By this step 1〇5, it can be confirmed that the circuits 16 are short-circuited to each other.

When the result of the determination in step 1〇5 is YES (the signal with the signal is input), the control device 78 determines that the short circuit is short-circuited with each other, and the key value of the short-circuited position of each other is the same as the coordinate value. After (4) 84, the process returns to step (10) to move to the output of the secondary-sensor circuit 38, the coordinate value confirmation, and the like. When the result of the determination is "NO" (the signal with the signal is not input), the control device 78 determines that "the current position is normal" and returns to step 100. When the decision result in the step 101 is "NO" (the power supply and the power receiving timing do not coincide), the control unit 78 determines whether or not the "signal" signal has been input (step 107). By this step 107, regardless of whether the power supply and the power receiving timing are inconsistent (not the position of the regular circuit), it is determined whether the "signal signal" signal has been input, that is, whether the decision circuit 16 is submitted and shorted. When the result of the determination in step 107 is YES (the signal with the signal is input), the control device 78 stores the gist of the cross short circuit together with the coordinate value of the cross short-circuit position in the memory 84, and returns. In step 100, the processing is performed by moving to the next signal and confirming the coordinate value (step 108). 25 1306157 When the result of the determination in step 107 is "NO" (when the signal with signal is not input), the control device 78 determines that "the current position is normal return step 100. The abnormal position of the circuit 16 may sometimes be plural. Therefore, even if an abnormal position of the circuit is found during the relative movement of the substrate 12 to be inspected and the sensor substrate 20, the above inspection moves the substrate to be inspected and the sensor substrate 20 from the end of the region to be inspected of the circuit. The period to the other end is repeated.'

[Configuration Example of Inspection Apparatus] Referring to FIGS. 13 to 18, the inspection apparatus 1A further includes a frame 13A that functions as a support table for supporting various mechanical devices of the inspection apparatus 10, and serves to inspect the substrate 12 to be inspected. a transport device 132 transported in the left-right direction, a sensor substrate 20 for detecting an electrical signal from the substrate 12 to be inspected, a pair of switching devices 136 for performing exchange of the substrate to be inspected, and A centering device 138 that is centered on the substrate 12 under inspection by the exchange device 136 is performed. The frame "0' contains: the tester unit 14〇' is based on the electrical signal from the sensor: board, confirms the disconnection and short circuit of the circuit, the bad position (seat value), etc.; and the control unit 142. Controls various mechanical devices provided in the inspection device 10. The reaching device 132' includes a pair of i-th moving directions extending in parallel in the vertical direction (z direction) and extending in the X direction (X direction), and extending in parallel in the left-right direction: a pair; :: 146 first and The second transport members 144 and 146 form 26*1306157 m first and second transport units, respectively. The first and second conveying members 144 and 146 are known devices that hold the flat member at a predetermined height position or carry it in a state of being maintained by air injection and suction. Such a conveying member is sold on the market under the trade name of a pressure vacuum plate (PV plate). The first conveying member 144 is disposed on the upstream side in the conveying direction in which the conveying device 132 conveys the inspection target substrate 12, and is configured to suck air into the inspection substrate 12 and suck the air in the conveyance space of the inspection substrate 12. The substrate 12 to be inspected is held at the first transport position separated from the sensor substrate 2 to the lower side and transported. The second transfer member 146 is disposed on the downstream side in the transport direction of the inspection target substrate 12, and the air to be inspected is maintained by ejecting air to the inspection substrate 12 and sucking the air in the transport space of the inspection substrate 12. The second transfer position that is slightly separated from the sensor substrate 20 is transported. φ The first transport position is a position at which the substrate 12 to be inspected is separated from the sensor substrate 20 by a large distance, and the substrate under test 12 and the lower surface of the sensor substrate are transported in parallel. The distance between the lower surface of the sensor substrate 2 and the first transfer position is 'the size of the sensor substrate 2 〇 to the second transfer position' or the thickness of the flat cable 42 described later is 5 〇" The size of m or more may be, for example, 100 " m or more. The second transport position is a position closer to the sensor substrate 2A than the first transport position and is a position where the underlying substrate 12 and the sensor substrate 2 are flattened. The lower surface of the sensor substrate 2 is spaced apart from the second transfer position by 27 1306157, and the inspection substrate 12 can be separated from the sensor substrate 2 by a position of about 5 〇 " m. The conveyance path of the inspection substrate 12 conveyed from the first conveyance position to the second conveyance position functions as a curved conveyance path for bending the inspection substrate 12 itself. As described above, the substrate 12 to be inspected is to be maintained at the second or second transport.

The conveyance is performed at a position. For example, the amount of air to be injected and the amount of suction may be different between the upper and lower conveyance members. The lower end portion of the downstream end portion of the first conveying member 144 on the upper side is opposed to the upper surface of the upstream end portion of the lower second conveying member 146. Further, the upper and second transfer members 144 & 146 are spaced apart in the left-right direction so that the sensor substrate 20 can be positioned therebetween. As a result of the above, when the substrate to be inspected is transferred from the substrate transfer path of the i-th transfer member (4) to the substrate transfer path of the second transfer member 146, as shown in FIG. 16, it is bent from the first transfer position to the second. The transport position, that is, the position from the sensor substrate substrate 20 is largely removed. The position of the plate 2G is close to the first and second conveyances of the lower side of the sensor, and the material members 144 and 146 are extended in the direction in which the soil plate 12 is transported in the past. The bottom plate 148 (the first and second conveying members 144 146' attached to the upper side of the bottom plate 148 is attached to the door type assembling device 15A (attached to the frame 13A), and is attached to the frame assembly device 150. The A-series 130 is a sensor substrate: t is spaced apart from the left-right direction to the support member 152, and is used to look at a plurality of support members 152. 28 • 1306157 members 1 5 4 And a plurality of coupling members 156 that are individually coupled to the coupling members 154. In the illustrated example, there are five coupling members 154, and three coupling members ι56. The upper second and second conveying members 144. And 146 are respectively attached to the coupling member 156. The remaining coupling member 156 is mounted with the sensor substrate 20.

The transport device 132 further includes a pair of holder mechanisms that abut against the side edge portion of the substrate 12 to be inspected to collectively hold the substrate 12 to be inspected, and a holder moving mechanism that corresponds to the holder mechanism , the corresponding holder mechanism is synchronously moved in the left and right direction. Each of the two sets of mechanisms, which are constituted by the holder mechanism and the holder moving mechanism, sandwiches the conveyance path of the substrate 12 to be inspected, and is spaced apart from each other in the front-rear direction and is placed at a level of 13G ±. The holder mechanism and the holder moving mechanism constitute an auxiliary conveying device 8 for assisting the conveyance of the substrate 12 to be inspected by the first and second conveying members <4 and 146. Each of the holder mechanisms includes: the outer side of the conveying path of the support cover extends to the right and left; ·: the number of the substrate = the substrate to be inspected 12 which is in contact with the front and rear direction of the substrate 12 to be inspected, and the right direction is spaced apart from the branch The swing member 16〇4 causes the support structure to move in the front-rear direction, so that the substrate=two movable paths that can enter and exit the side edge portion of the substrate 12 to be inspected.基板, the substrate holder 162 of each substrate holding holder of the holder mechanism and the substrate holder I62 of the other holder mechanism are formed to be opposite to each other in the front-rear direction, and one of 162 The group or the pair of substrate holders 162' that are opposed to the substrate holders at the front and rear sides 29 1306157 are attached to the support member 16 by moving them in the up and down direction up and down movement mechanism 166. In the illustrated example, the up-and-down moving mechanism 166 is a linear motor including a linear rail (that is, a fixing member) in a state in which the supporting members 16A and 4 extend in the vertical direction (see FIG. 18), and The movable mode is coupled to the movable body (i.e., movable member) 166b of the linear rail 166a. Each of the substrate holders 1 62 is attached to a movable body 1 66b of the linear motor. The lowermost position of each of the substrate holders 1 62 is limited by a stopper 168 (see Fig. 18) attached to the linear guide 166a of the linear motor. Each of the substrate holders 162 has a lateral V-shaped recess 170 (see Fig. 18) that receives the side edge portion of the substrate to be inspected in accordance with the movement in the front-rear direction. The actuator 164 is a pneumatic or hydraulic cylinder mechanism that expands and contracts in the front-rear direction in the illustrated example. The actuator i 64 has a cylinder body supported on the holder moving mechanism ' and a piston rod coupled to the support member 16'. Each of the holder mechanisms further includes a plurality of rods 72 extending from the support member 丄6 to the side opposite to the side edge portion of the substrate to be inspected, and a bushing i74 for allowing the rod 172 to pass through to move in the front-rear direction . Each of the holder mechanisms is supported by the holder moving mechanism in the bushing 174, and is movable in the left-right direction by the holder moving mechanism. The holder moving mechanism includes a pair of actuators 176 that are spaced apart from each other in the front-rear direction with the conveyance path of the substrate 12 to be inspected sandwiched therebetween. Actuator ^ % In the example shown in the figure, a linear motor is provided which is provided with a linear rail (i.e., a fixing member) 176a that is attached to the frame 13A so as to extend in the left-right direction, and is movable in the left-right direction by 1306157. The mode is combined with the linear rail of the linear actuator 16a (i.e., the movable member m6b. The actuator 164 and the bushing 174 are cut to the linear rail ma. / the auxiliary conveying device 158 is in standby at the left end of the drawing in Fig. 14. In the standby position, the substrate holder 162 is separated from the conveyance path of the substrate 12 to be inspected. In the standby position, the auxiliary conveyance device 158 moves the control member 16G toward the substrate 12 to be inspected by the actuator 164. Here, the substrate holder 162 is moved to the conveyance path of the substrate 12 to be inspected, and the substrate 12 to be inspected on the exchange device 136 is held to receive the substrate a to be inspected. When the substrate 12 to be inspected is received, the auxiliary conveyance device is In other words, in a state where the substrate to be inspected J2 is held by the substrate, the actuator 丄% is moved from the left to the right in FIG. 14 to transport the substrate to be inspected to the right end of the figure. In this position, base The plate holder 162 is moved to the conveyance path of the inspection base & 12, and the inspection substrate 12 is released. The auxiliary conveyance device 158 holds and lifts the substrate to hold the opposite substrates of the two holding mechanisms. The group of the crucibles 62 moves in the direction of approaching and leaving each other to move in and out of the side path of the side surface of the substrate to be inspected i 2 , thereby performing the substrate holder 162 on the substrate to be inspected. After the transfer of the substrate 12 to be inspected is completed, the auxiliary transfer device 158 returns to the standby position. During the transfer of the substrate 12 to be inspected, each substrate holder ι 62 is transported from the substrate of the first transfer member i 44. When the road is moved to the substrate conveyance path of the second conveyance member 146, the inspection of the substrate 12 to be inspected from the first conveyance position to the second conveyance position 31 1306157 is performed, and the reading # is transmitted through the vertical movement mechanism 166 to be inspected. The substrate 12 can be surely bent. As shown in Fig. 16, each of the total sapphire + cable 42 has one end fixed to the uppermost phase of the lower surface of the sensor substrate 20, and the 丨Α山& And the other end It is pulled out over the sensor substrate 20 through the sensor substrate 20 and the transfer member 144 on the upstream side of the upstream side. Each is a flat fiber, and the other end of the two cables 42 is connected. In the tester section shown in Figure 14.4〇.

The switching device 136 and the centering device 138 are disposed on the most upstream side of the substrate transport path of the transport device 132. The other exchange device 136 is disposed on the most downstream side of the substrate transport path of the transport device 132. Each of the parent-changing devices 136 is a known device that raises and lowers the substrate 12 to be inspected, and the plurality of lift pins 180 are lifted and lowered by a lifting mechanism (not shown) to carry out the transport device 132 and the transport robot (not shown). Exchange of the substrate 12 to be inspected. Each of the exchange devices 136 stands by in a state where the lift pins 18 are lowered, and the lift pins 180 are raised to receive the substrate 12 to be inspected from the robot, the worker, or the transfer device 132, and the lift pins 18 are lowered. The inspected substrate 12 is handed over to the transport device 32, the robot, or the worker. The fixed device 138 moves the center of the substrate 12 to be inspected by a moving mechanism (not shown) to the center of the substrate 12 to be inspected by the switching device 136, thereby performing centering of the substrate 12 to be inspected. A known device. The centering device 13 8 is thereby aligned with the substrate 12 to be inspected. The centering device 138 expands (standby) the centering pin 182 when the switching device 136 performs the exchange of the substrate to be inspected 136. When the centering of the substrate 32 1306157 12 to be inspected is performed, even if the centering pin 182 is centered mobile. The inspection device 10 operates in the following manner. Each of the substrate holders 162 is retracted to a position that does not interfere with the exchange and centering of the substrate under inspection 12. In the above state, the substrate 12 to be inspected is transported by a robot or a human hand to the upper side of the switching device 136 disposed at the left end portion of Fig. 14 . In this state, the exchange device 136 receives the substrate 12 to the lift pin 180 even if the lift pin 180 is raised.

Then, the centering device 138 moves the centering pin 182 toward each other to center the substrate to be inspected, and then stands by while the centering pin 1 § 2 is moved in a direction away from each other. Next, the conveying device 132 moves the auxiliary conveying device 158 to the substrate 12 to be inspected, and holds the substrate to be inspected by the substrate holder 162. Up to this point, the substrate holder 162 is moved to a predetermined height position, for example, to a position of the groove member 168. Next, in the above-described state, the conveyance device 132 conveys the inspection target substrate 12 to the right from the left side of Fig. 14 by the auxiliary conveyance device 158. The substrate 12 to be inspected may be transported by the first transport member 144 during transport from the auxiliary transport device 158. In this way, the substrate η to be inspected can be transported from the auxiliary transport device 158 and the first transport member 144, and the first transport position that is largely separated from the sensor substrate 20 can be transported. The product is conveyed by the auxiliary conveyance device 158 and the first and second conveyance members 144 and 6 and transferred to the auxiliary conveyance device 33 • 1306157 and the second conveyance member ία. In this way, the substrate 12 to be inspected can be bent in the curved conveyance path as described above, and the auxiliary conveyance device 158 and the second conveyance member 146 are maintained at the second conveyance position of the proximity sensing H substrate 2G. (4) Carrying out the transfer. The curved conveyance path is formed at least in a portion including a region corresponding to the position at which the sensor substrate 20 is disposed in the left-right direction, and is formed at an upstream side of the arrangement position of the power supply electrodes 24 and 26 and the power receiving electrode 28. Therefore, in response to the fact that the flat cable 42 is connected to the sensor substrate 20 on the upstream side of the arrangement position of the sensor circuit 38, the substrate 12 to be inspected is in a state of being in contact with the flat cable 42 in the curved conveyance path. And then the transport path is carried out. Each of the substrate holders 162 is moved by the vertical movement mechanism 166 to follow the bending deformation of the substrate 12 to be inspected when the bending conveyance path moves, whereby the inspection substrate 12 can be surely bent in the curved conveyance path. The second transport position is a parallel transport path that transports the substrate 12 to be inspected in parallel with the sensor circuit 38. The parallel transport path is formed from the circuit 16 of the test substrate 12 to the power supply electrodes 24 and 26" of the sensor substrate 20 and the position of the position below the electric electrode 28. The flat transport path is formed at the above position. Therefore, the substrate 12 to be inspected is shifted to the power supply electrode 24 and % and the power receiving electrode μ before reaching the power supply electrode of the sensor substrate 2 and before and under the second and second electrodes 28. Moving under the power supply electrodes 24 and % and the power receiving 8. 34 1306157 As a result of the above, when the substrate 12 to be inspected is bonded, the power supply electrodes 24 and 26 of the sensor substrate 20 are electrically connected to the power receiving electrodes. When the electrode 28 is moved under the electrode 28, the power supply electrodes 2 and 26 of the sensor substrate 20 and the power receiving electrode 28 are correctly opposed. When the circuits 16 of the substrate 12 to be inspected are on the power supply electrode 24 of the sensor substrate 2q. While the movement of the lower portion 26 and the power receiving electrode 28 is repeated, the above inspection using the inspection signal is repeated.

Next, when the substrate 12 to be inspected is transported to the right end portion of FIG. 14 and the upper portion of the exchange device S 136, the transfer of the transport device 132 is stopped, and the switch device 136 raises the rise -18G to receive the substrate to be inspected. 12. Thereafter, the transport device 132 returns to the standby position and the standby state. The substrate 12 to be inspected by the switching device 136 is thereafter removed from the switching device 136 by a robot or a human hand. While the transfer device 132 is transporting the substrate 12 to be inspected, the respective groups of the substrate holding/16 are brought into contact with the side edge portions of the substrate 12 to be inspected to collectively hold the substrate 12 to be inspected. Thereby, at least the position of the substrate to be inspected can be prevented from changing at a position corresponding to the position where the sensor substrate 2 is disposed, or the side edge portion of the substrate 12 to be inspected can be displaced from the central portion. The first and second transfer members 144 and 146 transport the test substrate 12 while maintaining the substrate 12 to be inspected at a predetermined height position, and the substrate holder 162 facing the front and rear direction is attached to the substrate 12 to be inspected. The substrate 12 to be inspected is transported in a state. However, the first and second transfer members 144 and M6 may have only a function of maintaining the substrate 12 to be inspected at a predetermined height position, and do not have a function of imparting a transport force to the substrate 12 to be inspected. At this time, the conveyance force of the inspection substrate 12 is given by the substrate holder 162. In addition to the use of the first and second transport members 144 and 146 and the transport device 132 for transporting (5), it is also possible to use a transport device having other structures and functions. And a conveying device of any one of the second conveying members 144 and 146 and the auxiliary conveying device 158.

For example, instead of maintaining the substrate 12 to be inspected at a predetermined height position by the i-th and second conveying members 144 and 146, a plurality of rollers or a maintenance mechanism or a conveying mechanism of the endless belt or more may be used. The substrate 12 to be inspected is maintained at a predetermined height position. For the sensor substrates 20 and 60, it is not necessary to provide the power supply electrodes 24, %, the electric electrodes 28, the % sub- 30, 32, 34, the sensor circuit 38, and the like to one glass plate 36. For example, as shown in FIG. 19, the power supply electrode may be turned "on". The fork electrode 28, terminals 3, 32, 34, sensor circuit 38, etc. are divided into a plurality of glass plates 36 and supported by the appropriate members 184. The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing the relationship between a sensor substrate of the present invention and a substrate to be inspected. Figure 2 is a right side view of Figure 1. 3 is a bottom plan view showing an embodiment of a sensor substrate. 4 is a diagram showing an embodiment of a sensor circuit. 36 1306157 Figure 5 is a diagram showing the waveform of an electrical signal. Fig. 6 is a view for explaining an example of a method of detecting a disconnection. Fig. 7 is a view for explaining an example of a detection method of short-circuiting each other. Fig. 8 is a view for explaining an example of a method of detecting a cross short circuit. Figure 9 is a bottom plan view showing another embodiment of the sensor substrate. Fig. 10 is a bottom view showing an embodiment of a cross short circuit when the substrate shown in Fig. 9 is used. Fig. 11 is a view showing an embodiment of a circuit of the inspection apparatus of the present invention. Fig. 12 is a view for explaining an embodiment of a method for detecting disconnection and short circuit of the circuit of Fig. i. Figure 13 is a front elevational view showing an embodiment of the mechanical construction of the inspection apparatus of the present invention. Fig. 14 is a plan view of the inspection apparatus shown in Fig. 13, which is a plan view showing a portion where the sensor substrate and the conveying device are partially omitted and the members are pushed. Figure 15 is a right side view of the inspection apparatus shown in Figure 13. Fig. 16 is an enlarged front elevational view showing the relationship between the conveying device and the sensor substrate. Fig. 1 is a plan view showing an embodiment of the holder mechanism and the holder conveying mechanism in an enlarged manner. Figure 18 is a cross-sectional view taken along line 18-18 of Figure 17. Figure 19 is a configuration diagram showing another embodiment of the sensor substrate. [Main component symbol description] 10 Inspection device 37 1306157

12 Inspected substrate 14, 36 Glass plate 16, 18 Circuit 20, 60 Sensor substrate 22 Sensor circuit group 24, 26, 62 Power supply electrode 28 Power receiving electrode 30, 32, 34 Terminal 36 Sensor circuit 30, 40 , 41, 44 Line 42 Flat cable 54 Broken position 56 Short-circuit pattern 58 Cross-break position 130 Frame 132 Transfer device 136 Exchange device 138 Centering device 144, 146 First and second transfer members 148 Base plate 150 Assembly device 158 Auxiliary Transfer device 160 support member 162 substrate holder 38 1306157 164, 176 actuator 166 up and down movement mechanism 168 stop 170 recess 172 rod 174 bushing 178 sensor circuit

39

Claims (1)

1306157 X. Patent Application Range: It is used to inspect a substrate to be inspected having a plurality of circuits spaced apart in a first direction, and the sensor substrate is spaced apart from the second direction and has: at least one The power supply electrode supplies the inspection signal to the circuit in a non-contact manner; &quot;"the plurality of power receiving electrodes are spaced apart at least in the first direction, and the electrical electrodes are spaced apart from each other in the second direction. And respectively receiving the inspection signal supplied to the circuit in a non-contact manner; and the plurality of sensor circuits outputting an electrical signal indicating whether the receiving electrode has a receiving signal at the power receiving electrode. 2. The patent application scope item 1 The sensor substrate includes: at least two of the power supply electrodes spaced apart from each other in the first direction; the plurality of electro-acoustic electrodes are divided into at least two spaced apart from the first direction and connected to the power supply electrode The power receiving electrode group corresponding to the one-to-one configuration includes a plurality of power receiving electrodes that can receive the inspection signals from the respective power supply electrodes. The sensor substrate of the first aspect, wherein the plurality of power supply electrodes are spaced apart from each other in a first direction of 5 hai; and the plurality of power receiving electrodes are corresponding to the power supply electrode in a one-to-one manner. The sensor substrate of the first aspect of the invention, wherein the plurality of sensor circuits are connected to the power receiving electrode in a one-to-one manner. The 1306157 checks the substrate 'in step-by-step' with a plurality of second circuits spaced apart in the direction of the second direction and extending in the first direction; the sensor substrate, who is _ + - step 3 for the second check signal At least one second power supply electrode supplied to the second circuit. The sensing of the five items, wherein the first power supply electrode and the power receiving electrode are disposed at a position deviated from the arrangement direction of the one direction in the second power supply electrode of the sixth aspect of the patent application. 7. The method of inspecting the substrate to be inspected by using the sensor substrate of any of items ii to 6 of the φ patent range, characterized in that it comprises: a moving step of the power supply electrode and the power receiving Disposing the sensor substrate opposite to the substrate to be inspected and moving relative to the second direction in a state in which the electrodes are spaced apart from each other in the direction of the 帛2; and supplying a check signal to the power supply electrode in the moving step And the determining step, in the power supply step, determining the goodness of the circuit according to the output state of the sensor circuit. 8. The inspection method of claim 7, wherein the sensor substrate is described in any one of claims 2 and 3; the power supply step is to apply a plurality of power supply electrodes at different timings. Supplying the check signal; the determining step 'determines a good match of the circuit in synchronization with the power supply timing of the power supply electrode. 9. The inspection method of claim 7, wherein the determining step 41 • 1306157 is based on an output of the sensor connected to the power receiving electrode opposite to the circuit opposite the circuit, and a connection. In the case of the circuit of the power receiving electrode of the aiI ^ A /, 忑 circuit, it is determined that the circuit is good #. ... the inspection method of the seventh item of the patent scope, wherein the sensing substrate is the ones listed in items 5 and 6 of the towel category; the power supply step is to supply the second inspection signal to the The second power supply electrode, . The determining step </ RTI> includes the step of determining that the circuit facing the electrode that receives the second inspection signal is defective. - U. For example, the inspection method of the patent application 帛7 item, wherein, when the judgment step determines that the circuit is defective, the step from the direction of the 帛2 is opposite to the substrate to be inspected. The location specifies the bad location of the circuit. The 12' inspection device, comprising: the sensor substrate of any one of claims 1 to 6; the inspection signal generating circuit is configured to generate an inspection signal supplied to the power supply electrode; The moving device is configured to move the sensor substrate and the substrate to be inspected in a relative direction in a state in which the power supply electrode and the power receiving electrode are spaced apart from each other in the second direction; the determining circuit is based on the The sensor substrate and the output signal of the sensor circuit that is moved by the mobile device and the inspection signal is supplied to the power supply electrode determine the goodness of the circuit. 13. For patent application scope I. The inspection device of the item, wherein the judgment is 42 • 1306157 :: two! The circuit is judged based on the signal of the sensor connected to the power receiving electrode opposed to the circuit, and the signal of the power receiving electrode and the foot circuit that are not connected to the circuit. 2. The inspection device of claim 12, wherein the substrate is required to be included in any of items 5 and 6 of the patent scope; the inspection signal generating circuit is stepped to the second The inspection signal is supplied to the second power supply electrode; The determination circuit determines, in a stepwise manner, a circuit that is opposite to the electrode that receives the second inspection signal as a defective cross. 15. The inspection apparatus of claim 12, wherein when the determination circuit determines that the circuit is defective, the step of specifying the relative position of the sensor substrate and the substrate to be inspected in the second direction is specified. Poor position of the circuit. Eleven, circle: φ as the next page 43