1338147 -九、發明說明： f發明所屬之技術領域】 . 纟發明有關-種用於檢查呈多列配置的導電圖幸 (pattern)的圖案檢查裝置。 電S案 【先前技術】 =液晶面板中，將被稱為間極線及c 呈多列配置的第一岸、w β # ,一丄 子电固木 .,,f ΛΛ ^私θ 被稱為源極線的導電圖案呈多 ./、弟一曰進行疊層。此時，源極線與閘極線及Cs ，線交：配置。在第-層和第二層之間設置有絕緣層V: 源極線與閘極線及Cs線的電性連接。但是， 中，在絕緣層會產生微小的孔，即產生所謂的針孔2 )，故源極線與祕線及^線有時會產生電性連接（短 二° "在,不同層之間的導電圖案的短路也稱為交叉短 路，攸而¥致液晶面板動作不良和故障的原因。另外，在 交叉短路以外，有時也會產生鄰接的導線圖案電性連接的 普通短路、以及導線圖案在中間斷路的缺陷。上述的缺陷 在製造過程中需要明確判定並進行修理。 "因此’至今為止’有提出過一些用於判定這些缺陷的 技術。但是’大多數都是將電極直接接觸到導電圖案而進 行提供檢查用信號的結構。在所述的結構中，由於物理性 接觸電極的導電圖案，因此會導致導電圖案的損傷以及產 生灰塵等問題。 因此在下述專利文獻1中，揭示有一種利用靜電耦 合來判定導電圖案有無缺陷及其位置的技術。在該專利文 319637 5 1338147 獻1中，無須使電極接觸到導電圖案，即可向 ，交流電壓’同時檢查作為檢查對象的導電圖案: 交流電壓。依據上述結構’可確實防止導電圖案的以 及產生灰塵。 ' 專利文獻1 :日本特開2005·24518號公報 【發明内容】 (發明所欲解決之課題） 但是，在該專利文獻！中，關於所述的交叉短 Γ定沒有具體的記載，另外，在專利文獻】t，斷路圖 *的判定以及判定其斷路位置時’檢查電極是一個 交流電㈣供電電極固定在預定的位置 ::檢=與一間的位置，有時： :此’本發明第—目的在於提供—種不必使電極接觸 '圖案而可以判定交又短路位置的圖案檢查裝置。 I另外’本發明的第二目的在於提供—種可進—步 電圖案的檢查精確度的圖案檢查裝置。 (解決課題的手段） =發明的圖案檢查裝置，是判定呈多列配置的第一導 第田道U及在與第一導電圖案交叉的方向呈多列配置的 ^導電圖案電性連接的交叉短路位置的圖案檢查裝置， 第^在於’具備有：供電電極，係與產生有交又短路的 圖安获！圖案：父又圖案之間保持微小的空間並沿該交又 西卞夕，而藉由隔著上述微小空間的靜電耦合，向交又 319637 6 1338147 圖流電愿；檢查電極，係與供電電極連動，在愈 二：：方向移動，而藉由與對向的第二導電圖荦 及控制部，係根據檢杳電極㈣感應；以 判定交叉短路的位置。…的父^電屢值的變化而 在較佳的態樣中，將供雷 個，將檢查電極在通過上=:=動方向鄰接設置兩 線上鄰接設置兩個。 電極…態樣卜還具備有輔助 動f二二。、電電極旁邊’且與該供電電極連動而移 :二向：向的導電圖案施加與供電電極所施加的交流電 [相同位準而相位相差⑽。的第二交流電麼。 本發明另一種的圖案檢查裝置’是檢查基板上呈多列 配置的導電圖案的狀態的圖案檢查裝置，其特徵在於，且 備有：第-供電電極，係與基板之間保持微小空間而移動： 主要是向對向的導電圖案施加第一交流電壓；第二供電電 極’係與第-供電電極連動而移動’主要是向對向的導電 圖案施加與m電壓相同位準而相位相差刚。的第 二交流電壓；檢查電極’係與兩個供電電極連動而移動， 亚對應對向的導電圖案感應產生的交流電壓值而❹產生 相應大小的交流電麼；以及控制部，係根據檢查電極所感 應產生的交流電壓值的變化而判斷導電圖案的狀態。 在較佳的態樣中，兩個供電電極係在導電圖案的端部 旁邊’沿配置方向移動；檢查電極係分別在兩個供電電極 的旁邊各設置-個’與該供電電極連動而移動；控制部係 319637 7 丄丄4/ ΓΪ:ί 感應產生的交流電壓值的變化，而從多個 判夂產生斷路的斷路圖案。 路圖樣中，在產生有斷路的導電圖案即斷 第二供㈣又依序配置第一供電電極、檢查電極、 一 /、、電極，並使這三個電極沿著所述斷路圖案移 ^控制部_據檢查電極所感應產生的交流電壓值的變 而判疋存在於斷路圖案上之斷路的位置。1338147 - IX. Description of the Invention: The technical field to which the invention belongs is a related art pattern inspection apparatus for inspecting a pattern of a conductive pattern in a multi-column configuration. Electric S case [Prior technology] = In the liquid crystal panel, it will be called the first line of the interpolar line and c in multiple columns, w β # , a 丄子电固木.,, f ΛΛ ^私θ is called The conductive pattern of the source line is laminated in a plurality of layers. At this time, the source line and the gate line and Cs, line intersection: configuration. An insulating layer V is disposed between the first layer and the second layer: the source line is electrically connected to the gate line and the Cs line. However, in the insulating layer, tiny holes are formed, that is, so-called pinholes 2) are generated, so that the source lines and the secret lines and the lines sometimes have electrical connections (short two degrees " The short circuit between the conductive patterns is also called a cross short circuit, which causes the liquid crystal panel to malfunction and causes the malfunction. In addition, in addition to the cross short circuit, a common short circuit and a wire which are electrically connected to the adjacent wire patterns may be generated. The defect that the pattern is broken in the middle. The above defects need to be clearly determined and repaired during the manufacturing process. "So far, there have been some techniques for determining these defects. But most of them are directly contacting the electrodes. In the above-mentioned structure, the conductive pattern of the electrode is physically contacted with the conductive pattern, which causes damage to the conductive pattern and generation of dust, etc. Therefore, Patent Document 1 below discloses There is a technique for determining whether a conductive pattern has defects and its position by electrostatic coupling. In the patent 319637 5 1338147, there is no need When the electrode is brought into contact with the conductive pattern, the conductive pattern to be inspected can be simultaneously inspected to the AC voltage: AC voltage. According to the above structure, the conductive pattern and the generation of dust can be surely prevented. Patent Document 1: Japanese Patent Laid-Open No. 2005. In the patent document!, there is no specific description about the cross-cutting determination described above, and in the patent document t, the determination of the disconnection diagram* And when determining the position of the disconnection, the 'inspection electrode is an alternating current (four). The power supply electrode is fixed at a predetermined position:: check = position with one room, sometimes: : This 'the invention is the first purpose of providing - no need to make the electrode contact' A pattern inspection device capable of determining a position of a short-circuited position by a pattern. Further, a second object of the present invention is to provide a pattern inspection device for checking the accuracy of a step-by-step pattern. (Means for Solving the Problem) = Invented The pattern inspection device determines that the first guide track U arranged in a plurality of rows and the plurality of rows arranged in the direction intersecting the first conductive pattern are arranged The pattern inspection device for the cross-short position of the pattern electrical connection, the second is that the power supply electrode is provided with the intersection and the short-circuited pattern! The pattern: the parent and the pattern maintain a small space along the intersection In the west, and by the electrostatic coupling between the small spaces, the flow is 319637 6 1338147. The electrode is connected with the power supply electrode and moves in the direction of the second:: The second conductive pattern and the control unit are based on the detection electrode (4); in order to determine the position of the cross-short circuit, ... the change in the value of the parent's power, and in the preferred aspect, the mine will be supplied with The inspection electrode is arranged adjacent to the two lines on the upper direction of the === moving direction. The electrode...the state is also provided with an auxiliary movement f22. The electric electrode is next to and moves with the power supply electrode: two-way: The conductive pattern applied is applied to the alternating current applied to the power supply electrode [the same level and phase difference (10). The second AC? Another pattern inspection device of the present invention is a pattern inspection device that inspects a state in which a conductive pattern is arranged in a plurality of rows on a substrate, and is characterized in that: a first power supply electrode is provided to move a small space between the substrate and the substrate : Mainly applying a first alternating current voltage to the opposite conductive pattern; the second power supply electrode 'being in conjunction with the first power supply electrode to move 'mainly applies the same level to the m voltage to the opposite conductive pattern and the phase difference is just. a second alternating voltage; the inspection electrode is moved in conjunction with the two supply electrodes, and the sub-corresponding to the alternating voltage value induced by the opposite conductive pattern generates an alternating current of a corresponding magnitude; and the control unit is based on the inspection electrode The state of the conductive pattern is judged by the change in the induced AC voltage value. In a preferred aspect, the two power supply electrodes are moved along the arrangement direction beside the end of the conductive pattern; the inspection electrode is respectively disposed adjacent to the two power supply electrodes and moving in conjunction with the power supply electrode; Control Department 319637 7 丄丄4/ ΓΪ: ί A change in the value of the AC voltage generated by the induction, and a disconnection pattern that is broken from multiple judgments. In the road pattern, the first power supply electrode, the inspection electrode, the /, and the electrodes are sequentially arranged in the conductive pattern in which the breaking circuit is generated, that is, the second supply (four) is broken, and the three electrodes are moved along the breaking pattern. Part _ The position of the disconnection existing in the disconnection pattern is judged based on the change of the AC voltage value induced by the inspection electrode.
在另一較佳的態樣中，當將呈多列配置的第一導電圖 案、以及在與第一導電圖案交叉的方向呈多列配置的第二 導電圖案隔著絕緣層進行疊層時，在第—導電圖案的配置 方向：序配置第一供電電極、檢查電極、第二供電電極， f使這三個電極沿著所述配置方向移動，且控制部係根據 檢查電極所感應產生的交流電壓值的變化，而判定與第二 導電圖案形成短路的第一導電圖案即交又圖案。 [發明效果] 在本發明的圖案檢查裝置中，電極與導電圖案係藉由 靜電耦合而電性連接。因此無須使電極接觸導電圖案而可 判定交叉短路的位置。 另外’在本發明的另一種圖案檢查裝置中，同時向導 電圖案施加互相反相的交流電壓。因此，由於面板整體的 電位大致穩定為〇,故可進一步提高導電圖案的檢查精確 度。 【實施方式】 以下’參,日，?、圖示έ兌明本發明的實施形態。在以下的說 319637 8 13-38147 明中’將用於液晶面板等而在破璃基板上呈多列配置的導 電圖案作為檢查對象。但是，只要是呈多列配置的導電圖 -案，也可以將用於液晶面板以外的裝置的導電圖案作為檢 • 查對象。In another preferred aspect, when the first conductive pattern arranged in a plurality of columns and the second conductive pattern arranged in a plurality of columns in a direction crossing the first conductive pattern are laminated via an insulating layer, In the arrangement direction of the first conductive pattern: sequentially arranging the first power supply electrode, the inspection electrode, and the second power supply electrode, f moving the three electrodes along the arrangement direction, and the control unit is based on the alternating current induced by the inspection electrode The change in the voltage value determines that the first conductive pattern that forms a short circuit with the second conductive pattern is a cross pattern. [Effect of the Invention] In the pattern inspection device of the present invention, the electrode and the conductive pattern are electrically connected by electrostatic coupling. Therefore, it is possible to determine the position of the cross short circuit without contacting the electrode with the conductive pattern. Further, in another pattern inspecting apparatus of the present invention, the alternating current voltages which are mutually inverted are applied simultaneously with the electric pattern. Therefore, since the potential of the entire panel is substantially stabilized, the inspection accuracy of the conductive pattern can be further improved. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, a conductive pattern in which a liquid crystal panel or the like is disposed in a plurality of rows on a glass substrate is used as an inspection object. However, as long as it is a conductive pattern arranged in a plurality of columns, a conductive pattern for a device other than the liquid crystal panel can be used as a check object.
第1圖是本發明的第一實施形態的圖案檢查裝置1〇 '的概略俯視圖·>另外，第2圖是圖案檢查裝置1〇的概略側 視圖。該圖案檢查裝置是適用於判定交又短路位置情況 的圖案檢查裝置。在此，在對該圖案檢查裝置1〇進行詳細 φ說明之前，先對交叉短路進行簡單說明D 一般的液晶面板50等，是由將被稱為閘極線52的導 .電圖案呈多列配置的第一層、以及被稱為源極線54的導電 .圖案呈多列配置的第二層進行疊層而構成。第一層的閘極 線52與第二層的源極線54係相互交叉配置。在該第一層 和第二層之間設置有絕緣層56，以防止源極線54與閘極 線52的電性連接（短路）。但是，由於種種原因，在絕緣層 癱兄會產生微小的孔（針孔），通過這些針孔，源極線與閘 極線52會有產生電性連接的情況。該閘極線52和源極線 W的電性連接稱為交又短路。該交叉短路成為液晶面板扣 動作不良和故障的原因。因此，在液晶面板5〇製造過程的 步驟中，必須要明確判定該交叉短路並進行修理。 在判定上述交叉短路時，首先，從多條源極線54中判 定存在交叉短路CS的源極線54，作為交又線（交叉圖 案）54a。接著’從已經判定的交又線54a上判定存在交又 紐路cs的位置。本實施形態的圖案檢查裝置1〇係構成為 319637 9 1338147 適用於判定父叉線54a後，判定存在於該交叉線54a上的 交叉短路cs的位置。另外，關於交又線54a的判定技術， 因為後面會做詳細說明，在這裏省略詳細說明。 本實施形態的圖案檢查裝£ 1〇纟有可以沿著存在交 叉短路CS的交又線54a移動的感測器12。作為該感測器 12的移動機構，可湘衆所周知的機構，例如由馬達和 杆所構成的移動機構。感測器〗2的移動量或者是移動位置 係藉由未圖示的控制裝置取得並儲存。 兩個供電電極 •从旦电伐10、大致呈 十字狀設置於感測器12。也就是說，兩個供電電極Μ、Μ 係設在源極線54的長度方向（第1圖中的χ方向），兩個檢 查電極18、20係設在源極線54的配置方向（第！圖中的γ !向)而分別鄰接。從第2圖可得知，該感測器12隔著— 疋的空間，位於液晶面板5〇的上側。從該感測器U到 晶50的距離為設置在該感測器12的四個電極μ, 2〇和源極線54及閘極線52能_電麵合的㈣。、 =供電電極14、16是用於向交叉線％施 =極’且連接在交流電源22。在判定交又短路cj 為了使這兩個供電電極14、16 進行感測器U的位置調整。由於交叉線54:^ 極MW相對向，兩者靜電耗合。而且，由此=:電電 電極14、16向交叉線54a的施加交流電壓。、攸供電 兩個檢查電極18、2〇是用於檢 生的交流電壓的雷炼。& & , ]極線52感應產 電[的電極。這兩個檢查電極18、2〇藉由與對向 319637 10 1338147 的閘極線52的靜電輕合，對應該閘極線52感應產生的交 μ電壓值而感應產生相應大小的交流電壓。由檢查電極 18、20感應產生的交流電壓通過放大器26而放大，作為 檢出電壓而被取得。控制部將該檢出電壓值與感測器U 的位置資訊附加_並儲存。並且，控制部根據所取得 檢出電壓值的變化來判定交叉短路c s的位置。 胆地說明關於判定交又短路cs的位置的情況的過 程。另外，第1圖下側係圖示伴隨感測器12 電壓值的變化情況。 細出 在'定交又短路CS的位置時’為了將兩個供電電極 、16定位在交又線54a的延長線上，而確 的位置，使感測器12沿著該交叉線54a移動。換十之 供電電極14、16保持為接近交叉線54a而移動。、㈣ :電極㈣與交又線54a之間的空間作為電容而發揮； 用、者該空間在交叉線54a感應產生交流電壓。感 =交流電壓經由交叉短路cs也會感應產生在和^又 線54a產生有交叉短路的閘極線52a。 的閘Si面，/沒有和交又線…產生交叉短路的其他 =:二由絕緣層56而與交叉線絕緣，故基 :上不會感應產生交流電座。因此，隨著感測H 12的移 動，檢查電極1 8、20 Sp /由软& , 勺牙夕 置’檢查電㈣、2。也不;線52的位 广電[。於疋’結果是檢出電壓值大致為〇。另一方 面’隨著感測器】2的移動，檢查電極18、2。在接二交方 3196371 is a schematic plan view of a pattern inspection device 1A according to the first embodiment of the present invention. FIG. 2 is a schematic side view of the pattern inspection device 1A. The pattern inspection device is a pattern inspection device suitable for determining the position of the intersection and the short-circuit position. Here, before the detailed inspection of the pattern inspection apparatus 1 is described, the cross-short is briefly described. The general liquid crystal panel 50 or the like is formed by a plurality of electric patterns to be referred to as gate lines 52. The first layer of the arrangement and the second layer of the conductive pattern in which the source lines 54 are arranged in a plurality of rows are laminated. The gate line 52 of the first layer and the source line 54 of the second layer are arranged to cross each other. An insulating layer 56 is disposed between the first layer and the second layer to prevent electrical connection (short circuit) of the source line 54 and the gate line 52. However, for various reasons, minute holes (pinholes) are generated in the insulating layer, and the source lines and the gate lines 52 are electrically connected through these pin holes. The electrical connection of the gate line 52 and the source line W is referred to as a crossover and a short circuit. This cross short circuit is a cause of malfunction and malfunction of the liquid crystal panel. Therefore, in the step of the manufacturing process of the liquid crystal panel 5, it is necessary to clearly determine the cross short circuit and perform repair. When the cross-short circuit is determined, first, the source line 54 having the cross-short CS is determined from the plurality of source lines 54 as a cross-line (cross-pattern) 54a. Next, it is judged from the already determined intersection line 54a that there is a position where the intersection is cs. The pattern inspection device 1 of the present embodiment is configured such that 319637 9 1338147 is applied to determine the position of the cross short circuit cs existing on the intersection line 54a after determining the parent fork line 54a. In addition, the determination technique of the intersection line 54a will be described in detail later, and a detailed description thereof will be omitted here. The pattern inspection device of the present embodiment has a sensor 12 that can move along the intersection line 54a where the cross-short CS exists. As the moving mechanism of the sensor 12, a well-known mechanism such as a moving mechanism composed of a motor and a lever can be known. The amount of movement of the sensor ii 2 or the moving position is acquired and stored by a control device (not shown). The two power supply electrodes are disposed on the sensor 12 in a substantially cross shape from the electrical circuit 10 . That is, the two power supply electrodes Μ and Μ are disposed in the longitudinal direction of the source line 54 (the χ direction in Fig. 1), and the two inspection electrodes 18 and 20 are disposed in the direction in which the source line 54 is disposed (the ! γ ! in the figure is adjacent to each other. As can be seen from Fig. 2, the sensor 12 is located on the upper side of the liquid crystal panel 5A via a space of —. The distance from the sensor U to the crystal 50 is the four electrodes μ, 2 〇 and the source line 54 and the gate line 52 of the sensor 12 can be electrically connected (4). The = supply electrodes 14, 16 are for applying a voltage to the cross line % and are connected to the AC power source 22. In the determination of the crossover and short circuit cj, the two supply electrodes 14, 16 are adjusted in position of the sensor U. Since the cross line 54: ^ pole MW is opposite, the two are statically constrained. Further, by this =: the electric electrodes 14, 16 apply an alternating voltage to the intersecting line 54a.攸 Power supply The two inspection electrodes 18 and 2 are the rectification of the AC voltage used for the detection. && , ] The pole 52 senses the electricity produced by [the electrode. The two inspection electrodes 18, 2 are induced to generate an AC voltage of a corresponding magnitude by the electrostatic coupling with the gate line 52 of the opposite 319637 10 1338147, corresponding to the value of the voltage induced by the gate line 52. The AC voltage induced by the inspection electrodes 18, 20 is amplified by the amplifier 26 and obtained as the detected voltage. The control unit adds the detected voltage value to the position information of the sensor U and stores it. Then, the control unit determines the position of the cross short circuit c s based on the change in the acquired detected voltage value. The process of determining the position of the short-circuit cs is explained in a bold manner. In addition, the lower side of Fig. 1 shows the change with the voltage value of the sensor 12. In order to position the two power supply electrodes 16, 16 on the extension of the line 54a, and to determine the position, the sensor 12 is moved along the line 54a. The power supply electrodes 14, 16 are kept moving closer to the cross line 54a. (4): The space between the electrode (4) and the intersection line 54a functions as a capacitor; the space is induced to generate an AC voltage at the intersection line 54a. Sense = AC voltage via the cross-short cs also induces a gate line 52a that is cross-circuited to the line 54a. The gate Si surface, / no and the intersection line... the other that produces the cross short circuit =: two is insulated from the intersection line by the insulating layer 56, so the base does not induce an alternating current seat. Therefore, as the H 12 is sensed, the electrodes 18, 20 Sp / are checked by soft &No; line 52 bit radio and television [. As a result, the detected voltage value is approximately 〇. On the other hand, as the sensor 2 moves, the electrodes 18, 2 are inspected. In the second party 319637
II 1338147 叉線54a產生有交又短路的閘極線52a時，換言之接近經 由乂又短路CS而被施加交流信號的閘極線52a時，經由 與該閘極線52a之間產生的電容（空間），會由檢查電極 2 〇感應產生較大的交流電壓。也就是說，只要感測器 12移動到交又短路cs旁邊，檢出電壓值就會急劇的上 升。控制部將該檢查電壓值急劇上升時的感測器12位置判 定為交又短路CS的位置。 從以上的說明可得知，依據本實施形態，不使電極物 理性的接觸到源極線54和閘極線52等導電圖案就可以判 疋父又短路CS的位置。結果，既能防止物理接觸產生的 塵埃和導電圖案損傷等，又可以簡單的判定交叉短路的位 置。II 1338147 When the fork wire 54a generates the gate line 52a which is short-circuited and short-circuited, in other words, when it is close to the gate line 52a to which the AC signal is applied via the turn-on and short-circuit CS, the capacitance generated between the gate line 52a and the gate line 52a (space) ), a large AC voltage is induced by the inspection electrode 2 〇. That is to say, as long as the sensor 12 moves to the side of the crossover and short circuit cs, the detected voltage value will rise sharply. The control unit determines the position of the sensor 12 when the detected voltage value rises abruptly as the position of the short-circuit CS. As apparent from the above description, according to the present embodiment, the position of the short-circuit CS can be judged without causing the electrode to physically contact the conductive pattern such as the source line 54 and the gate line 52. As a result, it is possible to prevent damage of dust and conductive patterns generated by physical contact, and to easily determine the position of the cross short circuit.
另外，在本實施形態中，兩個供電電極丨4、〗6以及兩 個檢查電S 18、2G呈大致十字狀配置。結果，交叉短路 P使存在於導電圖案的端部旁邊，也能準確的判定其位 ，。+例如，考慮交又短路cs存在於源極線54的端部旁邊。 攻時，為了檢查出交叉短路cs的位置，有必要使檢查電 極18、20移動到該交叉短路cs的旁邊。這時，如本實施 ^態’若將四個電極14、16、18、2〇呈大致十字狀配置時， 雖“個供電電極14、16中至少一方有位於交叉線* 、9位置之虞，但另一方位於能夠向交又線54a供電的 、。果’如上所述，在交叉短路CS㈣產生急劇的 壓值㈣化，且能夠簡單而且正確關定交叉短路 、置另外，考慮父又短路CS在閘極線52的端部 319637 12 13-38147 方邊的情況。這種情況下，為了檢 置，有必要使檢查電極】8、2 : 乂又知路以的位 旁邊。這時，如本〜…〇各動到該開極線52的端部 20 ％形也，若將四個電極14、16、、 、十子狀配置時，雖然兩個檢杳 -方有位於間極線52以外的位置之：查上極18、2〇至少 夠與閘極線52產生靜電 仁另一方停留在能 座生静電耦合的位置。結果， 且正確的判定交又短路CS的位置。也一二早 施形態，使四個雷炻7 . 也就疋祝，如本實 藉此即使在導電圖安的：二18、2〇呈大致十字狀配置， 準破二2 部旁邊產生有交又短路CS，也能 早確的檢查出其位置。 1月匕 子，這裏說明的感測器12的構成態樣只是一個例 田=也可以㈣其他的構成態樣。例如， 所不，也可以由單一的供雷雷 ^ 2〇 λ Μ .,, 、電極14和兩個檢查電極18、 0來構成感測器！2。這時’最好是將單一 沿行進方向形成長條形狀，將烚杏 ’、電電極14 雷雷祐電極18、2G配置在該供 以〆 的兩側。另外，相反的’如第3圖(B)所示，可 ^米用單一的檢查電極18 ’將供電電極14、16配置在該 早—的檢查電極18的兩側。 可是’如上所述’當檢查電極18、2〇接近沒有和交又 l4a產生短路的其他閘極㈣時’檢出電壓值應該大致 但是’從第i圖下側所示的檢出電壓值明顯可以看 出’檢出電壓值不是0,時常會有微小的變化。這基於以 下幾個理由。 由供電電極H、16提供的交流電壓實際上不只是通過 319637 13 1338147 相對向的交叉線54a，而且通過與該交叉線54a鄰接的其 他的源極線54b、交叉線54a和閘極線52的交點的寄生電 ‘容，遍佈整個液晶面板50，提高液晶面板50整體的電位。 .由於液晶面板的寄生電容會因位置而變化，所以液晶面板 的電位也會因位置而有微妙的不同。並且，在所述電位不 均勻的液晶面板50相對向的檢查電極丨8、2〇所檢查出的 才^出電壓值雖然低但是也會變動。有時所述的電壓檢出電 I值的變動會成為交叉短路cs位置判定精確度下降等的 •原因。 第4圖是可解決所述問題，且提高交叉短路cs位置 判定精確度的本發明第二實施形態所述的圖案檢查裝置 10的概略俯視圖。該圖案檢查裝置1〇和第一實施形態相 同’具備有可以沿著交又、線54a移動的感卿12。感測器 12的移動位置以及後述的檢出電壓值被附加相互關聯，且 儲存在沒有圖示的控制部。 鲁 該感測器12設有兩個供電電極14、16以及兩個檢查 電極18、20。但是，本實施形態與第一實施形態不同，兩 個供電電極14、16鄰接配置在源極線54的配置方向。另 卜兩個核查電極1 8、20配置在源極線54的配置方向， 而夾著這兩個供電電極14、16。 一 β兩個供電電極14、丨6連接於相位相反的交流電源。也 二、疋兒在第一供電電極14施加相位為〇。的交流電壓。 卜β在第一供電電極16施加與施加於第一供電電極14 的電壓相同位準且相位相差⑽。的交流電塵。在判定交又 319637 14 13-38147 短路CS位置的時候，以使第一供電電極 5如的正上方移動的方式調整感測器】2整體的位置。線 兩個檢查電極18、2〇與第一實施形態和同，是用於檢 f由問極線52感應產生的交流電屡值的電極。藉由與閉極 :52的靜電#合而由兩個檢查電極18、㈣應產生的交 Γ電愿係經由放大器26 *放大，作為檢出㈣值而被取 仔0Further, in the present embodiment, the two power supply electrodes 丨4, 〖6 and the two inspection electrodes S18, 2G are arranged in a substantially cross shape. As a result, the cross short circuit P is present beside the end of the conductive pattern, and the position can be accurately determined. + For example, consider that the crossover and short circuit cs are present beside the end of the source line 54. At the time of attack, in order to check the position of the cross short circuit cs, it is necessary to move the inspection electrodes 18, 20 to the side of the cross short circuit cs. At this time, as in the present embodiment, when the four electrodes 14, 16, 18, and 2 are arranged in a substantially cross shape, at least one of the power supply electrodes 14 and 16 is located at the position of the intersection lines * and 9, However, the other party is located in the power supply to the line 54a. As described above, the cross-short CS (4) produces a sharp voltage value (four), and can easily and correctly determine the cross-short circuit, and additionally, consider the parent and short-circuit CS. In the case of the end of the gate line 52 at the end of 319637 12 13-38147. In this case, in order to check, it is necessary to make the inspection electrode 8, 2: 乂 and know the way to the side. At this time, as this When the ends of the open line 52 are 20%, if the four electrodes 14, 16, and 10 are arranged, the two inspections are located outside the interpolar line 52. Position: Check that the poles 18 and 2 are at least enough to generate static electricity with the gate line 52 and the other side to stay in the position where the seat can be electrostatically coupled. As a result, the correct judgment is made to short-circuit the position of the CS. Early application of the form, so that the four Thunder 7 will also celebrate, as this is the case, even in the conductive figure The two 18, 2 〇 are arranged in a roughly cross shape, and the short-circuit CS is generated next to the second and second parts. It can also check the position early. January 匕子, the composition of the sensor 12 described here The aspect is only a case = can also be (4) other constitutional aspects. For example, no, it can also be composed of a single supply of thunder ^ 2 〇 λ Μ , , , electrode 14 and two inspection electrodes 18 , 0 Sensor! 2. At this time, it is preferable to form a single strip shape along the traveling direction, and arrange the apricots and the electric electrodes 14 Leileiyou electrodes 18 and 2G on both sides of the supply. As shown in Fig. 3(B), the power supply electrodes 14, 16 can be disposed on both sides of the early inspection electrode 18 with a single inspection electrode 18'. However, 'as described above' when the inspection electrode 18 2 〇 close to the other gates (4) that are short-circuited with the intersection and the l4a, the 'detection voltage value should be approximate but 'the detected voltage value shown from the lower side of the i-th picture is clearly visible. 'The detected voltage value is not 0. There are often minor changes. This is based on the following reasons: The supply provided by the power supply electrodes H, 16 The voltage does not actually pass through the opposite crossing line 54a of 319637 13 1338147, but also the parasitic capacitance of the intersection of the other source line 54b, the crossing line 54a, and the gate line 52 adjacent to the crossing line 54a. The liquid crystal panel 50 increases the potential of the entire liquid crystal panel 50. Since the parasitic capacitance of the liquid crystal panel changes depending on the position, the potential of the liquid crystal panel is subtly different depending on the position, and the liquid crystal having the potential is not uniform. The value of the voltage detected by the inspection electrodes 丨8 and 2〇 facing the panel 50 may be low, but may vary. The variation of the voltage detection power I may cause the cross-short cs position determination accuracy. • Reasons such as falling. Fig. 4 is a schematic plan view of the pattern inspecting apparatus 10 according to the second embodiment of the present invention which can solve the above problem and improve the accuracy of the cross-short cs position determination. The pattern inspection device 1A is provided in the same manner as the first embodiment, and includes a sensory 12 that is movable along the line 54a. The movement position of the sensor 12 and the detected voltage value to be described later are additionally associated with each other and stored in a control unit (not shown). The sensor 12 is provided with two supply electrodes 14, 16 and two inspection electrodes 18, 20. However, in the present embodiment, unlike the first embodiment, the two power supply electrodes 14 and 16 are arranged adjacent to each other in the direction in which the source lines 54 are arranged. Further, the two verification electrodes 18, 20 are arranged in the direction in which the source lines 54 are arranged, and the two supply electrodes 14, 16 are sandwiched. A β two power supply electrodes 14 and 丨 6 are connected to an AC power source of opposite phase. Second, the deaf child applies a phase of 〇 at the first power supply electrode 14. AC voltage. The voltage β is applied to the first power supply electrode 16 at the same level as the voltage applied to the first power supply electrode 14 and is out of phase (10). AC dust. When it is determined that the intersection 319637 14 13-38147 is short-circuited to the CS position, the position of the sensor 2 is adjusted so that the first power supply electrode 5 is moved directly upward. Lines The two inspection electrodes 18, 2 are the electrodes for detecting the alternating current value induced by the interrogation line 52, as in the first embodiment. The intersection of the two inspection electrodes 18 and (4) by the static electricity of the closed pole: 52 is amplified by the amplifier 26*, and is taken as the value of the detected (four) value.
接著，說明關於在該圖案檢查裝置1〇的交叉短路cS 斷的過轾。另外’第4圖的下側係圖示隨著感測器 12的私動，檢出電壓值的變化。 &在判定交叉短路CS的位置時，以使第一供電電極14 能夠在交叉線54a的正上方移動的方式調整感測器12整體 的位置後，使該感測器12沿著該交又線⑷移動。這時， 第供電電極14和父又線54a之間產生的空間作為電容而 發揮作用’在交叉線54a施加相位為〇。的交流電壓。施加 的該父流電壓係經由交叉短路cs也感應產生在該間極線 52a另外伙第一供電電極14提供的相位為的交流電壓 通過寄生電容，也被施加在整個液晶面板5〇。 另-方面’與第一供電電極14鄰接配置的第二供電電 極16，係與鄰接於交叉、線54a的源極線糾接近並移動。 這時，第二供電電極16係在該鄰接的源極線州施加相位 為18(Γ的交流電壓。另外，通過不均勻存在的寄生電容， 也會在液晶面板50整體施加相位為18〇。的很小的交 壓。 Μ 319637 15 丄幻8147 、在这裏，第二供電電極16對交叉線54a的影響與接近 並對向於父叉線54a的第一供電電極14對交叉線5乜的影 響相^是非常小的。因此，在交叉線54a以及與該交叉線 a 乂叉紐路的閘極線52a感應產生的相位為〇。的交流電 璧;’不會與相位為18G。的交流電壓抵消，而維持相當高的 4準另方面，液晶面板50的整體，同時被第一供電電 極14 %加相位為〇。的相同位準的交流電壓以及被第二供 電電極16施加相位為18〇。的相同位準的交流電壓。這種 同時施加的相位相反的交流電壓係互相抵消。因此，作為 液晶面扳50整體的電位大致為〇。 結果’隨著感測器12移動，檢出電麼值的位準會穩 ::也就是說’如第4圖的下側所示，當檢查電極18::〇 從交叉短路cs位置離開時’相對向的源極線M和閉極線 52的電位大致是〇’由檢查電極18、則應產生的交流電 壓也大致穩定為0。另一方面，當檢查電極18、2〇 又短路《旁邊時，藉由和交叉線54a產生有交叉短路的 間極線52a(換言之，由相位為G。的較高的交流電_ 生的與閘極線52a)的靜電輕合，檢查電極18、2〇會感應 產生相位為0。的交流。控制部係根據隨時取得的^ 電盧值達到最高點時的感測器位置，來判定交又短路cs 由於互相 以在沒有 而且，其 從以上的說明中可得知，根據本實施形態， 反相的交流電壓同時施加到液晶面板5〇整體^所 缺陷的部分的檢出電壓值的位準大致穩定為〇。 319637 16 1338147 結果能夠更準確的判定交叉短路cs的位置。 但是，在本實施形態中，利用藉由同時施加反相的交 流電壓而使檢出電壓值穩定這項技術來判定交叉短路cs 、存在的位置，這項技術也能應用於其他的圖案檢查。 第5圖是本發明第三實施形態的圖案檢查裝置10的概 略俯視圖。該圖案檢查裝置1G是—種適用於判定產生斷線 的導電圖案（以下稱為「斷路圖案」）的檢查裝置。 該圖案檢查裝置10的感測器12可以沿著導電圖案6〇 勺配置方向（第5圖中的γ方向）移動^該感測器〗2設置有 兩個供電電極14、16以及兩個檢查電極1 8、20。感測器 • 12係以所搭載的四個.電極14、16、18'2G與相對向的導 圖案60此夠產生靜電耦合的距離配置在液晶面板π 上側。 為了使兩個供電電極14、16分別在導電圖案6〇的兩 側旁邊位置，隔著預定間隔排列在導電圖案6()的延伸設置 鲁2 (第5圖中的X方向）°兩個供電電極14、分別連接 :電原' 22 24，並被施加互相反相的交流電壓。也就是 說’在第-供電電極14施加相位為〇。的交流電麼，在第 「供電電極16施加與在第—供電電極14施加 相同位準且相位相差18〇。的交流電壓。 電土 分別將第一檢查㈣18配置在第—供電電極 、*，將第二檢查電極20配置在第二供電電極16的旁邊。 ^兩個檢查電極18、20係和相對向的導電圖案60靜電耦 13而且，藉由該靜電耦合，在檢查電極18、20會感應產 319637 17 交浐ΐ严:導案60感應產生的交流電壓呈比例大小的 各個檢查電極18、2G感應引起的交流電麼係經 電壓：=28放大’從而作為第一檢出電壓和第二檢出 移二“Γ。控制部係將這兩個檢出電壓值和感測器12 私動位置附加關聯並儲存。 二著：說明關於採用該圖案檢查裝置10的斷路圖案 的^ &另外’第5圖的右側係圖示隨著感測器U >的^’。弟一檢出電壓值（實線）以及第二檢出電壓值（虛線） 在從多個導電圖案60中判定產生斷路0的斷路圖案 62的情況下，以使四個電極14、16、i8、2Q位於導電圖 二60上方的方式調整感測器㈣位置後，使該感測器η m配置方向移動。這時，控制部係將感測器12的移動位置 和檢出電壓值附加關聯並隨時儲存。 在這裏，當感測器12與沒有產生斷路〇和短路的正 常導電圖案6G相對向時，兩個供電電極14、16和該正常 導電圖案60靜電耗合，並施加交流電麗。此時，同時施加 第供電電極Η的相位為〇。的交流電塵以及第二供電電 & ㈣為18()^交流電f至一個導電圖案6(J由於 同時施加的反相的交流電壓互相抵消，所以結果是該導電 圖案60感應產生的交流電壓大致為〇。在供電電極14、16 與正常的導電圖案60靜電輕合的情況下，與該供電電極 14、16連動而移動的檢查電極18、2〇也與該正常的導電 圖案6〇靜電搞合。但是，該正常的導電圖f 60由於反相 319637 1338147 的交流電塵的相互抵消而使電位為〇。因此，在檢查電極 18、20感應產生的交流電壓的值也大致為q，第—檢出電 壓值以及第二檢出電壓值都大致為〇。 另方面，當感測器U移動到產生斷路〇的斷路圖 案62的正上方時，藉由斷路〇阻止所述的交流電壓的相 互抵因此，由各個供電電極14、16施加到斷路圖案 62的父流電壓變強。結果，兩個檢查電極以、中，一 =會感應產生0。的交流信號，另一方會感應產生！，的交 .號:在這裏，當將〇。及18〇。的交流予以同步， 為正的直流電麗，180。的交讀會作 為負的直流電壓而檢出。 哭據本實施形態，如第5圖右側所示，在感測 案62旁邊的時候取得高位準的檢出電I 值在感測益U遠離斷路圖案62的時候取得大 值。控制部係根據取得高位準的檢出電壓值_ 測12的位置來判定斷路圖案62。 〜 相交==中可知，由於本實施形態為同時施加反 成，使得在缺陷以外處的檢出電壓值大致 穩疋為〇。，纟。果’力夠提高斷路圖案 外，在本實施形態中 ㈣疋精確度。另 個。 τ &查電極既可以是兩個也可以是一 接著’說明關於第四實施形態。， 實施形態的圖案檢查装置i 明第四 置10是一鍤镝田认t ;概唂俯視圖。該圖案檢查裝 種適用於列定存在於斷路圖案上的斷路的位置 319637 】9 1338147 的裝置。 °又置在5亥圖案檢查裝置1 0的感測器12可以沿著斷路 圖术62 ~動。第—供電電極檢查電極18、第二供電 電和、/α斷路圖案62的長度方向而排列配置於感測器 12。並且，感測器12係以這三個電極14、18、16與對向 的斷路圖帛62隔著能夠產生靜電_合的距離配置在液晶 面板50的上側。 —在兩個供電電極14、16施加互相反相的交流電壓。在 本實施形態中，在配置在感測器移動方向前方側的第一供 電電極％加相位為〇。的交流電壓，在配置在感測器的移動 方向後方側的第二供電電極！ 6施加相位為⑽。的交流電 壓仏查電極18感應產生的交流電壓係經過放大器26放 大，作為檢出電壓值而被取得。 。 一、說明關於採用該圖案檢查裝置1〇的斷路〇的位置判 ° 第6圖下側係圖示隨著感測器的移動檢出電壓值 的變化。 一 ^判疋斷路〇的位置時，使感測器12從斷路圖案Μ =7 =動到另-端。該感測器12開始移動後，也就是 ' ’、第—供電電極16以及檢查電極18位於斷路圖案 外側的時候==14口位於斷路圖案62的端部的 、 斷路圖案62，、施加相位為1 。的交流電 LIT感測器12開始移動後，不會發生所述交流電壓 移動感測器==為負方向的高位準。但是，繼續 田一個電極14、18、16全部移動到斷路 319637 20 1338147 圖案62的正上方時’第一供電電極14的相位為〇。以及第 二供電電極16相位為】80。的交流電壓會同時施加到該斷 路圖案62。而且，由於施加的$兩種交流電愿互相抵消， 故斷路圖案62的電位大致變為〇。因此，經由檢查電極 檢查出的檢出電壓值也大致穩定為〇。 另一方面，感測器〗2進一步移動，在通過斷路〇位 置的前後，檢出電壓值有大的變動。具體而言，只有第二 供電電極在斷路〇後方側，只有檢查電極ί8以及第一供 電電極在斷路〇前方側。這時，在斷路〇前方側的斷 路圖案62a只施加相位為〇。的交流電塵。而且，該前方側 的斷路圖案62a的電位在正方向上升，在與該前方側的斷 路圖案62a靜電耦合的檢查電極18感應產生的交流電Next, the overshoot of the cross short circuit cS in the pattern inspection device 1A will be described. Further, the lower side of Fig. 4 shows a change in the voltage value detected by the private movement of the sensor 12. When determining the position of the cross short circuit CS, the position of the entire sensor 12 is adjusted so that the first power supply electrode 14 can move directly above the intersection line 54a, and the sensor 12 is caused to follow the intersection. Line (4) moves. At this time, a space generated between the first power supply electrode 14 and the parent parallel line 54a functions as a capacitance. A phase is applied to the intersection line 54a. AC voltage. The applied parent current voltage is also induced via the cross short circuit cs to generate an alternating voltage of the phase supplied from the first power supply electrode 14 at the interpolar line 52a. The parasitic capacitance is also applied to the entire liquid crystal panel 5'. On the other hand, the second power supply electrode 16 disposed adjacent to the first power supply electrode 14 is close to and moved from the source line adjacent to the intersection and line 54a. At this time, the second power supply electrode 16 applies an alternating current voltage of 18 (Γ) in the adjacent source line state. Further, a phase of 18 〇 is applied to the entire liquid crystal panel 50 by the parasitic capacitance which is uneven. Very small voltage. Μ 319637 15 丄 8 8147, here, the second power supply electrode 16 has an influence on the intersection line 54a and approaches the first power supply electrode 14 of the parent fork line 54a to the intersection line 5乜The influence phase is very small. Therefore, the phase induced by the cross line 54a and the gate line 52a of the cross line a 纽 纽 〇 〇 〇 〇 璧 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The voltage is canceled, while maintaining a relatively high level of accuracy, the entirety of the liquid crystal panel 50 is simultaneously phased by the first supply electrode 14%. The same level of AC voltage and the phase applied by the second supply electrode 16 is 18 The AC voltage of the same level is the same. The AC voltages of the opposite phases are canceled each other. Therefore, the potential of the liquid crystal panel 50 as a whole is substantially 〇. The result 'detects as the sensor 12 moves. The value of the electrical value It will be stable: that is, as shown in the lower side of Fig. 4, when the inspection electrode 18::〇 is separated from the cross-short cs position, the potentials of the opposite source line M and the closed line 52 are substantially 〇 'The AC voltage to be generated by the inspection electrode 18 is also substantially stabilized to 0. On the other hand, when the inspection electrodes 18, 2 are short-circuited "on the side, the inter-polar line 52a having a cross short circuit is generated by the intersection line 54a. (In other words, the high frequency of the alternating current with the phase G is lightly coupled with the gate line 52a), and the inspection electrodes 18, 2〇 induce an alternating current with a phase of 0. The control unit is obtained at any time. ^ The position of the sensor when the electric rush value reaches the highest point is used to determine that the crossover and the short circuit cs are not present in each other. As can be seen from the above description, according to the present embodiment, the reversed alternating voltage is simultaneously applied to The level of the detected voltage value of the portion of the liquid crystal panel 5 that is defective is substantially stable. 319637 16 1338147 As a result, the position of the cross-short cs can be more accurately determined. However, in the present embodiment, Applying reversed alternating current Further, the technique of determining the cross-short cs and the existing position by the technique of stabilizing the detected voltage value can be applied to other pattern inspections. Fig. 5 is a schematic plan view of the pattern inspection device 10 according to the third embodiment of the present invention. The pattern inspection device 1G is an inspection device suitable for determining a conductive pattern (hereinafter referred to as a "breaking pattern") in which a disconnection is generated. The sensor 12 of the pattern inspection device 10 can be disposed along the conductive pattern 6 Direction (γ direction in Fig. 5) movement ^ The sensor 2 is provided with two power supply electrodes 14, 16 and two inspection electrodes 18, 20. The sensor 12 is equipped with four. The distance at which the electrodes 14, 16, 18'2G and the opposing guide patterns 60 are electrostatically coupled is disposed on the upper side of the liquid crystal panel π. In order to position the two power supply electrodes 14, 16 respectively on both sides of the conductive pattern 6〇, the extension of the conductive pattern 6() is arranged at a predetermined interval (the X direction in FIG. 5). The electrodes 14 are respectively connected to the electric source '22 24 and are applied with alternating voltages which are mutually inverted. That is to say, the phase applied to the first power supply electrode 14 is 〇. In the alternating current, the "power supply electrode 16 applies an alternating voltage that is the same as the phase applied to the first supply electrode 14 and has a phase difference of 18 〇. The electric ground respectively sets the first inspection (four) 18 on the first supply electrode, *, The second inspection electrode 20 is disposed beside the second power supply electrode 16. The two inspection electrodes 18, 20 are electrically coupled to the opposite conductive pattern 60 and, by the electrostatic coupling, are sensed at the inspection electrodes 18, 20. Production 319637 17 浐ΐ 浐ΐ : 导 导 导 导 导 导 导 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : Move out two "Γ. The control unit additionally associates and stores the two detected voltage values with the sensor 12 private position. Second, the description will be made regarding the circuit breaker pattern of the pattern inspection device 10, and the right side of the fifth diagram is shown along with the sensor U > The first detected voltage value (solid line) and the second detected voltage value (dashed line), in the case where the disconnection pattern 62 in which the open circuit 0 is generated is determined from the plurality of conductive patterns 60, the four electrodes 14, 16, i8 are made. After the 2Q is located above the conductive pattern 260, the position of the sensor (4) is adjusted, and the direction of the sensor η m is moved. At this time, the control unit associates the movement position of the sensor 12 with the detected voltage value and stores it at any time. Here, when the sensor 12 opposes the normal conductive pattern 6G which does not generate a break and a short circuit, the two power supply electrodes 14, 16 and the normal conductive pattern 60 are electrostatically consumed, and an alternating current is applied. At this time, the phase at which the first power supply electrode 施加 is applied is 〇. The alternating current dust and the second power supply & (4) are 18 () ^ alternating current f to a conductive pattern 6 (J because the simultaneously applied reversed alternating voltages cancel each other, the result is that the alternating voltage generated by the conductive pattern 60 is substantially In the case where the power supply electrodes 14 and 16 are electrostatically coupled to the normal conductive pattern 60, the inspection electrodes 18 and 2, which move in conjunction with the power supply electrodes 14 and 16, are also electrostatically associated with the normal conductive pattern 6〇. However, the normal conductive pattern f 60 has a potential of 〇 due to the mutual cancellation of the alternating current dust of the reversed phase 319637 1338147. Therefore, the value of the alternating voltage induced by the inspection electrodes 18 and 20 is also substantially q, first— The detected voltage value and the second detected voltage value are both substantially 〇. On the other hand, when the sensor U moves directly above the open circuit pattern 62 that generates the open circuit, the alternating voltage is prevented from interchanging with each other. Therefore, the voltage of the parent current applied to the disconnection pattern 62 by the respective power supply electrodes 14, 16 becomes strong. As a result, the two inspection electrodes are in the middle, one = the AC signal which is induced to generate 0. The other side will sense生!,交交.号: Here, when the communication of 〇. and 18〇 is synchronized, the positive DC 丽, 180. The reading will be detected as a negative DC voltage. As shown on the right side of Fig. 5, the high-level detected power I value obtained at the side of the sensing case 62 is large when the sensing benefit U is away from the breaking pattern 62. The control unit checks according to the high level. The position of the voltage value _12 is determined to determine the disconnection pattern 62. ～ Intersection == It can be seen that in the present embodiment, the reverse detection is performed at the same time, so that the detected voltage value other than the defect is substantially stabilized. In addition to the fact that the breaking pattern is sufficient, in the present embodiment, (4) 疋 accuracy. Another τ & the inspection electrode may be two or a sequel to the description of the fourth embodiment. The inspection device i shows that the fourth set 10 is a view of the Putian; a top view of the pattern. The pattern check is suitable for the device that sets the position of the open circuit 319637] 9 1338147 which is present on the open circuit pattern. Sensing of the Hai pattern inspection device 10 The device 12 can be arranged in the sensor 12 along the length direction of the first power supply electrode inspection electrode 18, the second power supply and/or the ?-circuit pattern 62. And the sensor 12 is arranged. The three electrodes 14, 18, 16 and the opposing open circuit diagram 62 are disposed on the upper side of the liquid crystal panel 50 with a distance capable of generating static electricity. - An alternating current is applied to the two power supply electrodes 14, 16 In the present embodiment, the AC voltage applied to the front side of the first power supply electrode in the direction in which the sensor is moved is added to the second power supply electrode disposed on the rear side in the moving direction of the sensor! 6 The applied phase is (10). The AC voltage induced by the AC voltage detecting electrode 18 is amplified by the amplifier 26 and is obtained as the detected voltage value. . 1. Description of the positional judgment of the circuit breaker 采用 using the pattern inspection device 1 Fig. 6 is a diagram showing the change in the detected voltage value with the movement of the sensor. When the position of the break is determined, the sensor 12 is moved from the open circuit pattern Μ = 7 = to the other end. After the sensor 12 starts moving, that is, when the '', the first power supply electrode 16 and the inspection electrode 18 are located outside the circuit breaker pattern, the ==14 port is located at the end of the circuit breaker pattern 62, and the circuit breaker pattern 62 is applied. 1 . The AC voltage does not occur after the LIT sensor 12 starts moving. The mobile sensor == is a high level in the negative direction. However, when all of the electrodes 14, 18, and 16 are moved to the open circuit 319637 20 1338147 directly above the pattern 62, the phase of the first power supply electrode 14 is 〇. And the phase of the second power supply electrode 16 is 80. The alternating voltage is applied to the circuit pattern 62 at the same time. Further, since the two kinds of alternating currents to be applied are mutually canceled, the potential of the breaking pattern 62 is substantially changed to 〇. Therefore, the detected voltage value detected through the inspection electrode is also substantially stabilized. On the other hand, the sensor ">2 moves further, and the detected voltage value greatly changes before and after passing through the open position. Specifically, only the second power supply electrode is on the rear side of the circuit breaker, and only the inspection electrode ί8 and the first power supply electrode are on the front side of the circuit breaker. At this time, only the phase 〇 is applied to the circuit breaker pattern 62a on the front side of the circuit breaker. AC dust. Further, the potential of the front side open circuit pattern 62a rises in the positive direction, and the alternating current induced by the inspection electrode 18 electrostatically coupled to the front side open circuit pattern 62a
並且，當感測器移動，且只有第二供電電極^ 及檢查電極18位於斷路0的後方側時，相反地會產生 :二也就是說’雖然檢查電極18與斷路〇後方側的斷 靜電耦合，但該後方側的斷路圖案62b只被第 供電電極施加相位為18G。的交流電壓。因此，當將檢查 極18的信號予以同步檢波時，檢出負的直流電壓。— 侧所亦感測器12通過斷路0的時候，如“圖 侧所不，檢出電懕信fΑ π + , ^ 女。2 士 向方向增大，之後向負方向 面’在感測器12已經離開斷路0的時候， 正:負St本大上穩定為。。控制部係根據檢出電壓值 負方向W感測器12的位置來判定斷路〇的位置 319637 21 丄：)0014/ 攸以上的說明中可知，由於本實施形態係在導電圖案 同時施加有反㈣交流電壓，所以離開缺陷時的檢出電 值穩定。並且，作為結果，能夠提高斷路0的位置判定 精確度。 i〜< 接著’說明_第五實施形態。帛7圖是第五實施形 〜:圖案;^查裝置1Q的概略俯視圖。此圖案檢查褒置 種適用於從多條導電圖案中判定產生有短路的導電圖 木（以下稱為短路圖案）的裝置。 該圖案檢查裝置10的感測器12可以沿著導電圖案6〇 的配置方向(第7圖中的Y方向)移動。第-供電電極14、 檢。查電極18、第二供電電極16沿配置方向排列配置於感 ’貝1裔12。與上述的實施形態相同，傳感器係以三個電 =m16與對向的導電圖案6G隔著能夠產生靜電輕 s的距離的方式配置在基板的上側。 在兩個供電電極14、16施加互相反相的交流電壓。在 ::施形態中，在配置在感測器12移動方向前方側的第一 二電極14施加相位為〇。的交流電壓，在配置在感測哭 的移動方向後方側的第二供電電極16施加相位為⑽。 的父流電壓。檢查電極18設置在兩個供電電極Μ、“之 間’用於檢出對向的導電圖案6〇感應產生的交流電壓值。 =檢查電極18感應產生的交流電壓，經過放大器％放大， 作為檢出電壓值而被取得。 說明關於㈣該圖案檢查裝£ 1G的短路圖案的判定 “王。幻圖右侧係圖示隨著感測器12的移動檢出電壓值 319637 22 的變化的模樣。另外，以 12移動方h a D月為了易於理解，將感測器 將感二 圖案643稱為“第-短路圖案”， 路圖案”。夕。後方側的短路圖案料b稱為“第二短 有短路::: 調整到導電圖案6。的端二12的位置 電圖案6。的配置方向移動。彳使該感測益12沿著導 位電_⑷目對向的導電圖案施加相 圖案施加相位為U。。的交電:：16相對向的導電 的寄生電容，在液晶:板= 湳雷厭, 锻〕u正體冋時施加相位為〇。的交 相位為1 80。的交流電壓。這種施加在液曰 整體的兩種交流電壓’因為互相抵 ： 整體電位大致鞾宕盔Λ π 夜日日面板50 圖索64 “ 當感測器12位於離開短路 ” a、4b的位置時，經由檢查電極 壓值大致穩定為〇。 你出的仏出電 電壓變在動撿=丄8通二：案的前後， -短路圊安： 電電極16移動到第 一短路圖“讣的對向位置，檢查電極 圖案㈣對向位置。這時，第二供電電極：：二= 圖案_以及與該第二短路圖案64b短路的第—短路圖安 64a施加相位為18〇。的交流電壓。第一供電電極μ通= 生電容也會在該第-短路圖案64a、第二短路圖案6仆施 319637 23 1338147 加相位為〇。的較小的 加的相位為】8〇C 但與第二供電電極】6施 此，Γ? 8"父流電虔相比，其比例是非常小的。因 第一短路圖案64a、第二短 向增大。在盥該査古a帝，、一間杀04D的電位向負方 0 〇 、 D電位增尚的第一短路圖案64a相對 向的铋查電極18感應產生負 12繼❼翻a 王貝的又桃電堡。接著，感測器 相ΐΓ^Λ’虽檢查電極18移動到與第二短路圖案6仆 相對向的位置、第一供雷雪ϋ 7 # 64a相斟… 移動到與第-短路圖案Moreover, when the sensor moves, and only the second power supply electrode ^ and the inspection electrode 18 are located on the rear side of the open circuit 0, the opposite is generated: that is, 'although the static electrode coupling between the inspection electrode 18 and the rear side of the circuit breaker However, the circuit breaker pattern 62b on the rear side is applied with a phase of only 18G by the first power supply electrode. AC voltage. Therefore, when the signal of the check electrode 18 is synchronously detected, a negative DC voltage is detected. — When the sensor 12 passes the open circuit 0, such as “the side of the picture is not, the electric signal is detected, fΑ π + , ^ female. 2, the direction increases, then the negative direction” is in the sensor. When 12 has left the open circuit 0, the positive: negative St is stable on the upper side. The control unit determines the position of the open circuit 319 according to the position of the detected voltage value negative direction W sensor 319637 21 丄:)0014/ 攸As described above, in the present embodiment, since the reverse (four) alternating voltage is applied to the conductive pattern at the same time, the detected electric value at the time of leaving the defect is stabilized, and as a result, the accuracy of the position determination of the disconnection 0 can be improved. < Next, the fifth embodiment is described. The 帛7 diagram is a schematic plan view of the fifth embodiment: the pattern inspection device 1Q. The pattern inspection device is suitable for determining that a short circuit is generated from a plurality of conductive patterns. a device for conducting a conductive wood (hereinafter referred to as a short-circuit pattern). The sensor 12 of the pattern inspection device 10 is movable along a direction in which the conductive patterns 6〇 are disposed (the Y direction in FIG. 7). The first power supply electrode 14 Check. Check electrode 18, second power supply electrode 16 Arranged in the arrangement direction, the sensor is placed on the substrate. In the same manner as the above-described embodiment, the sensor is disposed on the substrate such that three electric=m16 and the opposite conductive pattern 6G are separated by a distance capable of generating electrostatic light s. The upper side is applied with an alternating voltage that is mutually inverted with respect to the two power supply electrodes 14, 16. In the embodiment, an alternating voltage of phase 〇 is applied to the first two electrodes 14 disposed on the front side in the moving direction of the sensor 12. A parent flow voltage having a phase of (10) is applied to the second power supply electrode 16 disposed on the rear side of the moving direction of the sense of crying. The inspection electrode 18 is disposed between the two power supply electrodes Μ, "between" for detecting the opposite direction The conductive pattern 6〇 induces an AC voltage value. = The AC voltage induced by the electrode 18 is inspected and amplified by the amplifier to be obtained as the detected voltage value. (4) The determination of the short-circuit pattern of the pattern check device 1 1G "Wang. The right side of the phantom diagram shows the change of the voltage value 319637 22 as the movement of the sensor 12 is moved. In addition, the movement is performed by 12 ha. For the sake of easy understanding, the sensor will refer to the sensor's second pattern 643 as a "first-short-circuit pattern", a road pattern. Xi. The short-circuit pattern material b on the rear side is referred to as "the second short has a short circuit::: the positional electric pattern 6 of the end two 12 of the conductive pattern 6 is adjusted. The arrangement direction moves." Applying a phase pattern to the conductive pattern of the opposite direction (4) is applied to the phase pattern. The phase of the alternating current::16 is opposite to the conductive parasitic capacitance, and the phase is applied when the liquid crystal: plate = 湳 厌 ,, 锻 u u positive body 冋交. The phase of the intersection is 1 80. The AC voltage. This kind of two AC voltages applied to the liquid helium 'because each other: the overall potential is roughly 鞾宕 Λ π 夜 日 面板 面板 面板 面板 “ “ “ “ “ When the device 12 is located away from the short circuit "a, 4b", the pressure value of the electrode is substantially stabilized by the inspection electrode. The voltage of the electricity output from the battery is changed to 捡 = 丄 8 pass two: before and after the case, - short circuit :: electricity The electrode 16 is moved to the opposite position of the first short-circuit pattern "讣", and the electrode pattern (four) is in the opposite position. At this time, the second power supply electrode:: two = pattern_ and the first short-circuit diagram 64a short-circuited with the second short-circuit pattern 64b are applied with a phase of 18 〇. AC voltage. The first power supply electrode μ pass = raw capacitor also has a phase of 〇 in the first short circuit pattern 64a and the second short circuit pattern 6 319637 23 1338147. The smaller added phase is 8 〇C but compared with the second power supply electrode, the ratio is very small compared to the 8? 8" parent current 虔. The first short circuit pattern 64a and the second short direction increase. In the case of the Chagu a Emperor, the potential of the killing 04D to the negative side 0 〇, the D short-circuit potential of the first short-circuit pattern 64a is opposite to the detecting electrode 18, which induces a negative 12-step turn over a Taodian Fort. Next, the sensor phase ΐΓ Λ 虽 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 检查 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽 虽
Ma相對向的位置時，這次 第一 Mini # ^ 生相反的現象。也就是說， 路圖案64a、第二短路圖案糾的電位係由第一供 電極M提供相位為〇。的交流電愿而導致正方向較大， 且在檢查電極18感應產生正的交流電壓。 亦即’如第7圖右側所示，當感測器12通過短路圖案 a、64b的時候，檢出電壓值首先向負方向變大，接著向 正方向變大。控制部係據檢出電壓值變的較大時感測器Μ 的位置來判定短路圖案64a、64b。 •從：上的說明中可知’由於在本實施形態令同時施加 ^相的父、机電壓’使得離開缺陷位置的檢出電壓值大致穩 定為〇。並且，其結果提高了短路圖案的判定精確度。 另外’本實施形態的圖案檢查裝置10不僅能判定鄰接的導 電圖案的互相短路，而且能判定在互相交叉的方向上延伸 的導電圖案的互相短路也就是交又短路。 第8圖是採用本實施形態的圖案檢查裝置】〇，判定和 閘極線52a產生有交叉短路的源極線54a，也就是交又線 54a時的概略俯視圖。 319637 24 1338147 . 在判疋父叉線54a的時候，將感測器12配置到源極線 54的端部旁邊後，使該感測器12沿著源極線54的配置方 - 向（第8圖申的Y方向）移動。 / 如上所述，在本實施形態中，同時施加有互相反相的 交流電壓。因此，在離開交叉線54a的位置上，由於通過 •寄生電容施加的反相的交流電壓會互相抵消，故液晶面板 50整體的電位大致穩定為〇<)因此，感測器〗2在離開交叉 線54a的位置時，檢查電極〗8感應產生的交流電壓也大致 #穩定為0。 另一方面，當檢查電極丨8位於交叉線54&旁邊時，反 •相的交流電壓的平衡會崩潰，使檢出電壓值有較大變動。 =體而§，當第二供電電極16位於交又線的正上方 時^第二供電電才圣16主要向交叉線54a以及和該交叉線 54a父又短路的閘極線52a，共計兩條導電圖案供電。另一 方面’第-供電電極14主要僅向沒有產生交叉短路的一條 •源極線54供電。這時，向數量多的導電圖案供電的第二供 電電極16的負何增大，電位降低。並且，與第—供電電極 14相比’由於第二供電電極16的電位降低’故阻止所述 交流電屢的互相抵消現象。結果，在檢查電極18周圍，受 供電電極14的影響更多，且在檢查電極18感應產 電雷目2 〇°的交流信號。感測器12繼續移動，當第一供 =極U位於交叉線54 a的正上方時，產生與此相反的 14的雷、即’與第二供電電極16相比，由於第一供電電極 .位降低’結果在檢查電極W感應產生相位為180。 319637 25 1338147 的交流信號。 亦即，當感測器12通過交叉線5 4 a時，檢出電壓值的 相位檢波的結果’首先向正方向變大，接著向負方向變大。 控制部係根據該檢出電壓值變大時感測器12的位置來判 定交叉線54a。 按照上述說明可知，由於在本實施形態中同時施加反 相的交流電壓’而使離開缺陷位置時的檢出電壓值大致穩 疋為0。並且，其結果可以提高交叉線54a的判定精確度。 【圖式簡單說明】 第1圖是本發明的第一實施形態的圖案檢查裝置的概 略俯視圖。 第2圖是圖案檢查裝置的概略側視圖。 第3圖（A)及（B)是顯示其它的電極配置態樣的一個示 例圖。 第4圖疋本發明的第二實施形態的圖案檢查裝置的概 略俯視圖。 第5圖是本發明的第三實施形態的圖案檢查裝置的概 略俯視圖。 第6圖是本發明的第四實施形態的圖案檢查裝置的概 略俯視圖。 第7圖疋本發明的第五實施形態的圖案檢查裝置的概 略俯視圖。 第8圖是顯示使用圖案檢查裝置進行交 判定時的 不意圖。 26 319637 1338147 【主要元件符號說明】 10 圖 案檢查裝置 12 感測器 14、 16 供電電極 18 ' 20 檢查 電極 22 ' 24 交流電源 26、 28 放大 器 50 液 晶面板 52、 52a閘極線 54、 54b 源極線 54a 交叉線 56 絕 緣層 60 導電圖 案 62、 62a ' 62b 斷路圖案 64 短路圖 案 CS 交叉短路 0 斷路 27 319637When Ma is in the opposite position, this time the first Mini #^ is the opposite phenomenon. That is, the potential of the road pattern 64a and the second short pattern is corrected by the first supply electrode M to provide a phase of 〇. The alternating current is expected to result in a larger positive direction and a positive alternating voltage is induced at the inspection electrode 18. That is, as shown on the right side of Fig. 7, when the sensor 12 passes through the short-circuit patterns a, 64b, the detected voltage value first becomes larger in the negative direction, and then becomes larger in the positive direction. The control unit determines the short-circuit patterns 64a and 64b based on the position of the sensor 时 when the detected voltage value becomes large. • As can be seen from the above description, the detection voltage value at the position of leaving the defect is substantially stabilized by 父 when the parent and machine voltages of the ^ phase are simultaneously applied in the present embodiment. Moreover, the result is improved in the accuracy of the determination of the short-circuit pattern. Further, the pattern inspection device 10 of the present embodiment can determine not only mutual short-circuiting of adjacent conductive patterns but also mutual short-circuiting of the conductive patterns extending in the direction intersecting each other, that is, intersection and short-circuit. Fig. 8 is a schematic plan view showing the source line 54a which is crossed and short-circuited with the gate line 52a by the pattern inspection apparatus of the present embodiment, that is, when the line 54a is overlapped. 319637 24 1338147. When the parent fork 54a is judged, the sensor 12 is placed next to the end of the source line 54 so that the sensor 12 is disposed along the source line 54 (the first direction) 8 Tushen's Y direction) moves. / As described above, in the present embodiment, AC voltages which are mutually inverted are applied at the same time. Therefore, at the position away from the cross line 54a, since the inverted AC voltages applied by the parasitic capacitance cancel each other, the potential of the entire liquid crystal panel 50 is substantially stabilized as 〇 <) Therefore, the sensor 〖2 is leaving When the position of the line 54a is crossed, the AC voltage induced by the inspection electrode 8 is also substantially # stable to zero. On the other hand, when the inspection electrode 8 is located next to the intersection line 54 & the balance of the reverse phase AC voltage collapses, causing a large change in the detected voltage value. = body and §, when the second power supply electrode 16 is located directly above the line and the line, the second power supply circuit 16 is mainly directed to the intersection line 54a and the gate line 52a which is short-circuited with the parent of the line 54a, for a total of two The conductive pattern is powered. On the other hand, the first-supply electrode 14 mainly supplies power to only one source line 54 which does not cause a cross-short. At this time, the negative of the second power supply electrode 16 that supplies a large number of conductive patterns increases, and the potential decreases. Further, since the potential of the second power supply electrode 16 is lowered as compared with the first power supply electrode 14, the mutual cancellation of the alternating current is prevented. As a result, around the inspection electrode 18, the power supply electrode 14 is more affected, and the inspection electrode 18 senses an alternating current signal of 2 〇 °. The sensor 12 continues to move. When the first supply pole U is located directly above the cross line 54a, the opposite 14 lightning is generated, that is, compared with the second power supply electrode 16, due to the first power supply electrode. The bit is lowered 'results in the inspection electrode W to induce a phase of 180. 319637 25 1338147 AC signal. That is, when the sensor 12 passes the cross line 5 4 a, the result of the phase detection of the detected voltage value 'first becomes larger in the positive direction and then becomes larger in the negative direction. The control unit determines the intersecting line 54a based on the position of the sensor 12 when the detected voltage value is increased. As apparent from the above description, in the present embodiment, the detected alternating voltage at the time of leaving the defective position is substantially zero. Moreover, as a result, the determination accuracy of the intersecting line 54a can be improved. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view of a pattern inspecting apparatus according to a first embodiment of the present invention. Fig. 2 is a schematic side view of the pattern inspection device. Fig. 3 (A) and (B) are diagrams showing an example of other electrode arrangement aspects. Fig. 4 is a schematic plan view showing a pattern inspecting apparatus according to a second embodiment of the present invention. Fig. 5 is a schematic plan view of a pattern inspecting apparatus according to a third embodiment of the present invention. Fig. 6 is a schematic plan view of a pattern inspecting apparatus according to a fourth embodiment of the present invention. Fig. 7 is a schematic plan view of a pattern inspecting apparatus according to a fifth embodiment of the present invention. Fig. 8 is a view showing the intention of performing the intersection determination using the pattern inspection device. 26 319637 1338147 [Description of main component symbols] 10 Pattern inspection device 12 Sensors 14, 16 Power supply electrode 18 ' 20 Inspection electrode 22 ' 24 AC power supply 26, 28 Amplifier 50 Liquid crystal panel 52, 52a Gate line 54, 54b Source Line 54a crossing line 56 insulating layer 60 conductive pattern 62, 62a ' 62b open circuit pattern 64 short circuit pattern CS cross short circuit 0 open circuit 27 319637