JP5533169B2 - Inspection device - Google Patents

Description

The present invention relates to an inspection apparatus for inspecting an inspection object by detecting electrical characteristics of the inspection object such as a touch panel, and more specifically, without damaging the inspection object by using a non-contact supply electrode and a detection electrode, The present invention relates to an inspection apparatus capable of quickly and efficiently carrying out inspection of good / bad of wiring formed on an inspection object.
In addition, this invention can test | inspect suitably with respect to the test target object which has the wiring arranged in matrix form in the x-axis direction and the y-axis direction like a touch panel, Such a test target object Are collectively referred to as “touch panel”.

  Conventionally, an inspection object having wirings arranged in a matrix formed in an x-axis direction and a y-axis direction formed on an ITO film called a touch panel (or touch screen or touch screen) is an x-axis direction. A contact (needle-like conduction probe) is brought into contact with each of the wirings arranged in the y-axis direction, and inspection of a short circuit between each wiring and the adjacent wiring is performed.

  However, in the method in which the contact is in contact with each wiring as described above, the wiring formed on the ITO film and the contact are not stable, and the electrical characteristics are unstable due to the instability of the contact resistance due to the oxide film. It had a problem that could not be measured accurately. Further, since the contact is brought into pressure contact with the wiring to be inspected, there is a problem that a dent is formed by the contact of the contact with the wiring.

On the other hand, as disclosed in Patent Document 1, there is an inspection technique for accurately inspecting electrical characteristics such as a resistance value of the entire touch panel that can accurately detect a predetermined touch input position on the assembled touch panel. Proposed. Thus, a technique for inspecting the electrical characteristics of the function of the assembled touch panel is disclosed.
However, a technique for inspecting the continuity and short circuit of the wiring before assembly as described above is not disclosed.

  Conventionally, a plasma display panel (PDP) or the like exists as a glass substrate having wiring formed on the surface. A PDP glass substrate has a plurality of rod-like wirings formed in one direction. In the manufacturing process, it is necessary to inspect the continuity and short circuit of a plurality of wires arranged in one direction.

  As such a PDP inspection apparatus, a non-contact inspection technique as disclosed in Patent Document 2 has been proposed. In the non-contact inspection technique disclosed in Patent Document 2, a signal is supplied to a wiring to be inspected, and a signal detected from the wiring and a wiring detected at a distance of 4 or 5 patterns from the wiring are detected. The inspection is performed by comparing the signals and detecting the difference.

  However, the technique disclosed in Patent Document 2 can inspect wirings arranged in parallel in one direction, and in a matrix form in the x-axis direction and the y-axis direction like a touch panel. It was not possible to inspect the wiring placed in

  In particular, in recent years, there has been an increasing demand for improving productivity. For example, in order to shorten tact time, there is an inspection apparatus that can complete inspection in a short time or inspect various touch panels. It is desired. In addition, the need for high-speed inspection based on wiring resistance detection is increasing.

JP 2005-274225 A Japanese Unexamined Patent Publication No. 2006-200992

  The present invention has been made in view of such circumstances, and even if the inspection object is an inspection object such as a touch panel having wirings arranged in a matrix in the x-axis direction and the y-axis direction, it is non-contact Provided is a touch panel inspection apparatus capable of efficiently performing an inspection by shortening an inspection time by performing an inspection by an inspection method.

The invention described in claim 1 is an x-axis wiring composed of an x-axis display wiring that is a rod-shaped wiring, an x-axis tab wiring serving as a connection end for electrically connecting the x-axis display wiring to the outside, and a rod-shaped wiring. Inspection of a test object in which a plurality of y-axis wirings composed of y-axis display wirings and y-axis tab wirings serving as connection ends for electrically connecting the y-axis display wirings to the outside are formed in a matrix. An inspection apparatus that supplies an AC signal to a conductive mounting table on which the inspection object is mounted and an x-axis display wiring of an x-axis wiring to be inspected in order to inspect the inspection object. One supply means, one end of the first supply means that is electrically connected to one end of the x-axis display wiring and arranged in a non-contact manner, and the other side of the first supply means; It is electrically connected and non-contact with the other end of the x-axis display wiring The other-end power supply unit disposed, the one-end detection unit that is disposed in a non-contact manner at one end of the x-axis display wiring to be inspected, and detects the electrical signal from the one end in a non-contact manner, and the x-axis that is the inspection target The other end of the display wiring is arranged in a non-contact manner, and the other end detection unit for detecting an electric signal from the other end in a non-contact manner is arranged in a non-contact manner at the center of the x-axis display wiring to be inspected. A second detector that supplies an AC signal to the center detection unit that detects an electrical signal from the x-axis tab wiring to be inspected and one side of which is electrically connected to the mounting table; A second power feeding portion that is electrically connected to the other side of the X-axis tab wiring and is disposed in a non-contact manner with the x-axis tab wiring; and a second detection portion that is disposed in a non-contact manner at a connection end of the x-axis tab wiring. , One end detection signal detected from the one end detection unit and the center detection unit, Determination means for determining the conduction state of the x-axis wiring based on the other end detection unit, the other end detection signal detected from the center detection unit, and the tab detection signal detected from the second detection unit; The one end detection unit, the other end detection unit, the center detection unit, the one end power supply unit, the other end power supply unit, the inspection head unit having the second detection unit and the second power supply unit, and the inspection head unit. There is provided an inspection apparatus comprising a moving means for moving the surface of the inspection object in the y-axis direction.
According to a second aspect of the present invention, the inspection apparatus includes a third supply unit that supplies an AC signal for detecting a short-circuit abnormality between an x-axis wiring to be inspected and an adjacent x-axis wiring. The head portion is disposed in a non-contact manner on one side of the x-axis display wiring adjacent to the x-axis display wiring of the x-axis wiring to be inspected and is electrically connected to one side of the third supply means. The third upper power supply unit and the other x-axis display wiring adjacent to the x-axis display wiring to be inspected are arranged in a non-contact manner and electrically connected to the other side of the third supply means. A third lower power feeding unit and a third detection unit that is arranged in a non-contact manner on the x-axis display wiring of the x-axis wiring to be inspected, and the determination means is connected to the third detection unit from the third detection unit. Determining the short-circuit state of the x-axis wiring to be inspected based on the detection signal of It provides a test apparatus according to claim 1, symptoms.
According to a third aspect of the invention, the inspection apparatus supplies an AC signal for detecting a short-circuit abnormality between the x-axis wiring to be inspected and all the y-axis wirings, and one side is electrically connected to the mounting table. A fourth supply means connected; the inspection head unit being arranged in a non-contact manner on the x-axis display wiring of the x-axis wiring to be inspected; and the x-axis to be inspected A fourth detection unit arranged in a non-contact manner on the x-axis display wiring of the wiring, and the determination means is configured to detect all the x-axis wirings to be inspected based on the detection signal from the fourth detection unit. The inspection apparatus according to claim 1, wherein a short-circuit state of the y-axis wiring is determined.
The invention according to claim 4 is characterized in that the inspection head unit has a drive mechanism that allows the one end detection unit and the other end detection unit to be relatively close to each other with the center detection unit as a center. An inspection apparatus according to claim 1 is provided.
According to a fifth aspect of the present invention, there is provided the inspection apparatus according to the first aspect, wherein the moving means moves the inspection head portion on the surface of the inspection object in the x-axis direction.

According to the first aspect of the present invention, the one end feeding portion, the other end feeding portion, the one end detecting portion, the other end detecting portion, the center detecting portion, the second feeding portion and the second detecting portion are arranged in the inspection head portion. Since the inspection head part is formed to be movable on the inspection object, the inspection head part moves on the inspection object, so that the inspection object is arranged in a matrix in the x-axis direction and the y-axis direction. Even an inspection object such as a touch panel can be inspected by a non-contact inspection method, and the inspection time can be shortened and the inspection can be efficiently performed.
According to the invention described in claim 2, since the third upper power feeding unit, the third lower power feeding unit, and the third detection unit are arranged in the inspection head unit, the inspection head unit moves on the inspection object, A short circuit inspection between the x-axis wirings can be performed, the inspection can be performed by a non-contact inspection method, and the inspection time can be shortened and the inspection can be efficiently performed.
According to the third aspect of the present invention, since the fourth power feeding unit and the fourth detection unit are disposed in the inspection head unit, the x-axis wiring and the y-axis wiring are performed when the inspection head unit moves on the inspection object. The short circuit inspection can be performed, the inspection can be performed by the non-contact inspection method, and the inspection time can be shortened and the inspection can be efficiently performed.
According to the fourth aspect of the invention, the one end detecting portion and the other end detecting portion are provided by the drive mechanism so as to be relatively close to and away from each other with the center detecting portion as the center. Inspection can be performed and a highly versatile inspection apparatus can be provided.
According to the fifth aspect of the invention, since the inspection head portion can move in the x-axis direction and the y-axis direction, the inspection head portion moves on the inspection object, so that the inspection can be performed quickly. .

It is a schematic plan view which shows one Embodiment of the touchscreen used as the test object of this invention. It is a top view which shows schematic structure of this test | inspection apparatus. It is a schematic block diagram showing the state by which the touch panel was mounted in this test | inspection apparatus. It is a schematic block diagram which shows the test | inspection state of the test | inspection apparatus concerning this invention. Note that wiring of the inspection apparatus is omitted.

The best mode for carrying out the present invention will be described.
This inspection apparatus can improve inspection efficiency with respect to a substrate or a glass substrate having a plurality of wirings arranged in a matrix in the x-axis direction and the y-axis direction, such as a touch panel.
For this reason, first, a touch panel to be inspected by the inspection apparatus will be described.
FIG. 1 is a schematic plan view showing an embodiment of a touch panel to be inspected according to the present invention. In the touch panel TP of FIG. 1, a plurality of x-axis wirings arranged in the x-axis direction and y-axis wirings arranged in the y-axis direction are arranged on the glass substrate. In FIG. 1, 14 x-axis wirings (line: X1 to Line: Xe indicated by reference numerals) are formed, and eight y-axis wirings (line: Y1 to Line: Y8 indicated by reference numerals) are formed. .
Since the x-axis wiring and y-axis wiring of the touch panel TP are arranged so as to cover the touch area (the portion covered by P1 and P2) on the screen with these wirings, one x-axis as shown in FIG. The wiring (and the y-axis wiring) is formed so as to cover the entire touch area by repeatedly forming the wide portion and the narrow portion. By being formed in this way, when the touch panel TP is used, it is possible to detect on which x-axis wiring and on which y-axis wiring the touched location (contact location) is located. This touch area is formed by x-axis display wiring xP of x-axis wiring and y-axis display wiring yP of y-axis wiring.

  In the touch panel TP of FIG. 1, the x-axis wiring and the y-axis wiring are formed in 14 and 8, respectively, but this is not particularly limited, and is appropriately adjusted by the touch panel manufacturer. Further, the touch area of the touch panel TP and tab wiring described later are also formed by being adjusted as appropriate by the manufacturer, and the length and the size of the wide portion and the narrow portion are also appropriately adjusted by the touch panel manufacturer.

These x-axis wiring and y-axis wiring are respectively formed with x-axis tab wiring xT and y-axis tab wiring yT (tab wiring portion T) so that one end can be connected to an electronic component such as a driver. The electrical connection portions with other electronic components are formed so as to extend. The tab wiring portion T is formed at a location separated from the touch area (P1 to P2) in a plan view so that electrical connection can be made. In the touch panel TP of FIG. 1, tab wiring portions T of (x-axis wiring and y-axis wiring) are formed on the right side as viewed in the drawing. The tab wiring portion T can be formed in parallel at one place in a place other than the touch area.
The x-axis wiring is formed by the x-axis display wiring xP and the x-axis tab wiring xT, and the y-axis wiring is formed by the y-axis display wiring yP and the y-axis tab wiring yT.

  The inspection apparatus 1 includes a first supply unit 11, a first power supply unit 12, a second power supply unit 13, a first end detection unit 14, a second end detection unit 15, a center detection unit 16, a second supply unit 21, and a second power supply unit 22. , Second detection unit 23, third supply unit 31, third upper power supply unit 32, third lower unit 33, third detection unit 34, fourth supply unit 41, fourth power supply unit 42, fourth detection unit 43, inspection The head unit 5, the moving unit 6, the mounting table 7, and the determining unit 8 are provided. FIG. 2 is a plan view showing a schematic configuration of the inspection apparatus 1.

The 1st supply means 11 supplies the alternating current signal for implementing the continuity test | inspection of the x-axis wiring used as test object. The first supply means 11 supplies the first AC signal to the x-axis display wiring xP of the x-axis wiring. The 1st supply means 11 can also be comprised using one alternating current power supply, and can also be comprised by connecting two alternating current power supplies from which a phase differs 180 degree | times via earth | ground.
The first supply means 11 has one side electrically connected to the one end power supply unit 12 and the other side electrically connected to the other end power supply unit 13. For this reason, the first supply means 21 supplies the first AC signal for inspection to the x-axis display wiring xP via the one-end power supply unit 12 and the other-end power supply unit 13.

The one-end power supply unit 12 is electrically connected to one side of the first supply unit 11 and is disposed in a non-contact manner at one end of the x-axis display wiring xP. For this reason, the one-end power supply unit 12 is arranged with a predetermined distance from one end of the x-axis display wiring xP, and thus is capacitively coupled to this one end. The one-end power supply unit 12 is not particularly limited in size and shape as long as the first AC signal can be supplied to one x-axis display wiring xP to be inspected, but is smaller than the wide part and smaller than the narrow part. It is preferable to form a large film. The one-end power supply section 12 is preferably arranged so as to be capacitively coupled to the wide portion on the most end side (the side farther from the x-axis tab wiring xT) of the x-axis display wiring xP to be inspected.
Note that the one-end power supply unit 12 is disposed in a non-contact manner with the x-axis display wiring xP, and thus is disposed slightly apart from the surface of the x-axis display wiring xP.

The other end power supply unit 13 is electrically connected to the other side of the first supply unit 11 and is disposed in a non-contact manner at the other end of the x-axis display wiring xP. For this reason, since the other end power supply unit 13 is disposed with a predetermined distance from the other end of the x-axis display wiring xP, it is capacitively coupled to the other end. The other end power supply unit 13 is not particularly limited in size and shape as long as it can supply the first AC signal to one x-axis display wiring xP to be inspected, but is smaller than the wide part and narrower than the wide part. It is preferable to form larger. The other end power supply section 13 is preferably arranged so as to be capacitively coupled to a wide portion on the other end side (side closer to the x-axis tab wiring xT) of the x-axis display wiring xP to be inspected. .
Since the other end power supply unit 12 is arranged in a non-contact manner with the x-axis display wiring xP, it is arranged slightly spaced from the surface of the x-axis display wiring xP. The one-end power supply unit 12 and the other-end power supply unit 13 are arranged at one end and the other end of the x-axis display wiring xP, respectively, but one end and the other end of the x-axis display wiring xP may be switched.

  The one end detection unit 14 detects an electrical signal in a non-contact manner from one end of the x-axis display wiring xP to be inspected. Since the one end detection unit 14 is disposed at a predetermined interval from the x-axis display wiring xP, the one end detection unit 14 is capacitively coupled to the one end. The one-end detection unit 14 is arranged so as to be capacitively coupled to a wide portion at one end of the x-axis display wiring xP. This wide portion is the one end side of the x-axis display wiring xP (from the x-axis tab wiring xT). A wide part on the far side) is preferred. This is because the one end detection unit 14 and the other end detection unit 15 which will be described later serve as a continuity inspection area for the x-axis display wiring xP, and therefore it is preferable to ensure as wide an inspection area as possible. The one end detection unit 14 and the one end power supply unit 12 are preferably arranged at one end of the x-axis display wiring xP, but the one end power supply unit 12 may be arranged outside the one end detection unit 14. preferable. This is because the area to be inspected can be widened.

  The other end detection unit 15 detects an electrical signal in a non-contact manner from the other end of the x-axis display wiring xP to be inspected. Since the other end detection unit 15 is arranged with a predetermined distance from the x-axis display wiring xP, the other end detection unit 15 is capacitively coupled to the other end. The other end detection unit 15 is arranged so as to be capacitively coupled to the wide portion at the other end of the x-axis display wiring xP. This wide portion is the other end side (x-axis tab) of the x-axis display wiring xP. A wide portion on the side close to the wiring xT is preferable. The other end detection unit 15 and the other end power supply unit 13 are preferably arranged at the other end of the x-axis display wiring xP, but the other end power supply unit 13 is located outside the other end detection unit 15. It is preferable to arrange in. This is because the area to be inspected can be widened.

  The center detector 16 is arranged in a non-contact manner at the center of the x-axis display wiring xP to be inspected, and detects an electrical signal from this center. Since the center detection unit 16 is arranged with a predetermined distance from the x-axis display wiring xP, the center detection unit 16 is capacitively coupled to the center. The center detection unit 16 is preferably arranged so as to be capacitively coupled to the wide portion at the center of the x-axis display wiring xP, but may be a narrow portion. Thus, when the center detection part 16 is arrange | positioned at a narrow part, it is necessary to set so that it may not receive to the influence of the electrical signal from the x-axis display wiring xP adjacent to the x-axis display wiring xP used as a test object. There is.

  The distances between the one end detection unit 14 and the other end detection unit 15 from the center detection unit 16 are set to be equal. Although details will be described later, the resistance value of the x-axis display wiring xP disposed oppositely between the center detection unit 16 and the one end detection unit 14 and the center detection unit 16 are set so that the respective distances are equal. This is because it is possible to determine whether the resistance value of the x-axis display wiring xP is good or bad by comparing the resistance values of the x-axis display wiring xP arranged oppositely between the other end detection units 15.

  The drive mechanism (not shown) can adjust the distance between the center detection unit 16 and the one end detection unit 14 and the distance between the center detection unit 16 and the other end detection unit 15. This drive mechanism can move the one end detection unit 14 and the other end detection unit 15 relatively close to and away from each other about the center detection unit 16 according to the length of the x-axis display wiring xP. For this reason, it can be appropriately adjusted according to the size of the touch area of the touch panel TP (the length of the x-axis display wiring xP).

  The one end detection unit 14, the other end detection unit 15, and the center detection unit 16 have been described as detection units for detecting an electrical signal from the x-axis display wiring xP, but a pair arranged at equal distances with the center detection unit 16 as the center. A plurality of other detection units (not shown) may be provided.

The second supply means 21 supplies an AC signal to the x-axis tab wiring xT to be inspected, and one side is electrically connected to the mounting table 7 described later. The second supply means 21 supplies a second AC signal for detecting the conduction state of the x-axis tab wiring xT. The other side of the second supply means 21 is electrically connected to a second power feeding section 22 described later, and this second AC signal is supplied to the x-axis tab wiring xT.
The second supply means 21 supplies an AC signal to the x-axis tab wiring xT, but also supplies it to the y-axis tab wiring yT.

  The second power feeding section 22 is electrically connected to the other side of the second supply means 21 and is disposed in a non-contact manner at the connection end of the x-axis tab wiring xT. For this reason, since the second power feeding portion 22 is disposed with a predetermined distance from the x-axis tab wiring xT, it is capacitively coupled to this connection end. The second power feeding unit 22 is not particularly limited in size and shape as long as it can supply the second AC signal to one x-axis tab wiring xT to be inspected, but the tab wiring as shown in FIG. Since the x-axis tab wiring xT and the y-axis tab wiring yT are arranged in parallel in the part T, the width is approximately the same as the width of the x-axis tab wiring xT or the y-axis tab wiring yT (or approximately the same width as any shorter width). Is formed.

  The second power feeding unit 22 is not particularly limited as long as it can supply an electric signal to one x-axis tab wiring xT or y-axis tab wiring yT to be inspected, but all the x-axis tab wiring xT and the y-axis tab are not limited. The wiring yT is arranged so that it can be moved where the wiring yT is arranged in parallel. In addition, when this 2nd electric power feeding part 22 is arrange | positioned non-contactingly in the place where x-axis tab wiring xT and y-axis tab wiring yT are arranged in parallel, not only x-axis tab wiring xT but y-axis tab wiring The second AC signal can also be supplied to yT (see FIG. 3).

  The second detection unit 23 is arranged in a non-contact manner on the x-axis tab wiring xT. Since the second detection unit 23 is arranged with a predetermined distance from the x-axis tab wiring xT, it is capacitively coupled to the x-axis tab wiring xT. The second detection unit 23 is arranged so as to be capacitively coupled to the x-axis tab wiring xT (or the y-axis tab wiring yT). The position of the x-axis tab wiring xT where the second detection unit 23 is provided is the first position. It is preferable that the same x-axis tab wiring xT and y-axis tab wiring yT as in the two power feeding portions 22 are arranged so as to be movable in a place where they are arranged in parallel. The second detector 23 is not particularly limited in size and shape as long as it can supply the second AC signal to one x-axis tab wire xT to be inspected, but the tab wire as shown in FIG. Since the x-axis tab wiring xT and the y-axis tab wiring yT are arranged in parallel in the part T, the width is approximately the same as the width of the x-axis tab wiring xT or the y-axis tab wiring yT (or approximately the same width as any shorter width). It is preferable to form so that it may have. When the second detection unit 23 is arranged in a non-contact manner at a movable place where the x-axis tab wiring xT and the y-axis tab wiring yT are arranged in parallel, not only the x-axis tab wiring xT but also y An electric signal can also be detected from the axis tab wiring yT (see FIG. 3). Moreover, it is preferable that the 2nd electric power feeding part 22 and the 2nd detection part 23 are set so that the 2nd electric power feeding part 22 may be arrange | positioned outside. This is because the inspection target area can be set widely.

The 3rd supply means 31 supplies the alternating current signal for detecting the short circuit abnormality of x-axis wiring. The third supply means 31 supplies the third AC signal to the two x-axis display wirings xP adjacent to the x-axis display wiring xP to be inspected. The third supply means 31 can be configured by using one AC power source, or can be configured by connecting two AC power sources different in phase by 180 degrees via a ground.
As will be described in detail later, the third supply means 31 has one side electrically connected to the third upper power supply unit 32 and the other side electrically connected to the third lower power supply unit 33. For this reason, the third supply means 31 supplies the third AC signal to the x-axis display wiring xP adjacent to the x-axis display wiring xP via the third upper power supply section 32 and the third lower power supply section 33. Become.

  The third upper power feeding unit 32 and the third lower power feeding unit 33 serving as the third power feeding unit are arranged in a non-contact manner on two x-axis display wirings xP arranged on both sides of the x-axis display wiring xP to be inspected. The Since the third upper power feeding portion 32 and the third lower power feeding portion 33 are arranged with a predetermined distance from the x-axis display wiring xP, they are capacitively coupled to the respective x-axis display wiring xP. The size and shape of the third upper power supply unit 32 and the third lower power supply unit 33 are not particularly limited as long as the third AC signal can be supplied to each x-axis display wiring xP, but smaller than the wide part. It is preferable that it be formed larger than the narrow portion. In the embodiment of FIG. 3, the x-axis display wiring xP is disposed so as to be capacitively coupled to the wide portion.

  The third detector 34 is arranged in a non-contact manner on the x-axis display wiring of the x-axis wiring to be inspected. The third detection unit 34 is capacitively coupled to the x-axis display wiring xP (the x-axis display wiring xP to be inspected) disposed between the third upper power feeding unit 32 and the third lower power feeding unit 33. Can be arranged.

  The fourth supply means 41 supplies an AC signal for detecting a short-circuit abnormality between the x-axis wiring and the y-axis wiring, and one side is electrically connected to the mounting table 7. The fourth supply means 41 supplies a fourth AC signal for detecting a short-circuit state between the x-axis wiring and the y-axis wiring. The other side of the fourth supply means 41 is electrically connected to a fourth power feeding section 42 described later, and the fourth AC signal is supplied to the x-axis wiring.

The fourth power feeding section 42 is electrically connected to the other side of the fourth feeding means 41 and is disposed in a non-contact manner with the x-axis wiring. For this reason, the fourth power feeding part 42 is arranged with a predetermined distance from the x-axis wiring, but the fourth power feeding part 42 is capacitively coupled to the wide part of the x-axis display wiring xP to be inspected. It is preferable to arrange | position. This is because the fourth AC signal can be reliably supplied to the x-axis wiring (x-axis display wiring xP) by being arranged in this way.
The size and shape of the fourth power feeding unit 42 are not particularly limited as long as the fourth AC signal can be supplied to one x-axis display wiring xP to be inspected, but the wide portion of the x-axis display wiring xP is not limited. A shape and a size that can reliably supply an electric signal to the battery are preferable.

The fourth detection unit 43 is arranged in a non-contact manner on the x-axis display wiring xP of the x-axis wiring to be inspected. Since the fourth detection unit 43 is disposed with a predetermined distance from the x-axis display wiring xP, the fourth detection unit 43 is capacitively coupled to the x-axis display wiring xP. If there is no short-circuit abnormality in the x-axis wiring and the y-axis wiring, the fourth detection unit 43 detects the capacitance of the x-axis wiring to be inspected and the mounting table 7. If there exists, a different electrostatic capacity will be detected.
The fourth detection unit 43 and the fourth power feeding unit 44 are preferably arranged in the widest part of the x-axis display wiring xP that is farthest apart.

The inspection head unit 5 includes one end power supply unit 12, the other end power supply unit 13, one end detection unit 14, the other end detection unit 15, a center detection unit 16, a second power supply unit 22, and a second detection unit 23. The inspection head portion 5 is formed of a non-conductive plate-like member, and the above-described portions are arranged at predetermined positions. In the inspection head unit 5, as shown in FIG. 2, the one end power supply unit 12, the other end power supply unit 13, the one end detection unit 14, the other end detection unit 15 and the center detection unit 16 are arranged in a line. This is because the capacitive coupling is simultaneously performed without contact with the x-axis wiring (or y-axis wiring) to be inspected.
The second power feeding unit 22 and the second detection unit 23 are arranged in a line at a place where the x-axis tab wiring xT and the y-axis tab wiring yT of the tab wiring unit T are arranged in parallel.

  The inspection head unit 5 further includes a third upper power feeding unit 32, a third lower power feeding unit 33, and a third detection unit 34. The third detection unit 34 is disposed so as to be capacitively coupled to the wide portion of the x-axis display wiring xP to be inspected without contact, and the third upper power supply unit 32 and the third lower power supply unit 33 are third detection. The part 34 is attached to the inspection head unit 5 so as to be arranged in the wide part of the x-axis display wiring xP arranged on both sides of the wide part of the x-axis display wiring xP targeted.

  The inspection head unit 5 further includes a fourth power feeding unit 42 and a fourth detection unit 43. The fourth power supply unit 42 is disposed so as to be capacitively coupled to the wide portion of the x-axis display wiring xP to be inspected without contact, and the fourth detection unit 43 is an inspection target adjacent to the fourth power supply unit 42. The x-axis display wiring xP is arranged so as to be capacitively coupled to the wide portion of the x-axis display wiring xP in a non-contact manner.

In one embodiment of FIG. 3, the one end power supply unit 12, the other end power supply unit 13, the one end detection unit 14, the other end detection unit 15, and the center detection unit 16 are opposed to the x-axis display wiring xP to be inspected. In addition, the fourth power feeding unit 42 and the fourth detection unit 43 are arranged to face the wide part of the adjacent x-axis display wiring xP.
The third detector 34 is arranged with an x-axis display wiring xP (in FIG. 3, two adjacent x-axis display wirings xP) different from the x-axis display wiring xP to be inspected as an inspection target. .

The moving means 6 moves the inspection head unit 5 on the surface of the inspection object in the y-axis direction. For example, as shown in FIG. 2, a guide rail that can move in one direction can be adopted as the moving means 6, and the inspection head unit 5 moves along the guide rail. The movement of the inspection head unit 5 by the moving means 6 can be provided by selecting manual and / or automatic as appropriate.
By moving the inspection head unit 5 by the moving means 6, it is possible to inspect the unidirectional wiring (in the present embodiment, inspection of the x-axis wiring) provided on the inspection object. For this reason, when inspecting the wiring in the other direction (inspection of the y-axis wiring in this embodiment), the inspection object is rotated by 90 degrees and placed again, or the guide rail provided on the moving means 6 is moved directly. This can be dealt with by providing a second guide rail.
The moving means 6 can move the inspection head unit 5 in a predetermined direction (x-axis direction or y-axis direction). However, in the inspection method of the present inspection apparatus 1, the inspection head unit 5 stops on the inspection object. In addition, each x-axis wiring and y-axis wiring can be inspected continuously.

The mounting table 7 is formed of a conductive material while mounting an inspection object to be inspected. The mounting table 7 is electrically connected to one side of the second supply means 21 and the fourth supply means 41 as described above. For this reason, the mounting table 7 itself serves as an electrode plate. The mounting table 7 is formed of a conductive material, but the material is not particularly limited and is appropriately selected by the inspection device manufacturer.
The mounting table 7 can be formed with a plurality of fine through holes (not shown). In this case, the through-hole is connected to the suction mechanism, and the inspection object placed on the placement surface can be fixed and held.

The determination means 8 is detected from the one end detection signal detected from the one end detection section 14 and the center detection section 16, the other end detection signal detected from the other end detection section 15 and the center detection section 16, and the second detection means 23. The conduction state of the x-axis wiring is determined based on the tab detection signal.
The determination unit 8 uses the detection signal from the one end detection unit 14, the detection signal from the other end detection unit 15, and the detection signal from the center detection unit 16. First, the detection signal from the one end detection unit 14 and the center signal are detected. Based on the detection signal from the detection unit 15, the one-end detection signal is calculated. Further, the determination unit 8 calculates the other end detection signal based on the detection signal from the other end detection unit 15 and the detection signal from the center detection unit 16.
This one end detection signal can be obtained, for example, by connecting the one end detection unit 14 and the center detection unit 16 to the operational amplifier 81, respectively. The other end detection signal can be obtained, for example, by connecting the other end detection unit 15 and the center detection unit 16 to the operational amplifier 82, respectively.

The determination unit 8 compares the one end detection signal and the other end detection signal to determine the conduction state of the x-axis display wiring xP. This comparison performed by the determination means 8 is performed by comparing the resistance value of the x-axis display wiring xP from the one end detection unit 14 to the center detection unit 16 and the resistance value of the x-axis display wiring xP from the other end detection unit 15 to the center detection unit 16. It will be based on the comparison of values. In accordance with the comparison result, the determination unit 8 determines the conduction state of the x-axis display wiring xP.
The x-axis display wiring xP between the one end detection unit 14 and the center detection unit 16 and the x-axis display wiring xP between the other end detection unit 15 and the center detection unit 16 have substantially the same resistance when there is no continuity abnormality. Three detection units are arranged so as to have values. For this reason, the resistance value of the x-axis display wiring xP from the one end detection unit 14 to the center detection unit 16 and the resistance value of the x-axis display wiring xP from the other end detection unit 15 to the center detection unit 16 each have a conduction abnormality. If they do not exist, the values are almost the same. Therefore, the conduction state of the x-axis display wiring xP can be determined by comparing the one end detection signal and the other end detection signal.

  In order to perform the comparison as described above, the one end detection signal obtained from the operational amplifier 81 and the other end detection signal obtained from the operational amplifier 82 are set to be input to the determination means 8. This input signal is set as a value for determining the conduction state of the x-axis display wiring xP. In this case, for example, if the comparison result between the one end detection signal and the other end detection signal is substantially equal to zero, it is determined that the conduction state of the x-axis display wiring xP is good, and any one of the signals has a difference in output. Thus, it is determined that the conduction state of the x-axis display wiring xP is defective.

  In this manner, the one end detection unit 14, the other end detection unit 15, and the center detection unit 16 are used to face each other between the one end detection unit 14 and the center detection unit 16 based on the detection signals detected from the respective detection units. The resistance value of the x-axis display wiring xP to be compared with the resistance value of the x-axis display wiring xP disposed oppositely between the other end detection unit 15 and the center detection unit 16 is simply compared. In addition to inspecting whether xP is conductive, it is possible to determine good or bad from the conductive state in consideration of the resistance value.

  The determination unit 8 determines the detection signal as described above, and can generate the detection signal by detecting the detection signal from each detection unit by 90 degrees based on the AC signal input from each supply unit. it can. In the embodiment of FIG. 2, each electric signal can be set to be detected when it is output from the operational amplifier 81 and the operational amplifier 82.

The determination unit 8 determines the conduction state of the x-axis tab wiring xT based on the tab detection signal detected from the second detection unit 23. In this determination means 8, the second AC signal is supplied from the x-axis tab wiring xT via the second power feeding unit 22, and capacitively coupled to the mounting table 7. For this reason, if the conduction state of the x-axis tab wiring xT is poor, the second detection unit 23 detects a detection signal different from the case where the conduction state is good, and the second detection unit 23 detects the detection signal. This can be determined based on the detection signal to be detected. In the embodiment of FIG. 2, the detection signal detected by the second detection unit 23 is input to the determination unit 8 via the operational amplifier 84. The detection signal determined by the determination means 8 is generated by 90-degree detection based on the second AC signal.
In the above description, the x-axis tab wiring xT is described, but the same applies to the y-axis tab wiring yT.

  The determination unit 8 further determines the short-circuit state of the x-axis wiring based on the detection signal from the third detection unit 34. A third upper power feeding unit 32 and a third lower power feeding unit 33 are respectively disposed on the x-axis display wiring xP of the x-axis wiring adjacent to the x-axis wiring to be inspected in which the third detection unit 34 is disposed. For this reason, when a short circuit exists in either of the adjacent sides, the x-axis wiring to be inspected is affected by the third AC signal from either of the short circuits. That is, when there is no short circuit abnormality in the x-axis wiring to be inspected, the third detection unit 34 does not detect the detection signal, but when there is a short circuit abnormality, the third detection unit 34 detects the third AC signal. The detection signal affected by the above is detected. In the embodiment of FIG. 2, the detection signal detected by the third detection unit 34 is input to the determination unit 8 via the operational amplifier 85. The detection signal determined by the determination means 8 is generated by 90-degree detection based on the third AC signal.

  The determination unit 8 further determines a short-circuit state between the x-axis wiring and the y-axis wiring based on the detection signal from the fourth detection unit 43. In this case, the short-circuit state between the x-axis wiring and the y-axis wiring is determined based on the detection signal detected from the fourth detection means 43. The determination means 8 is capacitively coupled to the mounting table 7 when the fourth AC signal is supplied from the x-axis display wiring xP via the fourth power feeding section 42. For this reason, if there is a short-circuit abnormality between the x-axis wiring and the y-axis wiring, the fourth detection unit 43 detects a detection signal that is different from the case where there is no short-circuit abnormality, and the fourth detection unit 43 detects the detection signal. This can be determined based on the detection signal to be detected. In the embodiment of FIG. 2, the detection signal detected by the fourth detection unit 43 is input to the determination unit 8 via the operational amplifier 86. The detection signal determined by the determination means 8 is generated by detecting 90 degrees based on the fourth AC signal.

An upper limit value and a lower limit value are set for the detection signals from the respective detection units that are the basis of the determination by the determination means 8, and output values within this range are used. When there is no output value between the upper limit value and the lower limit value, there is a conduction and / or short circuit abnormality. In this case, an abnormality exists in the wiring to be inspected. In order to determine the upper limit value and the lower limit value in this way, in the embodiment of FIG. 3, the operational amplifier A connected to the one end detection unit 14 is connected, and the operational amplifier A is connected to the determination means 8. The operational amplifier A connected to the one end detection unit 14 is connected, and the operational amplifier A is connected to the determination unit 8. An operational amplifier C connected to the other end detection unit 15 is connected, and the operational amplifier C is connected to the determination unit 8. The operational amplifier B connected to the center end detection unit 16 is connected, and the operational amplifier B is connected to the determination means 8.
The above is the basic configuration of the inspection apparatus.

Next, the operation of this inspection apparatus will be described.
The touch panel TP is arranged at a predetermined position of the inspection apparatus, and the inspection of the touch panel TP is started (see FIG. 3).
As shown in FIG. 3, the inspection head unit 5 is moved downward by the moving means 6 toward the paper surface. When the touch panel TP in FIG. 1 is inspected, one end power feeding unit 12, the other end power feeding unit 13, and one end detecting unit are arranged on the x-axis wiring (Line: X1) arranged on the uppermost side in the drawing. 14. The inspection is started when the other end detection unit 15 and the center detection unit 16 are arranged in the wide portion of the x-axis display line xP of the x-axis line Line: X1.

At this time, in FIG. 3, the second power feeding unit 22 and the second detection unit 23 are arranged at positions facing the connection end of the y-axis tab wiring Line: Y5.
When the inspection is started, the second AC signal of the second supply means 21 is supplied to the y-axis tab wiring yT of the y-axis wiring Line: Y5 via the second power feeding unit 22. Next, the second detection unit 23 detects a detection signal from the y-axis tab wiring yT. At this time, the conduction state of the y-axis tab wiring yT is determined based on this detection signal. In this case, the determination means 8 is compared with the electrical signal value (reference value) of the good state of conduction of the y-axis tab wiring yT, and the conduction state of the y-axis tab wiring yT is determined.
As shown in FIG. 3, the inspection head unit 5 moves in the direction of the black arrow. With this movement, the second detection unit 23 moves the y-axis tab wiring yT of the y-axis wiring Line: Y5. Next, the conduction state of the y-axis wiring Line: Y6, the y-axis tab wiring yT of the y-axis wiring Line: Y8, and the y-axis wiring Line: Y8 of the y-axis tab wiring yT are performed. Next, the conduction state of the x-axis tab wiring xT of the x-axis wiring Line: X1 is inspected, the inspection is performed up to the x-axis tab wiring xT of the x-axis wiring Line: Xe, and the y-axis wiring Line: Y4 The conduction state of the y-axis tab wiring yT is inspected, and the conduction state of the y-axis tab wiring yT of the y-axis wiring Line: Y1 is inspected.

When the inspection head unit 5 as shown in FIG. 3 is arranged, the continuity inspection of the x-axis display wiring xP of the x-axis wiring Line: X1 is performed. In this case, when the one-end power supply unit 12 and the other-end power supply unit 13 are arranged in the wide portions of the x-axis display wiring xP, detection signals from the one-end detection unit 14, the other-end detection unit 15, and the center detection unit 16. Will be detected. Next, the one end detection signal is calculated from the one end detection unit 14 and the center detection unit 16, the other end detection signal is calculated from the other end detection unit 15 and the center detection unit 16, and the one end detection signal and the other end detection signal are calculated. The determination unit 8 determines the conduction state of the x-axis display wiring xP.
That is, if the one end detection signal and the other end detection signal are the same, the conduction state of the x axis display wiring xP is good, and if the one end detection signal and the other end detection signal are different, the x axis display wiring xP It is determined that the conduction state is defective.

  The one end detection unit 14, the other end detection unit 15, and the center detection unit 16 also display the x axis display of the x axis wiring Line: Xe from the x axis display wiring xP of the x axis wiring Line: X 1 as the inspection head unit 5 moves. The wiring xP is similarly inspected.

  The determination unit 8 determines the short-circuit state between the x-axis wires from the detection signal of the third detection unit 34. In this case, the detection signal detected by the third detection unit 34 is substantially zero output (no output) if there is no short circuit abnormality in the x-axis wiring. For this reason, when the third detection unit 34 detects a detection signal, the x-axis wiring to be inspected has a short circuit abnormality with one of the adjacent x-axis wirings. The detection by the third detection unit 34 is also performed according to the order of the x-axis wiring as the inspection head unit 5 moves.

  The determination unit 8 determines a short-circuit state between the x-axis wiring and the y-axis wiring from the detection signal of the fourth detection unit 43. When the fourth power supply unit 42 and the fourth detection unit 43 are respectively arranged in the wide portion of the x-axis display wiring xP of the x-axis wiring to be inspected, the fourth power supply unit 42 transmits the fourth AC signal to the x-axis wiring. Will be supplied. At this time, the detection signal detected by the fourth detection unit 43 is sent to the determination unit 8 and compared with the electrical signal value (reference value) when the short-circuit abnormality does not exist between the x-axis wiring and the y-axis wiring to be inspected. Will be. When the short circuit abnormality exists, the capacitance formed by the detection signal and the mounting table 7 is different from the reference value at the normal time, and the short circuit abnormality can be found. The detection by the fourth detection unit 43 is also performed according to the order of the x-axis wiring as the inspection head unit 5 moves.

  FIG. 4 is an embodiment showing a state of inspection of the inspection apparatus 1. In FIG. 4, the continuity test of the x-axis display line xP of the x-axis line Line: X6 is performed, and the continuity test of the y-axis tab line yT of the y-axis line Line: Y4 is performed. In this case, a short-circuit inspection is performed on the x-axis wiring line: X8, the x-axis wiring line: X7, and the x-axis wiring line: X9, and the short-circuit inspection between the x-axis wiring line: X5 and all y-axis wirings. Will be implemented.

When the continuity / short-circuit inspection of the x-axis wiring is performed and the inspection of all the x-axis wirings is completed, the continuity inspection of the y-axis wiring is performed. In this case, the y-axis wiring is inspected by moving the inspection head unit 5 in the x-axis direction of the touch panel TP. Note that this case can be dealt with by rotating the touch panel TP by 90 degrees or by providing the moving means 6 so as to move the moving means 5 also in the x-axis direction.
As described above, the inspection of the y-axis wiring is performed by conducting the continuity test, whereby the inspection of the x-axis wiring and the y-axis wiring of the touch panel TP is executed. That is, the inspection head unit 5 can be inspected for continuity and short-circuiting of all the wirings by moving the inspection head unit 5 twice in the y-axis direction and the x-axis direction.

The continuity test of the y-axis wiring is performed using the one end power supply unit 12, the other end power supply unit 13, the one end detection unit 14, the other end detection unit 15, and the center detection unit 16. The detection unit 15 can appropriately adjust the arrangement position according to the length of the y-axis display wiring yP by using a drive mechanism with respect to the center detection unit 16. For this reason, even when the lengths of the x-axis wiring and the y-axis wiring are different, the touch panel TP can be inspected in an appropriate manner, similarly to the x-axis display wiring xP.
The above is the description of the operation of the present invention.

  The inspection apparatus 1 can perform continuity / short-circuit inspection of the x-axis wiring and the y-axis wiring of the touch panel TP by moving the inspection head unit 5 twice in the x-axis direction and the y-axis direction. The processing speed can be improved as compared with a contact-type inspection apparatus in which inspection is performed by contacting an inspection probe. In particular, since the inspection head unit 5 can be inspected by moving it continuously by the moving means 6, the processing speed can be improved.

  In addition, the inspection method for the wiring of the touch area of the touch panel TP (the x-axis display wiring xP and the y-axis display wiring yP) is not limited to the presence or absence of an electrical conduction state. Since the detection unit 14, the other end detection unit 15, and the center detection unit 16 are used to determine the conduction state based on the resistance value between the detection units, it is possible to accurately inspect the wiring in the touch area.

  In addition, since the one end detection unit 14 and the other end detection unit 15 can be moved relative to each other about the center detection unit 16 by the drive mechanism, the inspection can be performed by appropriately adjusting according to the length of the wiring in the touch area. And a highly versatile inspection apparatus can be provided.

DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus 11 ... 1st supply means 12 ... One end electric power feeding part 13 ... Other end electric power feeding part 14 ... One end detection part 15 ... Other end detection part 16 ... Center Detection unit 21 ... second supply unit 22 ... second power supply unit 23 ... second detection unit 31 ... third supply unit 41 ... fourth supply unit 42 ... fourth power supply unit 43... Fourth detection unit 5... Inspection head unit 6.

Claims (5)

An x-axis wiring comprising an x-axis display wiring that is a rod-shaped wiring, an x-axis tab wiring serving as a connection end for electrically connecting the x-axis display wiring to the outside, and a y-axis display wiring that is a rod-shaped wiring; An inspection apparatus for inspecting an inspection object in which a plurality of y-axis wirings composed of y-axis tab wirings serving as connection ends for electrically connecting the external and the y-axis display wirings are formed in a matrix,
A conductive mounting table on which the inspection object is mounted in order to inspect the inspection object;
First supply means for supplying an AC signal to the x-axis display wiring of the x-axis wiring to be inspected;
One end power supply portion that is electrically connected to one side of the first supply means and arranged in a non-contact manner at one end of the x-axis display wiring;
The other end of the first supply means is electrically connected to the other end of the x-axis display wiring and arranged in a non-contact manner on the other end of the x-axis display wiring;
One end detection unit that is arranged in a non-contact manner at one end of the x-axis display wiring to be inspected, and detects an electric signal from the one end in a non-contact manner;
The other end detection unit that is arranged in a non-contact manner on the other end of the x-axis display wiring to be inspected and detects an electrical signal from the other end in a non-contact manner;
A center detector that is arranged in a non-contact manner in the center of the x-axis display wiring to be inspected and detects an electrical signal from the center;
A second supply means for supplying an AC signal to the x-axis tab wiring to be inspected and having one side electrically connected to the mounting table;
A second power feeding portion that is electrically connected to the other side of the second supply means and disposed in a non-contact manner on the x-axis tab wiring;
A second detection unit arranged in a non-contact manner at a connection end of the x-axis tab wiring;
One end detection signal detected from the one end detection unit and the center detection unit, the other end detection unit and the other end detection signal detected from the center detection unit, and a tab detection signal detected from the second detection unit Based on the determination means for determining the conduction state of the x-axis wiring,
An inspection head unit including the one end detection unit, the other end detection unit, the center detection unit, the one end power supply unit, the other end power supply unit, the second detection unit, and the second power supply unit;
An inspection apparatus comprising: moving means for moving the inspection head portion on the surface of the inspection object in the y-axis direction. The inspection device includes:
A third supply means for supplying an AC signal for detecting a short circuit abnormality between the x-axis wiring to be inspected and the adjacent x-axis wiring;
The inspection head part is
A third upper surface that is disposed in a non-contact manner on one side of the x-axis display wiring adjacent to the x-axis display wiring of the x-axis wiring to be inspected and is electrically connected to one side of the third supply means. A power feeding unit;
A third lower power feeding portion that is disposed in a non-contact manner on the other side of the x-axis display wiring adjacent to the x-axis display wiring to be inspected, and is electrically connected to the other side of the third supply means;
A third detection unit disposed in a non-contact manner on the x-axis display wiring of the x-axis wiring to be inspected,
The inspection apparatus according to claim 1, wherein the determination unit determines a short-circuit state of the x-axis wiring to be inspected based on a detection signal from the third detection unit. The inspection device includes:
Supplying an AC signal for detecting a short circuit abnormality of the x-axis wiring to be inspected and all the y-axis wirings, and having a fourth supply means electrically connected to one side of the mounting table,
The inspection head portion is
A fourth power feeding unit arranged in a non-contact manner on the x-axis display wiring of the x-axis wiring to be inspected;
A fourth detector arranged in a non-contact manner on the x-axis display wiring of the x-axis wiring to be inspected,
2. The inspection apparatus according to claim 1, wherein the determination unit determines a short-circuit state between the x-axis wiring to be inspected and all the y-axis wirings based on a detection signal from the fourth detection unit. . The inspection head part is
The inspection apparatus according to claim 1, further comprising a drive mechanism that allows the one end detection unit and the other end detection unit to be relatively close to each other with the center detection unit as a center.   The inspection apparatus according to claim 1, wherein the moving unit moves the inspection head unit on the surface of the inspection object in the x-axis direction.

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