KR101430040B1 - Insulation inspection device and insulation inspection method - Google Patents

Abstract

(assignment)
The present invention provides an insulation inspection apparatus for inspecting insulation between a plurality of wirings formed on a surface of an inspection object such as a touch panel and the insulation inspection method.
(Solution)
Two or more different frequencies of electric power are applied to inspect the insulation between wires, the impedances thereof are calculated, and the insulation state between the wires is calculated on the basis of these impedances.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an insulated inspecting apparatus,

The present invention relates to an insulation inspection apparatus for inspecting insulation between a plurality of wiring lines (wirings) formed on the surface of an inspection object such as a touch panel and a method of inspecting the insulation inspection apparatus More particularly, the present invention relates to an insulation inspection apparatus capable of inspecting insulation between wirings formed on an object without damaging the object by using a contact electrode (supply electrode) and a detection electrode (non-contact electrode) ≪ / RTI >

Conventionally, an object to be inspected having wirings formed in an x-axis direction and a y-axis direction and arranged in a matrix on an ITO film called a touch panel (or a touch screen or a touch screen) a contact (a needle-shaped conduction probe) is brought into contact with each of the wirings arranged in the y-axis direction so that conduction of each wirings and short-circuit inspection with the adjacent wirings are carried out there was.

However, in the method of inspecting the contacts by bringing the contacts into contact with the respective wirings, there is a problem that the electrical characteristics can not be accurately measured due to the instability of contact resistance caused by the oxide film because the wirings and contacts formed in the ITO film are not stable. Further, since the contact is pressure-contacted with the wiring to be inspected, there is a problem that a contact is brought into contact with the wiring to form a dent.

In order to solve such a problem, a non-contact type inspection method as disclosed in Patent Document 1 has been proposed. According to the technique disclosed in Patent Document 1, a base electrode (base electrode) disposed in a placement portion on which an object to be inspected is placed is prepared, and a capacitance between the base electrode and a wiring to be inspected ) And the capacitance between the base electrode and the wiring other than the object to be inspected.

In the technique disclosed in Patent Document 1, since the electrostatic capacitance between the base electrode and the base electrode for inspecting the object to be inspected must be inspected, it is necessary to detect the electrostatic capacitance between the base electrode and the base electrode according to the size of the wiring It is impossible to simplify or simplify the apparatus.

In addition, in the insulation inspection between wirings as described in Patent Document 1, when insulation defects having a high resistance value (for example, a resistance value of several MΩ) are generated between the wirings to be inspected, this insulation failure is detected There is a problem that it can not be done. This is a problem that since the capacitance between wiring lines is a very small capacitance value (for example, a capacitance value of several pF), the impedance of the insulation failure location can be detected only by a measurement error.

Japanese Patent Application Laid-Open No. 2000-338168

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide an insulation inspection apparatus and a method thereof, which are capable of detecting insulation defects even if insulation defects with a high resistance value are provided.

According to an aspect of the present invention, there is provided an insulation inspection apparatus for inspecting insulation between a plurality of wirings formed on an object to be inspected, the insulation inspection apparatus comprising: A first power feeder (first power feeder) disposed in a non-contact manner with one of the wirings for supplying the power between the wirings; A second feeding part (second feeding part) which is arranged in a non-contact manner with the other wiring between the wirings for supplying the electric power, and a second feeding part (second feeding part) for detecting the electric signals of the one wiring or the other wiring (Measurement electrode portion) arranged in a non-contact manner with the wiring of the other electrode or the wiring of the other, (Calculating means) for calculating the impedance between the wirings, and a calculating means for calculating the impedance between the wiring and the wiring, by requesting the power supply means to supply electric power of a predetermined frequency and for calculating the impedance when the electric power of the predetermined frequency is applied And a control means for requesting the control means to calculate an impedance when power of at least two or more different predetermined frequencies is supplied and also to request the control means to calculate the impedance of the wiring from the two or more calculated impedances And a judging means (judging means) for judging whether or not the circuit is good (good or bad).

According to a second aspect of the present invention, in the inspecting apparatus according to the first aspect, the determining means calculates a displacement amount corresponding to the frequency of two or more calculated impedances, and determines a positive portion according to the displacement amount Lt; / RTI >

According to a third aspect of the present invention, there is provided an insulation inspection method (insulation inspection method) for inspecting insulation between a plurality of wirings formed on an object to be inspected, comprising the steps of supplying electric power to one wiring forming the wiring to be inspected and the other wiring (Measurement plates) for detecting electric signals of the one wiring are disposed in a noncontact manner, and electric power of two or more different frequencies is supplied The insulation inspection method is characterized by calculating an impedance between wirings at each frequency and determining an insulation state between the wirings in accordance with the amount of displacement of the at least two calculated impedances in accordance with the frequency.

These problems are solved by providing these inventions.

According to the invention as set forth in claim 1 or claim 3, impedance is calculated using electric power of a plurality of frequencies, and insulation inspection is performed based on these impedances, so that even if a short circuit that is an insulation abnormality has a high resistance value, And it is possible to detect by a configuration of an inexpensive device without using a complicated device.

According to the invention of claim 2, since the insulation state is determined using the amount of displacement of the impedance, more accurate insulation inspection can be performed by using a plurality of impedances.

1 is a block diagram showing a schematic configuration of an insulation inspection apparatus according to the present invention.
Fig. 2 shows a graph when the insulation state is good and the case where the insulation state is poor. The abscissa represents the logarithm of the frequency, and the ordinate represents the impedance output (ratio of the capacitance component to the resistance component).
3 is a schematic view showing an inspection state of the insulation inspection apparatus according to the present invention.
Fig. 4 shows a flowchart of the insulation inspection method according to the present invention.

Best mode for carrying out the present invention will be described.

A plurality of wirings are formed on a surface of an inspection object inspected by an insulation inspection apparatus or an insulation inspection method of the present invention. The shape of the wirings is not particularly limited, but the insulating state between wirings between adjacent wirings (wirings) can be suitably inspected in the present invention.

The insulation inspection apparatus 1 of the present invention will be described. 1, the insulation inspection apparatus 1 according to the present embodiment includes a power supply unit 2, a first power supply unit (first power supply unit) 3, a second power supply unit (second power supply unit) A measuring electrode unit 5, a calculating unit 6, a control unit 7 and a judging unit 8 as shown in FIG. In addition, two wirings are selected among the wirings to be inspected, and these two wirings are subjected to insulation inspection.

The power source means 2 applies electric power of a predetermined frequency to inspect the insulation between the wirings to be inspected. This power supply means 2 supplies an alternating voltage whose frequency has been changed in accordance with an electric signal from a control means 7 which will be described later. The power source means 2 can use an AC power source capable of changing the frequency. The power source means 2 can appropriately change the AC voltage of the frequency requested by the control means 7 in accordance with a command from the control means 7. [

The first power feeder 3 is disposed in a non-contact manner with one of the wirings TA between these wirings in order to supply power from the power source means 2 between wirings. The first power feeder 3 is a conductive plate member having a width equal to or smaller than the width of one of the wirings TA so as to supply power to only one of the wirings TA, . The first power feeder 3 has a certain distance from one of the wirings TA and is arranged to face them. By disposing the first feeder 3, the first feeder 3 and one of the wires TA are electrostatically coupled.

The second power feeder 4 is disposed in a noncontact manner with the other wiring TB between these wirings in order to supply power from the power source means 2 between the wirings. The second power feeder 4 is formed of a conductive plate member having the same width or smaller width as the other wiring TB so as to supply power only to the other wiring TB. This second power-feeding portion 4 has a certain distance from the other wiring TB and is arranged so as to face the other. By disposing the second feeding part 4, the second feeding part 4 and the other wiring TB are electrostatically coupled.

The first power feeder 3 and the second power feeder 4 are arranged as described above so as to form an electrical closed loop between the power feeder and the wiring.

The measuring electrode unit 5 is disposed in a non-contact manner with one of the wirings TA for detecting an electric signal of one of the wirings TA. The measuring electrode unit 5 is formed of a conductive plate-shaped member having a width equal to or smaller than the width of one of the wirings TA so as to detect an electric signal from one of the wirings TA . The measuring electrode portion 5 has a certain distance from one of the wirings TA and is disposed opposite to the other. By disposing the measuring electrode unit 5 in this manner, the measuring electrode unit 5 and one of the wirings TA are electrostatically coupled. In the above description, the measuring electrode unit 5 is disposed in a non-contact manner with one of the wirings TA. However, the measuring electrode unit 5 may be disposed in a non-contact manner with the other wirings TB. In this case, TA may be replaced with the other wiring TB so that the above conditions are met.

The first feeding part 3 and the second feeding part 4 are disposed at one end of one wiring TA and the other wiring TB at one end, Is preferably arranged at the other end (the other end) of the wiring TA or the other wiring TB. By arranging in this way, it is possible to detect the insulation state in the entire wiring.

The calculating means 6 calculates the impedance between the wirings based on the electric signal from the measuring electrode unit 5. [ The calculating means 6 is electrically connected to the measuring electrode portion 5 and receives the electric signal from the measuring electrode portion 5 so that the information of the electric signal and the electric power information Value information or AC voltage value information). The calculation result calculated by the calculation means 6 is transmitted to the determination means 8, which will be described later, in combination with the information between the wirings. The calculation means 6 can use an arithmetic processing device or the like capable of collecting and calculating electric signal information and electric power information.

The control means 7 requests the power supply means 2 to supply the power of a predetermined frequency and also requests the calculating means 6 to calculate the impedance when the power of the predetermined frequency is applied. The control means 7 controls the power applied by the power supply means 2 and controls the impedance between the wirings when the power is applied.

The judging means 8 requests the control means 7 to calculate the impedance when at least two or more different frequencies of power are supplied and judges whether the wiring is insulated from the two or more calculated impedances . The judging means 8 supplies power of two or more different frequencies by the control means 7 to calculate two or more impedances. Then, the judging means 8 judges whether or not the insulating state between the wirings is correct using the calculated two or more impedances.

The determination method of the insulation state performed by the determination means 8 will be described. Although two or more pieces of impedance information calculated as described above are calculated, the case where two pieces of impedance information are used will be described. The impedance information acquired by the determination means 8 is acquired by being combined with the frequency information. Therefore, the judging means 8 can treat this impedance information as a displacement value when the frequency is changed, and judges the part of the insulation state in accordance with the displacement of the impedance.

The determination based on the amount of displacement of the impedance due to the displacement of the frequency which is performed by the determination means 8 as above makes it possible to detect an electric signal influenced only by the capacitance between the wirings when the insulation state between wirings is good, The electric signal subjected to the influence of the capacitance between the wirings and the resistance (short-circuit state) is detected. Therefore, by calculating the impedance value based on two (plural) different frequencies, It is detected whether or not it is affected by the influence or the resistance.

Specifically, when the insulation state between the wirings is good, even if the impedances at different frequencies are calculated, only the influence due to the capacitance between the wirings is calculated. That is, even if the frequency is changed, the resistive component is not detected, and only the capacitance component of the capacitance between the wirings is calculated.

Further, when the insulation state between the wirings is poor, the influence of the capacitance between the wirings and the influence of the short circuit is calculated. That is, the influence of the resistance component is largely reflected in the low-frequency region (low-frequency region) of the frequency, while the influence of the capacitive component is largely reflected in the wide-region (high-frequency region) of the frequency.

As described above, the influence of the resistance component is detected by changing the frequency as described above to determine the insulation state. Fig. 2 shows a graph when the insulation state is good and the case where the insulation state is poor as described above.

By calculating the characteristics of the two frequencies and the respective impedances as described above, the determining means 8 calculates the displacement amount corresponding to the frequency displacement based on the calculated impedance, and if the displacement amount is within the predetermined range, It can be judged that it is defective. Further, it is also possible to determine the amount of displacement in the case where the insulation state is good in advance as a reference value, and determine the deviation amount from the reference value. The determination means 8 can be implemented by providing an arithmetic processing unit or a storage unit.

In the above description, the case where the two frequencies are different from each other and the two different frequencies are described as being divided into the low frequency band and the wide frequency band. However, the frequency itself may be divided into a low frequency (for example, 10 to 1000 Hz) A frequency in a frequency range (for example, 1 MHz to 100 MHz) may be used, or a frequency in which one frequency is a specific frequency and another frequency is 100 times or 1000 times greater than the specific frequency may be used.

In addition, the number of different frequencies is not limited to two, and two or more frequencies can be used. By using three or more frequencies, it is possible to detect the displacement amount of the impedance by the frequency with high accuracy, and the inspection accuracy can be improved.

A plurality of electric power having the predetermined frequency requested by the control means 7 to the power source means 2 may be set in advance in the control means 7 or may be appropriately set to the control means 7 by a user or the like You can also type. The predetermined frequency to be controlled by the control means 7 can be appropriately changed according to the interval between the wirings and the shape and area of the measuring electrode unit 5. [

The construction of the insulation inspection apparatus of the present invention has been described above.

Next, the operation of the insulation inspection apparatus of the present invention will be described.

3 is a plan view schematically showing the insulation inspection method of the present invention. 3, one wiring TA and the other wiring TB appear between the wirings to be inspected and the insulation state between the wiring TA and the wiring of the wiring TB is inspected. 4 is a flowchart showing each step of the insulation inspection method of the present invention.

The first frequency and the second frequency are set to perform the insulation inspection. At this time, for example, the first frequency is set at 100 Hz and the second frequency is set at 100 MHz. Further, in order to determine the insulation state between wirings, the amount of displacement of the impedance when the alternating voltage of the first frequency and the alternating voltage of the second frequency are applied in the case of the good insulation state is set as the determination reference value. At this time, for example, 10% of the determination reference value is set as a threshold value for determining a good state.

The first power feeder 3 is disposed at one end of one of the wirings TA and the second power feeder 4 is connected to the other wirings TB to select between wirings to be inspected. And the measuring electrode unit 5 is disposed at the other end (one end) of one of the wirings TA (see S1).

Next, the control means 7 requests the power supply means 2 and the calculation means 6 to calculate the impedance value when the AC voltage of the first frequency is applied between the wirings. Therefore, the power supply means 2 supplies the AC voltage of the first frequency between the wirings via the first feeding portion 3 and the second feeding portion 4 (see S2).

At this time, the calculating means 6 calculates the impedance between the wirings based on the electric signal measured through the measuring electrode unit 5 (see S3). The information of the alternating voltage applied by the power source means 2 and the calculated impedance information are stored in a memory means such as a memory.

Subsequently, the control means 7 requests the power supply means 2 and the calculation means 6 to calculate the impedance value when the AC voltage of the second frequency is applied between the wirings. Therefore, the power supply means 2 supplies the AC voltage of the second frequency between the wirings via the first power feeder 3 and the second power feeder 4 (see S4).

At this time, the calculating unit 6 calculates the impedance between the wirings based on the electric signal measured through the measuring electrode unit 5 (see S5). The information of the alternating voltage applied by the power source means 2 and the calculated impedance information are stored in a storage means such as a memory.

When the AC voltage of the first frequency and the AC voltage of the second frequency are applied and the impedance when each voltage is applied is measured, the amount of displacement of the impedance is calculated (see S6). When the amount of displacement of the impedance is calculated, this calculation result is compared with a predetermined determination reference value, and it is determined whether or not a calculation result exists in the threshold value of the determination reference value. If the calculated result is within the determination reference threshold value, it is determined that the insulation state between the wirings to be inspected is good, and if the calculation result is not within the determination reference threshold value, the insulation state between the wirings to be inspected is determined to be defective (S7 Reference).

After the insulation state between the wirings to be inspected is judged, the insulation state between the following wirings is judged, and the first feeding part 3, the second feeding part 4 and the measuring electrode part 5 are inspected And are arranged to move to respective positions between the wirings.

If it is determined that the insulation state is defective, the insulation inspection of the inspected object may be terminated.

The insulation inspection method according to the present invention has been described above.

1: Insulation inspection device
2: power supply means
3: First class all part
4: Second class all parts
5: Measurement electrode section
6: Calculation means
7: Control means
8:
TA: One-way wiring
TB: the other wiring

Claims (3)

An insulation inspection apparatus for inspecting insulation between a plurality of wirings formed on an object to be inspected,
A power supply means (power supply means) for applying electric power of a predetermined frequency to inspect the insulation between the wirings to be inspected,
A first power feeder (first power feeder) disposed in non-contact with one of the wirings for supplying the power between the wirings,
A second power feeder (second power feeder) disposed in non-contact with the other of the wirings for supplying the power between the wirings;
A measurement electrode portion (measurement electrode portion) disposed in non-contact with the one wiring or the other wiring for detecting electric signals of the one wiring or the other wiring,
Calculating means (calculating means) for calculating an impedance between the wirings based on an electrical signal from the measuring electrode portion;
It requires the power supply means to supply an electric power having a predetermined frequency between the wirings is inspected and at the same time, control means for requesting to said calculation means to calculate the impedance when the power of the predetermined frequency is applied between the wires to the test object ( Control means)
(2), wherein said control means (3) requests said control means (5) to calculate an impedance when electric power of at least two or more different frequencies is supplied between wirings to be inspected , (Determination means)
And inspecting the insulation inspecting apparatus.
The method according to claim 1,
Wherein the determination means calculates a displacement amount corresponding to the frequency of the two or more calculated impedances and determines both sides in accordance with the displacement amount.
An insulation inspection method (insulation inspection method) for inspecting insulation between a plurality of wirings formed on an object to be inspected,
A power supply plate (power supply plate) for supplying electric power is arranged in a noncontact manner to one wiring forming the wiring to be inspected and the other wiring, and a measuring plate (Measuring plate) is disposed in a noncontact manner,
Two or more electric powers of different frequencies are supplied, the impedance between the wirings at each frequency is calculated,
And judging the insulation state between the wirings in accordance with the amount of displacement of the at least two calculated impedances in accordance with the frequency
Insulation inspection method characterized by.

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