KR100324138B1 - Inspection apparatus and method adapted to a scanning technique employing a capacitance gap sensor probe - Google Patents

Abstract

The present invention relates to a scanning inspection apparatus and method using a capacitive proximity sensor probe, the apparatus according to the present invention is at least one of generating an output voltage according to the electrical state of the electrode patterns while the electrode patterns are scanned in a non-contact manner Capacitive proximity sensor probes; And a control unit for controlling the capacitive proximity sensor probe and determining the electrical characteristics based on the output voltage of the capacitive proximity sensor probe that varies according to whether the electrode pattern is grounded or not. According to the present invention, when the electrode pattern is scanned while the capacitive proximity sensor is close to a plurality of electrode patterns formed on the panel, whether the electrode pattern is opened or shorted based on a change in the output voltage of the capacitive proximity sensor. Check it. According to the present invention, manufacturing cost can be reduced, inspection accuracy can be improved, and product yield can be increased.

Description

Inspection apparatus and method using a capacitive proximity sensor probe {Inspection apparatus and method adapted to a scanning technique employing a capacitance gap sensor probe}

The present invention relates to an apparatus and method for inspecting electrical characteristics (open / short) of an electrode pattern formed in a panel-like product such as, for example, a plasma display panel (PDP).

In general, a glass panel, such as a PDP, includes a front panel 11 and a rear panel 10 as shown in FIGS. 1A and 1B. A plurality of electrode patterns 10a and 11a are formed on the surface of the rear panel 10.

In general, in the case of 42-inch PDP, the line width and pitch of one of the electrode patterns 10a and 11a are 50 μm and 300 μm, respectively, whereas the line length reaches 1 m. Rather, it often happens that lines are broken or short with adjacent lines in the manufacturing process, such as subsequent heat treatment. Therefore, checking whether the formed electrode patterns 10a and 11a are broken or short-circuited is essential to increase the yield of the finished PDP.

In order to examine the electrical characteristics as described above for the electrode patterns 10a and 11a, a test pin block 12 as shown in FIG. 2 is conventionally used. In the inspection using the same, a plurality of pins 12a formed in the test pin block 12 are connected to the connector connection portions, that is, both ends 10b and 10c of the electrode pattern 10a and both ends 11b of the electrode pattern 11a. ) And 11c, and then the voltage output through the wire 12b corresponding to each pin 12a is measured. That is, through the conduction test between the inspection target electrode pattern and the adjacent pattern, the electrical characteristics of the pattern, that is, whether open or short-circuited is examined.

However, this conventional inspection method has the following problems.

First, since the test pin block 12 of FIG. 3 is a consumable that is expensive and has no durability, the test pin block 12 serves as an increase factor of product cost. That is, the pin 12a formed on the test pin block 12 is easily damaged by contact in the process of inspecting the electrode pattern, and thus there is a problem that the inspection cost is high.

Second, when the position and pitch of the electrode pattern are changed due to the design change of the PDP, all of the test pin blocks 12 and the related mechanical parts have to be replaced. There was a problem that fell very much.

Third, in the case where the electrode patterns are formed in the same manner as in FIGS. 1A and 1B, in addition to the connector connection portions 10b, 10c, 11b, and 11c of the PDP pattern, the pixel portions' A 'and' B 'part) also had to contact the pin 12a of the test pin block 12, there was a problem that a defective product is generated due to the scratch (scratch) due to the contact.

Fourth, when the flatness of the glass panel on which the electrode pattern is formed is not good, the large glass plate is precisely placed on the entire glass panel in order to make the panel horizontal so that the pin 12a of the test pin block 12 can be exactly in contact with the electrode pattern. In addition to being fixed with a vacuum chuck, a precise servo mechanism of xy-theta 3-axis is required for precise xy positioning of the electrode pattern, resulting in an increase in manufacturing cost.

Fifth, in the case of the pixel portion in which an additional thin film operation such as a dielectric, a fluorescent layer, and a protective film was performed on the electrode pattern 101, the inspection itself was impossible.

Accordingly, the present invention can be used for all types of patterns by devising a scan method using a capacitive proximity sensor probe to improve the problem of the conventional test pin block. In addition, the primary purpose is to reduce the occurrence of scratches and the increase in manufacturing cost, and to improve the inspection accuracy and to inspect the electrical characteristics of the electrode pattern even after additional thin film work is performed on the electrode pattern. For the second purpose.

1A and 1B show electrode patterns formed on a general PDP.

Figure 2 shows a conventional test pin block for inspecting the electrical characteristics of the electrode pattern.

Figure 3 is a block diagram showing the configuration of the entire system including the test method of the present invention.

Figure 4a shows a combination of the capacitive proximity sensor probe and the rolling wire probe in the present invention.

Figure 4b shows an arrangement combined with the test pin block in the present invention.

Figure 5 shows the configuration of the capacitive proximity sensor probe according to the present invention.

6A illustrates a method of inspecting an electrode pattern by combining a rolling wire probe with a capacitive proximity sensor probe according to the present invention.

6b illustrates a method of inspecting an electrode pattern by combining a conventional test pin block with a capacitive proximity sensor probe according to the present invention.

Figure 7 shows that the air static pressure pad is provided in the present invention.

* Description of the symbols for the main parts of the drawings *

10, 11, 100: panel 10a, 11a, 101: electrode pattern

20: control unit 110110 ': rolling wire probe

120: capacitive proximity sensor probe

121: AC power 123: Amplifier

150: air static pressure pad 151,152: parallel leaf spring

In order to achieve the above object, the present invention provides a device for inspecting electrical characteristics of a plurality of electrode patterns formed on a panel, wherein one end of the electrode pattern is non-contacted to generate an output voltage according to the electrical state of the electrode patterns. At least one capacitive proximity sensor probe; A contact probe providing a grounding condition at the other end of the electrode pattern; And a controller for controlling the capacitive proximity sensor probe and determining the electrical characteristics based on the output voltage of the capacitive proximity sensor probe that is varied according to whether the electrode patterns are grounded or not.

Referring to the entire inspection system of the present invention by the block diagram of FIG. 3, the entire system includes a control unit 20 for controlling the overall operation of the inspection device, a touch panel, a keyboard or a mouse, and the like. An input unit 21 for inputting a command to the display unit, a display unit 22 formed of a TFT-LCD, etc., and displaying an operation state of the inspection apparatus under the control of the control unit 20, the control unit 20, and an external device. The bus network 23 provides an interface between the wires 23 and the wires under the control of the control unit 20 so as to make a wire contact on the electrode patterns, thereby scanning the electrode patterns and providing the scanned information to the control unit 20. According to the control of the rolling wire module 24 (separately applied) and the control unit 20, the electrode pattern is scanned in a non-contact manner, and the capacitive proximity sensor module 25 provides the scanned information to the control unit 20. phrase It is.

The capacitive proximity sensor module 25 is composed of a non-contact capacitive proximity sensor probe, a loading / unloading actuator, and an air pressure pad, which in turn inspect the electrical characteristics of the electrode pattern by using the capacitance of the electrode pattern.

Capacitive proximity sensor probe 120 belonging to the capacitive proximity sensor module in the present invention, as shown in Figure 5, parallel to the AC power supply 121 and the AC power supply 121 for supplying an AC current (i) When the capacitive proximity sensor probe 120 is close to the glass panel, the electrode 122 and the electrode 122 forming the capacitor C together with the electrode pattern 101 on the glass panel are connected in parallel with the electrode 122. The amplifier 123 generates an output voltage Vo by amplifying an input voltage that varies according to the open and short states of 101. Here, the output voltage Vo is supplied to the controller 20 described above.

The output voltage Vo of the capacitive proximity sensor probe 120 is defined as d / A, where 'd' is the distance between the electrode pattern 101 and the electrode 122, and 'A' is the electrode 122. It means the effective area of.

In the state in which the capacitive proximity sensor probe 120 configured as described above is in a non-contact manner corresponding to the grounded target surface, that is, the electrode pattern 101, the AC power source i is applied to the electrode 122. A voltage proportional to the distance d is generated at the electrode 122 and this voltage is amplified by the amplifier 123, resulting in an output voltage Vo proportional to the distance d. When the ground state of the electrode pattern 101 is cut off, an effect such that the distance d to the target surface is infinite is obtained and the output voltage Vo rises to the maximum value.

6A and 6B illustrate a method of inspecting the electrode pattern 101 by using a single contactless method using the operating characteristics of the capacitive proximity sensor probe 120.

First, in the case of the method as shown in FIG. 4A, two rolling wire probes 110 and 110 ′ are disposed at one end of the panel 100 on which the electrode pattern 101 is formed, and at the other end of the capacitance. Type proximity sensor probe 120. The rolling wire probes 110 and 110 'are provided with rolling wires 118 and 118', respectively, and the rolling wires 118 and 118 'are provided by the above-described loading / unloading actuators. While rotating at a constant speed, it is controlled to make a rolling contact on the electrode pattern 101. At this time, the rolling wires 118 and 118 are grounded through the switches SW1 and SW2. When the open state of the electrode pattern 101 is checked in this state, the control unit 20 controls the control unit 20. When the switch SW1 is connected, the ground effect is obtained by the width of the corresponding electrode pattern 101, so that the output voltage Vo of the capacitive proximity sensor probe 120 is reduced by a certain size. If the middle of the electrode pattern 101 is open, the electrode pattern 101 on the target surface is not grounded even though the rolling wire 118 of the rolling wire probe 110 is grounded through the switch SW1. The output voltage Vo does not change. Therefore, the controller 20 detects the change in the output voltage Vo to determine whether the electrode pattern 101 is open and displays it on the display unit 22.

When the short circuit state of the electrode pattern 101 is examined, both the switches SW1 and SW2 are connected. Therefore, since the electrode patterns adjacent to each other are grounded through the rolling wires 118 and 118 ', the grounded area of the target surface of the capacitive proximity sensor probe 120 is increased. Therefore, when the adjacent electrode pattern is normal, the output voltage Vo becomes smaller. If the two electrode patterns are short-circuited with each other, the same output voltage Vo is generated even when only one rolling wire probe is grounded. You can check for shorts between patterns. In addition, as shown in Figures 4b and 6b can be used in combination with a conventional test pin block instead of a rolling wire probe, the inspection method is the same as described above.

As such, the present invention can eliminate the risk of scratches on the inspection surface, in particular, the pixel portion by using a non-contact type inspection method using the capacitive proximity sensor probe 120, and a non-conductive thin film is formed on the inspection surface. Inspection will be possible later.

By improving the principle as described above, two or more capacitive proximity sensor probes 120 may be used to inspect the electrode pattern 101 in the same manner as described above to prevent scratches on the pixel portion. That is, if a plurality of capacitive proximity sensor probes 120 are installed in the middle of the electrode pattern 101, it is possible to find out the section information in which the defect is generated, and even in the case where the opening and the short circuit are generated in various places. More information about the number and interval of defects can be obtained.

Meanwhile, as shown in FIG. 7, the capacitive proximity sensor probe 110 may be used together with the air pressure pad 150 described above. The air static pressure pad 150 is for maintaining the test surface of the glass panel 100 and the body of the capacitive proximity sensor probe 120 to maintain a constant distance.

That is, the glass panel 100 may be warped through various processes such as storage or deposition of a dielectric film in a furnace, so that the glass panel 100 is conventionally warped by using a vacuum chuck or the like during inspection. I made it horizontal. However, since such a conventional technology requires a lot of cost, in the present invention, air nozzles are installed on the bottom of the capacitive proximity sensor probe 120, respectively, to obtain a floating effect by air static pressure. To this end, the parallel plate springs 151 and 152 support the support member 160 and the capacitive proximity sensor probe 120 so that the capacitive proximity sensor probe 110 can move freely in the vertical direction, that is, the gravity direction. Connected in between. When the air of a predetermined pressure is discharged to the glass panel 100 through the air nozzle, even if the glass panel 100 is warped, the distance between the capacitive proximity sensor probe 120 and the glass panel 100 can be kept constant. If the flatness of the glass panel 100 is not good, the inspection can be performed without any adjustment.

As described above, the present invention can be used universally even if the shape of the electrode pattern is changed by devising a scan type inspection technique using the capacitive proximity sensor probe, thereby reducing the burden of manufacturing cost increase. In addition, according to the present invention, since the inspection can be made in a non-contact manner using a capacitive proximity sensor probe, it is possible to exclude the occurrence of scratches and to inspect the electrical properties of the electrode pattern even after the additional thin film work on the electrode pattern product In addition, according to the present invention, by installing an air pressure pad equipped with an air nozzle on the bottom of the capacitive proximity sensor probe, even if the flatness of the glass panel is not good, the electrode pattern is not damaged. Close inspection can be performed.

In addition, the present invention can further improve the accuracy of the entire inspection device by using in conjunction with a separate panel transfer device.

Claims (6)

An apparatus for inspecting electrical characteristics of a plurality of electrode patterns formed on a panel, At least one capacitive proximity sensor probe for non-contact scanning one end of the electrode pattern to generate an output voltage according to an electrical state of the electrode patterns; A contact probe providing a grounding condition at the other end of the contact pattern; And a control unit configured to control the capacitive proximity sensor probe and determine the electrical characteristics based on an output voltage of the capacitive proximity sensor probe that varies according to whether the electrode patterns are grounded or not. Scan type inspection device using. The method of claim 1, wherein the capacitive proximity sensor probe An AC power supply for supplying AC current; An electrode connected in parallel to the AC power source and forming a capacitor together with the electrode pattern; And an amplifier connected in parallel with the electrode and generating an output voltage by amplifying an input voltage which is varied according to the open and short circuit states of the electrode pattern. The method of claim 1, wherein the electrode patterns Scan type inspection apparatus using a capacitive proximity sensor, characterized in that the grounded through the switch on / off by the control unit. The method of claim 1, wherein the capacitive proximity sensor probe An air static pressure pad having an air nozzle formed on a bottom portion facing the panel is installed, and an electrostatic force is coupled to a support member through a parallel plate spring movable in a gravity direction on a side of the capacitive proximity sensor probe. Scan type inspection device using capacitive proximity sensor. One end of the electrode pattern formed on the panel scans the electrode pattern with the capacitive proximity sensor proximate and gives the grounding condition to the other end of the electrode pattern, so that the electrode pattern is based on the change of the output voltage of the capacitive proximity sensor. Scan method inspection method using the capacitive proximity sensor, characterized in that the inspection of the open and short circuit. The method of claim 5, wherein when the output voltage of the capacitive proximity sensor is maintained at a predetermined level when one of the electrode patterns is grounded, it is determined that the corresponding electrode pattern is open, and any two of the electrode patterns are grounded. When the change in the output voltage of the capacitive proximity sensor is the same as when the one electrode pattern is grounded, it is determined that the two electrode patterns are short-circuited with each other.