KR20080098088A - Non-contact type single side probe and inspection apparatus and method for open/short test of pattern electrodes used thereof - Google Patents

Abstract

A disconnection of contactless single side probe and pattern electrode using the same is provided to inspect disconnection and short circuit of the corresponding pattern electrode through one scan by using the contactless single side probe. In a contactless single side probe, a pattern for test electrode is placed on the grounded substrate(45) while maintaining ground state. A contactless probe electrode(44) supplies power to test electrode on the grounded substrate in contactless. A power supply unit(42) supplies suddenly the AC power to the contactless probe electrode. A sensor(46) measures the electrical change value at the contactless probe electrode.

Description

NON-CONTACT TYPE SINGLE SIDE PROBE AND INSPECTION APPARATUS AND METHOD FOR OPEN / SHORT TEST OF PATTERN ELECTRODES USED THEREOF}

1 is a view for explaining the disconnection and short circuit inspection method of a typical pattern electrode.

2 is a block diagram showing a non-contact single-side probe according to a first embodiment of the present invention.

3 is a block diagram illustrating a non-contact single side probe according to a second embodiment of the present invention.

Figure 4 is a block diagram showing a non-contact single-side probe according to a third embodiment of the present invention.

5 is a block diagram showing a non-contact single-side probe according to a fourth embodiment of the present invention.

6 is a block diagram illustrating a non-contact single side probe according to a fifth embodiment of the present invention.

7 is a configuration diagram illustrating a non-contact single side probe according to a sixth embodiment of the present invention.

8 is a block diagram showing a disconnection and short circuit inspection apparatus using a non-contact single-side probe according to the present invention.

9 is a diagram illustrating an inspection of the disconnection and short circuit inspection apparatus of the pattern electrode using the non-contact single-side probe according to the present invention.

10 is a view showing a waveform measured by the disconnection and short circuit inspection apparatus using a non-contact single-side probe according to the present invention.

11 is a diagram illustrating another inspection of the disconnection and short circuit inspection apparatus of the pattern electrode using the non-contact single-side probe according to the present invention.

   -Explanation of symbols for the main parts of the drawings-

15 pattern electrode 40 non-contact single-side probe

42: feeder 44: non-contact probe electrode

45: grounding board 46: sensing unit

50: signal processing unit 60: key input unit

70: display unit 421: AC current source

422: AC voltage source 441: feeding electrode

443: first feed electrode 444: second feed electrode

442: sensor electrode 445: first sensor electrode

446 second sensor electrode

The present invention relates to a non-contact single-side probe, an apparatus for inspecting disconnection and short circuit of pattern electrodes using the same, and more particularly, to a non-contact single-side probe including a feed electrode and a sensor electrode of a non-contact probe electrode. A non-contact single-side probe for inspecting disconnection and short-circuit of the pattern electrode through the electric change value fed and sensed at one end of the pattern electrode placed on the ground substrate using the same, and an apparatus for inspecting disconnection and short-circuit of the pattern electrode using the same It is about a method.

In general, to check the disconnection and short circuit of a multi-wire cable such as a data transmission line, it is necessary to separate the circuit from other circuits and measure the resistance between the two ends of the cable. There are many problems, such as the loss of the number often requires repeated checks, not only decreases the reliability, but also takes a lot of time.

In addition, in order to detect disconnection and short-circuit of the transparent electrode of a flat panel display device such as an LCD or a PDP, as shown in FIG. 1, a current is applied from one end of the pattern electrode 15 to the corresponding pattern electrode 15. Voltage was measured at the opposite end of the pattern electrode 15 to check the disconnection and short circuit, or trace the wire with a microscope or the like to detect the disconnection and short circuit.

Therefore, at least two probes are required to check for abnormality by measuring disconnection and short circuit of one pattern electrode, and a large number of probes are required, resulting in a cost increase as well as the length of the pattern electrode. If it is longer, there is a problem that requires a lot of time and manpower as more than two people to measure in different positions are required.

In addition, in the case of a contact probe, the contact probe may not only generate a bad contact due to pressure contact with the pattern electrode, but also cause scratches on the pattern electrode to be measured, thereby causing another defect.

The present invention has been made to solve the above problems, and an object of the present invention is to use one end of the pattern electrode placed on the ground substrate using a non-contact single-side probe composed of a module and a feed electrode of the non-contact probe electrode. The present invention provides a non-contact single-side probe for detecting disconnection and short circuit of a corresponding pattern electrode through a power change value sensed by power supply and sensing, and an apparatus for inspecting disconnection and short circuit of a pattern electrode using the same.

In addition, an object of the present invention is to configure the feed electrode and the sensor electrode of the non-contact probe electrode of the non-contact single-side probe in pairs, respectively, a voltage of opposite phase is applied to the pair of feed electrodes and the difference voltage between the pair of sensor electrodes The present invention provides a non-contact single-side probe that can increase spatial resolution and noise-to-signal ratio, and an apparatus for detecting and disconnection of pattern electrodes using the same, and a method thereof.

The non-contact single-side probe according to the present invention for realizing the above object maintains the ground state and the non-contact for feeding and sensing non-contact with the ground substrate for placing the pattern electrode to be tested and the pattern electrode to be inspected placed on the ground substrate. And a sensing unit for measuring an electrical change value of the probe electrode, a power supply unit for supplying an AC power source to the non-contact probe electrode, and a non-contact probe electrode.

In the present invention, the power supply unit is made of an AC current source for supplying an AC current, the detection unit is characterized in that for measuring the voltage change value.

At this time, the non-contact probe electrode is characterized in that consisting of a feed electrode for supplying an AC current connected to the feeder, and a sensor electrode connected to the sensing unit for sensing the voltage change value.

In the present invention, the feed electrode and the sensor electrode of the non-contact probe electrode is characterized in that it is made in one piece.

In the present invention, the power supply unit is made of an AC voltage source for supplying an AC voltage, the detection unit is characterized in that for measuring the voltage change value.

At this time, the non-contact probe electrode is characterized in that consisting of a feeding electrode for supplying an AC voltage connected to the feeder, and a sensor electrode for measuring the voltage change value is connected to the sensing unit.

In the present invention, the power supply unit is composed of an AC voltage source for supplying an AC voltage, the detection unit is characterized in that for measuring the current change value flowing between the AC voltage source and the non-contact probe electrode.

The non-contact probe electrode in the present invention is characterized in that it comprises a first to second feed electrode for supplying an AC voltage, and the first to the second sensor electrode for measuring the voltage change value.

In the present invention, the first feed electrode, the first sensor electrode, the second feed electrode and the second sensor electrode are disposed on the same linear axis of the pattern electrode, respectively, and the first to second feed electrode and the first to second sensor electrode are Each of them is arranged side by side.

In the present invention, the first feed electrode, the first sensor electrode, the second feed electrode and the second sensor electrode are disposed on the same linear axis of the pattern electrode, respectively, and the first to second feed electrode and the first to second sensor electrode are Each of them is arranged symmetrically diagonally.

In this case, the power supply unit is characterized in that for feeding the same AC voltage to each of the first to the second feed electrode in 180 kW phase.

The detector may measure the difference voltage value of the voltage measured by the first to second sensor electrodes.

In addition, the disconnection and short-circuit inspection apparatus of the pattern electrode using the non-contact single-side probe according to the present invention is a grounding and short-circuit inspection apparatus of the pattern electrode for inspecting disconnection and short circuit while scanning a plurality of pattern electrodes formed on the panel, the ground A non-contact single-side probe for maintaining a state and placing a pattern electrode, a non-contact single-side probe for inputting an alternating current to the non-contact probe electrode at one end of the pattern electrode placed on the ground substrate, and measuring an electrical change value of the non-contact probe electrode. Characterized in that it comprises a signal processing unit for determining the disconnection and short-circuit with the electrical change value measured by the probe.

At this time, the non-contact single-side probe maintains the ground state, the ground substrate for placing the pattern electrode, the non-contact probe electrode for non-contact feeding and sensing to the pattern electrode placed on the ground substrate, and the non-contact probe electrode for supplying AC power And a sensing unit for measuring an electrical change value at the power supply unit and the non-contact probe electrode.

In the present invention, the power supply unit is made of an AC current source for supplying an AC current, the detection unit is characterized in that for measuring the voltage change value.

At this time, the non-contact probe electrode is characterized in that consisting of a feeding electrode for supplying an AC current connected to the feeding unit, and a sensor electrode for measuring the voltage change value is connected to the sensing unit.

In the present invention, the feed electrode and the sensor electrode of the non-contact probe electrode is characterized in that it is made in one piece.

In the present invention, the power supply unit is made of an AC voltage source for supplying an AC voltage, the detection unit is characterized in that for measuring the voltage change value.

At this time, the non-contact probe electrode is characterized in that consisting of a feed electrode for supplying an AC voltage connected to the feeder, and a sensor electrode for detecting the voltage change value is connected to the sensing unit.

In the present invention, the power supply unit is composed of an AC voltage source for supplying an AC voltage, the detection unit is characterized in that for measuring the current change value flowing between the AC voltage source and the non-contact probe electrode.

The non-contact probe electrode in the present invention is characterized in that it comprises a first to second feed electrode for supplying an AC voltage, and the first to the second sensor electrode for measuring the voltage change value.

In the present invention, the first feed electrode, the first sensor electrode, the second feed electrode and the second sensor electrode are disposed on the same linear axis of the pattern electrode, respectively, and the first to second feed electrode and the first to second sensor electrode are Each of them is arranged side by side.

In the present invention, the first feed electrode, the first sensor electrode, the second feed electrode and the second sensor electrode are disposed on the same linear axis of the pattern electrode, respectively, and the first to second feed electrode and the first to second sensor electrode are Each of them is arranged symmetrically diagonally.

In this case, the power supply unit is characterized in that for feeding the same AC voltage to each of the first to the second feed electrode in 180 kW phase.

The detector may measure the difference voltage value of the voltage measured by the first to second sensor electrodes.

In addition, according to the present invention, a method of inspecting a pattern electrode using a non-contact single-side probe includes a feed electrode and a sensor electrode of a non-contact probe electrode measuring an electrical change at one end of a pattern electrode formed on a panel placed on the ground substrate. In the apparatus for disconnection and short circuit inspection of pattern electrodes using a non-contact single side probe formed of one module, a non-contact probe electrode is applied to one end of a pattern electrode formed on a panel while applying AC power through the non-contact probe electrode of the non-contact single side probe. It is characterized in that the disconnection and short circuit of the pattern electrode is inspected by measuring the electrical change value.

In addition, according to the present invention, a method of inspecting a pattern electrode using a non-contact single-side probe includes a feed electrode and a sensor electrode of a non-contact probe electrode measuring an electrical change at one end of a pattern electrode formed on a panel placed on the ground substrate. In the apparatus for disconnection and short circuit inspection of pattern electrodes using a noncontact singleside probe formed of one module, each noncontact singleside probe is positioned at both ends of the pattern electrode formed on the panel, and the respective frequencies are applied to each noncontact probe electrode. By measuring the electrical change value through the non-contact probe electrode of characterized in that for checking the disconnection and short circuit of the pattern electrode.

In addition, according to the present invention, a method of inspecting a pattern electrode using a non-contact single-side probe includes a feed electrode and a sensor electrode of a non-contact probe electrode measuring an electrical change at one end of a pattern electrode formed on a panel placed on the ground substrate. In the apparatus for disconnection and short-circuit inspection of pattern electrodes using a non-contact single side probe formed of one module, the non-contact single side probes are positioned at both ends of the pattern electrodes formed on the panel, and the non-contact probe electrodes subjected to the same frequency are shifted from each other. It is characterized in that the disconnection and short circuit of the pattern electrode by measuring the electrical change value through each non-contact probe electrode while scanning so as to scan.

According to the present invention, the sensor electrode is disposed adjacent to the feeding electrode of the non-contact probe electrode, and the AC contact is applied to the non-contact probe electrode at one end of the pattern electrode, which is a test object placed on the ground substrate, of the non-contact single-side probe formed as a module. Then, by measuring the electrical change value through the non-contact probe electrode to determine the disconnection and short circuit of the pattern electrode, it is possible to determine both the disconnection and the short circuit by scanning only at one end of the pattern electrode, and the feed electrode and the sensor electrode of the non-contact probe electrode, respectively In pairs, a pair of feed electrodes are applied with a voltage that is opposite in phase and a differential voltage between the pair of sensor electrodes is used to form a sharp boundary to clarify the distinction between adjacent pattern electrodes when scanning continuously. It is possible to increase the resolution and to remove noise due to the effect of removing common mode noise. It can increase the Hobie.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings, and the same parts as in the prior art use the same reference numerals and names. In addition, the present embodiment is not intended to limit the scope of the present invention, but is presented by way of example only and those skilled in the art will be capable of many modifications within the technical spirit of the present invention.

2 is a block diagram showing a non-contact single-side probe according to a first embodiment of the present invention.

As shown here, the non-contact single-side probe 40 according to the present embodiment maintains a ground state and a ground substrate 45 for placing the inspection target pattern electrode 15 and an inspection object placed on the ground substrate 45. The non-contact probe electrode 44 which consists of the feed electrode 441 for supplying an alternating current non-contactly to the pattern electrode 15, the sensor electrode 442 for sensing the voltage change value of the pattern electrode 15, and the non-contact An alternating current source 421 for feeding an alternating current to the feeding electrode 441 of the probe electrode 44, and a sensing unit for measuring a voltage change value detected by the sensor electrode 442 of the non-contact probe electrode 44 ( 46).

In this case, as shown in FIG. 3, the non-contact probe electrode 44 may be integrally formed with the feed electrode 441 and the sensor electrode 442.

In this way, the power supply unit 42 is composed of an AC current source 421 for applying an AC current, and then supplies the AC current to the non-contact probe electrode 44, and then pattern the electrode through the voltage change value measured by the non-contact probe electrode 44. The disconnection and short circuit of (15) can be judged.

Figure 4 is a block diagram showing a non-contact single-side probe according to a third embodiment of the present invention.

As shown here, the non-contact single-side probe 40 according to the present embodiment maintains a ground state and a ground substrate 45 for placing the inspection target pattern electrode 15 and an inspection object placed on the ground substrate 45. A non-contact probe electrode 44 consisting of a feed electrode 441 for supplying an AC voltage in a non-contact manner to the pattern electrode 15, a sensor electrode 442 for detecting a voltage change value of the pattern electrode 15, and a non-contact probe An AC voltage source 422 for supplying AC voltage to the feed electrode 441 of the electrode 44, and a detector 46 for measuring a voltage change value detected by the sensor electrode 442 of the non-contact probe electrode 44. Is made of.

In this way, the power supply unit 42 is composed of an AC voltage source 422 for applying an AC voltage, and supplies the AC voltage to the non-contact probe electrode 44, and then changes the pattern electrode through the voltage change value measured by the non-contact probe electrode 44. The disconnection and short circuit of 15) can be judged.

5 is a block diagram showing a non-contact single-side probe according to a fourth embodiment of the present invention.

As shown here, the non-contact single-side probe 40 according to the present embodiment maintains a ground state and a ground substrate 45 for placing the inspection target pattern electrode 15 and an inspection object placed on the ground substrate 45. A non-contact probe electrode 44 for feeding and sensing the pattern electrode 15 in a non-contact manner, an AC voltage source 422 for feeding an AC voltage to the non-contact probe electrode 44, an AC voltage source 422 and a non-contact probe electrode And a sensing unit 46 for measuring the current change value flowing between the 44.

In this way, the power supply unit 42 is composed of an AC voltage source 422 for applying an AC voltage, and measures the current change value flowing between the AC voltage source 422 and the non-contact probe electrode 44 to measure the pattern electrode 15. It is possible to judge the disconnection and short circuit of.

6 is a block diagram illustrating a non-contact single side probe according to a fifth embodiment of the present invention.

As shown here, the non-contact single-side probe 40 according to the present embodiment maintains a ground state and a ground substrate 45 for placing the inspection target pattern electrode 15 and an inspection object placed on the ground substrate 45. The first to second feed electrodes 443 and 444 for supplying AC power in a non-contact manner to the pattern electrode 15 and the first to second sensor electrodes 445 for detecting an electric change value of the pattern electrode 15. An alternating voltage source 422 for feeding the same alternating current voltage in a 180 kW phase with a non-contact probe electrode 44 composed of 446, first to second feed electrodes 443 and 444, and first to second The detector 46 may measure a difference voltage value of the voltage measured by the sensor electrodes 445 and 446.

In this case, the first feed electrode 443, the first sensor electrode 445, the second feed electrode 444, and the second sensor electrode 446 are disposed on the same linear axis of the pattern electrode 15, respectively. The second feed electrodes 443 and 444 and the first to second sensor electrodes 445 and 446 are arranged side by side.

In addition, as shown in FIG. 7, the first feed electrode 443, the first sensor electrode 445, and the second feed electrode 444 and the second sensor electrode 446 each have a pattern on the ground substrate 45. The first to second feed electrodes 443 and 444 and the first to second sensor electrodes 445 and 446 may be disposed to be symmetrically diagonally disposed on the same linear axis of the electrode 15. .

As described above, an AC voltage having an opposite phase is applied through the first to second feed electrodes 443 and 444 to form a phase boundary between the first and second feed electrodes 443 and 444, and the first to second sensors. By measuring the difference voltage between the electrodes 445 and 446, a sharp boundary is formed between the first to second feed electrodes 443 and 444 and between the first and second sensor electrodes 445 and 446 to obtain a spatial resolution. In addition, the noise-to-signal ratio can be increased by removing the common mode noise. By clarifying the voltage change in the adjacent pattern electrode 15 by this effect, it is possible to determine the disconnection and short circuit of the pattern electrode 15 with a higher spatial resolution through the minute probe effect on the fine pattern electrode 15.

8 is a block diagram illustrating an apparatus for inspecting disconnection and short circuit of the pattern electrode using the non-contact single side probe according to the present invention.

As shown here, the ground electrode 45 maintains the ground state and the pattern electrode 15 is non-contactedly scanned from one end of the ground electrode 45 and the pattern electrode 15 placed on the ground substrate 45. The non-contact single side probe 40 and the non-contact single side probe 40 which measure an electric change value by the sensor electrode 442 provided adjacent to the feed electrode 441 while applying an alternating current power by the feed electrode 441 to the feed electrode 441. The signal processing unit 50 for determining disconnection and short circuit through the measured electrical change value, and the display unit for displaying the operating state of the signal processing unit 50 and the electrical change value measured by the non-contact single-side probe 40 ( 70) and a key input unit 60 for selecting the operation state of the signal processing unit 50.

9 is a diagram illustrating an inspection of the disconnection and short circuit inspection apparatus of the pattern electrode using the non-contact single-side probe according to the present invention.

The non-contact single-side probe 40 shown here is composed of first to second feed electrodes 443 and 444 and first to second sensor electrodes 445 and 446, and is placed on the ground substrate 45. Disconnection and short-circuit are inspected by non-contact scanning at one end of the pattern electrode 15.

In this case, the first to second feed electrodes 443 and 444 and the first to second sensor electrodes 445 and 446 are arranged side by side, respectively, and the first feed electrode 443 and the first sensor electrode 445 are disposed side by side. And the second feed electrode 444 and the second sensor electrode 446 are disposed on the same linear axis, respectively.

The AC voltage source 422 applied to the first feed electrode 443 and the second feed electrode 444 of the non-contact single-side probe 40 uses a voltage of 200 V to 300 V of 1 KHz or more and less than several tens of KHz.

If a lower frequency of less than 1KHz is used as the AC voltage source 422, the driving speed of the probe 40 is limited, so it is practically difficult, and if a high frequency of several tens of KHz or more is used, the impedance between the pattern electrodes 15 is lowered. There is a problem that compromises inspection resolution.

In addition, the line connecting the first to second feed electrodes 443 and 444 and the first to second sensor electrodes 445 and 446 is shielded by using an AC voltage source 422 of 1 KHz or more and several tens of KHz or less. Use a coaxial cable or tri-axial cable to prevent the signal from being emitted to the outside.

Therefore, when an AC voltage is applied to the first feed electrode 443 of the non-contact single-side probe 40 driving the pattern electrode 15 placed on the ground substrate 45, the charges corresponding to the magnitude of the AC voltage are pattern electrode. Charged on the (15) and by measuring the electrical change value by the first sensor electrode 445 to determine the disconnection and short circuit of the pattern electrode (15).

However, in the present invention, the first to second sensor electrodes 445 and 446 are used to read the difference voltages of the voltages measured at the first to second sensor electrodes 445 and 446, respectively, based on the voltage change. As the disconnection and the short circuit of the pattern 15 are determined, the boundary between the pattern electrode 15 supplied through the differential voltage of the first to second sensor electrodes 445 and 446 and the adjacent pattern electrode 15 not supplied is Sensitivity can be improved by clearly distinguishing, and the change of voltage is increased in case of disconnection and short circuit so that failure can be detected more effectively.

On the other hand, through the first to the second feed electrode (443, 444) by applying a voltage of a different phase from the adjacent pattern electrode 15 in the phase of 180 kHz respectively, the distinction between the pattern electrode 15 is made clear Sensitivity can also be improved.

FIG. 10 shows the voltages measured by feeding the AC voltages in accordance with disconnections and short circuits while scanning the pattern electrodes 15.

At this time, when the voltage value V _{PP_N} measured after applying the AC voltage to the normal pattern electrode 15 by the non-contact single-side probe 40 as shown in (A) is the normal value, the pattern electrode 15 is In the case of disconnection, the overall area of the pattern electrode 15 becomes small, so that the capacitance of the virtual capacitor generated by the ground substrate 45 around the pattern electrode 15 becomes small, so that the same amount of charge is formed in a narrow area. The voltage rise effect occurs, and the V _{PP_O} value higher than the normal value is measured.

On the other hand, when the pattern electrode 15 is short-circuited with the adjacent pattern electrode 15 as shown in (c), the overall area of the pattern electrode 15 is increased, so that the ground substrate 45 around the pattern electrode 15 is increased. As the capacitance of the virtual capacitor generated is increased, the same amount of charge is formed in a large area, and a voltage drop effect occurs, and the V _{PP_S} value lower than the normal value is measured.

As such, the voltage value measured by the normal pattern electrode 15 through the voltage change measured after applying the AC voltage while scanning the non-contact single-side probe 40 from one end of the pattern electrode 15 placed on the ground substrate 45 as described above. If it is higher, it is determined that it is disconnected and if it is low, it is determined that it is shorted.

In addition, a control command is input through the key input unit 60 to control the processing state of the signal processing unit 50.

On the other hand, when measuring the voltage change while scanning through the non-contact single-side probe 40 only at one end of the pattern electrode 15, the location where the disconnection occurred is close to the opposite end, so the area decreases and the voltage increase effect is small. In order to solve the problem that the disconnection cannot be detected, as shown in FIG. 11, the non-contact single-side probe 40 is simultaneously scanned at one end and the opposite end of the pattern electrode 15 placed on the ground substrate 45. The accuracy of inspection can also be improved by performing disconnection and short circuit inspection with respect to the electrode 15. FIG.

In this case, the same pattern electrode 15 may be inspected using a different frequency, and the same frequency may be used but the other pattern electrodes 15 may be inspected at the same time by displacing the positions slightly.

As described above, the present invention uses a non-contact single-side probe consisting of a feed electrode and a sensor electrode in one scan through an electrical change value fed and sensed at one end of a pattern electrode placed on a ground substrate. There is an advantage that can check the disconnection and short circuit.

In addition, the present invention has the advantage of preventing the damage of the pattern electrode due to poor contact or pressure contact by inspecting the disconnection and short circuit of the pattern electrode through a non-contact single-side probe, as well as to extend the life of the probe compared to the contact method have.

In addition, the present invention not only facilitates the configuration of the device by inspecting disconnection and short circuit by scanning at one end of the pattern electrode, but also has the advantage of being easily inspected through comparison with the same pattern electrode for a pattern electrode that is not a straight line. .

In addition, the present invention has the advantage that the inspection sensitivity can be increased through a pair of feed electrodes having a reverse phase and a pair of sensor electrodes using a differential voltage.

Claims (28)

A ground substrate for placing the pattern electrode to be inspected while maintaining the ground state; A non-contact probe electrode for supplying and sensing non-contact with the inspection target pattern electrode placed on the ground substrate; A feeding unit for feeding AC power to the non-contact probe electrode; Sensing unit for measuring the electrical change value in the non-contact probe electrode Non-contact single-side probe, characterized in that consisting of. The non-contact single side probe of claim 1, wherein the power supply unit comprises an AC current source for supplying an AC current, and the sensing unit measures a voltage change value. The method of claim 2, wherein the non-contact probe electrode A feeding electrode connected to the feeding part for feeding an AC current; A sensor electrode connected to the sensing unit for sensing a voltage change value Non-contact single-side probe, characterized in that consisting of. 3. The non-contact single side probe of claim 2, wherein a feed electrode and a sensor electrode of the non-contact probe electrode are integrally formed. The non-contact single side probe of claim 1, wherein the power supply unit comprises an AC voltage source for supplying an AC voltage, and the sensing unit measures a voltage change value. The method of claim 5, wherein the non-contact probe electrode A feeding electrode connected to the feeding part for feeding an AC voltage; A sensor electrode connected to the sensing unit for measuring a voltage change value Non-contact single-side probe, characterized in that consisting of. The non-contact single side probe of claim 1, wherein the power supply unit comprises an AC voltage source for supplying an AC voltage, and the sensing unit measures a current change value flowing between the AC voltage source and the non-contact probe electrode. The method of claim 1, wherein the non-contact probe electrode First to second feed electrodes for supplying an AC voltage; First to second sensor electrodes for measuring voltage change Non-contact single-side probe, characterized in that consisting of. The method of claim 8, wherein the first feed electrode, the first sensor electrode, the second feed electrode and the second sensor electrode are disposed on the same linear axis of the pattern electrode, respectively, the first to second feed electrode and the Non-contact single-side probe, characterized in that the first to second sensor electrodes are arranged side by side. The method of claim 8, wherein the first feed electrode, the first sensor electrode, the second feed electrode and the second sensor electrode are disposed on the same linear axis of the pattern electrode, respectively, the first to second feed electrode and the Non-contact single-side probe, characterized in that the first to second sensor electrodes are arranged symmetrically diagonally. The non-contact single-side probe according to any one of claims 8 to 10, wherein the power supply unit feeds the same AC voltage to each of the first to second power supply electrodes in a phase of 180 mA. The non-contact single side probe of claim 8, wherein the detector measures a difference voltage value of the voltage measured by the first to second sensor electrodes. An apparatus for inspecting disconnection and short circuit of pattern electrodes for inspecting disconnection and short circuit while scanning a plurality of pattern electrodes formed on a panel, A ground substrate for placing the pattern electrode while maintaining a ground state; A non-contact single side probe for inputting an AC power source to the non-contact probe electrode at one end of the pattern electrode placed on the ground substrate and measuring an electrical change value of the non-contact probe electrode; Signal processing unit for determining the disconnection and short circuit by the electrical change value measured by the non-contact single-side probe Disconnection and short circuit inspection apparatus of the pattern electrode using a non-contact single-side probe, characterized in that made. The method of claim 13, wherein the non-contact singleside probe is A ground substrate for placing the pattern electrode while maintaining a ground state; A non-contact probe electrode for non-contactly feeding and sensing the pattern electrode placed on the ground substrate; A feeding unit for feeding AC power to the non-contact probe electrode; Sensing unit for measuring the electrical change value in the non-contact probe electrode Disconnection and short-circuit inspection device of the pattern electrode using a non-contact single-side probe, characterized in that consisting of. 15. The apparatus of claim 14, wherein the power supply unit comprises an AC current source for supplying an AC current, and the sensing unit measures a voltage change value. The method of claim 15, wherein the non-contact probe electrode A feeding electrode connected to the feeding part for feeding an AC current; A sensor electrode connected to the sensing unit for sensing a voltage change value Disconnection and short-circuit inspection device of the pattern electrode using a non-contact single-side probe, characterized in that consisting of. 16. The apparatus for inspecting disconnection and short circuit of a pattern electrode using a non-contact single-side probe according to claim 15, wherein the feed electrode and the sensor electrode of the non-contact probe electrode are integrally formed. 15. The apparatus of claim 14, wherein the power supply unit comprises an AC voltage source for supplying an AC voltage, and the sensing unit measures a voltage change value. 19. The method of claim 18, wherein the non-contact probe electrode A feeding electrode connected to the feeding part for feeding an AC voltage; A sensor electrode connected to the sensing unit for measuring a voltage change value Disconnection and short-circuit inspection device of the pattern electrode using a non-contact single-side probe, characterized in that consisting of. 15. The non-contact single side probe of claim 14, wherein the power supply unit comprises an AC voltage source for supplying AC voltage, and the sensing unit measures a current change value flowing between the AC voltage source and the non-contact probe electrode. Device for inspecting disconnection and short circuit of pattern electrode. The method of claim 14, wherein the non-contact probe electrode First to second feed electrodes for supplying an AC voltage; First to second sensor electrodes for measuring voltage change Disconnection and short-circuit inspection device of the pattern electrode using a non-contact single-side probe, characterized in that made. 22. The method of claim 21, wherein the first feed electrode, the first sensor electrode, the second feed electrode and the second sensor electrode are disposed on the same linear axis of the pattern electrode, respectively, the first to second feed electrode and the An apparatus for inspecting disconnection and short circuit of a pattern electrode using a non-contact single side probe, characterized in that the first to second sensor electrodes are arranged side by side. 22. The method of claim 21, wherein the first feed electrode, the first sensor electrode, the second feed electrode and the second sensor electrode are disposed on the same linear axis of the pattern electrode, respectively, the first to second feed electrode and the An apparatus for inspecting disconnection and short circuit of a pattern electrode using a non-contact single side probe, wherein the first to second sensor electrodes are symmetrically disposed diagonally. 24. The patterned electrode according to any one of claims 21 to 23, wherein the power supply unit feeds the same AC voltage to the first to second power supply electrodes in a phase of 180 mA. Open circuit and short circuit inspection device. 22. The apparatus of claim 21, wherein the sensing unit measures a differential voltage value of the voltage measured by the first to second sensor electrodes. Disconnection and short-circuit inspection of the pattern electrode using a non-contact single-side probe having a ground board and a non-contact single-side probe in which a feed electrode and a sensor electrode of a non-contact probe electrode measure electrical changes at one end of a pattern electrode formed on a panel on the ground board. In the apparatus, Inspecting disconnection and short circuit of the pattern electrode by measuring an electrical change value through the non-contact probe electrode while applying AC power through the non-contact probe electrode of the non-contact single-side probe at one end of the pattern electrode formed on the panel Inspection method of the pattern electrode using a non-contact single-side probe, characterized in that. Disconnection and short-circuit inspection of the pattern electrode using a non-contact single-side probe having a ground board and a non-contact single-side probe in which a feed electrode and a sensor electrode of a non-contact probe electrode measure electrical changes at one end of a pattern electrode formed on a panel on the ground board. In the apparatus, The non-contact single-side probe is positioned at both ends of the pattern electrode formed on the panel, and the electrical change is measured through each of the non-contact probe electrodes while applying a different frequency to each of the non-contact probe electrodes. Checking for shorts Inspection method of the pattern electrode using a non-contact single-side probe, characterized in that. Disconnection and short-circuit inspection of the pattern electrode using a non-contact single-side probe having a ground board and a non-contact single-side probe in which a feed electrode and a sensor electrode of a non-contact probe electrode measure electrical changes at one end of a pattern electrode formed on a panel on the ground board. In the apparatus, Placing the non-contact single-side probe on both ends of the pattern electrode formed on the panel and scanning the non-contact probe electrodes applied with the same frequency to each other to measure the electric change value through each of the non-contact probe electrodes while scanning the pattern electrodes. For disconnection and short-circuit Inspection method of the pattern electrode using a non-contact single-side probe, characterized in that.

Images